JPH0622915Y2 - 表面解析装置 - Google Patents

表面解析装置

Info

Publication number
JPH0622915Y2
JPH0622915Y2 JP15475887U JP15475887U JPH0622915Y2 JP H0622915 Y2 JPH0622915 Y2 JP H0622915Y2 JP 15475887 U JP15475887 U JP 15475887U JP 15475887 U JP15475887 U JP 15475887U JP H0622915 Y2 JPH0622915 Y2 JP H0622915Y2
Authority
JP
Japan
Prior art keywords
lens
scattered
vacuum
proton
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15475887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160352U (it
Inventor
正彦 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP15475887U priority Critical patent/JPH0622915Y2/ja
Publication of JPH0160352U publication Critical patent/JPH0160352U/ja
Application granted granted Critical
Publication of JPH0622915Y2 publication Critical patent/JPH0622915Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP15475887U 1987-10-07 1987-10-07 表面解析装置 Expired - Lifetime JPH0622915Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15475887U JPH0622915Y2 (ja) 1987-10-07 1987-10-07 表面解析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15475887U JPH0622915Y2 (ja) 1987-10-07 1987-10-07 表面解析装置

Publications (2)

Publication Number Publication Date
JPH0160352U JPH0160352U (it) 1989-04-17
JPH0622915Y2 true JPH0622915Y2 (ja) 1994-06-15

Family

ID=31431775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15475887U Expired - Lifetime JPH0622915Y2 (ja) 1987-10-07 1987-10-07 表面解析装置

Country Status (1)

Country Link
JP (1) JPH0622915Y2 (it)

Also Published As

Publication number Publication date
JPH0160352U (it) 1989-04-17

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