JPH06232017A - Air cleaner - Google Patents
Air cleanerInfo
- Publication number
- JPH06232017A JPH06232017A JP5015066A JP1506693A JPH06232017A JP H06232017 A JPH06232017 A JP H06232017A JP 5015066 A JP5015066 A JP 5015066A JP 1506693 A JP1506693 A JP 1506693A JP H06232017 A JPH06232017 A JP H06232017A
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- filter
- air
- adsorbent
- chemical filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims abstract description 118
- 239000003463 adsorbent Substances 0.000 claims abstract description 43
- 229920005594 polymer fiber Polymers 0.000 claims abstract description 14
- 238000004140 cleaning Methods 0.000 claims description 16
- 239000002245 particle Substances 0.000 abstract description 14
- 239000000356 contaminant Substances 0.000 abstract description 8
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical class S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052815 sulfur oxide Inorganic materials 0.000 abstract description 6
- 230000000379 polymerizing effect Effects 0.000 abstract description 5
- 125000003277 amino group Chemical group 0.000 abstract description 3
- 239000012286 potassium permanganate Substances 0.000 abstract description 2
- 125000003368 amide group Chemical group 0.000 abstract 1
- 239000000969 carrier Substances 0.000 abstract 1
- 239000003344 environmental pollutant Substances 0.000 description 12
- 231100000719 pollutant Toxicity 0.000 description 12
- 238000010586 diagram Methods 0.000 description 5
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical group N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 125000001174 sulfone group Chemical group 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は半導体製造工場やその他
のクリーンルームに供給する空気から硫黄酸化物等の化
学汚染物質を除去する空気清浄装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air cleaning apparatus for removing chemical pollutants such as sulfur oxides from air supplied to a semiconductor manufacturing factory or other clean rooms.
【０００２】[0002]
【従来の技術】半導体製造工場のクリーンルームでは、
微細なパーティクルを除去する目的で供給空気経路にＨ
ＥＰＡフィルタが設けられている。しかしこのＨＥＰＡ
フィルタではＳｉウエハー表面の曇りなどの原因となる
硫黄酸化物などの化学汚染物質を空気より除去すること
はできない。2. Description of the Related Art In a clean room of a semiconductor manufacturing plant,
H is added to the supply air path for the purpose of removing fine particles.
An EPA filter is provided. But this HEPA
The filter cannot remove from the air chemical contaminants such as sulfur oxides that cause clouding of the Si wafer surface.
【０００３】そのためのフィルタとして、粒体状担体に
化学吸着剤を担持させたケミカルフィルタや、高分子繊
維に化学吸着剤を重合させたケミカルフィルタが従来か
ら用いられている。As a filter for that purpose, a chemical filter in which a chemical adsorbent is supported on a granular carrier and a chemical filter in which a chemical adsorbent is polymerized on polymer fibers have been conventionally used.
【０００４】[0004]
【発明が解決しようとする課題】上記粒体状担体に化学
吸着剤を担持させたケミカルフィルタにおいては、すぐ
れた化学汚染物質除去能力を有するものの、ベースが粒
体状担体であるため、そこから、クリーンルームで最も
嫌うパーティクルを発生するという問題があり、それを
解決しようとすれば、図３に概略構成図を示す空気清浄
装置３において、粒体状担体に化学吸着剤を担持させた
ケミカルフィルタ３２の後にパーティクル除去用アフタ
ーフィルタ３３が必要となり、さらに外部環境から供給
される空気３０に含有されるパーティクルを除去するた
めのプレフィルタ３１が必要となる。図中の３４は浄化
空気を示す。そのため、気流の圧力損失が大きくなり、
それを補償するため送風機の送風能力を大きくしなけれ
ばならなくなり、空気清浄装置の設置スペースが大きく
なるなどの課題があった。In the chemical filter in which the chemical adsorbent is supported on the granular carrier, although it has an excellent ability to remove chemical contaminants, the base is a granular carrier, However, there is a problem that the most disliked particles are generated in the clean room. To solve the problem, in the air cleaning device 3 whose schematic configuration diagram is shown in FIG. 3, a chemical filter in which a chemical adsorbent is supported on a granular carrier After 32, a particle removing after filter 33 is required, and further, a prefilter 31 for removing particles contained in the air 30 supplied from the external environment is required. Reference numeral 34 in the figure denotes purified air. Therefore, the pressure loss of the air flow increases,
In order to compensate for this, the blowing capacity of the blower has to be increased, and there is a problem that the installation space of the air cleaning device becomes large.
【０００５】一方、高分子繊維に化学吸着剤を重合させ
たケミカルフィルタでは、フィルタからのパーティクル
の発生はなく、気流の圧力損失も少なく、このフィルタ
で空気清浄装置を構成しても容積は大きくならないとい
う特徴を有するものの、化学汚染物の除去能力が低いと
いう課題を抱えていた。On the other hand, in a chemical filter in which a polymer adsorbent is polymerized with a chemical adsorbent, particles are not generated from the filter and the pressure loss of the air flow is small, and the volume is large even if the air cleaning device is constructed with this filter. Although it has the feature that it does not occur, it has a problem of low ability to remove chemical contaminants.
【０００６】本発明は上記従来の課題を解決するもの
で、化学汚染物質除去能力が高く、パーティクルの発生
がなく、気流の圧力損失が少なく、容積の小さな空気清
浄装置を提供することを目的とする。SUMMARY OF THE INVENTION The present invention is intended to solve the above-mentioned conventional problems, and an object thereof is to provide an air cleaning apparatus having a high capacity for removing chemical pollutants, no generation of particles, a small pressure loss of an air flow, and a small volume. To do.
【０００７】[0007]
【課題を解決するための手段】前記目的を達成するため
本発明は、粒体状担体に化学吸着剤を担持させたケミカ
ルフィルタと、高分子繊維に化学吸着剤を重合させたケ
ミカルフィルタとを併用した空気清浄装置の構成とす
る。To achieve the above object, the present invention provides a chemical filter in which a chemical adsorbent is supported on a granular carrier, and a chemical filter in which a polymer adsorbent is polymerized with the chemical adsorbent. The structure of the air purifier used together.
【０００８】[0008]
【作用】上記構成の空気清浄装置は、粒体状担体に化学
吸着剤を担持させたケミカルフィルタによって、外部環
境から取り入れた空気から化学汚染物質を効率よく除去
するとともに、高分子繊維に化学吸着剤を重合させたケ
ミカルフィルタによって粒体状担体に化学吸着剤を担持
させたケミカルフィルタから発生するパーティクルを除
去でき、化学汚染物質とパーティクルの両方の含有率の
低い清浄な空気をクリーンルームに送り出す作用をな
す。In the air cleaning apparatus having the above structure, the chemical filter in which the chemical adsorbent is supported on the granular carrier efficiently removes the chemical pollutants from the air taken in from the external environment and also the chemical adsorption on the polymer fiber. The chemical filter that polymerizes the agent can remove particles generated from the chemical filter that supports the chemical adsorbent on the granular carrier, and sends clean air with low content of both chemical pollutants and particles to the clean room. Make up.
【０００９】[0009]
【実施例】次に本発明にかかる空気清浄装置についてそ
の実施例をあげて具体的に説明する。 実施例１ 図１は本発明にかかる空気清浄装置の一実施例を示す説
明図である。この図を用いてその構成および作用を詳細
に説明する。図中の１は本発明にかかる空気清浄装置で
あって外部環境から供給された空気１０は、高分子繊維
に化学吸着材としてアミン基を重合させた第１のケミカ
ルフィルタ１１で、外部環境から供給された空気に含有
されているパーティクルが除去され、化学汚染物質であ
る硫黄酸化物ＳＯX の一部が除去される。第１のケミカ
ルフィルタ１１を通過した空気１２は、粒体状担体ゼオ
ライトに化学吸着剤である過マンガン酸カリウムを担持
させた第２のケミカルフィルタ１３において、外部環境
から供給された空気中に含有されている硫黄酸化物ＳＯ
X の大部分が除去される。第２のケミカルフィルタ１３
を通過した空気１４は、第１のケミカルフィルタ１１と
同じ高分子繊維に化学吸着剤としてアミン基を重合した
第３のケミカルフィルタ１５で、外部環境から供給され
た空気に含有されていた硫黄酸化物ＳＯX を除去しかつ
第２のケミカルフィルタ１３で発生したパーティクルを
除去し、清浄空気を送出する。EXAMPLE An air purifying apparatus according to the present invention will be specifically described below with reference to Examples. Embodiment 1 FIG. 1 is an explanatory view showing an embodiment of the air cleaning apparatus according to the present invention. The configuration and operation will be described in detail with reference to this figure. Reference numeral 1 in the figure is an air purifying apparatus according to the present invention. Air 10 supplied from an external environment is a first chemical filter 11 in which polymer fibers are polymerized with an amine group as a chemical adsorbent. The particles contained in the supplied air are removed, and a part of the sulfur oxide SO X which is a chemical pollutant is removed. The air 12 that has passed through the first chemical filter 11 is contained in the air supplied from the external environment in the second chemical filter 13 in which potassium permanganate, which is a chemical adsorbent, is supported on the granular carrier zeolite. Sulfur oxide SO
Most of X is removed. Second chemical filter 13
The air 14 that has passed through is the third chemical filter 15 in which the same polymer fiber as that of the first chemical filter 11 is polymerized with an amine group as a chemical adsorbent, and the sulfur oxidation contained in the air supplied from the external environment is carried out. The substance SO X is removed, the particles generated in the second chemical filter 13 are removed, and clean air is sent out.
【００１０】なお、この実施例において、除去すべき化
学汚染物質を硫黄酸化物として説明したが、化学汚染物
質が他の物質でもよく、その場合、それに対応する化学
吸着剤に変えてやればよい。たとえば、化学汚染物質が
アンモニアＮＨ3 の場合、高分子繊維に重合する化学吸
着剤としてスルホン基を選んでやり、粒体状担体に担持
する化学吸着剤としてリン酸塩等を選んでやればよい。In this embodiment, the chemical pollutant to be removed is described as sulfur oxide, but the chemical pollutant may be another substance, and in that case, the chemical adsorbent may be changed to the corresponding chemical adsorbent. . For example, when the chemical pollutant is ammonia NH 3, a sulfone group may be selected as the chemical adsorbent that polymerizes on the polymer fiber, and a phosphate or the like may be selected as the chemical adsorbent loaded on the granular carrier. .
【００１１】また除去すべき化学汚染物質が複数ある場
合には、それらの除去すべき量に対応させながら、最も
高濃度の化学汚染物質を最も除去能力の高い、粒体状担
体に化学吸着剤を担持させた第２のケミカルフィルタ１
３で除去し、その他の化学汚染物質の除去を第１のケミ
カルフィルタ１１および第３のケミカルフィルタ１５に
割り当てることも可能である。さらに化学汚染物質が多
い場合には、粒体状担体に化学吸着剤を担持させたケミ
カルフィルタや高分子繊維に化学吸着剤を重合させたケ
ミカルフィルタを第４のケミカルフィルタ、第５のケミ
カルフィルタとして追加することも可能である。When there are a plurality of chemical contaminants to be removed, the chemical adsorbent is applied to the granular carrier which has the highest ability to remove the highest concentration of chemical contaminants while corresponding to the amount to be removed. Second chemical filter 1 supporting
It is also possible to remove the other chemical pollutants in the first chemical filter 11 and the third chemical filter 15 in the third chemical filter 15. Further, when there are many chemical contaminants, a chemical filter in which a chemical adsorbent is supported on a granular carrier or a chemical filter in which a chemical adsorbent is polymerized on polymer fibers is used as a fourth chemical filter or a fifth chemical filter. It is also possible to add as.
【００１２】なお空気清浄装置１に取り入れる空気１０
は外部環境から供給される空気に限定する必要はなく、
クリーンルーム内で発生する化学汚染物質を含有したク
リーンルーム内の汚染空気を加えてもよい。その場合、
空気清浄装置を汚染空気は循環しており、クリーンルー
ム内の空気の化学汚染物質の濃度をさらに低く保持する
ことができる。Air 10 taken into the air cleaning device 1
Is not limited to air supplied from the external environment,
You may add the contaminated air in a clean room containing the chemical pollutant generated in a clean room. In that case,
The polluted air circulates through the air purifier, and the concentration of chemical pollutants in the air in the clean room can be kept even lower.
【００１３】また、微小なパーティクルを除去する必要
がある場合は、空気清浄装置１にＨＥＰＡフィルタなど
を後置すればよい。 実施例２ 図２は本発明にかかる第２の実施例を示す説明図であ
る。この第２の実施例の空気清浄装置２においては、粒
体状担体に化学吸着剤を担持させたケミカルフィルタで
第２のケミカルフィルタ２２を構成し、多孔質フィルム
に化学吸着剤を重合させたケミカルフィルタで第１のケ
ミカルフィルタ２１と第３のケミカルフィルタ２３を構
成しており、外部環境から供給される空気２０に含有さ
れる化学汚染物質を効率よく除去し、かつ粒体状担体に
化学吸着剤を担持させたケミカルフィルタから発生する
パーティクルを後置の多孔質フィルムに化学吸着剤を重
合させたケミカルフィルタで除去するなど、作用や効果
は実施例１の場合となんら変わるところはない。図中２
４は清浄空気である。Further, when it is necessary to remove fine particles, a HEPA filter or the like may be placed after the air cleaning device 1. Second Embodiment FIG. 2 is an explanatory diagram showing a second embodiment according to the present invention. In the air cleaning apparatus 2 of the second embodiment, the second chemical filter 22 is constituted by a chemical filter in which a granular carrier carries a chemical adsorbent, and the porous film is polymerized with the chemical adsorbent. The chemical filter constitutes the first chemical filter 21 and the third chemical filter 23, efficiently removes the chemical pollutants contained in the air 20 supplied from the external environment, and chemically treats the granular carrier. Particles generated from the chemical filter supporting the adsorbent are removed by the chemical filter in which the chemical adsorbent is polymerized on the porous film provided later, and the action and effect are no different from those in the first embodiment. 2 in the figure
4 is clean air.
【００１４】[0014]
【発明の効果】以上の実施例の説明より明らかなよう
に、本発明は粒体状担体に化学吸着剤を担持させたケミ
カルフィルタと、高分子繊維に化学吸着剤を重合させた
ケミカルフィルタあるいは多孔質フィルムに化学吸着剤
を重合させたケミカルフィルタとを併用し、化学汚染物
質除去能力が高く、パーティクルの発生がなく、気流の
圧力損失が少なく、容積の小さなすぐれた空気清浄装置
を実現できるものである。As is apparent from the above description of the embodiments, the present invention provides a chemical filter in which a chemical adsorbent is supported on a granular carrier, a chemical filter in which a chemical adsorbent is polymerized on polymer fibers, or By combining a porous film with a chemical filter made by polymerizing a chemical adsorbent, it is possible to realize an excellent air purifier with a small volume and high capacity for removing chemical contaminants, no particles, and little pressure loss in the air flow. It is a thing.
【図１】本発明にかかる空気清浄装置の第１の実施例の
概略構成図FIG. 1 is a schematic configuration diagram of a first embodiment of an air cleaning device according to the present invention.
【図２】本発明にかかる空気清浄装置の第２の実施例の
概略構成図FIG. 2 is a schematic configuration diagram of a second embodiment of an air cleaning device according to the present invention.
【図３】従来の空気清浄装置の概略構成図FIG. 3 is a schematic configuration diagram of a conventional air cleaning device.
１ 空気清浄装置 １０ 外部環境から供給される空気 １１ 高分子繊維に化学吸着材を重合させた第１のケ
ミカルフィルタ １２ 第１のケミカルフィルタから第２のケミカルフ
ィルタに供給される空気 １３ 粒体状担体に化学吸着剤を担持させた第２のケ
ミカルフィルタ １４ 第２のケミカルフィルタから第３のケミカルフ
ィルタに供給される空気 １５ 高分子繊維に化学吸着材を重合させた第３のケ
ミカルフィルタ １６ 空気清浄装置から供出される清浄空気1 Air Cleaning Device 10 Air Supplyed from External Environment 11 First Chemical Filter Made by Polymerizing Chemical Adsorbent on Polymer Fiber 12 Air Supplyed from First Chemical Filter to Second Chemical Filter 13 Granular Second chemical filter in which a chemical adsorbent is supported on a carrier 14 Air supplied from the second chemical filter to the third chemical filter 15 Third chemical filter in which a chemical adsorbent is polymerized on polymer fibers 16 Air Clean air delivered from the purifier
Claims (4)
ミカルフィルタと、高分子繊維に化学吸着剤を重合させ
たケミカルフィルタとを有する空気清浄装置。1. An air purifying device comprising a chemical filter in which a chemical adsorbent is supported on a granular carrier, and a chemical filter in which a chemical adsorbent is polymerized on polymer fibers.
ミカルフィルタを、粒体状担体に化学吸着剤を担持させ
たケミカルフィルタの送風出力側に配置した請求項１記
載の空気清浄装置。2. The air cleaning apparatus according to claim 1, wherein the chemical filter in which the chemical adsorbent is polymerized on the polymer fiber is arranged on the air output side of the chemical filter in which the chemical adsorbent is supported on the granular carrier.
ミカルフィルタと、多孔質フィルムに化学吸着剤を重合
させたケミカルフィルタとを有する空気清浄装置。3. An air purifying device comprising a chemical filter in which a chemical adsorbent is supported on a granular carrier, and a chemical filter in which a chemical adsorbent is polymerized on a porous film.
たケミカルフィルタを、粒体状担体に化学吸着剤を担持
させたケミカルフィルタの送風出力側に配置した請求項
３記載の空気清浄装置。4. The air cleaning apparatus according to claim 3, wherein the chemical filter in which the chemical adsorbent is polymerized on the porous film is arranged on the blast output side of the chemical filter in which the chemical adsorbent is supported on the granular carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5015066A JPH06232017A (en) | 1993-02-02 | 1993-02-02 | Air cleaner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5015066A JPH06232017A (en) | 1993-02-02 | 1993-02-02 | Air cleaner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06232017A true JPH06232017A (en) | 1994-08-19 |
Family
ID=11878477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5015066A Pending JPH06232017A (en) | 1993-02-02 | 1993-02-02 | Air cleaner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06232017A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6897165B2 (en) * | 2001-06-06 | 2005-05-24 | Matsushita Electric Industrial Co., Ltd. | Environmental control equipment/method of developing apparatus for developing light-exposed resist film with developer in wafer treating chamber |
| CN110043982A (en) * | 2019-04-16 | 2019-07-23 | 北京联合大学 | Dynamic self-adapting pressure-difference fluctuation control system and method |
-
1993
- 1993-02-02 JP JP5015066A patent/JPH06232017A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6897165B2 (en) * | 2001-06-06 | 2005-05-24 | Matsushita Electric Industrial Co., Ltd. | Environmental control equipment/method of developing apparatus for developing light-exposed resist film with developer in wafer treating chamber |
| EP1265040A3 (en) * | 2001-06-06 | 2006-09-06 | Matsushita Electric Industrial Co., Ltd. | Environmental control equipment, method for developing apparatus |
| CN110043982A (en) * | 2019-04-16 | 2019-07-23 | 北京联合大学 | Dynamic self-adapting pressure-difference fluctuation control system and method |
| CN110043982B (en) * | 2019-04-16 | 2020-08-28 | 北京联合大学 | Dynamic adaptive differential pressure fluctuation control system and method |
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