JPH06232111A - Centrifugal substrate drying device - Google Patents

Abstract

PURPOSE:To maintain movable carrier holding members for holding a substrate to be treated and a carrier in a rotor in a state that the movable carrier holding members are shut at the time of rotation of the rotor in a centrifugal substrate drying device, which holds the substrate to be treated and conducts a drain drying of the substrate by rotating the substrate. CONSTITUTION:Movable carrier holding members 10 and 17 are rotatably provided to a rotor 2 and the positions G and G' of the centers of gravities of these members 10 and 17 are positioned on the opposite side to the positions of substrate and carrier holding parts of the members 10 and 17 to extension lines B and C of the lines between the center C of rotation of the rotor and axes 11 and 18 for supporting the members 10 and 17.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centrifugal type substrate drying apparatus for draining and drying a substrate to be processed such as a semiconductor substrate.

[0002]

2. Description of the Related Art As a conventional centrifugal type substrate drying apparatus, Japanese Patent Application Laid-Open No. 60-59740 is known. In this centrifugal type substrate drying device, a plurality of carriers containing a plurality of substrates are housed in a rotor that rotates at a high speed on the vertical axis, and the cleaning liquid is separated by the centrifugal force generated by the rotation of the rotor.

As a substitute for the rotor having the vertical axis, there is proposed a centrifugal substrate drying apparatus having a rotor having the horizontal axis shown in FIG. The substrate drying device 42 rotates a rotor 44 in a chamber 43 at a high speed by means of a motor provided at one end of its shaft to separate water droplets on a substrate 46 contained in the rotor 44.

The rotor 44 is constructed by connecting a pair of side plates 46 by a plurality of shafts 47, 48, 49, 50, 51, 52, and the shafts 47, 48 have movable substrate holding members 53, respectively. , 54 are swingably provided, and the movable substrate holding member 53 is attached to the shaft 55.
A lock member 57 for fixing the movable substrate holding portion 53 by engaging with a pin 56 provided on the is provided swingably.

The movable substrate holding member 53 and the movable substrate holding member 54 are connected by a connecting rod 58, and a lock member 57.
Since the movable substrate holding member 54 and the movable substrate holding member 54 are connected by the tension bar 59, the movable substrate holding members 53 and 54 are fixed in a closed state by engaging the lock member 57 with the pin 56 of the movable substrate holding member 53. It is possible,
If the lock member 57 is rotated in the direction of arrow J in the figure,
The movable substrate holding members 54, 55 are interlocked with the lock member 57.
Can be opened.

As described above, the conventional centrifugal substrate drying device 42
Closes the movable substrate holding members 53 and 54,
7 is engaged with the pin 56, the carrier 45 accommodating a plurality of substrates to be processed 46 is securely held in the rotor 44, and the rotor 44 is rotated to dry the substrates to be processed 46.

[0007]

However, in the conventional structure, since the release of the lock member 57 is supported only by the tension bar 59, the movable substrate holding members 53, 54 are rotated while the rotor 43 rotates at a high speed. When the centrifugal force acts on the lock member 57 and the lock member 57, the tension bar 5 that is rotating is rotated.
There is a risk that the load on the substrate 9 becomes heavy, the lock member 57 is released, the movable substrate holding members 53 and 54 are opened by centrifugal force, and the substrate 46 to be processed and the carrier 45 jump out and are damaged.

An object of the present invention is to prevent damage to the substrate to be processed and the carrier due to release of the lock member for fixing the movable substrate holding member during the rotation.

[0009]

In order to solve the above-mentioned problems, the centrifugal type substrate drying apparatus of the present invention comprises, as a first means, a pair of side plates and a carrier which is placed between the side plates and accommodates a plurality of substrates. A carrier holding member for holding and a carrier holding portion that is rotatably mounted between the pair of side plates and that abuts the carrier when closed, and a substrate holding portion that abuts the substrate. Has a rotor composed of a movable carrier holding member for retracting the carrier holding portion and the substrate holding portion for attaching and detaching the carrier,
In the centrifugal type substrate drying apparatus for rotating the rotor at a high speed, the position of the center of gravity of the movable carrier holding member when the movable carrier holding member is closed is defined as an extension line between the rotation center of the rotor and the rotation axis of the movable carrier holding member. On the other hand, the carrier holding portion and the substrate holding portion are opposite to each other.

As a second means, a pair of side plates and a substrate holding member which is placed between the side plates and holds a plurality of substrates,
A movable board is rotatably mounted between the pair of side plates and comes into contact with the board when the board is closed. When the board is opened, the board holder is retracted to attach and detach the board. A rotor having a substrate holding member,
In the centrifugal substrate drying device that rotates the rotor at a high speed, the position of the center of gravity of the movable substrate holding member when the movable substrate holding member is closed is defined as an extension line between the rotation center of the rotor and the rotation axis of the movable substrate holding member. On the other hand, it is characterized in that it is on the opposite side of the substrate holding portion.

[0011]

Embodiments of the present invention will be described with reference to the drawings. 1 is a front sectional view of a centrifugal substrate drying apparatus, FIG. 2 is a side sectional view thereof, and FIGS. 3 and 4 are rotors 2 of the centrifugal substrate drying apparatus.
FIG.

The rotor 2 of the centrifugal type substrate drying apparatus 1 includes a pair of side plates 3, a pair of inner plates 4, a plurality of frames 5,
A rough skeleton is constituted by 6, 7, and 8 and the carrier holding plate 9.

The movable carrier holding member 10 includes a pair of rocking plates 12 fixed to a shaft 11 rotatably provided on the side plates 3 and the inner plate 4, and a substrate mounted between the rocking plates 12. A holding rod 13 and a carrier holding rod 14, a weight 15,
It is composed of a positioning pin 16. The movable carrier holding member 17 includes a pair of swing plates 19 fixed to a shaft 18 rotatably provided on the side plate 3 and the inner plate 4,
It is composed of a substrate holding rod 20 and a carrier holding rod 21, which are hung between the rocking plates 19, a weight 22, and a positioning pin 23.

Weights 15 and 22 provided on the movable carrier holding member 10 and the movable carrier holding member 17, respectively.
With respect to extension lines D and E connecting the center of gravity G of the movable carrier holding member 10 and the position G ′ of the center of gravity of the movable carrier holding member 17 to the rotation center X of the rotor 2 and the shaft 11 and the shaft 18, respectively. The weights and positions of the substrate holding rods 13 and 20 and the carrier holding rods 14 and 21 are determined so as to be the positions opposite to the positions (the lower side of the lines D and E in the drawing).

The carrier 24 and the substrate to be processed 25 housed in the carrier 24 are the carrier holding plate 9 and the substrate holding rod 1 provided on the movable carrier holding members 10 and 17.
3 and 20 and carrier holding rods 14 and 21.

The positioning of the substrate holding rods 13 and 19 is as follows.
This is performed by abutting the positioning pins 16 and 23 provided on the movable carrier holding members 10 and 17 against the upper surface portion of the inner plate 4, and this state is set between the movable carrier holding member 10 and the movable carrier holding member 17. Tension bar 2
It is held by the tension of 6.

The motor 27 is a drive source for rotating the rotor 3, and the opening / closing lid 28 is provided slidably along the outer periphery of the centrifugal substrate drying apparatus 1, and is opened when loading / unloading the substrate, and the rotor is opened. It is closed when rotating 2. The discharge port 29 is for discharging the liquid separated from the substrate 25 to be processed by the rotation of the rotor 2.

Next, the operation of this embodiment will be described. The carrier is carried into the rotor 2 by a robot hand (not shown), and at this time, the movable carrier holding members 10, 1
7 is in an opened state as shown in FIG.

When the carrier 24 is placed on the carrier holding plate 9, the drive source (not shown) rotates the shaft 11 (direction of arrow A in FIG. 3). As a result, the movable carrier holding member 10 rotates in the closing direction, and the movable carrier holding member 17 also rotates in the closing direction via the tension bar 26.
Then, first, the positioning pin 23 of the movable carrier holding member 17 contacts the upper surface of the inner plate 4, and the position of the movable carrier holding member 17 is regulated.

The other movable carrier holding member 10 further rotates against the tension of the tension bar 26, and when the tension bar 26 exceeds the top dead center, the positioning pin 16 contacts the upper surface of the inner plate 4 and its position is regulated. To be done. Then, the movable carrier holding member 1 is driven by the tension of the tension bar 26.
0 and 17 are maintained in the closed state shown in FIG.

At this time, the carrier holding rods 14 and 21 contact the carrier 24, hold the carrier 24 in the rotor 2 together with the carrier holding plate 9, and hold the substrate holding rods 13 and 2.
0 contacts the substrate 25 to be processed, and the substrate 25 to be processed is rotated by the rotor 2
Hold in.

Next, the motor 27 is driven and the rotor 2 rotates. By this rotation, the movable carrier holding member 10,
The centrifugal force acts on 17. Centrifugal force is the movable carrier holding member 1
The movable carrier holding member 10 tries to rotate in the right direction of the arrow B in FIG. 3 around the shaft 11, and the movable carrier holding member 17 rotates around the shaft 18 as a center. 3 Try to rotate in the direction of the middle arrow C.

Therefore, as the rotor 2 rotates at a higher speed, the centrifugal force acts to close the substrate holding rods 13 and 20 and the carrier holding rods 14 and 21 of the movable carrier holding members 10 and 17, so that the carrier 24 is rotated during rotation. Also, the substrate 25 is prevented from fluttering and being damaged, and the lock member can be removed, so that the number of components can be reduced.

FIG. 5 is a side view of the rotor 2 of the centrifugal type substrate drying apparatus according to the second embodiment.
An example will be described. In the second embodiment, the substrate to be processed 25 is directly held in the rotor 2 by the plurality of substrate holding members 30 and the movable substrate holding members 31 and 36.

The movable substrate holding member 31 includes a pair of swing plates 33 fixed to a shaft 32 movably provided on the side plates 3 and the inner plate 4, and a substrate holding rod mounted on the swing plates 33. 34 and a weight 35, and the movable substrate holding member 36 includes a pair of swing plates 38 fixed to a shaft 37 movably provided on the side plate 3 and the inner plate 4, and the swing plate 3.
It is composed of a substrate holding rod 39 hung on 8 and a weight (not shown) (similar to the weight 35 of the movable substrate holding member 31).

The weight 35 of the movable substrate holding member 31 and the weight (not shown) of the movable substrate holding member 36 are such that the center of gravity g of the movable substrate holding member 31 and the center of gravity g ′ of the movable substrate holding member 36 are the rotation centers of the rotor 2, respectively. x and axis 32 and axis 37
The weight and position of the extension lines H and I are determined so as to be on a side opposite to the positions of the substrate holding rods 34 and 39 with respect to the extension lines H and I (below the lines H and I in the figure). Are

With the movable substrate holding members 31 and 36 closed for holding the substrates, the positioning portion 40 of the movable substrate holding member 31 and the positioning portion (not shown) of the movable substrate holding member 36 are the frames 7 and 8, respectively. In contact with each other, the positions of the movable substrate holding members 31 and 36 are regulated. Further, the tension bar 41 causes the movable substrate holding members 31, 3 and 3 due to the tension.
6 is maintained in the closed position.

Therefore, according to the second embodiment, it is possible to provide the centrifugal type substrate drying device in the carrierless line process, and by making it carrierless, the manufacturing efficiency of the semiconductor substrate can be improved. Further, as the rotor 2 rotates at a higher speed, the centrifugal force acts so as to close the substrate holding members 31 and 35, so that the substrate to be processed does not rattle and the same effect as that of the first embodiment can be obtained.

The movable carrier holding member in the first embodiment and the locking member for fixing the movable substrate holding member in the second embodiment are eliminated, but this may be provided. Thus, the movable carrier holding member or the movable substrate holding member can be more securely fixed in the closed state.

[0030]

As described above, firstly, in the centrifugal type movable substrate drying apparatus for holding the substrate to be processed through the carrier, the center of gravity of the movable carrier holding member with the movable carrier holding member closed. Since the position is on the side opposite to the positions of the carrier holding portion and the substrate holding portion with respect to the extension line of the rotation center of the rotor and the rotation axis of the movable carrier holding member, the movable carrier holding member acts on the movable carrier holding member during rotation of the rotor. The centrifugal force works to close the substrate holding portion and the carrier holding portion of the movable carrier holding member, and it is possible to eliminate the flapping of the substrate to be processed and the damage to the substrate to be processed due to the floating of the conventional substrate holding member. Secondly, in a centrifugal type substrate drying apparatus that directly holds a substrate to be processed without using a carrier, the position of the center of gravity of the movable substrate holding member with the movable substrate holding member closed is the rotation center of the rotor and the movable substrate holding member. Since it is located on the side opposite to the position of the substrate holder with respect to the extension of the member with respect to the axis of rotation, centrifugal force acting on the movable substrate holder during rotation of the rotor causes the substrate holder of the movable substrate holder to close. Since it works, it is possible to eliminate the flapping of the substrate due to the lifting of the conventional substrate holding member and the damage of the substrate to be processed due to it.

[Brief description of drawings]

FIG. 1 is a front sectional view of a centrifugal substrate drying apparatus according to the present invention.

FIG. 2 is a side sectional view of a centrifugal substrate drying apparatus according to the present invention.

FIG. 3 is a side sectional view of a rotor of the centrifugal substrate drying apparatus according to the present invention.

FIG. 4 is a side sectional view of a rotor of the centrifugal substrate drying device according to the present invention.

FIG. 5 is a side sectional view of a rotor of a centrifugal substrate drying apparatus according to a second embodiment of the present invention.

FIG. 6 is a side sectional view of a conventional centrifugal substrate drying device.

[Explanation of symbols]

 1 Centrifugal Substrate Drying Device 2 Rotor 5, 6, 7, 8 Frame 9 Carrier Holding Plate 10, 17 Movable Carrier Holding Member 11, 18 Shaft 12, 19 Oscillating Plate 13, 20 Substrate Holding Rod 14, 21 Carrier Holding Rod 15 , 22 Weights 16 and 23 Positioning pins 24 Carrier 25 Target substrate 26 Tension bar 27 Motor 28 Open / close lid 30 Substrate holding members 31, 36 Movable substrate holding members 34, 39 Substrate holding rod

Claims (2)

[Claims] 1. A pair of side plates, a carrier holding member that is placed between the side plates and holds a carrier that houses a plurality of substrates, and a pair of side plates that are rotatably placed between the side plates.
A movable carrier holder that has a carrier holder that contacts the carrier when closed and a substrate holder that contacts the substrate, and that retracts the carrier holder and the substrate holder when the carrier is attached and detached In a centrifugal substrate drying apparatus for rotating a rotor at a high speed, the position of the center of gravity of the movable carrier holding member when the movable carrier holding member is closed is set to the rotation center of the rotor and the movable carrier holding member. Centrifugal substrate drying apparatus, characterized in that the positions are opposite to the positions of the carrier holding portion and the substrate holding portion with respect to the extension line of the member rotation axis. 2. A pair of side plates, a substrate holding member which is hung between the side plates and holds a plurality of substrates, and a rotatably hung between the pair of side plates. A centrifuge substrate drying apparatus having a substrate holding portion that abuts, and a movable substrate holding member that retracts the substrate holding portion when the substrate holding portion is opened to remove the substrate holding portion, and rotates the rotor at a high speed. In, the position of the center of gravity of the movable substrate holding member when the movable substrate holding member is closed is opposite to the position of the substrate holding portion with respect to the extension line between the rotation center of the rotor and the rotation axis of the movable substrate holding member. Centrifugal substrate drying device characterized by