JPH0625962Y2 - container - Google Patents

Description

[Detailed Description of the Invention] [Industrial field of application] The present invention relates to a container, and more specifically, is used for various manufacturing lines such as manufacturing of semiconductor devices, for storing and transporting wafer lots as works. Regarding the container.

[Prior Art] In various manufacturing lines, for example, semiconductor device manufacturing lines,
A carrier in which a large number of semiconductor wafers are aligned, that is, a large number of wafer lots are stored and stored in a box-shaped container.
It is generally transported. In recent years, the semiconductor device has
There is a tendency for high-mix low-volume production, and there are many custom products that meet the needs of users. On the other hand, the above-mentioned semiconductor manufacturing line is composed of a large number of processing steps, and during this processing step, the film formation processing is repeatedly performed a plurality of times in the same equipment before the impurity diffusion step. Therefore, when the container containing the above-mentioned wafer lot is carried into the film forming process, a large number of containers are always stagnant because the preceding container exists. When a large number of containers are stagnant in this way, if the wafer lot in each container is a custom product that covers a wide variety of products, the product lot container that should be given priority according to the user's request may be mixed with other containers. Become. Therefore, it is necessary to identify the work start priority of the container and handle the container accordingly.

Therefore, as a means of identifying a large number of containers according to their work start priority when the above-mentioned process is stagnant, for example, the containers are labeled or color-coded, and the terminal equipment is installed together with the processing equipment. It is installed so that the worker can recognize the display by this terminal device, or a storage shelf for accommodating containers is installed together with the above-mentioned processing equipment, and a lamp is displayed for each container of the storage shelf to display the worker Is trying to recognize.

[Problems to be solved by the device]

By the way, when a label or a color-coded display is given to the container as described above, when the work start priority for the container is changed, the worker must replace the label each time, which is very complicated and man-hours are required. It becomes large and the workability is poor. Further, when the terminal device is installed together with the processing equipment, the container must be selected according to the information data displayed on the terminal device, and because the above information data is changed from moment to moment, It may happen that it does not match the container. Furthermore, when a storage shelf for accommodating the container is installed, the storage shelf itself is expensive and requires an installation space. Further, the information data for the container can be recognized only when the container is stored in the storage shelf, and it is difficult to recognize the information data once the container is taken out from the storage shelf. Moreover, if the number of stagnant containers increases, the capacity of the storage shelves may be exceeded, and some containers may not be able to be stored in the storage shelves.

[Means for Solving the Problems]

Therefore, the present invention has been proposed in view of the above problems, and an object of the present invention is to provide a container capable of immediately recognizing work start priority information data that is changed from moment to moment with a simple means. Especially.

The technical means for achieving the above-mentioned object in the present invention is to store a work lot, and in a container having a work start priority corresponding to the work lot at the time of delay in delivery to the processing process of the manufacturing line, a host computer and A small display is provided which is connected to a wireless modem and which displays the work start priority information data.

[Action]

According to the present invention, when a container is stagnant in the processing line of a manufacturing line, a small display connected to a host computer and a wireless modem displays work start priority information data while changing it according to the container. Real-time information data can be accurately displayed on the container itself.

〔Example〕

An embodiment of the container according to the present invention will be described with reference to FIGS. 1 and 2.

The container (1) of the present invention is characterized in that an openable and closable lid (3) is pivotally attached to the upper surface of a bottomed box-shaped container body (2) as shown in FIG. However, a thin display (4) such as a small liquid crystal display is attached to the outer wall surface of the container body (2). The display (4) is not limited to the above-mentioned display system, but other displays such as an EL display and a plasma display can be used. The display (4) is connected to a host computer, which will be described later, by a wireless modem, and has a built-in IC that receives information data from the host computer and determines only necessary information data.

When the container (1) is used in a semiconductor device manufacturing line, carriers in which semiconductor wafers are aligned, that is,
Work lots are stored. When the containers (1), (1), etc. carried into the film forming process (A) repeatedly performed by the same equipment prior to the impurity diffusion process are stagnant during the process of the manufacturing line, as shown in FIG. As shown in the figure, the host computer (5) transmits information data of work start priority corresponding to each container (1) (1) ... To each container (1) (1) ... Through the wireless modem (6). To do. On the other hand, a large number of containers (1) (1) ... Stagnated in the processing step (A) are displayed on the above-mentioned display (4) based on the ID code of the work lot they store and the addresses of the displays (4) (4). ) (4) ... I
It is determined whether or not the information data is required by C, and the required information data is displayed on the displays (4) (4) ... In accordance with the container (1) (1). The operator sequentially puts the containers (1) (1) ... Into the processing equipment (7) based on the work start priority displayed on the displays (4) (4). In this processing equipment (7), information data based on the processing content is transmitted to the host computer (5), and the host computer (5) processes the data. In this way, the above-mentioned information data is changed from moment to moment, but the latest information data is transmitted from the host computer (5) to the containers (1) (1) ... and the displays (4) (4) ... A container (1) that is displayed and based on the work start priority of the displayed information data
(1) ... are sequentially processed.

[Effect of device]

According to the present invention, since the container is provided with an inexpensive and compact small display for displaying the work start priority information data, real-time information data is displayed on each container itself when the container is stagnant in the processing process of the manufacturing line. Therefore, the worker can easily recognize the accurate priority of the container, the workability can be improved, and the production period can be shortened.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a container according to the present invention, and FIG. 2 is a system configuration diagram in a processing step of a manufacturing line using the container of FIG. (1) ... Container, (4) ... Small display, (5) ... Host computer.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H01L 21/68 T 8418-4M

Claims (1)

[Scope of utility model registration request] 1. A container for storing a work lot and having a work start priority corresponding to the work lot when the delivery to a processing step of a manufacturing line is delayed, is connected to a host computer by a wireless modem, and the work start is performed. A container that features a small display that displays priority information data.