JPH0627945Y2 - 薄膜気相成長装置 - Google Patents

薄膜気相成長装置

Info

Publication number
JPH0627945Y2
JPH0627945Y2 JP1988045093U JP4509388U JPH0627945Y2 JP H0627945 Y2 JPH0627945 Y2 JP H0627945Y2 JP 1988045093 U JP1988045093 U JP 1988045093U JP 4509388 U JP4509388 U JP 4509388U JP H0627945 Y2 JPH0627945 Y2 JP H0627945Y2
Authority
JP
Japan
Prior art keywords
thin film
film vapor
vapor deposition
susceptor
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988045093U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01153633U (it
Inventor
清 久保田
公人 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Sumitomo Electric Industries Ltd
Original Assignee
Nissin Electric Co Ltd
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd, Sumitomo Electric Industries Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988045093U priority Critical patent/JPH0627945Y2/ja
Publication of JPH01153633U publication Critical patent/JPH01153633U/ja
Application granted granted Critical
Publication of JPH0627945Y2 publication Critical patent/JPH0627945Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1988045093U 1988-04-01 1988-04-01 薄膜気相成長装置 Expired - Lifetime JPH0627945Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988045093U JPH0627945Y2 (ja) 1988-04-01 1988-04-01 薄膜気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988045093U JPH0627945Y2 (ja) 1988-04-01 1988-04-01 薄膜気相成長装置

Publications (2)

Publication Number Publication Date
JPH01153633U JPH01153633U (it) 1989-10-23
JPH0627945Y2 true JPH0627945Y2 (ja) 1994-07-27

Family

ID=31271420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988045093U Expired - Lifetime JPH0627945Y2 (ja) 1988-04-01 1988-04-01 薄膜気相成長装置

Country Status (1)

Country Link
JP (1) JPH0627945Y2 (it)

Also Published As

Publication number Publication date
JPH01153633U (it) 1989-10-23

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