JPH0628775Y2 - Transmission electron microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a transmission electron microscope in which various devices in a chamber connected to an imaging room through an electron beam passage hole are prevented from being damaged.

(Prior Art) FIG. 2 is a schematic view of a conventional transmission electron microscope. Reference numeral 1 is an electron beam source chamber, 2 is a lens barrel, 3 is an observation room, and 4 is an imaging room. Separate exhaust systems (not shown) are connected to the respective chambers and the lens barrel, for example. Reference numeral 5 denotes a chamber, which is connected to the radiographing chamber 4 with the electron beam passage hole 6 of the radiographing chamber 4, which is normally closed by a shield, in an open state. 7A, 7B and 7C are vacuum valves. In such an apparatus, each chamber and the interior of the lens barrel are evacuated to a high vacuum by a dedicated exhaust system (not shown), and when observing an electron beam image, the valves 7A and 7B are opened and the electron When capturing a line image or when capturing with a TV camera provided in the chamber 5, the valve 7C is opened. The inside of the chamber 5 is exhausted by the exhaust system of the photographing room.

Now, a film for photographing an electron beam image is installed in the photographing room 4, and when exchanging the film, the vacuum valve 7C is first closed, and then the photographing room 4 is leaked, The photographing room 4 is opened and the film is exchanged.

(Problems to be solved by the invention) By the way, in the chamber 5, as described above, a TV camera, an electron beam detector and the like (both not shown) are installed.
The TV camera and electron beam detector are cooled to 0 ° C. or lower to improve sensitivity. However, if the photographing chamber 4 is leaked for film exchange, the inside of the chamber 5 is also leaked through the electron beam passage hole 6 provided between the photographing chamber 4 and the chamber 5, so that the temperature is 0 ° C. or less. Dew is generated on the surface of TV cameras and electron beam detectors that have been cooled by
The TV camera and the electron beam detector are damaged and cannot be used.
If an electron beam energy analyzer (not shown) is installed in the chamber 5, the chamber 5
Is leaked, discharge occurs in the withstand voltage portion of the electron beam energy analyzer to which a high voltage is applied, so that the electron beam energy analyzer is damaged and becomes unusable.

The present invention is intended to prevent damage to each device due to such a leak of the chamber 5.

(Means for Solving the Problems) Therefore, the present invention observes an electron beam generation source, a lens barrel that houses an electron lens system for forming an electron beam image, and an electron beam image formed by the electron lens system. In the transmission electron microscope, the observation chamber, the photographing room for photographing the electron beam image, and the chamber connected to the photographing room through the electron beam passage hole are used, and a vacuum valve is provided in the photographing room and the electron beam passage hole. Was installed, and the observation chamber and the chamber were connected by a tube.

(Embodiment) FIG. 1 is a schematic view of a transmission electron microscope showing an embodiment of the present invention. In the figure, the same reference numerals as in FIG. 2 are the same components.

Reference numeral 8 in the drawing denotes a vacuum valve, which is provided in the electron beam passage hole (see FIG. 2). A tube 9 is connected between the observation chamber 3 and the chamber 5.

In such a transmission electron microscope, when observing an electron beam image, the valves 7A and 7B are opened, and when the electron beam image is taken or a TV camera provided in the chamber 5 is used. When shooting with a bulb 7C
And 8 are opened.

When replacing the film in the photographing chamber 4, first, the vacuum valves 7C and 8 are closed, and then the photographing chamber 4 is leaked, and then the photographing chamber 4 is opened to replace the film. I do. Further, since the chamber 5 and the observation chamber 3 are connected by a pipe 9 and the chamber 5 is evacuated by a pump (not shown) that evacuates the imaging chamber 3, the chamber 5 is always kept at a certain degree of vacuum. keeping.

Further, when the exchange of the film is completed, the photographing chamber 4 is evacuated, and when the vacuum degree of the photographing chamber 4 reaches the vacuum degree of the observation chamber 3 or the chamber 5, the vacuum valve 7C
By opening 8 and 8, the three chambers (observation room 3, imaging room 4, chamber 5) can be set to a uniform vacuum state.

(Effect of the Invention) In the present invention, since a vacuum valve is installed in the electron beam passage at the junction of the imaging room and the chamber and the chamber and the observation room are connected by a pipe, the imaging room is leaked. When changing the film, it is possible to prevent the leak of the chamber through the electron beam passage hole due to the leak,
It is possible to prevent damage to devices such as an electron beam detector and an electron beam energy analyzer installed in the chamber.

[Brief description of drawings]

FIG. 1 is a schematic view of a transmission electron microscope showing an embodiment of the present invention, and FIG. 2 is a schematic view of a conventional transmission electron microscope. 1 ... Electron beam source 2 ... Lens barrel, 3 ... Observation room 4 ... Imaging room, 5 ... Chamber 6 ... Electron beam passage hole 7A, 7B, 7C, 8 ... Vacuum valve 9 ... Tube

Claims (1)

[Scope of utility model registration request] 1. An electron beam source, a lens barrel for accommodating an electron lens system for forming an electron beam image, an observation room for observing an electron beam image formed by the electron lens system, and a photographing for the electron beam image. In a transmission electron microscope including a photographing room and a chamber connected to the photographing room through an electron beam passage hole, a vacuum valve is installed in the photographing room and the electron beam passage hole, and the observation chamber and the A transmission electron microscope characterized by connecting the chambers with a tube.