JPH0628832B2 - Fine movement mechanism - Google Patents
Fine movement mechanismInfo
- Publication number
- JPH0628832B2 JPH0628832B2 JP60122779A JP12277985A JPH0628832B2 JP H0628832 B2 JPH0628832 B2 JP H0628832B2 JP 60122779 A JP60122779 A JP 60122779A JP 12277985 A JP12277985 A JP 12277985A JP H0628832 B2 JPH0628832 B2 JP H0628832B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- movement mechanism
- fine movement
- side wall
- expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は電子ビーム露光装置、電子顕微鏡等、真空中で
微小な動きを要求する装置に用いる微小変位アクチュエ
ーターに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a micro-displacement actuator for use in an apparatus that requires a minute movement in a vacuum, such as an electron beam exposure apparatus and an electron microscope.
［従来の技術］ 印加電圧に応じて伸縮する圧電素子を利用した微小変位
に発生用アクチュエーターは大気中に於て多用されてき
たが、真空内で使用すると絶縁破壊を生じるため高真空
領域（10-5トル以上）で用いることができなかった。[Prior Art] An actuator for generating a small displacement using a piezoelectric element that expands and contracts according to an applied voltage has been widely used in the atmosphere, but when used in a vacuum, dielectric breakdown occurs, so that a high vacuum region (10 -5 Torr or more) could not be used.
［発明が解決しようとする問題点と解決手段］ 本発明の目的は、高真空領域において使用できる圧電素
子を利用した微小変位発生用アクチュエーターを提供す
ることにある。[Problems to be Solved by the Invention and Means for Solving the Problem] An object of the present invention is to provide an actuator for generating a minute displacement using a piezoelectric element that can be used in a high vacuum region.
この目的は本発明に従って圧電素子を圧電素子の伸縮方
向に伸縮することのできる気密ハウジングに圧電素子を
収容することによって達成される。すなわち、本発明の
微動機構は、外部から電圧を印加されるようになってい
る圧電素子、この圧電素子の伸縮方向における圧電素子
の上面と下面に取付けた上板と下板、及びこの上板と下
板とを密封包囲し、前記の伸縮方向に移動できる側壁を
備えており、前記圧電素子と前記側壁との間には密封空
間が形成されていることを特徴とする。特に前記の側壁
はベローズ、またはＯリングを介して入れ子になってい
る２つの包囲壁から成っている。This object is achieved according to the invention by housing the piezoelectric element in an airtight housing which is capable of expanding and contracting in the direction of expansion and contraction of the piezoelectric element. That is, the fine movement mechanism of the present invention includes a piezoelectric element to which a voltage is applied from the outside, an upper plate and a lower plate attached to the upper surface and the lower surface of the piezoelectric element in the expansion and contraction direction of the piezoelectric element, and the upper plate. And a lower plate are hermetically enclosed and provided with a side wall that is movable in the expansion and contraction direction, and a sealed space is formed between the piezoelectric element and the side wall. In particular, said side wall comprises a bellows or two surrounding walls nested via an O-ring.
［実施例］ 第１図は本発明の実施例の縦断面図である。この図で１
は圧電素子の上面を取付ける上板、２は圧電素子の下面
を取付ける下板、３は圧電素子、４は上板１と下板２を
つなぎあわせ圧電素子３を包囲、密封するベローズ、そ
して５は圧電素子に印加する電圧を供給する電極であ
る。上、下板とベローズで密封される空間には、例えば
空気、不活性ガス等の気体、または絶縁油等の流体を封
入しておく。[Embodiment] FIG. 1 is a longitudinal sectional view of an embodiment of the present invention. 1 in this figure
Is an upper plate for mounting the upper surface of the piezoelectric element, 2 is a lower plate for mounting the lower surface of the piezoelectric element, 3 is a piezoelectric element, 4 is a bellows that connects the upper plate 1 and the lower plate 2 and surrounds and seals the piezoelectric element 3, and 5 Is an electrode for supplying a voltage to be applied to the piezoelectric element. The space sealed by the upper and lower plates and the bellows is filled with air, gas such as inert gas, or fluid such as insulating oil.
電極５に外部電源より電圧を印加することにより圧電素
子３は伸縮するが、この際上下板１，２及びベローズ４
によって外気の雰囲気（高真空領域）としゃ断されてい
るため外気の雰囲気とは無関係に所要の機能を果すこと
ができる。The piezoelectric element 3 expands and contracts when a voltage is applied to the electrode 5 from an external power source.
Since it is cut off from the atmosphere of the outside air (high vacuum region), the required function can be achieved regardless of the atmosphere of the outside air.
第２図は本発明の別の実施例の縦断面図である。第１図
の実施例と同じ部分には同じ参照数字を付して示してい
る。第２図において、６は上方の包囲壁であり、７は下
方の包囲壁であって、これらの包囲壁はＯリング８を介
して相互に入れ子になっている。Ｏリング８は包囲壁６
の内壁に沿って摺動して気密を保つ。FIG. 2 is a vertical sectional view of another embodiment of the present invention. The same parts as those in the embodiment of FIG. 1 are designated by the same reference numerals. In FIG. 2, 6 is an upper surrounding wall, 7 is a lower surrounding wall, and these surrounding walls are mutually nested via an O-ring 8. The O-ring 8 is the surrounding wall 6
Keeps airtightness by sliding along the inner wall of the.
いずれの実施例でも圧電素子３に外部電源（図示せず）
から電極５を介して電圧を加えるとこれに応じて側壁は
圧電素子の伸縮とともに上下動して上下いずれかの板に
接着している部材へ微小変位を与える。In any of the embodiments, the piezoelectric element 3 is supplied with an external power source (not shown).
When a voltage is applied from the electrode 5 through the electrode 5, the side wall moves up and down in response to the expansion and contraction of the piezoelectric element, and a minute displacement is given to the member bonded to either the upper or lower plate.
本発明の微動機構では圧電素子を外気雰囲気に無関係に
動作させることができるため外気雰囲気は真空に限らず
例えば海水のような導電性の液体であってもよいし、ま
たは圧電素子を使用できない雰囲気であってもよい。In the fine movement mechanism of the present invention, since the piezoelectric element can be operated independently of the outside air atmosphere, the outside air atmosphere is not limited to vacuum, and may be a conductive liquid such as seawater, or an atmosphere in which the piezoelectric element cannot be used. May be
［発明の効果］ 本願発明によれば、微動機構を高真空中や導電性液体中
に置いても、絶縁破壊等を生じることなく使用すること
ができる。特に、圧電素子が側壁と密閉空間とによる二
重の保護作用で、圧電素子をより完全に保護すると共
に、側壁が圧電素子から離れているために、伸縮がしや
すく且つ伸縮ストロークを大きくとることができ、した
がって、実用性の高い微動機構を提供することができ
る。EFFECTS OF THE INVENTION According to the present invention, even if the fine movement mechanism is placed in a high vacuum or in a conductive liquid, it can be used without causing dielectric breakdown or the like. In particular, the piezoelectric element double protects the side wall and the closed space to protect the piezoelectric element more completely, and since the side wall is separated from the piezoelectric element, the piezoelectric element easily expands and contracts and has a large expansion and contraction stroke. Therefore, a highly practical fine movement mechanism can be provided.
第１図は本発明の実施例の縦断面図である。 第２図は本発明の別の実施例の縦断面図である。 図中； １：上板、２：下板、３：圧電素子、４：ベローズ、
５：電極、６：上方包囲壁、７：下方包囲壁、８：Ｏリ
ング。FIG. 1 is a vertical sectional view of an embodiment of the present invention. FIG. 2 is a vertical sectional view of another embodiment of the present invention. In the figure; 1: upper plate, 2: lower plate, 3: piezoelectric element, 4: bellows,
5: electrode, 6: upper surrounding wall, 7: lower surrounding wall, 8: O-ring.
Claims (5)
る圧電素子と、 この圧電素子の伸縮方向における圧電素子の上面と下面
に取付けた上板と下板と、 この上板と下板とを密封包囲し、前記の伸縮方向に伸縮
できる側壁とを備え、 前記圧電素子と前記側壁との間には密封空間が形成され
ていることを特徴とする微動機構。1. A piezoelectric element to which a voltage is applied from the outside, an upper plate and a lower plate attached to the upper surface and the lower surface of the piezoelectric element in the expansion and contraction direction of the piezoelectric element, and the upper plate and the lower plate. And a side wall capable of expanding and contracting in the expansion and contraction direction, and a sealed space is formed between the piezoelectric element and the side wall.
囲第１項に記載の微動機構。2. The fine movement mechanism according to claim 1, wherein the side wall is a bellows.
っている２つの包囲壁から成り、Ｏリングが摺動するこ
とにより前記圧電素子の伸縮方向に移動する特許請求の
範囲第１項に記載の微動機構。3. The piezoelectric element according to claim 1, wherein the side wall is composed of two surrounding walls that are nested through an O-ring, and the O-ring slides to move in the expansion / contraction direction of the piezoelectric element. Fine movement mechanism described in.
いる特許請求の範囲第１項に記載の微動機構。4. The fine movement mechanism according to claim 1, wherein the hermetically sealed space is filled with an inert gas.
許請求の範囲第１項に記載の微動機構。5. The fine movement mechanism according to claim 1, wherein a liquid is enclosed in the sealed space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60122779A JPH0628832B2 (en) | 1985-06-07 | 1985-06-07 | Fine movement mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60122779A JPH0628832B2 (en) | 1985-06-07 | 1985-06-07 | Fine movement mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284350A JPS61284350A (en) | 1986-12-15 |
| JPH0628832B2 true JPH0628832B2 (en) | 1994-04-20 |
Family
ID=14844402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60122779A Expired - Lifetime JPH0628832B2 (en) | 1985-06-07 | 1985-06-07 | Fine movement mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628832B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01146379A (en) * | 1987-12-02 | 1989-06-08 | Nec Corp | Electrostrictive element assembly |
| JPH0192156U (en) * | 1987-12-08 | 1989-06-16 | ||
| JPH02137282A (en) * | 1988-11-17 | 1990-05-25 | Nec Corp | Electrostrictive effect element and its packaging method |
| JPH0296758U (en) * | 1989-01-20 | 1990-08-01 | ||
| JP2002203997A (en) | 2000-12-28 | 2002-07-19 | Denso Corp | Piezo actuator |
| JP3900918B2 (en) | 2001-12-10 | 2007-04-04 | 株式会社デンソー | Piezoelectric actuator |
| JP4649136B2 (en) * | 2003-07-31 | 2011-03-09 | キヤノン株式会社 | Actuator, exposure apparatus, and device manufacturing method |
| DE102007053303A1 (en) * | 2007-11-08 | 2009-05-14 | Robert Bosch Gmbh | Piezo actuator and piezo actuator module with a protective layer system |
| JP5246149B2 (en) * | 2009-12-08 | 2013-07-24 | 株式会社デンソー | Injector |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5571571U (en) * | 1978-11-09 | 1980-05-16 | ||
| JPS5987238A (en) * | 1982-11-10 | 1984-05-19 | Nippon Soken Inc | Fuel injector of internal-combustion engine |
| JPS60136680A (en) * | 1983-12-26 | 1985-07-20 | Nippon Denso Co Ltd | Three-position selector valve driven by piezoelectric element |
-
1985
- 1985-06-07 JP JP60122779A patent/JPH0628832B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61284350A (en) | 1986-12-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |