JPH0629884Y2 - 電子線照射装置 - Google Patents
電子線照射装置Info
- Publication number
- JPH0629884Y2 JPH0629884Y2 JP1987108700U JP10870087U JPH0629884Y2 JP H0629884 Y2 JPH0629884 Y2 JP H0629884Y2 JP 1987108700 U JP1987108700 U JP 1987108700U JP 10870087 U JP10870087 U JP 10870087U JP H0629884 Y2 JPH0629884 Y2 JP H0629884Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- hole
- irradiation
- pipe
- nitrogen gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 16
- 239000011888 foil Substances 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 15
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 15
- 230000001678 irradiating effect Effects 0.000 claims 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108700U JPH0629884Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108700U JPH0629884Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6413659U JPS6413659U (af) | 1989-01-24 |
| JPH0629884Y2 true JPH0629884Y2 (ja) | 1994-08-10 |
Family
ID=31344280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987108700U Expired - Lifetime JPH0629884Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0629884Y2 (af) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5115920Y2 (af) * | 1971-11-04 | 1976-04-26 |
-
1987
- 1987-07-14 JP JP1987108700U patent/JPH0629884Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6413659U (af) | 1989-01-24 |
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