JPH06306580A - Method of forming pattern on substrate - Google Patents

Abstract

PURPOSE: To partially wet a substrate with a slight amt. of a weting medium by adjusting the degree of weting so that a metallic layer may be deposited by evaporation on these parts as well when a foil web is wetted by the medium for blocking the coating.

CONSTITUTION: A pattern holder 58 rotates intermittently and on the other hand, the web 50 of the substrate passes the place of the holder 58 and the open sides of recesses 42, 42 and so forth are directed to the web surface. The vapor in the recesses condenses on the web surface and after the partial condensation of the vapor, the substrate is provided with at least one functional layer.

COPYRIGHT: (C)1994,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention partially coats a substrate with a medium that prevents subsequent coating, and then patents at least one functional layer (Patent Application P).
4310 0856) to provide a method and apparatus for forming a pattern on a substrate by providing it.

[0002]

The invention of the aforementioned application solves the problem of providing a foil web with a particular pattern of media which prevents the coating. For that purpose, the pattern carrier is provided with a pattern of intaglios, depending on the pattern to be formed, in which the spatial distribution of the recesses corresponds to the foil web surface areas which must not be coated. In addition, for that purpose, the recess is filled with vapor of a medium that prevents the coating, and also the substrate is moved virtually simultaneously with the pattern carrier, and the open side of the recess is Directed to the surface of the substrate, such that the vapor filling the recess is allowed to condense on the substrate, and finally at least a portion of this vapor has condensed, after which the substrate has at least 1 Will have two functional layers.

[0003]

SUMMARY OF THE INVENTION The problem underlying the present invention is that when a coating blocking medium is deposited on a foil web, a particular portion of the substrate is deposited by adjusting the degree of deposition. However, by depositing only a very small amount of lubricant, it is possible to deposit an additional metal layer, albeit an extremely thin layer, on the specific portion. In addition, the pattern is
A uniform pattern is formed on the strip that repeats without interruption, and is also adapted to allow the transition to the next pattern while the lubrication process of the strip in the first pattern proceeds. To do so.

[0004]

According to the present invention, this problem has been solved by the following method. That is, the pattern carrier moves periodically and intermittently, while the substrate passes continuously at the pattern carrier, and the open side of the recess is directed toward the substrate surface, whereby In this method, the vapor contained in the recess is condensed on the substrate, and after at least a part of the vapor is condensed, the substrate is provided with at least one functional layer.

According to the present invention, the following device is provided. That is, the substrate is capable of continuously passing at the pattern carrier and also cooperates with the scraping strips or shields to entrap the vaporized separation medium within the intaglio pattern or to prevent excess A device for metering the separation medium vapor and retaining it in the chamber in which the vaporizer is arranged.

[0006] Other features and details are as described in each of the following claims.

[0007]

The present invention can be applied to various embodiments. One embodiment of which is schematically illustrated in the accompanying drawings.

The web coating device shown is essentially a deflection roller, a tension measuring roller, a stretching roller and a tensioning roller 5 which are mounted between two plates 3 and 4.
-10 to 11-17, cooled coating roller 18, feeding roller 37, winding roller 35 ', pattern holder 58, evaporation container 2 arranged in coating chamber 28 formed by hollow cylinder 32
1. A TV camera 22 for observing the coating process. Two plates 3, which are fixed to the support base 52,
4 is traveling rails 24, 2 via casters 26, 27.
5 travels with rollers 5-10, 11-17 and coating roller 18 in and out of coating chamber 28 in the direction of arrow R. These rollers form the winding device 29. When the winding device 29 runs, the disk-shaped lid 3 fixedly arranged on the support frame 52
0 is applied at its edge area to the flange-like end face 31 of the hollow cylinder 32 and is fixed to the hollow cylinder 32 by a clamping member not shown in detail, or it prevails in the chamber 45 in the working stage. Because of negative pressure,
It is attracted toward the end face 31 by the atmospheric pressure.

The evaporator 34 is formed of a hollow molded body,
Both ends thereof are closed by end members. Evaporator 34
A rod-shaped heating member is arranged inside the heating element, and the circumference of the heating member is completely surrounded by the separation medium. The evaporated separation medium passes through the nozzle 36 and the pattern holder 5
Emitted in the direction of 8. Scraping strips or shielding members 43,
By 44, the separation medium is left in the recesses 42, 42 '... Which form the printed pattern. The recesses 42, 42 '... Are provided in the cylindrical outer surface of the pattern holder 58.

Further, the evaporator 34 is arranged in the chamber 39. The chamber 39 has a pressure that prevents condensation of the separation medium in this area. The chamber 39 is
On the one hand, the chamber wall, and on the other hand, the pattern carrier 5.
Limited by 8.

Advantageously, the evaporator 34 is further equipped with a temperature sensor. This temperature sensor allows precise monitoring and maintenance of the separation medium temperature (connection circuits necessary for monitoring and regulation of the heating circuit are not shown).

The evaporator 34 is held between both plates 3 and 4 via angle members 53 and 53 '. In this holding method, the ejection direction of the nozzle 36 is directed to the surface of the pattern holder to be wetted.

As shown in FIG. 1, the nozzle 36
Is located near the foil web 50, also in the immediate vicinity of the coating roller 18, so that the passing coating of the foil web 50 can be carried out immediately after wetting with the separating medium. Foil moistened with a separation medium (eg silicone oil)
On the web portion, the metal evaporated in the evaporation container 21 is not vapor-deposited at all, or in the case of an extremely thin wetting film, vapor deposition is significantly limited. As a result, the foil
Which portion of the web 50 is left without metal vapor deposition or metal coating or with thin film coating depends on the number and size of the recesses 42, 42 '... Of the pattern holder 58, and also on the shape.

In the case of the device shown in FIGS. 1 and 2, the rollers 5-10 are arranged as follows for conveying and guiding the foil web 50. That is, the foil web portion located immediately in front of the coating roller 18 is arranged to run downward from the pattern holder 58 at a steep angle, that is, almost vertically.

It goes without saying that this part of the foil web can also be guided differently. In that case, for example, the coating roller 1 in a substantially horizontal plane.
It is arranged so that it is not necessary to change the position or size of the pattern holder 58 which runs on the upper surface of the pattern holder 58 and which deposits the separation medium shown in FIG.

As shown in FIG. 3, the pattern carrier is constructed as a hollow roller and has individual recesses 42, 42 'and 4'.
2 ″ ... produces an intaglio pattern. The separating medium vapor emerging from the nozzle 36 fills the chamber 39, so that the recesses 42, 4 open towards the chamber 39.
It also fills 2 '... Since the pattern holder 58 can be continuously rotated stepwise in the direction of the arrow, the shield members 43, 44 can be rotated.
Prevents excessive steam. In other words, the vapor that is not collected in the recess is discharged towards the foil web.

The foil web 50 runs at a distance b with respect to the pattern holder 58, while the pattern holder 58 is stationary at a fixed position, so that the adjustable shield members 43 and 44 and the shield member. With respect to the recess 42 directed towards the area of the opening a, a strip of vapor of wetting medium is left on the web 50 with some difference in width or wetting.

[Brief description of drawings]

FIG. 1 is a plan view of a portion of a web coating device, showing the take-up device delivered from a coating chamber configured as a hollow cylinder during the loading process. In this case, one of the deflecting roller and the tensioning roller shown in FIG. 2 is omitted for clarity.

FIG. 2 is a side sectional view cut along the line AB of FIG.

FIG. 3 is a perspective view showing a cut pattern holder for wetting the foil web with a separation medium.

4 is an enlarged side view of the separation medium evaporator and the pattern holder of FIG.

[Explanation of symbols]

 3,4 Plates 5,7,8,10,14,17 Deflection roller 6 Tension roller 9,15 Stretching roller 11,16 Tension measuring roller 12 Tension roller 13 Measuring roller 18 Coating roller 19 Evaporation source 20 Aluminum wire reel 21 Evaporation Container 22 Television Camera 23 Wire Guide 24, 25 Traveling Rails 26, 27 Casters 28 Coating Chamber 29 Winding Device 30 Lid 31 End Face 32 Hollow Cylinder 34 Evaporator 35 Rolling Body 35 'Rolling Roller 36 Nozzle 37' Feeding Roller 40 , 41, 41 'Casing wall 42, 42', 42 "Recess 43, 44 Shielding member 45 Chamber 50 Foil web 52 Support frame 58 Pattern holder

Claims (5)

[Claims] 1. A substrate (50) is partially coated with a medium that prevents subsequent coating,
And also a method of forming a pattern on a substrate (50) by subsequently providing at least one functional layer, for which purpose a pattern carrier (58) according to the pattern to be created. In this pattern carrier (58), the spatial distribution of the recesses (42, 42 ', 42 ") corresponds to the uncoated surface area of the substrate (50). Furthermore, in the type in which the recesses (42, 42 ', 42 "...) Are filled with vapors which prevent the coating according to the patent (patent application P ...) While the rotatable pattern holder (58) continues to move periodically and intermittently, the substrate continuously moves to the pattern holder (58). The open side of the dish-shaped recess passing through the filter is directed toward the substrate surface, whereby the vapor contained in the recess is condensed on the substrate (50), and further, Finally, a method for forming a pattern on a substrate, characterized in that after condensation part of this vapor forms at least one functional layer on the substrate (50). 2. A foil coated in a vacuum
Device for producing strips free of metal, in particular in the case of webs (50), for capacitors, which consists of a casing (32), which has a lid (which closes it in a pressure-tight manner). 30) and a winding device (29), and further rotatably supported deflecting and tensioning rollers (5-10 to 11-17, 33).
And at least one coating roller (18),
Winding roller (35 ') and feeding roller (37')
A coating source (19) held in a casing (32), an evaporator (34) for receiving a separation medium, in particular oil, and at least one nozzle for discharging the separation medium evaporated from the evaporator (34). (36), and the coating roller (18) is preceded by a pattern holder (53), preferably in the form of a cylinder and having an intaglio pattern (53), Further, the discharge nozzle (36) is attached to the pattern holder (58),
In the type oriented according to the patent (patent application P ...), the pattern carrier (58) is cyclically movable, whereas the substrate is continuous with the pattern carrier (58). However, a scraping strip or a shielding member (43, 44) is provided and these (4
3, 44), the evaporated separation medium is treated with an intaglio pattern (5
3) trapped in the excess separation medium vapor,
4) A strip without metal, characterized in that it is retained in a separate chamber (39, 55) in which it is arranged or is metered and flowed onto a substrate (50). Equipment for manufacturing. 3. The discharge nozzle (36) is configured as a slit or row of holes, and the separation medium vapor discharged from this nozzle flows into a chamber (39), which chamber (39) Then, the shielding member (43, 44)
By the casing wall of the chamber (39) and on the other hand by the pattern holder (5
Device according to claim 2, characterized in that 8) forms a narrow gap with the casing opening (a) and the chamber (39) has a higher pressure than the adjacent chamber (45). 4. The shield member (43, 44) is a spring (4).
Device according to claim 2 or 3, characterized in that it is pressed against the casing wall (40) by an elastic member such as 6, 54) or by a magnet, but is held movably in the direction of the casing opening (a). . 5. The foil web (50) passes through the gap (a) defined by the shielding members (43, 44) at a distance from the pattern holder (58). The device according to any one of claims 2 to 4, which comprises: