JPH06310071A - Electron microscope - Google Patents

Abstract

(57) [Abstract] [Purpose] When a CCD camera is added to the electron microscope, install the CCD camera at the bottom of the camera room. The CCD camera is cooled, and when the cooling is turned off and the camera room and CCD camera section are brought to atmospheric pressure after a certain period of time, CC
Prevent condensation on the D camera. [Structure] The CCD camera control device 13 constantly sends a signal indicating whether or not the CCD camera 11 is cooled to a vacuum evacuation control device 12, and the camera chamber 2 and the vacuum container 10 are exposed to the air in order to take out the film 5 into the air. In this case, the vacuum valves 6 and 8 and the leak valve 14 are configured to be controlled by the vacuum exhaust control device 12 so as to prevent the condensation of the CCD camera. [Effect] It is possible to prevent condensation of the CCD camera due to a leak in the camera room 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus used as an image observing and recording means of an electron microscope, which is attached to a lower portion of a camera chamber, requires vacuum evacuation, and has a cooling means.

[0002]

2. Description of the Related Art Conventionally, as in USP (5,065,029), when a vacuum shutoff valve is used between a camera chamber and a vacuum container having a CCD camera to leak a vacuum in the camera chamber,
Close the valve for vacuum shut-off, cool and use CCD
Prevented exposure to the camera.

This method requires an additional valve unit for vacuum shutoff and is not economical.

[0004]

Even if it is removed without providing the vacuum shutoff valve provided between the camera chamber and the vacuum container with the CCD camera, the vacuum chamber with the camera chamber and the CCD camera leaks to atmospheric pressure. Also, it is to prevent condensation on the CCD camera being used after cooling.

[0005]

When the camera room of an electron microscope is brought to atmospheric pressure, it is detected through a CCD camera controller whether or not a CCD camera in a vacuum container attached to the lower part of the camera room is cooled. Evacuation control device is provided.

The vacuum exhaust control device exhausts a vacuum chamber containing a camera chamber and a CCD camera with an exhaust pump.
When the vacuum chamber containing the camera room and the CCD camera is set to the atmospheric pressure, the evacuation control device controls the CCD camera control device to turn off the cooling of the CCD camera at the same time when the cooling of the CCD camera is operating, and at the same time. After the passage of time,
By operating the vacuum valve between the camera room and the observation room and the vacuum valve between the camera room and the exhaust pump,
Bring the vacuum chamber containing the CD camera to atmospheric pressure.

[0007]

The evacuation control device controls the operation of the vacuum valve and the operation of the leak valve after a lapse of a fixed time after detecting the presence or absence of cooling of the CCD camera.

Therefore, it is possible to prevent condensation of the CCD camera section.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG.

FIG. 1 is a schematic view of an observation room 1 and a camera room 2 for observing an image of an electron microscope. The observation chamber 1 is evacuated by the exhaust pump 9 through the vacuum valve 7. The camera chamber 2 is evacuated by the exhaust pump 9 through the vacuum valve 8.

The electron microscope image shows the transmitted electron beam 3 on the fluorescent screen 4.
Received and observed on the fluorescent plate 4. There is a film 5 in the camera room 2 as a means for recording this electron microscope image.

Normally, the vacuum valve 6 between the observation room 1 and the camera room 2 is opened.

The vacuum valves 6, 7, 8 and the leak valve are controlled to open / close by a vacuum exhaust controller 12.

In order to remove the film 5 from the camera chamber 2, the vacuum valves 6 and 8 are closed, and then the inside of the camera chamber 2 is brought to atmospheric pressure through the leak valve 14.

Therefore, when a CCD camera 11 other than the film 5 is attached as a means for recording the electron microscope image, it is necessary to put the CCD camera 11 in the vacuum container 10 and attach it to the camera chamber 2 of the electron microscope. The vacuum valves 6, 7, 8 and the leak valve 14 and the vacuum exhaust control device are connected by a valve opening / closing signal line.

When the CCD camera 11 is cooled,
When the inside of the camera chamber 2 is brought to the atmospheric pressure through the leak valve 14, dew condensation occurs in the cooled portion.

In order to prevent this, the vacuum exhaust control device 12 is connected to the CCD camera control device 13 by a communication means, and when the camera chamber 2 is set to the atmospheric pressure, when the CCD camera 11 is cooled, the CCD camera control is performed. Device 13 to CCD
The camera 11 is controlled to be turned off and cooling is also turned off. After this, after passing a certain time, vacuum valves 6 and 8
Was closed, and a leak was made from the leak valve 14 so that the camera chamber 2 and the vacuum container 10 were brought to atmospheric pressure.

[0018]

According to the present invention, the condensation of the CCD camera can be prevented, and the performance of the CCD camera can be prevented from deteriorating due to the leak in the camera room.

[Brief description of drawings]

FIG. 1 is a schematic view of a portion for observing and recording an electron microscope image.

[Explanation of symbols]

1 ... Observation room, 2 ... Camera room, 3 ... Transmission electron beam, 4 ... Fluorescent plate, 5 ... Film, 6, 7, 8 ... Vacuum valve, 9 ... Exhaust pump, 10 ... Vacuum container, 11 ... CCD camera, 12 …
Vacuum exhaust controller, 13 ... CCD camera controller, 14
… Leak valve, 15… Valve opening / closing signal line.

Claims (1)

[Claims] 1. An observation room having a fluorescent plate for observing an electron microscope image and a camera room having a film for recording, a means for evacuating the observation room, a means for evacuating the camera room, an observation room and a camera room. A vacuum valve for shutting off and connecting the vacuum, a leak valve for making the camera chamber at atmospheric pressure, a vacuum container connected to the camera chamber, and a C installed in the vacuum container.
An electron microscope having a CD camera, comprising an evacuation control device for controlling the vacuum valve, evacuation means, and leak valve capable of communicating with the CCD camera control device.