JPH0631271A - Film treatment device - Google Patents
Film treatment deviceInfo
- Publication number
- JPH0631271A JPH0631271A JP4189429A JP18942992A JPH0631271A JP H0631271 A JPH0631271 A JP H0631271A JP 4189429 A JP4189429 A JP 4189429A JP 18942992 A JP18942992 A JP 18942992A JP H0631271 A JPH0631271 A JP H0631271A
- Authority
- JP
- Japan
- Prior art keywords
- water
- membrane
- pretreatment
- concentrated
- reverse osmosis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 85
- 239000007788 liquid Substances 0.000 claims abstract description 13
- 238000000926 separation method Methods 0.000 claims abstract description 9
- 239000012528 membrane Substances 0.000 claims description 49
- 239000000356 contaminant Substances 0.000 claims description 12
- 238000001223 reverse osmosis Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 34
- 238000011084 recovery Methods 0.000 abstract description 17
- 239000000377 silicon dioxide Substances 0.000 abstract description 17
- 239000000126 substance Substances 0.000 abstract description 8
- 239000012498 ultrapure water Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 16
- 238000012937 correction Methods 0.000 description 15
- 238000001914 filtration Methods 0.000 description 13
- 238000001556 precipitation Methods 0.000 description 8
- 239000000701 coagulant Substances 0.000 description 7
- 238000005345 coagulation Methods 0.000 description 7
- 230000015271 coagulation Effects 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000002270 dispersing agent Substances 0.000 description 4
- 238000001471 micro-filtration Methods 0.000 description 4
- 238000009287 sand filtration Methods 0.000 description 4
- 238000004062 sedimentation Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000000108 ultra-filtration Methods 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000001112 coagulating effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000009285 membrane fouling Methods 0.000 description 2
- 230000004520 agglutination Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、給水中の不純物を効率
的かつ経済的に除去し、半導体製造等の使用に供し得る
高純度水を製造する膜処理装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a membrane treatment apparatus for efficiently and economically removing impurities in feed water to produce high-purity water that can be used for semiconductor production.
【０００２】[0002]
【従来の技術】従来、原水を前処理装置により前処理
し、次いで逆浸透膜装置（以下「ＲＯ装置」という）に
より処理して高純度水を製造する膜処理装置は公知であ
る。その一例を図５に示す。図５において、原水１は、
凝集剤２を必要量添加され、前処理装置３により前処理
される。前処理装置３は、凝集沈殿・濾過装置、凝集濾
過装置、砂濾過装置、活性炭濾過装置等の公知手段１つ
又はそれ以上の組合せからなる。前処理装置３において
は必要に応じてｐＨや温度のコントロールを行う。前処
理装置３において濁質を除去された処理水３．１は次い
で濾過水タンク（図示せず）に貯溜される。一方前処理
装置３は、必要に応じ逆洗され、系内に蓄積した濁質
３．２をブローする。2. Description of the Related Art Conventionally, a membrane treatment apparatus for producing high-purity water by pretreating raw water with a pretreatment apparatus and then with a reverse osmosis membrane apparatus (hereinafter referred to as "RO apparatus") is known. An example thereof is shown in FIG. In FIG. 5, the raw water 1 is
A necessary amount of the flocculant 2 is added and pretreatment is performed by the pretreatment device 3. The pretreatment device 3 is composed of one or more known means such as a coagulation sedimentation / filtration device, a coagulation filtration device, a sand filtration device, and an activated carbon filtration device. In the pretreatment device 3, pH and temperature are controlled as needed. The treated water 3.1 from which turbidity has been removed in the pretreatment device 3 is then stored in a filtered water tank (not shown). On the other hand, the pretreatment device 3 is backwashed if necessary, and blows the suspended matter 3.2 accumulated in the system.
【０００３】前処理装置３により処理された前記処理水
３．１は、安全フィルター４を経て、高圧ポンプ５によ
り加圧され、ＲＯ装置６に供給される。ＲＯ装置６にお
いては、前処理装置３により除去できなかった残余の不
純物を除去し、高純度の透過水６．１が得られる。ＲＯ
装置６において除去される不純物は、濃縮水６．２とし
て系外に排出される。The treated water 3.1 treated by the pretreatment device 3 passes through the safety filter 4, is pressurized by the high pressure pump 5, and is supplied to the RO device 6. In the RO device 6, residual impurities that could not be removed by the pretreatment device 3 are removed, and high-purity permeated water 6.1 is obtained. RO
The impurities removed in the device 6 are discharged out of the system as concentrated water 6.2.
【０００４】ところで、上記のような従来の膜処理装置
において、その運転上、ＲＯ装置からの透過水の回収率
を高めて、その運転効率を高めると共に、経済性を高め
ることが望まれており、そのためには、ＲＯ装置の濃縮
側水の濃度を可及的に高くして、透過水を増加するよう
にすればよい。この回収率を向上させるために、従来技
術として、ＲＯ給水に分散剤を添加し、例えばシリカの
膜装置内での析出を防止する方法、ＲＯ給水を膜処理す
ることにより微粒子を除去しシリカの析出を防止する方
法などが提案されている。By the way, in the conventional membrane treatment apparatus as described above, in operation, it is desired to increase the recovery rate of permeated water from the RO apparatus to enhance the operation efficiency and economical efficiency. For that purpose, the concentration of water on the concentrated side of the RO device may be increased as much as possible to increase the permeated water. In order to improve this recovery rate, as a conventional technique, a method of adding a dispersant to RO feed water to prevent precipitation of silica in a membrane apparatus, for example, a membrane treatment of RO feed water to remove fine particles to remove silica Methods for preventing precipitation have been proposed.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記の
ような従来技術には、次のような問題点があった。即
ち、ＲＯ給水に分散剤を添加したり、或いは微粒子の除
去を行ったとしても、回収率を向上させるには、膜装置
内で回収率を制限する物質を適切に処理する必要があっ
た。前記物質は、例えばシリカ、濁度等であるが、これ
ら物質はＲＯ膜を汚染する膜汚染物質であり、回収率を
向上するためには、膜汚染物質、例えばシリカの濃度を
析出限界以上に濃縮する必要があった。しかし析出限界
以上に濃縮された物質は、分散剤等が添加されていて
も、不安定な状態に変わりはなく、例えば給水温度の変
化、運転停止等の運転状態の変化により、膜装置内で析
出し、膜処理装置の運転に支障を来たすことがあり、実
質的に採用することはできなかった。However, the above-mentioned conventional techniques have the following problems. That is, even if a dispersant is added to RO water or fine particles are removed, in order to improve the recovery rate, it is necessary to appropriately treat the substance that limits the recovery rate in the membrane device. The substance is, for example, silica, turbidity, etc., but these substances are film contaminants that contaminate the RO membrane, and in order to improve the recovery rate, the concentration of the film contaminant, eg silica, should be above the precipitation limit. It needed to be concentrated. However, a substance concentrated above the precipitation limit does not change to an unstable state even if a dispersant or the like is added.For example, a change in the feed water temperature, a change in the operating state such as an operation stop, etc. It could be deposited and interfere with the operation of the membrane treatment device, so that it could not be practically adopted.
【０００６】本発明は、上記のような従来の問題点を解
決しようとするもので、シリカ等の膜汚染物質を適切に
除去し、回収率を向上した膜処理装置を提供することを
目的とする。The present invention is intended to solve the above-mentioned conventional problems, and an object of the present invention is to provide a membrane processing apparatus capable of appropriately removing membrane contaminants such as silica and improving the recovery rate. To do.
【０００７】[0007]
【課題を解決するための手段及び作用】前記目的を達成
するために、本発明による解決手段は、特許請求の範囲
の各請求項に記載のとおりであり、その作用は次のとお
りである。[Means for Solving the Problems and Actions] In order to achieve the above-mentioned object, the solution according to the present invention is as described in each claim of the claims, and its action is as follows.
【０００８】請求項１の発明によれば、ＲＯ装置の濃縮
水系をＲＯ装置の給水系に固液分離装置を介して接続す
ることにより、ＲＯ装置の濃縮水中の膜汚染物質を固液
分離装置により除去し、膜汚染物質の除去された水をＲ
Ｏ装置に再供給して処理し、結果的に膜処理装置の系全
体としての回収率を向上せしめる。また請求項２の発明
によれば、ＲＯ装置の濃縮水系を前処理装置の給水系に
配管接続することにより、ＲＯ装置の濃縮水中の膜汚染
物質を前処理装置により除去し、このようにして処理し
た水をＲＯ装置に再供給して処理することにより、膜処
理装置全体としての回収率を向上する。According to the first aspect of the present invention, the concentrated water system of the RO device is connected to the water supply system of the RO device via the solid-liquid separation device, so that the membrane contaminant in the concentrated water of the RO device is separated into the solid-liquid separation device. To remove the water from which the membrane contaminants have been removed.
It is re-supplied to the O apparatus and processed, and as a result, the recovery rate of the entire system of the membrane processing apparatus is improved. Further, according to the invention of claim 2, by connecting the concentrated water system of the RO device to the water supply system of the pretreatment device by piping, the membrane contaminants in the concentrated water of the RO device are removed by the pretreatment device. By supplying the treated water again to the RO apparatus for treatment, the recovery rate of the entire membrane treatment apparatus is improved.
【０００９】[0009]
【実施例】本発明の一実施例を図１に参照して説明す
る。図１に示される各要素で、前記従来例を例示する図
５に示された要素と同一のものには、同一の符号を付
す。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. Of the elements shown in FIG. 1, the same elements as those shown in FIG. 5 illustrating the conventional example are designated by the same reference numerals.
【００１０】原水１は、凝集剤２を必要量添加され、前
処理装置３に供給される。前処理装置３は、前記従来例
で説明したように、凝集沈殿・濾過装置、凝集濾過装
置、砂濾過装置、活性炭濾過装置等の周知手段の１つ又
はそれ以上の組合せからなる。前処理装置３において、
必要に応じてｐＨや温度のコントロールを行う。前処理
装置３で濁質を除去された処理水３．１は次いで濾過水
タンク（図示せず）に貯溜される。前処理装置は必要に
応じ逆洗され、系内に蓄積した濁質３．２をブローす
る。処理水は、安全フィルター４を経て、高圧ポンプ５
で加圧され、膜モジュール等で構成されるＲＯ装置に供
給される。ＲＯ装置６で処理された透過水６．１は所要
個所に供給される。Raw water 1 is supplied with a necessary amount of coagulant 2 and is supplied to a pretreatment device 3. The pretreatment device 3 is composed of one or more known means such as a coagulating sedimentation / filtration device, a coagulation filtration device, a sand filtration device, and an activated carbon filtration device, as described in the conventional example. In the pretreatment device 3,
If necessary, control pH and temperature. The treated water 3.1 from which turbidity has been removed by the pretreatment device 3 is then stored in a filtered water tank (not shown). The pretreatment device is backwashed as necessary to blow off the suspended matter 3.2 accumulated in the system. The treated water passes through the safety filter 4 and the high pressure pump 5
And is supplied to an RO device composed of a membrane module or the like. The permeated water 6.1 processed by the RO device 6 is supplied to required locations.
【００１１】ＲＯ装置で例えばシリカの析出限界近くま
で濃縮された濃縮水６．２は、凝集沈殿・濾過装置、凝
集濾過装置、砂濾過装置、精密濾過装置、限外濾過膜装
置、ＲＯ装置等で構成される固液分離装置８に供給され
る。図１に示した固液分離装置８は精密濾過膜、限外濾
過膜、逆浸透膜等を用いる膜分離装置であり、その供給
過程で、濃縮水６．２に凝集剤７が添加され、シリカが
凝集される。凝集されたシリカは固液分離装置８で分離
濃縮し、濃縮液８．２は系外に排出される。凝集したシ
リカを除去された、固液分離装置８の透過水８．１は、
例えば濾過水タンク（図示せず）に送液される。該透過
水８．１は、前処理装置３による処理水３．１と該濾過
水タンクにおいて混合され、ＲＯ装置への給水として利
用される。Concentrated water 6.2, which has been concentrated to near the precipitation limit of silica by an RO device, is a coagulation sedimentation / filtration device, a coagulation filtration device, a sand filtration device, a microfiltration device, an ultrafiltration membrane device, an RO device, etc. Is supplied to the solid-liquid separator 8 composed of. The solid-liquid separator 8 shown in FIG. 1 is a membrane separator using a microfiltration membrane, an ultrafiltration membrane, a reverse osmosis membrane, etc., and in the process of supplying it, the coagulant 7 is added to the concentrated water 6.2, Silica is agglomerated. The aggregated silica is separated and concentrated by the solid-liquid separator 8, and the concentrated liquid 8.2 is discharged out of the system. The permeated water 8.1 of the solid-liquid separation device 8 from which the aggregated silica has been removed is
For example, the solution is sent to a filtered water tank (not shown). The permeated water 8.1 is mixed with the treated water 3.1 by the pretreatment device 3 in the filtered water tank and used as water supply to the RO device.
【００１２】上記実施例の試験を行うための実験装置の
例を図３に示す。図３に示す実験装置は、上記実施例と
実質的に同一の構成である。ただ実験装置は、当然のこ
とながら実際の設備に比してかなり小規模であり、ＲＯ
装置の給水及び濃縮側の配管は、実際の物に比し小径、
短尺となり、凝集剤７の混合時間が不足する等の理由
で、タンク２１が付設され、タンク２１内の水を送給す
るためにポンプＰが付設される。タンク２２は、図１の
実施例において図示省略したものを明示したものであ
る。FIG. 3 shows an example of an experimental apparatus for carrying out the test of the above embodiment. The experimental apparatus shown in FIG. 3 has substantially the same configuration as that of the above embodiment. However, the experimental equipment is naturally much smaller than the actual equipment, and the RO
The pipes on the water supply and concentration sides of the equipment have a smaller diameter than the actual ones,
The tank 21 is attached because the length is short and the mixing time of the coagulant 7 is insufficient, and the pump P is attached to feed the water in the tank 21. The tank 22 is clearly shown in the embodiment shown in FIG.
【００１３】図３に示す実験設備により実験を行ったと
ころ、図４に示すような結果が得られた。図４のグラフ
において、横軸に週単位の時間をとり、縦軸に圧力（ｋ
ｇｆ／ｃｍ2 ）をとり、ＲＯ装置６の給水側圧力Ｐ1 と
濃縮側の圧力Ｐ2 との差、即ち、ΔＰ＝Ｐ1 −Ｐ2 の経
時変化をプロットした。図４に示すように、差圧ΔＰ
は、ＲＯ装置に好適な差圧が長期に亘り維持され、即ち
膜汚染物質によりＲＯ装置は汚染されることなく良好な
運転を続け、前処理装置３からの給水とＲＯ装置の濃縮
側からの固液分離装置の透過水とをタンク２２により混
合して、ＲＯ装置に送給することにより、処理水の回収
率を向上せしめることが確認された。When an experiment was conducted using the experimental equipment shown in FIG. 3, the results shown in FIG. 4 were obtained. In the graph of FIG. 4, the horizontal axis represents time in weeks, and the vertical axis represents pressure (k
gf / cm 2 ), the difference between the pressure P 1 on the water supply side of the RO device 6 and the pressure P 2 on the concentration side, that is, ΔP = P 1 −P 2 was plotted over time. As shown in FIG. 4, the differential pressure ΔP
Means that the differential pressure suitable for the RO device is maintained for a long period of time, that is, the RO device continues to operate satisfactorily without being contaminated by the membrane contaminants, and the water supplied from the pretreatment device 3 and the concentration side of the RO device are maintained. It was confirmed that the recovery rate of the treated water was improved by mixing the permeated water of the solid-liquid separation device with the tank 22 and sending it to the RO device.
【００１４】そして、上記実験例における差圧ΔＰは、
図４に示すように、ＲＯ装置の運転停止の際に僅かに変
動するのみであった。一方図５に示す従来法において実
験した結果を図６に示す。図６の横軸、縦軸の単位は、
図５のそれと同じである。同図に示すように、従来法で
は連続運転の場合、約３週間でＲＯ装置は汚染されて、
差圧ΔＰが使用限度に達し、エレメント交換して破線の
如くΔＰを降下させる必要があり、その後に間欠運転し
た場合は、運転停止中にシリカが析出してΔＰが上昇
し、前記連続運転の場合よりも更に短期で、ΔＰが使用
可能上限に達する。The differential pressure ΔP in the above experimental example is
As shown in FIG. 4, it slightly fluctuated when the RO device was stopped. On the other hand, FIG. 6 shows the result of an experiment in the conventional method shown in FIG. The units of the horizontal and vertical axes in FIG. 6 are
It is the same as that of FIG. As shown in the figure, in the conventional method, in the case of continuous operation, the RO device is contaminated in about 3 weeks,
When the differential pressure ΔP reaches the usage limit, it is necessary to replace the element and lower ΔP as shown by the broken line. If intermittent operation is performed after that, silica precipitates during operation stop and ΔP rises, and In a shorter period than the case, ΔP reaches the usable upper limit.
【００１５】上記のように、本発明の一実施例は、従来
例に比して、膜モジュール内での膜汚染物質であるシリ
カの濃度を上昇させることなく、透過水の回収率を向上
し且つ長期に亘り良好な運転を行うことができる。As described above, one embodiment of the present invention improves the permeate recovery rate without increasing the concentration of silica, which is a membrane contaminant in the membrane module, as compared with the conventional example. In addition, good operation can be performed for a long period of time.
【００１６】図２に本発明の他の実施例を示す。同図に
おける要素で図１に示す要素と同一のものには同一の符
号を付す。図３に示す実施例においては、ＲＯ装置では
除去し難い炭酸ガスを脱炭酸ガス塔９で除去し、更に、
第１ＲＯ装置６の透過水６．１を第２ＲＯ装置１０で処
理することにより、高品質の透過水１０．１を製造す
る。本実施例では、凝集剤７を添加された第１ＲＯ装置
６の濃縮水６．２は、給水１に合流し、前処理装置３で
処理される。必要に応じて第１ＲＯ装置６の濃縮水の一
部６．３は系外にブローされるが、これは、その他の不
純物の濃縮を防止するためである。第２ＲＯ装置の濃縮
水１０．２は好ましくは全量例えば脱炭酸ガス塔９の前
段に給水として回収される。FIG. 2 shows another embodiment of the present invention. The same elements as those shown in FIG. 1 are designated by the same reference numerals. In the embodiment shown in FIG. 3, carbon dioxide gas that is difficult to remove by the RO device is removed by the decarbonation gas tower 9, and further,
By treating the permeated water 6.1 of the first RO device 6 with the second RO device 10, high-quality permeated water 10.1 is produced. In this embodiment, the concentrated water 6.2 of the first RO device 6 to which the coagulant 7 has been added joins the feed water 1 and is treated by the pretreatment device 3. A part 6.3 of the concentrated water of the first RO device 6 is blown out of the system as necessary, which is to prevent the concentration of other impurities. The total amount of the concentrated water 10.2 of the second RO device is preferably recovered as, for example, the feed water in the front stage of the decarbonation gas tower 9.
【００１７】図２に示す上記実施例においても、図１に
示す実施と同様に、透過水の回収率を向上することがで
きる。Also in the embodiment shown in FIG. 2, the recovery rate of permeated water can be improved as in the embodiment shown in FIG.
【００１８】なお上記各実施例は、膜汚染物質をシリカ
の例で説明したが、濁土等の膜汚染物質についても同様
の効果を奏することができ、又、図１における濃縮水
６．２を図２に示す如く、前処理装置３の給水系へ送給
してもよい。In each of the above-mentioned embodiments, the membrane contaminant is described as an example of silica, but the same effect can be obtained also with membrane contaminants such as suspended soil, and the concentrated water 6.2 in FIG. May be fed to the water supply system of the pretreatment device 3 as shown in FIG.
【００１９】[0019]
【発明の効果】以上説明したように、本発明は、ＲＯ装
置の濃縮水に凝集剤を添加して、凝集沈殿・濾過装置、
凝集濾過装置、精密濾過装置、限外濾過膜装置、ＲＯ装
置等の固液分離手段により、膜汚染によって回収率を制
限するシリカ等を濃縮して系外に排出するので、ＲＯ装
置内での濃縮水の濃度を上昇させることなく、膜処理装
置全体での透過水回収率を向上することができる。As described above, according to the present invention, a coagulant is added to the concentrated water of the RO device to obtain a coagulating sedimentation / filtration device,
By solid-liquid separation means such as a coagulation filtration device, a microfiltration device, an ultrafiltration membrane device, and an RO device, silica etc., which limits the recovery rate due to membrane contamination, are concentrated and discharged to the outside of the system. The permeated water recovery rate of the entire membrane treatment apparatus can be improved without increasing the concentration of the concentrated water.
【図１】本発明による膜処理装置の一実施例を示す図FIG. 1 is a diagram showing an embodiment of a film processing apparatus according to the present invention.
【図２】本発明による膜処理装置の他の実施例を示す図FIG. 2 is a diagram showing another embodiment of the film processing apparatus according to the present invention.
【図３】図１の実施例の試験装置の一例を示す図FIG. 3 is a diagram showing an example of a test apparatus of the embodiment of FIG.
【図４】図３に示す試験装置による試験結果を示す図FIG. 4 is a diagram showing a test result by the test apparatus shown in FIG.
【図５】従来の膜処理装置の例を示す図FIG. 5 is a diagram showing an example of a conventional film processing apparatus.
【図６】従来の膜処理装置の運転状態を示す図FIG. 6 is a diagram showing an operating state of a conventional membrane processing apparatus.
１…原水 ３…前処理装置 ５…ポンプ ６，１０…逆浸
透膜（ＲＯ）装置 ８…固液分離装置1 ... Raw water 3 ... Pretreatment device 5 ... Pump 6,10 ... Reverse osmosis membrane (RO) device 8 ... Solid-liquid separation device
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成５年７月１２日[Submission date] July 12, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００４[Correction target item name] 0004
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００４】ところで、上記のような従来の膜処理装置
において、その運転上、ＲＯ装置からの透過水の回収率
を高めて、その運転効率を高めると共に、経済性を高め
ることが望まれており、そのためには、ＲＯ装置の濃縮
水側の濃度を可及的に高くして、透過水を増加するよう
にすればよい。この回収率を向上させるために、従来技
術として、ＲＯ給水に分散剤を添加し、例えばシリカの
膜装置内での析出を防止する方法、ＲＯ給水を膜処理す
ることにより微粒子を除去しシリカの析出を防止する方
法などが提案されている。By the way, in the conventional membrane treatment apparatus as described above, in operation, it is desired to increase the recovery rate of permeated water from the RO apparatus to enhance the operation efficiency and economical efficiency. , For that purpose, the concentration of RO equipment
The permeated water may be increased by increasing the concentration on the water side as much as possible. In order to improve this recovery rate, as a conventional technique, a method of adding a dispersant to RO feed water to prevent precipitation of silica in a membrane apparatus, for example, a membrane treatment of RO feed water to remove fine particles to remove silica Methods for preventing precipitation have been proposed.
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００９[Correction target item name] 0009
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００９】[0009]
【実施例】本発明の一実施例を図１を参照して説明す
る。図１に示される各要素で、前記従来例を例示する図
５に示された要素と同一のものには、同一の符号を付
す。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. Of the elements shown in FIG. 1, the same elements as those shown in FIG. 5 illustrating the conventional example are designated by the same reference numerals.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１０[Correction target item name] 0010
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１０】原水１は、凝集剤２を必要量添加され、前
処理装置３に供給される。前処理装置３は、凝集沈殿・
濾過装置、凝集濾過装置、砂濾過装置、精密濾過装置、
限外濾過膜装置、活性炭濾過装置等の周知手段の１つ又
はそれ以上の組合せからなる。前処理装置３において、
必要に応じてｐＨや温度のコントロールを行う。前処理
装置３で濁質を除去された処理水３．１は次いで濾過水
タンク（図示せず）に貯溜される。前処理装置は必要に
応じ逆洗され、系内に蓄積した濁質３．２をブローす
る。処理水は、安全フィルター４を経て、高圧ポンプ５
で加圧され、膜モジュール等で構成されるＲＯ装置に供
給される。ＲＯ装置６で処理された透過水６．１は所要
個所に供給される。Raw water 1 is supplied with a necessary amount of coagulant 2 and is supplied to a pretreatment device 3. Pre-processing device 3, agglutination precipitation -
Filtration equipment, coagulation filtration equipment, sand filtration equipment, microfiltration equipment,
It comprises one or more combinations of well known means such as ultrafiltration membrane devices, activated carbon filtration devices and the like. In the pretreatment device 3,
If necessary, control pH and temperature. The treated water 3.1 from which turbidity has been removed by the pretreatment device 3 is then stored in a filtered water tank (not shown). The pretreatment device is backwashed as necessary to blow off the suspended matter 3.2 accumulated in the system. The treated water passes through the safety filter 4 and the high pressure pump 5
And is supplied to an RO device composed of a membrane module or the like. The permeated water 6.1 processed by the RO device 6 is supplied to required locations.
【手続補正４】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１６[Correction target item name] 0016
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１６】図２に本発明の他の実施例を示す。同図に
おける要素で図１に示す要素と同一のものには同一の符
号を付す。図２に示す実施例においては、ＲＯ装置では
除去し難い炭酸ガスを脱炭酸ガス塔９で除去し、更に、
第１ＲＯ装置６の透過水６．１を第２ＲＯ装置１０で処
理することにより、高品質の透過水１０．１を製造す
る。本実施例では、凝集剤７を添加された第１ＲＯ装置
６の濃縮水６．２は、給水１に合流し、前処理装置３で
処理される。必要に応じて第１ＲＯ装置６の濃縮水の一
部６．３は系外にブローされるが、これは、その他の不
純物の濃縮を防止するためである。第２ＲＯ装置の濃縮
水１０．２は好ましくは全量例えば脱炭酸ガス塔９の前
段に給水として回収される。FIG. 2 shows another embodiment of the present invention. The same elements as those shown in FIG. 1 are designated by the same reference numerals. In the embodiment shown in FIG. 2 , carbon dioxide gas that is difficult to remove by the RO device is removed by the decarbonation gas tower 9, and further,
By treating the permeated water 6.1 of the first RO device 6 with the second RO device 10, high-quality permeated water 10.1 is produced. In this embodiment, the concentrated water 6.2 of the first RO device 6 to which the coagulant 7 has been added joins the feed water 1 and is treated by the pretreatment device 3. A part 6.3 of the concentrated water of the first RO device 6 is blown out of the system as necessary, which is to prevent the concentration of other impurities. The total amount of the concentrated water 10.2 of the second RO device is preferably recovered as, for example, the feed water in the front stage of the decarbonation gas tower 9.
【手続補正５】[Procedure Amendment 5]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１８[Correction target item name] 0018
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１８】なお上記各実施例は、膜汚染物質をシリカ
の例で説明したが、濁質等の膜汚染物質についても同様
の効果を奏することができ、又、図１における濃縮水
６．２を図２に示す如く、前処理装置３の給水系へ送給
してもよい。[0018] Note that the above embodiment is a membrane-fouling substance has been described in example silica, can also achieve the same effect for the membrane-fouling substance such as turbidity quality, also concentrate 6.2 in FIG. 1 May be fed to the water supply system of the pretreatment device 3 as shown in FIG.
Claims (2)
した水を更に処理する逆浸透膜装置とからなる膜処理装
置において、前記逆浸透膜装置の給水系と濃縮水系とを
固液分離装置を介して配管接続し、膜汚染物質を固液分
離装置により除去して前記逆浸透膜装置に再供給する構
成としたことを特徴とする膜処理装置。1. A membrane treatment device comprising a pretreatment device for pretreating raw water and a reverse osmosis membrane device for further treating pretreated water, wherein the feed water system and concentrated water system of the reverse osmosis membrane device are solid-liquid. A membrane treatment apparatus characterized in that it is connected to a pipe through a separation device to remove a membrane contaminant by a solid-liquid separation device and re-supplies it to the reverse osmosis membrane device.
した水を更に処理する逆浸透膜装置とからなる膜処理装
置において、前記前処理装置の給水系と前記逆浸透膜装
置の濃縮水系とを配管接続し、膜汚染物質を前記前処理
装置により除去して前記逆浸透膜装置に再供給する構成
としたことを特徴とする膜処理装置。2. A membrane treatment device comprising a pretreatment device for pretreating raw water and a reverse osmosis membrane device for further treating pretreated water, wherein the water supply system of the pretreatment device and the concentration of the reverse osmosis membrane device are concentrated. A membrane treatment apparatus characterized in that it is connected to an aqueous system by piping, and membrane contaminants are removed by the pretreatment apparatus and re-supplied to the reverse osmosis membrane apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4189429A JPH0631271A (en) | 1992-07-16 | 1992-07-16 | Film treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4189429A JPH0631271A (en) | 1992-07-16 | 1992-07-16 | Film treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0631271A true JPH0631271A (en) | 1994-02-08 |
Family
ID=16241103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4189429A Pending JPH0631271A (en) | 1992-07-16 | 1992-07-16 | Film treatment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0631271A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0871567A (en) * | 1994-09-01 | 1996-03-19 | Kobe Steel Ltd | Movable water-purifying facility |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5273555A (en) * | 1975-12-17 | 1977-06-20 | Ebara Infilco Co Ltd | Separating method |
| JPS5358974A (en) * | 1976-11-10 | 1978-05-27 | Ebara Infilco Co Ltd | Separating method by use of membrane |
| JPS5411882A (en) * | 1977-06-29 | 1979-01-29 | Ebara Infilco Co Ltd | Desalting process |
| JPS5518258A (en) * | 1978-07-28 | 1980-02-08 | Kurita Water Ind Ltd | Treatment apparatus for boiler supply water |
| JPS55109406A (en) * | 1979-02-14 | 1980-08-22 | Toray Ind Inc | Liquid separating system |
| JPS5966391A (en) * | 1982-10-05 | 1984-04-14 | Hibiya Sogo Setsubi Kk | Reverse osmosis desalination process |
| JPS5992098A (en) * | 1982-11-18 | 1984-05-28 | Kurushima Group Kyodo Gijutsu Kenkyusho:Kk | Disposal of waste liquor containing organic substance |
| JPS61116695A (en) * | 1984-11-12 | 1986-06-04 | 科学技術庁原子力局長 | Method of treating aqueous solution containing radioactive iodine |
| JPS6211507A (en) * | 1985-07-09 | 1987-01-20 | Mitsubishi Rayon Eng Co Ltd | Treatment of suspended matters in water and treating device therefor |
| JPS6295701U (en) * | 1985-12-02 | 1987-06-18 |
-
1992
- 1992-07-16 JP JP4189429A patent/JPH0631271A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5273555A (en) * | 1975-12-17 | 1977-06-20 | Ebara Infilco Co Ltd | Separating method |
| JPS5358974A (en) * | 1976-11-10 | 1978-05-27 | Ebara Infilco Co Ltd | Separating method by use of membrane |
| JPS5411882A (en) * | 1977-06-29 | 1979-01-29 | Ebara Infilco Co Ltd | Desalting process |
| JPS5518258A (en) * | 1978-07-28 | 1980-02-08 | Kurita Water Ind Ltd | Treatment apparatus for boiler supply water |
| JPS55109406A (en) * | 1979-02-14 | 1980-08-22 | Toray Ind Inc | Liquid separating system |
| JPS5966391A (en) * | 1982-10-05 | 1984-04-14 | Hibiya Sogo Setsubi Kk | Reverse osmosis desalination process |
| JPS5992098A (en) * | 1982-11-18 | 1984-05-28 | Kurushima Group Kyodo Gijutsu Kenkyusho:Kk | Disposal of waste liquor containing organic substance |
| JPS61116695A (en) * | 1984-11-12 | 1986-06-04 | 科学技術庁原子力局長 | Method of treating aqueous solution containing radioactive iodine |
| JPS6211507A (en) * | 1985-07-09 | 1987-01-20 | Mitsubishi Rayon Eng Co Ltd | Treatment of suspended matters in water and treating device therefor |
| JPS6295701U (en) * | 1985-12-02 | 1987-06-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0871567A (en) * | 1994-09-01 | 1996-03-19 | Kobe Steel Ltd | Movable water-purifying facility |
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