JPH06314456A - Disk clamping device - Google Patents

Abstract

(57) [Summary] [Purpose] To prevent gas leakage for driving the chuck head. [Structure] During clamping, the diaphragm 15 is not displaced, and the spring force of the spring 17 causes the piston 7 to move.
Does not change. The chuck head 6 is the chuck ring 13
Is pressed downward to expand and clamp the disk W. On the other hand, at the time of unclamping, when air is supplied, the diaphragm 15 is displaced to the upper side, whereby the piston 7 is displaced upward against the spring force of the spring 17. The chuck head 6 rises without air leaking, and the inclined surface 6 a thereof separates from the chuck ring 13.
As a result, the chuck ring 13 contracts, the engagement with the disc W is released, and the disc W can be removed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disk clamping device which is mainly used in a clean environment and is used for magnetic or optical disk inspection.

[0002]

2. Description of the Related Art As disclosed in, for example, Japanese Unexamined Patent Publication No. Hei 2-260271, a hollow turntable fixed to a spindle and on which a disk is placed, and a hollow turntable penetrating the hollow portion of the turntable can be moved up and down. A shaft, a chuck head fixed to the upper end of the shaft and having a maximum diameter smaller than the central hole of the disk and having a diameter that becomes smaller toward the outer periphery toward the lower side; an inclined surface of the chuck head and an upper surface of the turntable; There is known a disk clamping device that is sandwiched between the two and has a chuck ring that expands and contracts along the inclined surface by the vertical movement of the chuck head and restricts the work by expansion.

In such a clamp device, as a mechanism for raising and lowering the shaft, for example, an actual flat plate 2
As described in Japanese Patent Application Laid-Open No. 50854, a piston is provided at the lower end of the shaft, air is supplied to the lower side of the piston to raise the shaft, and air is drawn from the lower side of the piston to spring the shaft. It is conceivable to employ a cylinder mechanism that lowers the spring force.

[0004]

However, when such a cylinder mechanism is adopted, the supply air may leak from the gap between the chuck head and the turntable via the gap between the piston and the bush. ,that time,
Abrasion powder generated by sliding of the piston and the shaft is also released, which adversely affects the clean environment and deteriorates cleanliness particularly in the vicinity of a work such as a disk.

It is also conceivable to provide an O-ring around the piston so as to prevent the supply air from leaking, but the O-ring gradually wears due to aging, and when the supply air leaks. It is unclear whether or not it should be discharged, and if the supplied air leaks upward, the cleanliness in the vicinity of the work deteriorates as in the case described above.

The present invention has been made in view of the above circumstances, and provides a structure in which gas for driving a chuck head (shaft) is prevented from leaking.

[0007]

SUMMARY OF THE INVENTION The present invention is directed to a hollow turntable which is fixed to a spindle and on which a disk is mounted, a shaft which penetrates the hollow portion of the turntable and is vertically movable, and an upper end of the shaft. A chuck head having a slanted surface fixed to the outer peripheral portion and having a maximum diameter smaller than the central hole of the disk and becoming smaller toward the lower side; and a chuck head sandwiched between the slanted surface of the chuck head and the upper surface of the turntable. In a disk clamping device including a chuck ring that expands and contracts along the inclined surface by a vertical movement of a head and restrains a work by expansion, a diaphragm disposed below a lower end portion of the shaft and a lower side of the diaphragm. And a drive means for moving the shaft up and down via a diaphragm.

[0008]

When the gas is supplied to the lower side of the diaphragm, the shaft moves up and the chuck head also moves up. As a result, the diameter of the inclined surface of the chuck head that restricts the chuck ring is reduced, the pressure applied by the chuck head is released, the chuck ring contracts and the diameter is reduced, and the constraint of the work by the chucking is released.

On the other hand, when the gas is drawn out from the lower side of the diaphragm, the shaft descends and the chuck head descends accordingly. As a result, the diameter of the inclined surface of the chuck head that regulates the chuck ring is increased, and the inclined surface with a large diameter presses the chuck ring to expand the chuck ring and increase the ring diameter. Restrained on the table.

[0010]

Embodiments of the present invention will now be described in detail with reference to the drawings.

In FIG. 1 showing a schematic structure, reference numeral 1 is a disk clamping device for clamping a disk W having a central hole W1, and a spindle 3 of a spindle motor 2
The disk W by the bolts 4 and 4 on the flange portion 3a of
The hollow turntable 5 on which is mounted is fixedly attached.

The turntable 5 has a flange portion 5a attached to the flange portion 3a, and a shaft portion 5b provided upright coaxially with the flange portion 5a. Flange part 5a
A large-diameter space portion 5c is formed therein, and a small-diameter space portion 5d extending in the shaft portion 5b is connected to the space portion 5c.
A recess 5e is formed at the upper end of the shaft 5b, and the recess 5e communicates with the space 5d through the through hole 5f.

In the recess 5e, the maximum diameter is the disk W.
A chuck head 6 having an inclined surface 6a which is smaller than the central hole W1 and whose diameter becomes smaller on the outer peripheral side is disposed. The piston 7 is disposed in the space 5d so as to be vertically movable. The chuck head 6 and the piston 7 are connected by the shaft 8. In addition, 9 and 10 are bushes for the shaft 8 and the piston 7, respectively.
Reference numeral 11 is a bolt for fixing the chuck head 6 to the shaft 8, and 12 is a nut for fixing the piston 7 to the shaft 8.

The inclined surface 6 on the outer circumference of the chuck head 6
A chuck ring 13 is sandwiched between a and the upper surface of the turntable 5 so as to expand and contract in the engagement relationship with the inclined surface 6a by the vertical movement of the chuck head 6 and restrain the disk W by expansion. The chuck ring 13 is shown in FIGS.
As shown in FIG.
An inclined surface 13a that abuts and engages with the inclined surface 6a is formed, and a part thereof is cut away to form a void portion 13b. In addition, the circumferential groove 13 is formed on the outer peripheral portion of the chuck ring 13.
c is formed, and the chuck ring 1 is formed in the circumferential groove 13c.
A steel ring 14 that constantly urges 3 in the direction of decreasing its diameter is fitted.

A diaphragm 15 is provided in the space 5c below the piston 7 and is fixed by a retaining ring 16. A spring 17 is interposed between the piston 7 and the turntable 5 to constantly urge the piston 7 downward.

Gas is supplied to the space 5c below the diaphragm 15 through the passages 2a, 3a formed in the spindle motor 2 and the spindle 3, and the shaft 8 is passed through the diaphragm 15. A driving means for moving the (chuck head 6) up and down is configured.

With the above construction, when the disk W is clamped, the diaphragm 15 will not be displaced unless air is supplied to the space 5c below the diaphragm 15.
The piston 7 is displaced downward due to the spring force of the spring 17, and the chuck head 6 connected to the piston 7 via the shaft 8 causes the chuck ring 13 to move.
Is pressed downward, and the chuck ring 13 is expanded (that is, expanded) so that the diameter thereof becomes large due to the abutting engagement relationship between the inclined surfaces 6a and 13a.
The disk W is clamped by restraining the peripheral portion of 1.

On the other hand, at the time of unclamping, if air is supplied to the space 5c below the diaphragm 15 through the passages 2a and 3a, the diaphragm 15 will be displaced upwards, thereby resisting the spring force of the spring 17. The piston 7 is displaced upward. As a result, the piston 8 and hence the chuck head 6 rises, the engagement relationship between the inclined surfaces 6a and 13a is released, and the inclined surface 6a of the chuck head 6 separates from the chuck ring 13. As a result, the chuck ring 13 contracts in the direction of decreasing the diameter, becomes smaller than the central hole W1 of the disc W, the constraint of the disc W by the chuck ring 13 is released, and the disc W is removed from the turntable 5. You can

[0019]

As described above, according to the present invention, since the shaft and the chuck head are moved up and down by utilizing the diaphragm, the gas leaking up and down the chuck head by the diaphragm can be prevented without complicating the structure. It becomes possible to prevent it. Therefore, with the leak of the gas,
The release of abrasion powder generated from the sliding parts is prevented, and the cleanliness is not impaired even when used in a clean environment.

[Brief description of drawings]

FIG. 1 is an overall configuration diagram of a disc clamp device.

FIG. 2 is an enlarged cross-sectional view of part A in FIG.

FIG. 3 is a plan view of a chuck ring.

[Explanation of symbols]

 1 Disc clamp device 3 Spindle 5 Turntable 6 Chuck head 6a Inclined surface 8 Shaft 13 Chuck ring 15 Diaphragm W Disc W1 Center hole

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Katsunori Taniguchi 6-10107 Takino-cho, Nishinomiya-shi, Hyogo Shinmeiwa Industrial Co., Ltd.

Claims (1)

[Claims] 1. A hollow turntable fixed to a spindle on which a disk is placed, a shaft penetrating the hollow portion of the turntable and vertically movable, and a maximum diameter fixed to the upper end of the shaft on the outer circumference. Is sandwiched between an inclined surface of the chuck head and the upper surface of the turntable, the chuck head having an inclined surface that is smaller than the central hole of the disk and has a smaller diameter toward the lower side, and the inclined surface is moved by the vertical movement of the chuck head. A disk clamping device including a chuck ring that expands and contracts along the axis to restrain the work by expansion.A diaphragm disposed below the lower end of the shaft and a gas supplied to the lower side of the diaphragm through the diaphragm. And a drive unit for moving the shaft up and down.