JPH06319734A - 多層音響変換器 - Google Patents
多層音響変換器Info
- Publication number
- JPH06319734A JPH06319734A JP7159794A JP7159794A JPH06319734A JP H06319734 A JPH06319734 A JP H06319734A JP 7159794 A JP7159794 A JP 7159794A JP 7159794 A JP7159794 A JP 7159794A JP H06319734 A JPH06319734 A JP H06319734A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- layers
- conductive electrode
- piezoelectric
- external
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006378 damage Effects 0.000 abstract description 3
- 208000027418 Wounds and injury Diseases 0.000 abstract description 2
- 208000014674 injury Diseases 0.000 abstract description 2
- 230000005611 electricity Effects 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 371
- 230000010287 polarization Effects 0.000 description 23
- 238000010586 diagram Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 11
- 230000005684 electric field Effects 0.000 description 10
- 230000005284 excitation Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 239000004593 Epoxy Substances 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000002059 diagnostic imaging Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000002592 echocardiography Methods 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/064—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface with multiple active layers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4860493A | 1993-04-16 | 1993-04-16 | |
| US048,604 | 1993-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06319734A true JPH06319734A (ja) | 1994-11-22 |
Family
ID=21955457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7159794A Pending JPH06319734A (ja) | 1993-04-16 | 1994-03-16 | 多層音響変換器 |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP0620049A3 (fr) |
| JP (1) | JPH06319734A (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011212334A (ja) * | 2010-03-31 | 2011-10-27 | Konica Minolta Medical & Graphic Inc | 超音波診断装置 |
| JP2011240007A (ja) * | 2010-05-20 | 2011-12-01 | Hitachi Aloka Medical Ltd | 超音波探触子及び超音波探触子の製造方法 |
| JP2012110740A (ja) * | 1999-06-22 | 2012-06-14 | Teratech Corp | 集積化電子機器を有する超音波プローブ |
| JP2017085002A (ja) * | 2015-10-29 | 2017-05-18 | 京セラ株式会社 | 圧電素子およびこれを備えた音響発生器、音響発生装置、電子機器 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000348321A (ja) | 1999-06-03 | 2000-12-15 | Nec Corp | 磁気ディスク装置,磁気ヘッド,磁気ヘッドの製造方法および磁気ディスク装置の製造方法 |
| US20030173870A1 (en) * | 2002-03-12 | 2003-09-18 | Shuh-Yueh Simon Hsu | Piezoelectric ultrasound transducer assembly having internal electrodes for bandwidth enhancement and mode suppression |
| US8085957B2 (en) | 2006-11-10 | 2011-12-27 | Sergey Vladimirovich Shishov | Method for converting electric signals into acoustic oscillations and an electric gas-kinetic transducer |
| CA2858819A1 (fr) | 2011-12-13 | 2013-06-20 | Piezotech Llc | Transducteur a largeur de bande amelioree destine a la mesure de l'integrite d'un puits |
| JP5993330B2 (ja) * | 2013-03-18 | 2016-09-14 | オリンパス株式会社 | 積層型超音波振動デバイス、積層型超音波振動デバイスの製造方法および超音波医療装置 |
| NL2012419B1 (en) * | 2014-03-13 | 2016-01-06 | Novioscan B V | High voltage MEMS, and a portable ultrasound device comprising such a MEMS. |
| WO2020044513A1 (fr) * | 2018-08-30 | 2020-03-05 | オリンパス株式会社 | Transducteur à ultrasons, instrument de traitement par ultrasons et procédé de production pour transducteur à ultrasons |
| GB201817503D0 (en) * | 2018-10-26 | 2018-12-12 | Dolphitech As | Scanning apparatus |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2894317A (en) * | 1954-06-07 | 1959-07-14 | Spence T Marks | Method for constructing a barium titanate blast velocity gauge |
| US4803763A (en) * | 1986-08-28 | 1989-02-14 | Nippon Soken, Inc. | Method of making a laminated piezoelectric transducer |
| JPS63122288A (ja) * | 1986-11-12 | 1988-05-26 | Nec Corp | 電歪効果素子 |
-
1994
- 1994-03-16 JP JP7159794A patent/JPH06319734A/ja active Pending
- 1994-04-14 EP EP94302655A patent/EP0620049A3/fr not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012110740A (ja) * | 1999-06-22 | 2012-06-14 | Teratech Corp | 集積化電子機器を有する超音波プローブ |
| JP2014087700A (ja) * | 1999-06-22 | 2014-05-15 | Teratech Corp | 集積化電子機器を有する超音波プローブ |
| JP2011212334A (ja) * | 2010-03-31 | 2011-10-27 | Konica Minolta Medical & Graphic Inc | 超音波診断装置 |
| JP2011240007A (ja) * | 2010-05-20 | 2011-12-01 | Hitachi Aloka Medical Ltd | 超音波探触子及び超音波探触子の製造方法 |
| JP2017085002A (ja) * | 2015-10-29 | 2017-05-18 | 京セラ株式会社 | 圧電素子およびこれを備えた音響発生器、音響発生装置、電子機器 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0620049A2 (fr) | 1994-10-19 |
| EP0620049A3 (fr) | 1995-09-06 |
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