JPH06338020A - Method of manufacturing magnetic head - Google Patents

Abstract

(57) [Summary] [Structure] The first substrates 3 and 4 in which the metal magnetic films 1 and 2 are at least partially made of a ferrite material in the thickness direction
When a pair of magnetic core halves 7 and 8 sandwiched between the first and second substrates 5 and 6 are fused by gap welding so that the end faces of the metal magnetic films 1 and 2 are butted against each other, the pressure P
Is 2 MPa ≦ P ≦ 10 MPa, and the gap fusion is performed. [Effect] A predetermined gap length is accurately formed, no residual stress is generated in the metal magnetic film and the substrate due to the gap fusion, the magnetic characteristics of these are not deteriorated, and the electromagnetic conversion characteristics thereof are improved. can do.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head for forming a magnetic head for high density magnetic recording, which is mounted on, for example, a video tape recorder.

[0002]

2. Description of the Related Art For example, in the field of magnetic recording, a so-called magnetic head for high-density magnetic recording, which is excellent in high-frequency characteristics, is formed by laminating thin magnetic metal thin films in multiple layers with an insulating film interposed therebetween. A magnetic head using a laminated metal magnetic film has been developed. An example of such a magnetic head is a so-called laminate type magnetic head in which a pair of magnetic core halves formed by sandwiching the metal magnetic film with a pair of substrates are joined and integrated by gap fusion.

In this laminate type magnetic head, since the film thickness of the metal magnetic film is the track width of the magnetic gap, a substrate made of a non-magnetic material such as ceramics or crystallized glass is used as the substrate.

However, in such a magnetic head, when the track width is narrowed in order to achieve higher density recording, the head efficiency is deteriorated due to the reduction of the cross-sectional area of the core forming the magnetic path.

Therefore, conventionally, a magnetic head using a magnetic ferrite for the substrate has been proposed in order to prevent deterioration of the head efficiency by ensuring the core cross-sectional area.
According to this method, even if the track is narrowed, since the core cross-sectional area is sufficiently secured by the magnetic ferrite, deterioration of head efficiency can be suppressed as compared with the magnetic head using the non-magnetic substrate.

In order to manufacture the above magnetic head,
First, on one magnetic ferrite substrate, a metal magnetic film, which is a laminated metal film in which a thin magnetic metal thin film is laminated in multiple layers via an insulating film, is formed, and the other magnetic ferrite substrate is formed on this. Joined to form a magnetic core half. Next, the magnetic core halves and the magnetic core halves formed similarly to each other are abutted with each other by abutting the end faces of the metal magnetic films present on the abutting faces, and the gap fusion is performed by the glass via the gap film. The magnetic head is completed by joining and unifying.

[0007]

By the way, when the above-mentioned magnetic core halves are subjected to the gap fusion, it is necessary to apply a predetermined pressure to these magnetic core halves to fuse them. However, depending on the magnitude of the pressure, residual stress is generated in the metal magnetic film and the substrate, the magnetic characteristics are deteriorated, and the gap becomes large.

The above tendency is particularly remarkable when the track width of the magnetic gap is narrowed to 13 μm or less. Therefore, it has been earnestly desired to reduce the influence of residual stress on the metal magnetic film and the substrate by controlling the pressure applied in the gap fusion.

Therefore, the present invention has been proposed in view of such a conventional situation, and it is possible to form a predetermined gap length with high precision, and the gap fusion causes a residual stress in the metal magnetic film and the substrate. It is an object of the present invention to provide a method of manufacturing a magnetic head that does not occur and does not deteriorate these magnetic characteristics, and that can manufacture a magnetic head having excellent electromagnetic conversion characteristics.

[0010]

In order to achieve the above-mentioned object, the present invention provides a pair of magnetic core halves in which a metal magnetic film is sandwiched in the film thickness direction by a substrate at least a part of which is made of a ferrite material. A method of manufacturing a magnetic head in which end faces of metal magnetic films present on respective abutting faces are abutted to each other and gap fusion is performed, and the gap fusion is performed by setting a pressure P during the gap fusion to 2 MPa ≦ P ≦ 10 MPa. Is.

[0011]

In the present invention, the pressure P at the time of gap fusion is set to 2
By setting MPa ≦ P ≦ 10 MPa, residual stress does not occur in the metal magnetic film and the substrate, and the gap length becomes constant.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described below with reference to the drawings. First, a magnetic head formed by the method of manufacturing a magnetic head according to the present invention will be described.

In the magnetic head, as shown in FIG. 1, the metal magnetic films 1 and 2 are sandwiched by the first and second substrates 3 and 4 and 5 and 6 made of a ferrite material in the thickness direction. It is composed of a pair of magnetic core halves 7 and 8 which are formed by being joined and integrated by a fused glass 9 so that the end faces of the metal magnetic films 1 and 2 are butted against each other. ing.

As described above, the magnetic core halves 7 and 8 are composed of the metal magnetic films 1 and 2 serving as the main cores, and the first substrates 3 and 4 serving as the auxiliary cores sandwiching the magnetic magnetic films 1 and 4 from the thickness direction. Substrate 5,6
The first substrates 3 and 4 are laminated so as to sandwich the metal magnetic films 1 and 2 formed on one main surface of the second substrates 5 and 6 so as to be joined and integrated. Has been done. At this time, the first substrates 3 and 4 and the second substrates 5 and 6 are
As shown in FIG. 2, the first and second substrates 3, 4 and 5, 6 are joined and integrated by the glass films 18, 19.
Underlayer films 16a, 16b and 17a, 17b are provided between the glass films 18 and 19 to prevent these reactions.

As shown in FIG. 2, the metal magnetic films 1 and 2 are composed of thin magnetic metal thin films 1a, 1b, 1c and 2a, 2b, 2c and an insulating film 10b for the purpose of improving high frequency characteristics. It is a laminated metal film formed by laminating many layers through ₁ , 10b ₂ , 11b ₁ and 11b ₂ . And
On the interfaces between the second substrates 5 and 6 and the magnetic metal thin films 1a and 2a, base films 10a and 11a are formed which function to improve the adhesion of these and prevent reaction.

Further, in the magnetic core halves 7 and 8 described above, the end faces of the metal magnetic films 1 and 2 present as the abutting faces of each other are butted against each other via a gap film not shown, and the fused glass 9 is formed. A magnetic gap g that operates as a recording / reproducing gap is formed between the abutting surfaces of the metal magnetic films 1 and 2 by joining. It should be noted that the track width Tw of the magnetic gap is equal to the first substrate 3, 4 and the second substrate.
Since the substrates 5 and 6 are made of ferrite, they are regulated by the track width regulating grooves 14a, 14b, 15a, 15b, and the groove portions formed by these are also filled with the fused glass 9.

Further, winding grooves 12, 13 for coil winding and glass grooves 22, 23 are provided on the abutting surface sides of the magnetic core halves 7, 8, and the bonding strength of the magnetic core halves 7, 8 is provided. In order to ensure the above, the fusion glass 9 is also melt-filled in these. Furthermore, in this magnetic head,
A step is provided on the sliding surface of the magnetic recording medium that is in sliding contact with the magnetic recording medium to ensure contact with the magnetic recording medium, and the winding state of the coils formed in the winding grooves 12 and 13 is improved. Therefore, auxiliary winding grooves 20 and 21 are formed at positions facing the winding grooves 12 and 13, respectively.

Next, an embodiment of a method of manufacturing a magnetic head to which the present invention is applied will be described. First, as shown in FIG. 3A, a ferrite substrate 24 is prepared, and one main surface 24a of the ferrite substrate 24 is mirror-finished by polishing or the like. As the ferrite material,
Any of single crystal ferrite, polycrystal ferrite, a joining material of single crystal ferrite and polycrystal ferrite, or a joining material of single crystal ferrites having different plane indices may be used.

Next, one main surface 2 of the ferrite substrate 24
The metal magnetic films 25 and 26 are formed on the strip 4a by mask sputtering so as to be parallel to each other in a strip shape at a predetermined interval so as to be parallel to each other. As described above, the metal magnetic films 25 and 26 are laminated metal films in which thin magnetic metal thin films are laminated in multiple layers with the insulating film interposed therebetween, and these films are sequentially laminated by mask sputtering. Then, the metal magnetic films 25 and 26 are formed.

As a material for forming the metal magnetic thin film, sendust (Fe-Al-Si) or Fe-Ru is used.
-Ga-Si, a crystalline magnetic metal material obtained by adding O, N, or the like to these, a Fe-based or Co-based microcrystalline magnetic metal material, or the like can be given. The thickness of the magnetic metal thin film is preferably 2 to 5 μm per layer in order to improve high frequency characteristics.

As one insulating film, for example, SiO₂，
Ta₂O_FiveOxide film such as Si and Si₃N _FourSuch as nitride film
used. The film thickness of the insulating film is, for example, 0.1.
It is preferably about 0.3 μm. Then, the metal magnetic film 2
The thicknesses of 5, 26 are
Target recording track width because it must be formed
It is preferably 1.2 to 3 times the magnetic metal thin film.
A plurality of insulating films are formed.

When forming the metal magnetic films 25 and 26, a base film 27 as shown in FIG. 3B is previously formed in order to improve the adhesion with the ferrite substrate 24 as described above. The base film 27 may be formed by using Si.
Examples thereof include oxide films such as O ₂ and Ta ₂ O ₅ , nitride films such as Si ₃ N ₄ , metal films such as Cr, Al, Si and Pt, and alloy films thereof or laminated films combining them. To be

Further, a base film 36 is formed on the metal magnetic films 25 and 26 on the ferrite substrate 24 as shown in FIG. 4 (only the metal magnetic film 25 is shown in the drawing). After that, the glass film 37 is formed. The base film 36 is
The metal magnetic films 25 and 26 are provided for the purpose of preventing the reaction between the glass film 37 and the like. As a film constituting this, an oxide film such as SiO ₂ , Ta ₂ O ₅ or Si ₃ N
Examples thereof include a nitride film of ₄ or the like, a metal film of Cr, Al, Pt or the like, or a laminated film in which these are combined. Further, the glass film 37 may be formed by sputtering Pb-based low melting point glass or applying frit glass by spin coating or the like. The glass film preferably has a thickness of 0.1 μm to 0.5 μm.

Further, as shown in FIG. 5, a base film 38 and a glass film 39 are formed on the other ferrite substrate 35 similarly to the ferrite substrate 24.

Then, as shown in FIG. 6A, the ferrite substrate 24 having the laminated film formed thereon and the ferrite substrate 35 are formed with glass films 37,
While abutting 39 each other and crimping, 500 ° C to 700
It is heated to ℃ and joined together. As a result, the glass films 37 and 39 formed on the abutting surfaces of each other are shown in FIG.
Fused as shown in.

In this embodiment, the glass films 37 and 39 are formed on both of the pair of ferrite substrates 24 and 35 and they are fused together.
Alternatively, a glass film may be formed on at least one of the above and fused.

Next, the laminated substrate integrated and joined is
The magnetic head is cut at the positions indicated by the line AA ', the line BB', and the line CC 'in FIG. 7 at the same angle as the azimuth angle given to the magnetic head to be manufactured.

Next, after removing unnecessary portions of ferrite by using a surface grinder or the like, each magnetic core half block 4 is removed.
As shown in FIGS. 8 and 9, winding grooves 42 and 43 for winding coils and glass grooves 44 and 45 for glass fusion are formed on the abutting surfaces of Nos. 0 and 41, respectively.

The winding grooves 42 and 43 and the glass grooves 44 and 4
5 is formed as a groove having a substantially U-shaped cross section, but one side surface 42a, 43a of the winding groove 42, 43 is an inclined surface in order to restrict the depth of the magnetic gap g.
The other side surfaces 42b, 43b of the winding grooves 42, 43
May be an inclined surface or a vertical surface.

Next, as shown in FIGS. 10 and 11, in each of the magnetic core half blocks 40 and 41, a track width regulating groove 46a for securing the joint strength of the blocks and regulating the track width of the magnetic head is formed. , 46b and 47a, 47b
To form.

The track width restricting grooves 46a, 46b and 47a, 47b are located on both sides of the metal magnetic films 25, 26 and close to the metal magnetic films 25, 26. Is formed over the entire block as a groove having a substantially trapezoidal cross section so as to be cut out. Incidentally, the track width regulating grooves 46a, 46b and 47
a side surface 46 of the metal magnetic films 25 and 26 of a and 47b
The a ₁ , 46b ₁ and 47a ₁ , 47b ₁ are formed as inclined surfaces so that the widths of the metal magnetic films 25 and 26 are regulated and the track width of the magnetic gap is regulated.

Next, the magnetic core half blocks 40,
Gap forming surfaces 40a, 41a which are abutting surfaces of 41
Is mirror-finished by polishing or the like.

Then, one magnetic core half block 40
After forming a gap film (not shown) on the gap forming surface 40a or on the gap forming surfaces 40a and 41a of both the magnetic core half blocks 40 and 41, as shown in FIG. Blocks 40 and 41
Metal magnetic films 25 and 26 present on the respective butting surfaces
The recording tracks are aligned by abutting the end faces of each other, and the gap fusion is performed while pouring the fusion glass 48.

As a result, these magnetic core half blocks 4 are
0 and 41 are joined and integrated by a fused glass 48,
A magnetic gap g that operates as a recording / reproducing gap is formed between the abutting surfaces of the metal magnetic films 25 and 26.

At this time, in this embodiment, the magnetic core half blocks are fused with each other by setting the pressure P at the time of the gap fusion within the range of 2 MPa ≦ P ≦ 10 MPa. If the gap fusion is performed within such a range, residual stress due to the gap fusion does not occur in the ferrite substrate and the metal magnetic film forming the magnetic core half block, and the gap length does not change. Therefore, the magnetic characteristics are not impaired. That is, the magnetic characteristics of the substrate and the metal magnetic film of the magnetic head constituted by them do not deteriorate, and the electromagnetic conversion characteristics of the magnetic head become good.

Then, after forming a winding auxiliary groove in the magnetic core half block joined and integrated by the fused glass 48, the sliding surface of the magnetic recording medium is cylindrically polished to be subjected to a contact width processing to obtain a predetermined chip. Cut to shape. As a result, the magnetic head as shown in FIG. 1 is completed.

Here, an experimental investigation was conducted on the electromagnetic conversion characteristics of the magnetic head actually manufactured through the above steps.
In this experimental example, single crystal ferrite was used as the substrate, and sendust (Fe) with a thickness of 3 μm was used as the magnetic metal thin film.
-Al-Si) film with a thickness of 0.2 μm as an insulating film
The above-mentioned SiO ₂ film was used to form three magnetic metal thin films to form a magnetic gap having a track width of 5 μm, and a 50 nm-thick SiO ₂ film was used as a base film. And
0.2 μm thick with 0.1 μm thick Cr film as base film
The Pb-based glass film of was used as a fused glass and was sputtered. A fused glass was similarly formed on the other ferrite substrate.

Then, the influence on the electromagnetic conversion characteristics of the magnetic head was investigated by changing the pressure P in the gap fusion. That is, the pressure P is 1 MPa, 2M
Pa, 5 MPa, 10 MPa, 20 MPa, 40 MPa
Magnetic heads were manufactured by changing the above, and the electromagnetic conversion characteristics of each magnetic head were evaluated.

The following method was used to evaluate the electromagnetic conversion characteristics. That is, 8 as a magnetic recording medium
Using a coated tape for mm, a fixed head type electromagnetic conversion characteristic measuring device was used to perform self-recording / reproduction at a frequency of 10 MHz and a relative speed of 7.5 m / s, and the reproduction output was measured.
The results are shown in Fig. 13. The reproduction output in FIG. 13 is shown as a relative output when the reproduction output of the magnetic head whose pressure P at the time of gap fusion is 10 MPa is 0 dB.

As can be seen from the results shown in FIG. 13, the reproducing output is stable in the magnetic head in which the pressure P at the time of gap fusion is 2 MPa ≦ P ≦ 10 MPa. However, when the pressure P is higher than 10 MPa, the reproduction output sharply decreases. It is considered that this is because residual pressure is generated in the metal magnetic film and the ferrite substrate in the vicinity of the gap due to the pressure during the gap fusion, and the magnetic characteristics of these are deteriorated, and the electromagnetic conversion characteristics of the magnetic head are deteriorated. On the other hand, when the pressure P is 10 MPa or less, the residual stress on the metal magnetic film and the ferrite substrate near the gap is reduced, and the reproduction output is improved. In addition, the pressure P is 2 MPa
When it is lower than the above value, the gap is not joined (indicated by a hatched portion in the drawing), and the gap becomes large. Therefore, by setting the pressure P at the time of gap fusion to 2 MPa ≦ P ≦ 10 MPa, residual stress does not occur in the substrate and the metal magnetic film in the vicinity of the gap, so that the magnetic characteristics of these are not deteriorated and the obtained magnetic It was confirmed that the electromagnetic conversion characteristics of the head were good.

In addition to the magnetic head whose substrate is made of only the ferrite material as described above, the method of manufacturing the magnetic head of the present invention is shown in FIG. 14 in which the substrate is made of a bonding material of a non-magnetic material and a ferrite material. It is also applicable when manufacturing a magnetic head as shown. The magnetic head is similar to the above-mentioned magnetic head in that the metal magnetic films 101 and 102 are made of a ferrite material from the first substrate 103,
It is composed of a pair of magnetic core halves 107 and 108 sandwiched by 104 and the second substrates 105 and 106, and these magnetic core halves 107 and 108 are the metal magnetic film 10 described above.
The end faces of 1, 102 are abutted against each other by a fused glass 109 so as to be integrated. Each of the magnetic core halves 107 and 108 is also provided with coil winding grooves 112 and 113, glass grooves 122 and 123, and winding auxiliary grooves 120 and 121, which are the same as those provided in the magnetic head described above. Have a role.

At this time, particularly in the above magnetic head,
Sliding contact portions 103a and 104a with which the first substrates 103 and 104 slidably contact the magnetic recording medium are made of a non-magnetic material N, and back portions 103b and 104b, which are the other portions, are made of a magnetic material M.
It consists of

The sliding contact portions 103a, 104a and the back portions 103b, 104b are made of Cr as the base films 114a, 114, as shown in FIG.
It is joined and integrated by a glass film 115 formed by sputtering glass via 4b. Sliding contact part 103
a, 104a between the glass film 115 and the back portion 103
b, 104b and the underlying film 1 interposed between the glass film 115
14a and 114b are provided for the purpose of improving the adhesive force of the glass film 115 or preventing reaction. Although only one magnetic core half body 107 is shown in FIG. 15, the other magnetic core half body 108 has the same structure.

As the glass film 105, a film made of frit glass applied by spin coating or the like can be used in addition to the film formed by sputtering glass. Then, S is formed on the base films 114a and 114b.
An oxide film of iO ₂ , Ta ₂ O ₅ or the like, a nitride film of Si ₃ N ₄ or the like, a metal film of Al, Si, Pt or the like in addition to Cr, or a laminated film combining them can be used.

The non-magnetic material N used for the sliding contact portions 103a and 104a is, for example, CaTiO ₃ or Zr.
O _2, BaTiO _2, etc. of the ceramics or crystallized glass, non-magnetic ferrite, and the like. Further, magnetic ferrite or the like is used for the magnetic material M used for the back portions 103b and 104b.

On the other hand, the second substrates 105 and 106 are all made of a non-magnetic material N from the sliding contact portion which is in sliding contact with the magnetic recording medium to the back portion. This second substrate 105,
106 includes, for example, CaTiO ₃ , ZrO ₂ , and BaTi.
Any substrate made of ceramics such as O ₂ or crystallized glass or non-magnetic ferrite can be used.

When manufacturing the magnetic head having the above-described structure, the manufacturing may be performed according to the above-described embodiment of the magnetic head manufacturing method, and the same portions are omitted and the first part is omitted.
The parts relating to the substrates 105 and 106 of will be described.

First, a nonmagnetic substrate 129 having a rectangular shape as shown in FIG. 16A is prepared. Then, after the main surface 129a of the non-magnetic substrate 129 is mirror-finished by polishing or the like, a glass film 130 is formed by sputtering as shown in FIG. 16 (b). At that time, a base film 131 made of Cr is formed for the purpose of improving the adhesion of the glass film 130 or preventing reaction.

Next, as shown in FIG. 17A, a magnetic ferrite substrate 132 to be joined and integrated with the non-magnetic substrate 129 is prepared. After the main surface 132a of the magnetic ferrite substrate 132 is mirror-finished, a base film 133 made of Cr is formed on the main surface 132a as shown in FIG. 17B, and the glass film 134 is formed thereon. Are formed by sputtering.

Next, the non-magnetic substrate 129 and the magnetic ferrite substrate 132 are butted against each other as shown in FIG. 18 (a) with the glass films 130 and 134 facing each other, and the substrates are joined by heating while pressure bonding. To do. At this time, the glass films 130, 1 formed on the butting surfaces of each other
As shown in FIG. 18B, 34 melts and fuses with each other. As a result, the non-magnetic substrate 129 and the magnetic ferrite substrate 132 are firmly bonded and integrated to form the bonded substrate 135 that serves as the first substrate.

Then, a metal magnetic film is sandwiched between the bonding substrate 135 and the non-magnetic substrate in the film thickness direction to form a pair of magnetic core half blocks, and gap fusion is performed to form a magnetic head as shown in FIG. Complete.

[0052]

As is apparent from the above description, according to the present invention, a pair of magnetic core halves each having a metallic magnetic film sandwiched in the film thickness direction by a substrate at least a part of which is made of a ferrite material is provided. In the method of manufacturing a magnetic head in which the end faces of the metal magnetic films present on the abutting faces are butted against each other and the gap is fused, the pressure P at the time of the gap fusion is set to 2 MPa ≦ P ≦ 10 MPa. It does not occur and the gap length is constant. Therefore, it is possible to form a magnetic head having good electromagnetic conversion characteristics without deteriorating the magnetic characteristics of the metal magnetic thin film and the substrate.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of a magnetic head formed by a method of manufacturing a magnetic head to which the present invention is applied.

2 is an enlarged cross-sectional view of a main part showing a sliding surface portion of a magnetic recording medium in the magnetic head of FIG.

3A and 3B show an example of a method of manufacturing a magnetic head to which the present invention is applied in the order of steps, FIG. 3A is a perspective view showing a step of forming a metal magnetic film on a ferrite substrate, and FIG. It is a principal part enlarged front view which shows a film part.

FIG. 4 is an enlarged front view of an essential part showing a step of forming a glass film on a metal magnetic film formed on a ferrite substrate.

FIG. 5 is an enlarged front view of an essential part showing a step of forming a glass film on a ferrite substrate.

FIG. 6A is a perspective view showing a step of joining a ferrite substrate on which a metal magnetic film is formed and the other ferrite substrate, and FIG. 6B is an enlarged front view of an essential part showing the joined portion in an enlarged manner. Is.

FIG. 7 is a perspective view showing a step of cutting a laminated substrate which has been joined and integrated.

FIG. 8 is a perspective view showing a process of forming a winding groove and a glass groove in one magnetic core half block.

FIG. 9 is a perspective view showing a step of forming a winding groove and a glass groove in the other magnetic core half block.

FIG. 10 is a perspective view showing a step of forming a track width regulating groove in one magnetic core half block.

FIG. 11 is a perspective view showing a step of forming a track width regulating groove on the other magnetic core half block.

FIG. 12 is a perspective view showing a gap fusion process of magnetic core half blocks.

FIG. 13 is a diagram showing electromagnetic conversion characteristics of a magnetic head manufactured by a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 14 is a perspective view showing another example of a magnetic head formed by a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 15 is an enlarged cross-sectional view of a main part of the magnetic head of FIG. 14, showing an enlarged joint portion of the first substrate.

16A and 16B sequentially show another example of a method of manufacturing a magnetic head to which the present invention is applied, in which FIG. 16A is a perspective view of a non-magnetic substrate for producing a bonded substrate, and FIG. It is a principal part enlarged front view which shows the process of forming a glass film into a board | substrate.

FIG. 17 (a) is a perspective view of a magnetic ferrite substrate for producing a bonded substrate, and FIG. 17 (b) is an enlarged front view of an essential part showing a step of forming a glass film on this magnetic ferrite substrate.

FIG. 18A is a perspective view showing a process of joining a non-magnetic substrate and a magnetic ferrite substrate to form a joined substrate;
FIG. 7B is an enlarged plan view of an essential part showing an enlarged joint portion of the joint substrate.

[Explanation of symbols]

1, 2 ... Metal magnetic film 1a, 1b, 1c, 2a, 2b, 2c ... Magnetic metal thin film 3, 4 ... First substrate 5, 6 ... Second substrate 7, 8 ... ..Magnetic core halves 9 ... Fused glass

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Yoshito Ikeda 6-735 Kitashinagawa, Shinagawa-ku, Tokyo Sony Corporation

Claims (1)

[Claims] 1. A pair of magnetic core halves each having a metallic magnetic film sandwiched in the film thickness direction between a pair of substrates, at least a part of which is made of a ferrite material. In a method of manufacturing a magnetic head in which gap fusion is performed, the pressure P during gap fusion is set to 2 MPa ≦ P ≦ 10M.
A method of manufacturing a magnetic head, characterized in that gap fusion is performed as Pa.