JPH06347327A - Two-beam interferometer - Google Patents
Two-beam interferometerInfo
- Publication number
- JPH06347327A JPH06347327A JP16318793A JP16318793A JPH06347327A JP H06347327 A JPH06347327 A JP H06347327A JP 16318793 A JP16318793 A JP 16318793A JP 16318793 A JP16318793 A JP 16318793A JP H06347327 A JPH06347327 A JP H06347327A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- light
- aspherical
- reflected
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
(57)【要約】
【構成】 点光源１２からの光Ｌ1を集光距離ｆ1の位置
に集光する非球面集光鏡１４、及び前記非球面鏡１４に
よる集光位置を焦点位置とし焦点距離ｆ3（<<ｆ2）の非
球面コリメータ鏡１６により細平行光束Ｌ3を形成す
る。該細平行光束Ｌ3をビームスプリッタ１８により分
割し、一分割光Ｌ5をキューブ型走査鏡２２の一反射面
２２ａで受光し、対向反射面２２ｂで入光方向とは逆方
向に反射する。その反射光束を、第二固定鏡２４により
再度前記キューブ型走査鏡２２の対向反射面２２ｂに返
光し、前第二記固定鏡２４よりの反射光を前記キューブ
型走査鏡２２を介して前記ビームスプリッタ１８に返光
し、前記第一固定鏡２０よりの反射光Ｌ4とで細干渉光
Ｌ6を形成することを特徴とする二光束干渉計。
【効果】 細光束干渉光を得ることが可能となる。
(57) [Summary] [Structure] An aspherical condensing mirror 14 for condensing the light L 1 from the point light source 12 at a position of a condensing distance f 1 , and a converging position by the aspherical mirror 14 as a focal position. A fine collimated light beam L 3 is formed by the aspherical collimator mirror 16 at the distance f 3 (<< f 2 ). The thin parallel light flux L 3 is split by the beam splitter 18, and one split light L 5 is received by one reflection surface 22a of the cube-type scanning mirror 22 and reflected by the opposite reflection surface 22b in the direction opposite to the light incident direction. The reflected light flux is returned to the opposing reflecting surface 22b of the cube type scanning mirror 22 by the second fixed mirror 24 again, and the reflected light from the second fixed mirror 24 is passed through the cube type scanning mirror 22 to A two-beam interferometer, which returns light to a beam splitter 18 and forms a fine interference light L 6 with the reflected light L 4 from the first fixed mirror 20. [Effect] It becomes possible to obtain fine-beam interference light.
Description
【０００１】[0001]
【産業上の利用分野】本発明は二光束干渉計、特に細光
束の干渉光を形成する二光束干渉計に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-beam interferometer, and more particularly to a two-beam interferometer for forming a narrow beam of interference light.
【０００２】[0002]
【従来の技術】赤外分光分析装置等には短時間で多くの
データを得るため、フーリエ変換変換型のものが汎用さ
れる。このようなフーリエ変換赤外分光分析装置にあっ
ては干渉光を必要とするが、この干渉光を得るために通
常は二光束干渉計が用いられる。すなわち、前記二光束
干渉計は光源から出光される光束を平行光束とし、該平
行光束をビームスプリッタにより二分割して一方の分割
光を固定鏡に、他方の分割光を走査鏡によりそれぞれ再
度ビームスプリッタへ返光し、さらに前記ビームスプリ
ッタにより合成・干渉させて所望の干渉光を得るもので
ある。2. Description of the Related Art In order to obtain a large amount of data in a short time, an infrared spectroscopic analysis device or the like is generally of the Fourier transform type. Such a Fourier transform infrared spectroscopic analyzer requires interference light, and a two-beam interferometer is usually used to obtain this interference light. That is, the two-beam interferometer converts a light beam emitted from a light source into a parallel light beam, divides the parallel light beam into two by a beam splitter, and one of the divided light beams is re-beamed by a fixed mirror and the other divided light beam is re-beamed by a scanning mirror. The light is returned to a splitter, and the beam splitter splits and combines the beams to obtain a desired interference beam.
【０００３】[0003]
【発明が解決しようとする課題】ところで、例えば小型
のセルに対し、前記干渉光を照射し、その透過光ないし
反射光を得ようとすると、前記干渉光を光束断面径の小
さな平行光束（以下、簡単のために細光束）とすること
が必要である。しかしながら、一般的な二光束干渉計を
用いて細光束を得ることは困難であった。無論、二光束
干渉計から得られる干渉光束をスリット等により細い光
束に絞ることは可能であるが、これでは光量の減少を伴
い、光源放射の利用効率の著しい悪化を招く。本発明は
前記従来技術の課題に鑑みなされたものであり、その目
的は簡易な構成でしかも効率的に細い干渉光束を得るこ
とのできる二光束干渉計を提供することにある。By the way, for example, when a small cell is irradiated with the interference light and an attempt is made to obtain transmitted light or reflected light thereof, the interference light is converted into a parallel light beam (hereinafter referred to as a parallel light beam) having a small light beam cross-sectional diameter. , For the sake of simplicity, it is necessary to use a fine light flux). However, it is difficult to obtain a fine light flux using a general two-beam interferometer. Of course, it is possible to narrow the interference light beam obtained from the two-beam interferometer into a thin light beam by a slit or the like, but this causes a decrease in the amount of light and causes a remarkable deterioration in the utilization efficiency of the light source radiation. The present invention has been made in view of the above problems of the prior art, and an object thereof is to provide a two-beam interferometer that has a simple configuration and is capable of efficiently obtaining a thin interference beam.
【０００４】[0004]
【課題を解決するための手段】前記目的を達成するため
に本発明にかかる二光束干渉計は、非球面集光鏡と、非
球面コリメータ鏡と、ビームスプリッタと、第一固定鏡
と、キューブ型走査鏡と、第二固定鏡とを備える。そし
て、前記非球面集光鏡は、実質的な点光源からの光を集
光距離ｆ2の位置に集光する。非球面コリメータ鏡は、
前記非球面鏡による集光位置を焦点位置とし、焦点距離
ｆ3（<<ｆ2）を有する。ビームスプリッタは、前記非球
面コリメータ鏡により形成された細光束を二分割する。
第一固定鏡は、前記ビームスプリッタによりの第一分割
光を再度前記ビームスプリッタに返光する。キューブ型
走査鏡は、前記ビームスプリッタよりの第二分割光を一
反射面で受光し、対向反射面で入光方向とは逆方向に反
射する。第二固定鏡は、前記キューブ型走査鏡からの反
射光束を、再度前記キューブ型走査鏡の対向反射面に返
光する。To achieve the above object, a two-beam interferometer according to the present invention comprises an aspherical condenser mirror, an aspherical collimator mirror, a beam splitter, a first fixed mirror, and a cube. A mold scanning mirror and a second fixed mirror are provided. Then, the aspherical condensing mirror condenses the light from the substantial point light source at the position of the condensing distance f 2 . The aspherical collimator mirror is
The focal point is the focal point of the aspherical mirror, and the focal length is f 3 (<< f 2 ). The beam splitter splits the fine light flux formed by the aspherical collimator mirror into two.
The first fixed mirror returns the first split light from the beam splitter to the beam splitter again. The cube type scanning mirror receives the second split light from the beam splitter on one reflecting surface and reflects it on the opposite reflecting surface in the direction opposite to the light incident direction. The second fixed mirror returns the reflected light flux from the cube type scanning mirror to the facing reflection surface of the cube type scanning mirror again.
【０００５】そして、前第二記固定鏡よりの反射光を前
記キューブ型走査鏡を介して前記ビームスプリッタに返
光し、前記第一固定鏡よりの反射光とで干渉光を形成す
ることを特徴とする。また、前記凹面鏡は楕円鏡であ
り、該楕円鏡の一焦点位置に光源を配置し、他方の焦点
位置と前記非球面鏡の焦点位置を一致させて配置するこ
とが好適である。また、前記干渉光は量子型半導体検出
器により検出され、該検出器はＭＣＴ検知素子と、該検
知素子を冷却状態に保つ冷却用外筒と、該外筒に直接設
置された凸レンズとを備え、該凸レンズにより干渉光を
検知素子上に集光することが好適である。Then, the reflected light from the second fixed mirror is returned to the beam splitter through the cube type scanning mirror, and interference light is formed with the reflected light from the first fixed mirror. Characterize. Further, it is preferable that the concave mirror is an elliptical mirror, and a light source is arranged at one focal position of the elliptic mirror, and the other focal position and the focal position of the aspherical mirror are aligned. Further, the interference light is detected by a quantum semiconductor detector, and the detector includes an MCT detection element, a cooling outer cylinder for keeping the detection element in a cooling state, and a convex lens directly installed on the outer cylinder. It is preferable that the convex lens collects the interference light on the detection element.
【０００６】[0006]
【作用】本発明にかかる二光束干渉計は、前述したよう
に点光源からの光をまず非球面集光鏡で集光し、非球面
コリメータ鏡に照射する。この際、前記非球面集光鏡の
集光位置と非球面コリメータ鏡の焦点位置は一致してい
るため、非球面コリメータ鏡から出光される光は平行光
束となる。しかも非球面集光鏡面からの集光距離ｆ1に
対し、非球面コリメータ鏡の焦点位置ｆ3は小さくなっ
ているため、前記非球面コリメータ鏡より出光される平
行光束は非常に細い光束となる。細平行光束は、ビーム
スプリッタにより二分割され、その一方は一般の二光束
干渉計と同様に第一固定鏡に反射されるが、他方はコー
ナ・キューブ型走査鏡の一面で反射される。そして、さ
らにコーナ・キューブ型走査鏡の対向面で反射されて、
前記入光光束とはやや位置をずらせて平行に出射され
る。該出射光は第二固定鏡により反射され、逆の光路を
たどり、コーナ・キューブ型走査鏡を介して前記ビーム
スプリッタに返光される。従って、コーナ・キューブ型
走査鏡の二反射面を各個別に用いているので、コーナ・
キューブ型走査鏡を極めて小型且つ高精度に形成しなく
ても、細平行光束に十分に対応することができ、しかも
走査鏡の走査に伴い、その走査距離の二倍の光路差を得
ることができる。なお、前記非球面集光鏡を楕円鏡とす
ると、その一焦点位置に点光源を、他方の焦点一に非球
面コリメータ鏡の焦点位置を配置させることで、より偏
差の少ない平行光束を得ることができる。In the two-beam interferometer according to the present invention, as described above, the light from the point light source is first condensed by the aspherical condensing mirror and is then irradiated on the aspherical collimator mirror. At this time, since the converging position of the aspherical condensing mirror and the focal position of the aspherical collimating mirror coincide with each other, the light emitted from the aspherical collimating mirror becomes a parallel light flux. Moreover, since the focal point position f 3 of the aspherical collimator mirror is smaller than the focusing distance f 1 from the aspherical condenser mirror surface, the parallel luminous flux emitted from the aspherical collimator mirror becomes a very thin luminous flux. . The fine parallel light beam is split into two by a beam splitter, one of which is reflected by a first fixed mirror as in a general two-beam interferometer, while the other is reflected by one surface of a corner cube scanning mirror. Then, it is further reflected by the facing surface of the corner-cube scanning mirror,
The incident light beam is emitted in parallel with a slight shift in position. The emitted light is reflected by the second fixed mirror, follows the reverse optical path, and is returned to the beam splitter via the corner cube type scanning mirror. Therefore, since the two reflecting surfaces of the corner-cube scanning mirror are used individually,
Even if the cube-type scanning mirror is not formed to be extremely small and highly accurate, it is possible to sufficiently deal with the fine parallel light flux, and further, with the scanning of the scanning mirror, it is possible to obtain an optical path difference that is twice the scanning distance. it can. When the aspherical condensing mirror is an elliptical mirror, a point light source is disposed at one focal point and a focal point of the aspherical collimator mirror is disposed at the other focal point to obtain a parallel light flux with less deviation. You can
【０００７】[0007]
【実施例】以下、図面に基づき本発明の好適な実施例を
説明する。図１には本発明の一実施例にかかる二光束干
渉計の概略構成が示されている。同図に示す二光束干渉
計１０は、実質的な点光源１２と、該光源１２より出射
された光Ｌ1を集光する非球面集光鏡としての楕円集光
鏡１４と、前記楕円集光鏡１４と対面して配置され該楕
円集光鏡１４の反射光Ｌ2を受光する非鏡面コリメータ
鏡としての放物面鏡１６と、前記放物面鏡１６よりの光
束Ｌ3を二分割するビームスプリッタ１８と、該ビーム
スプリッタ１８により反射された第一光束Ｌ4を反射し
再度ビームスプリッタ１８に返光する第一固定鏡２０
と、前記ビームスプリッタ１８を透過した第二光束Ｌ5
を反射するキューブ型走査鏡２２と、該キューブ型走査
鏡２２と対向配置された第二固定鏡２４とを含む。そし
て、前記点光源１２は、前記楕円集光鏡１４の一方の焦
点位置に配置されており、このため点光源１２から出射
された光Ｌ1は楕円集光鏡１４に反射されて該楕円集光
鏡１４の他方の焦点位置に集光される。なお、この焦点
位置に迷光を除去するアパーチャ２６が配置されてい
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a schematic configuration of a two-beam interferometer according to an embodiment of the present invention. The two-beam interferometer 10 shown in FIG. 1 includes a substantially point light source 12, an elliptical focusing mirror 14 as an aspherical focusing mirror for focusing the light L 1 emitted from the light source 12, and the elliptical focusing mirror. A parabolic mirror 16 as a non-specular collimator mirror which is arranged to face the optical mirror 14 and receives the reflected light L 2 from the elliptical focusing mirror 14, and a light flux L 3 from the parabolic mirror 16 is divided into two. Beam splitter 18 and a first fixed mirror 20 that reflects the first light beam L 4 reflected by the beam splitter 18 and returns it to the beam splitter 18 again.
And the second light flux L 5 transmitted through the beam splitter 18.
A cube-type scanning mirror 22 that reflects light and a second fixed mirror 24 that is arranged to face the cube-type scanning mirror 22. The point light source 12 is arranged at one focus position of the elliptical focusing mirror 14, and therefore the light L 1 emitted from the point light source 12 is reflected by the elliptical focusing mirror 14 to be reflected by the elliptical focusing mirror 14. The light is focused on the other focal position of the optical mirror 14. An aperture 26 for removing stray light is arranged at this focus position.
【０００８】一方、前記放物面鏡１６の焦点位置も前記
楕円集光鏡１４の第二焦点位置に一致しているため、放
物面鏡１６からの反射光Ｌ3は平行光束となる。しか
も、前記楕円集光鏡１４の第二焦点の焦点距離ｆ1を放
物面鏡１６の焦点距離ｆ2よりも小さくすると、光束の
幅Ｗはほぼ前記集光鏡の集光面のｆ3／ｆ1となり、放物
面鏡１６により得られる光束は強くしかも細いものとな
る。前記細平行光束Ｌ3はビームスプリッタ１８に導光
され、該ビームスプリッタ１８により反射された第一分
割光Ｌ4は第一固定鏡２０により反射され、再度ビーム
スプリッタ１８に返光される。これに対し、ビームスプ
リッタ１８を透過した第二分割光Ｌ5はキューブ型走査
鏡２２の図中下側反射面２２ａに導光され、該下側反射
面２２ａで反射された第二光束は対向反射面２２ｂで再
度反射され、第二固定鏡２４に導光される。そして、第
二固定鏡２４で反射された第二光束Ｌ5は再度走査鏡２
２の上側反射面２２ｂ及び下側面２２ａに反射されてビ
ームスプリッタ１８に返光される。ビームスプリッタ１
８では前記第一固定鏡２０よりの反射光Ｌ4と、走査鏡
２２からの反射光Ｌ5を合成・干渉させ、干渉光Ｌ6を形
成する。On the other hand, since the focus position of the parabolic mirror 16 also coincides with the second focus position of the elliptical focusing mirror 14, the reflected light L 3 from the parabolic mirror 16 becomes a parallel light beam. Moreover, when the focal length f 1 of the second focal point of the elliptical focusing mirror 14 is made smaller than the focal length f 2 of the parabolic mirror 16, the width W of the light beam is approximately f 3 on the focusing surface of the focusing mirror. / F 1 , and the luminous flux obtained by the parabolic mirror 16 is strong and thin. The fine parallel light flux L 3 is guided to the beam splitter 18, and the first split light L 4 reflected by the beam splitter 18 is reflected by the first fixed mirror 20 and returned to the beam splitter 18 again. On the other hand, the second split light L 5 transmitted through the beam splitter 18 is guided to the lower reflection surface 22a of the cube scanning mirror 22 in the figure, and the second light flux reflected by the lower reflection surface 22a is opposed. The light is reflected again by the reflecting surface 22b and guided to the second fixed mirror 24. Then, the second light flux L 5 reflected by the second fixed mirror 24 is again scanned by the scanning mirror 2.
The light is reflected by the upper reflecting surface 22b and the lower side surface 22a of the second beam 2 and returned to the beam splitter 18. Beam splitter 1
At 8, the reflected light L 4 from the first fixed mirror 20 and the reflected light L 5 from the scanning mirror 22 are combined and interfered to form an interference light L 6 .
【０００９】本実施例において、干渉光Ｌ6はフーリエ
変換赤外分光分析器に用いられており、ガスセル２８を
通過し、ＭＣＴ検知器３０に入光される。ここで、前記
干渉光Ｌ6は細光束となっているため、ガスセル２８自
体の径を前記干渉光Ｌ6に合わせて小さくすることがで
き、微量ガスサンプルの連続測定を可能とし、しかも応
答性の向上を図ることができる。前記ＭＣＴ検出器３０
は、液体窒素が充填された冷却器３２と、該冷却器３２
に密着して設けられたＭＣＴ検知素子３４と、冷却状態
を保つため内部を真空とされた冷却用外筒３６と、該外
筒３６に直接設置された凸レンズ３８とを備える。そし
て、前記ガスセル２８を通過した干渉光束Ｌ6は外筒３
６上の凸レンズ３８を介してＭＣＴ検知素子３４上に集
光される。なお、本実施例において、前記凸レンズ３８
は赤外域干渉光Ｌ6を良好に透過するＫＢｒないしＺｎ
Ｓｅにより形成されている。このように本実施例におい
てはガスセル２８から出光される赤外域干渉光Ｌ6自体
が細光束であるので、ＭＣＴ検出器３０の外筒３６に直
接凸レンズ３８を設けたのみで十分に集光可能である。
このため、集光鏡等の光学系を別途設ける場合と比較
し、装置自体を小型化することができる。In this embodiment, the interference light L 6 is used in the Fourier transform infrared spectroscopic analyzer, passes through the gas cell 28, and enters the MCT detector 30. Here, since the interference light L 6 is a fine light flux, the diameter of the gas cell 28 itself can be made smaller in accordance with the interference light L 6 , enabling continuous measurement of a small amount of gas sample, and the responsiveness. Can be improved. The MCT detector 30
Is a cooler 32 filled with liquid nitrogen, and the cooler 32
The MCT detection element 34 provided in close contact with the outer cylinder 36, a cooling outer cylinder 36 having a vacuum inside to maintain a cooling state, and a convex lens 38 directly installed on the outer cylinder 36. Then, the interference light flux L 6 that has passed through the gas cell 28 is
The light is condensed on the MCT detection element 34 via the convex lens 38 on the upper surface 6. In this embodiment, the convex lens 38
Is KBr or Zn that transmits infrared interference light L 6 well.
It is made of Se. As described above, in this embodiment, since the infrared interference light L 6 itself emitted from the gas cell 28 is a fine light beam, it can be sufficiently condensed only by providing the convex lens 38 directly on the outer cylinder 36 of the MCT detector 30. Is.
Therefore, the device itself can be downsized as compared with the case where an optical system such as a condenser mirror is separately provided.
【００１０】[0010]
【発明の効果】以上説明したように本発明にかかる二光
束干渉計によれば、凹面集光鏡により集光された光を放
物面鏡により平行光束としたので、細光束干渉光を得る
ことが可能となる。As described above, according to the two-beam interferometer of the present invention, since the light condensed by the concave condensing mirror is made into the parallel light beam by the parabolic mirror, the fine-beam interference light is obtained. It becomes possible.
【図１】本発明の一実施例にかかる二光束干渉計の概略
構成の説明図である。FIG. 1 is an explanatory diagram of a schematic configuration of a two-beam interferometer according to an embodiment of the present invention.
１０ 二光束干渉計 １４ 楕円集光鏡（凹面集光鏡） １６ 放物面鏡 １８ ビームスプリッタ ２０ 第一固定鏡 ２２ 走査鏡 ２４ 第二固定鏡 10 Two-beam Interferometer 14 Elliptical Focusing Mirror (Concave Focusing Mirror) 16 Parabolic Mirror 18 Beam Splitter 20 First Fixed Mirror 22 Scanning Mirror 24 Second Fixed Mirror
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【手続補正書】[Procedure amendment]
【提出日】平成５年６月１４日[Submission date] June 14, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】全図[Correction target item name] All drawings
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図１】 [Figure 1]
フロントページの続き (72)発明者 名越 利之 東京都八王子市石川町2967番地の５ 日本 分光株式会社内 (72)発明者 若林 克明 東京都八王子市石川町2967番地の５ 日本 分光株式会社内Front Page Continuation (72) Inventor Toshiyuki Nagoshi 5 at 2967 Ishikawa-cho, Hachioji City, Tokyo, Japan JASCO Corporation (72) Inventor Katsuaki Wakabayashi 5 at 2967 Ishikawa-cho, Hachioji, Tokyo Tokyo, JASCO Corporation
Claims (3)
の放射光を所定位置に集光する長及び短焦点距離ｆ1の
非球面集光鏡と、 前記非球面鏡による集光位置を焦点位置とし、焦点距離
ｆ3（<<ｆ2）の非球面コリメータ鏡と、 前記非球面コリメータ鏡により形成された光束断面径の
小さな平行光束を二分割するビームスプリッタと、 前記ビームスプリッタによりの第一分割光を再度前記ビ
ームスプリッタに返光する第一固定鏡と、 前記ビームスプリッタよりの第二分割光を一反射面で受
光し、対向反射面で入光方向とは逆方向に反射するコー
ナ・キューブ型走査鏡と、 前記コーナ・キューブ型走査鏡からの反射光束を、再度
前記コーナ・キューブ型走査鏡の対向反射面に返光する
第二固定鏡と、 を備え、前記第二固定鏡よりの反射光を前記コーナ・キ
ューブ型走査鏡を介して前記ビームスプリッタに返光
し、前記第一固定鏡よりの反射光とで干渉光を形成する
ことを特徴とする二光束干渉計。 1. An aspherical condensing mirror having a long and short focal length f 1 for condensing emitted light from a light source having a substantially finite emission surface at a predetermined position, and a converging position by the aspherical mirror. An aspherical collimator mirror having a focal length of f 3 (<< f 2 ), a beam splitter for splitting a parallel light beam having a small light beam cross-sectional diameter formed by the aspherical collimator mirror into two, and a beam splitter A first fixed mirror that returns the first split light to the beam splitter again, and a second split light from the beam splitter is received by one reflecting surface, and is reflected by the opposite reflecting surface in a direction opposite to the light incident direction. A corner-cube scanning mirror; and a second fixed mirror that returns the reflected light flux from the corner-cube scanning mirror to the opposite reflection surface of the corner-cube scanning mirror again, the second fixed mirror In front of the light reflected from the mirror Through a corner cube type scanning mirror and Kaehikari to the beam splitter, two-beam interferometer and forming an interference light between reflected light from the first fixed mirror.
集光鏡は楕円鏡であり、また非球面コリメータ鏡として
放物面鏡を用い、該楕円鏡の長焦点位置に光源を配置
し、他方の短焦点位置と前記非球面鏡の焦点位置を一致
させて配置したことを特徴とする二光束干渉計。2. The interferometer according to claim 1, wherein the aspherical condenser mirror is an elliptical mirror, a parabolic mirror is used as the aspherical collimator mirror, and the light source is arranged at a long focal position of the elliptic mirror. A two-beam interferometer, wherein the other short focus position and the focus position of the aspherical mirror are arranged so as to coincide with each other.
て、前記干渉光は量子型半導体検出器により検出され、
該検出器は検知素子と、該検知素子を冷却状態に保つ冷
却用外筒と、該外筒に直接設置された凸レンズとを備
え、該凸レンズにより干渉光を検知素子上に集光するこ
とを特徴とする二光束干渉計。3. The interferometer according to claim 1 or 2, wherein the interference light is detected by a quantum semiconductor detector,
The detector includes a sensing element, a cooling outer cylinder that keeps the sensing element in a cooling state, and a convex lens directly installed on the outer cylinder. The convex lens collects interference light on the sensing element. A characteristic two-beam interferometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16318793A JPH06347327A (en) | 1993-06-07 | 1993-06-07 | Two-beam interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16318793A JPH06347327A (en) | 1993-06-07 | 1993-06-07 | Two-beam interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06347327A true JPH06347327A (en) | 1994-12-22 |
Family
ID=15768920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16318793A Pending JPH06347327A (en) | 1993-06-07 | 1993-06-07 | Two-beam interferometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06347327A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003501653A (en) * | 1999-06-08 | 2003-01-14 | ツェー・エス・クリーン・ジステームス・アクチエンゲゼルシャフト | Analysis equipment |
| JP2012117936A (en) * | 2010-12-01 | 2012-06-21 | Ritsumeikan | Infrared microscope and an infrared microscope system |
-
1993
- 1993-06-07 JP JP16318793A patent/JPH06347327A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003501653A (en) * | 1999-06-08 | 2003-01-14 | ツェー・エス・クリーン・ジステームス・アクチエンゲゼルシャフト | Analysis equipment |
| JP4790949B2 (en) * | 1999-06-08 | 2011-10-12 | ツェー・エス・クリーン・ジステームス・アクチエンゲゼルシャフト | Analysis equipment |
| JP2012117936A (en) * | 2010-12-01 | 2012-06-21 | Ritsumeikan | Infrared microscope and an infrared microscope system |
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