JPH0635471Y2 - Wafer holding jig - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a semiconductor wafer manufacturing process, in particular, a mirror surface wafer manufacturing process, in which scratches, stains,
Wafer holding jig used for visual inspection of dirt etc. [Prior Art] Conventionally, in visual inspection of a mirror surface wafer, the light from a concentrating lamp is put on the surface of the mirror surface wafer taken out from the wafer case. A slight difference in the reflection state is visually checked to detect defects such as scratches, stains, and stains. In this detection operation, depending on the irradiation angle of light to the wafer, irregular reflection may not occur even if there is a foreign substance or the like. Therefore, the wafer is held again, the angle at which the light hits is changed, and the confirmation is performed again.

[Problems to be solved by the invention] By the way, in order to change the wafer, the wafer taken out from the case must be put into the case once, turned appropriately, and taken out again. The rotation in the case may cause scratches or stains on the edge portion of the wafer and also deteriorate workability. Further, since the number of contacts with the vacuum pinset that holds the wafer increases, the back surface of the wafer may be damaged.

[Means for Solving the Problems] The wafer holding jig according to the present invention has been made to solve the above-mentioned problems, and the top of the rotary shaft rotatably supported vertically by the support base. In addition, at least three arms are provided radially obliquely upward with respect to the rotation axis, and a disk is concentrically fixed to the rotation axis in the middle of the rotation axis. Further, it is desirable that the arm has a concavely curved structure.

[Operation] The wafer holding jig according to the present invention is provided with several arms extending obliquely upward in the upper part in a radial shape, and when holding the taken-out wafer, it is placed on it once and provided in the middle of the rotating shaft. Rotate the disk appropriately and rotate the rotating shaft until a part different from the one previously inspected comes. When the arm is bent in a concave shape, the contact portion with the wafer is reduced, but the wafer is hard to drop.

[Embodiment 1] FIG. 1 is a perspective view of an embodiment of a wafer holding jig of the present invention. The state where the wafer is loaded when the wafer is held is shown.

The four arms 4 are bent in a concave shape. Therefore, the contact with the wafer 7 becomes a point contact, scratches and stains can be prevented, and dropping due to rotation can be prevented. Also, from the small diameter wafer to the large diameter wafer, the same jig can be used. Further, the arm 4 has a surface coated to prevent contamination of the wafer. The disk 5 fixed in the middle of the rotary shaft 1 has a diameter larger than that of the support base 1 and is provided with a slip stopper on its side surface, so that the disk 5 can be easily rotated by a finger. Further, the rotation shaft 2 is rotatably supported on the support base 1 via a bearing (not shown). The support base 1 is made heavy in order to increase the stability of the entire jig. The material of the entire jig is iron and the disk 5 is made of antistatic vinyl chloride, but has a black matte finish in order to prevent reflection of light.

Using the wafer holding jig of this embodiment shown in FIG. 1, an external appearance inspection of 10,000 mirror-finished wafers was performed. In the conventional case, it took about 86 hours. It was shortened to 77 hours and the work efficiency was improved by 10%. Further, in the conventional work, scratches and stain defects were often given to the wafer due to rotation in the case when holding the wafer, but this was halved by using this jig.

By the way, the same effect can be obtained even when the arm is not bent, but if a strong rotation is given by mistake, the wafer may drop.

[Advantages of the Invention] According to the wafer holding jig of the present invention, at least 3 at a top of the rotation shaft rotatably supported vertically by the support base and radially obliquely upward about the rotation shaft.
Since the arm of the book is provided, the work of loading and unloading the wafer can be performed quickly, and the wafer can be taken out at any position after rotation. Even if there is a difference in wafer diameter, one jig can be used if there is a margin in the arm length. Further, since the disk is fixed concentrically with the rotary shaft at a fixed height of the rotary shaft located between the arm and the support base, the shaft can be smoothly rotated.

In addition, the one in which the arm is bent in a concave shape is effective in preventing the wafer from falling due to rotation.

By using the wafer holding jig of the present invention, the appearance inspection work of the mirror surface wafer can be performed more efficiently than before, and the damage to the wafer during the inspection work is drastically reduced, which contributes to the improvement of the yield. To do.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a wafer holding jig of the present invention. FIG. 2 is a front view showing an embodiment of the wafer holding jig of the present invention. 1 ... Support base 2 ... Rotating shaft 3 ... Top part 4 ... Arm 5 ... Disk 6 ... Wafer holding jig 7 ... Wafer

Claims (2)

[Scope of utility model registration request] 1. A rotary shaft vertically rotatably supported by a support base. At the top of the rotary shaft, at least three arms are provided radially obliquely upward with respect to the rotary shaft. The arms are located between the arms and the support base. A wafer holding jig characterized in that a disk is fixed concentrically with the rotating shaft at a fixed height of the rotating shaft. 2. The wafer holding jig according to claim 1, wherein the arm has a concavely curved structure.