JPH0638401Y2 - Laser trimming device - Google Patents

Description

TECHNICAL FIELD The present invention relates to a laser trimming device, and more particularly to a laser trimming device that irradiates a laser beam on a substrate to be processed to perform the laser trimming process.

2. Description of the Related Art Conventionally, data such as a processing position required for trimming (hereinafter referred to as trimming data) is created by calculating from the position of a resistor on a drawing and the position of a substrate on a mounting table.
Alternatively, trimming data can be created by either measuring the actual position of the resistor on the board and calculating it from the measured value and the position of the board on the stage, and then digitizing it using the keyboard. I was entering this data into a computer. Based on this input data, the laser trimming device was actually used to control the beam positioner in the state where the laser beam was not irradiated and the processing start point was checked.

In such a conventional trimming data creating method, firstly, the position of the resistor on the substrate is obtained, secondly, the position of the substrate on the stage is obtained, and thirdly, the data is input using a keyboard. However, fourthly, there is a problem that a large number of man-hours are required to create the trimming data because the four-step operation of actually confirming using the laser trimming device is required.

Also, when trimming data is created by finding the position of the resistor from the drawing, if printing misalignment of the board occurs,
There is a problem that an error occurs in the trimming data.

DISCLOSURE OF THE INVENTION The present invention has been made to eliminate the above-mentioned problems of the conventional one, and an object of the present invention is to provide a laser trimming device capable of producing accurate trimming data with a small number of steps.

The laser trimming device according to the present invention is a laser trimming device having a varying means for varying the irradiation position of laser light on a substrate to be processed, the laser trimming device being provided coaxially with the optical axis of the laser light and Monitor means capable of monitoring the irradiation position of the laser light, designating means capable of designating the irradiation position of the laser light on the monitor screen at the time of monitoring by the monitoring means before laser trimming processing, and the designating means designated by the designating means. Storage means for storing laser light irradiation start position and end position information and trajectory information of the irradiation position,
It is characterized by including means for performing the laser trimming process based on the irradiation start position and end position information stored in the storage means and the locus information of the irradiation position.

Embodiment Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention. In the figure, a laser beam emitted from a laser oscillator 1 includes a fixed mirror 2, an X-axis scanning mirror 3, and a Y-axis scanning mirror 5.
And is irradiated onto the workpiece 8 via the fθ lens 7. The irradiation position of the laser light on the workpiece 8 is photographed by the video camera 9 by the monitor light provided coaxially with the optical axis of the laser light, and is projected on the monitor television 11 via the crosshair adder 10.

Further, the X-axis scanning mirror 3 and the Y-axis scanning mirror 5 are respectively X-axis.
The laser irradiation position is detected and driven by the axial galvanometer 4 and the Y-axis galvanometer 6, and the irradiation position of the laser light is moved in the X-axis direction and the Y-axis direction. The movement amount is controlled by the controller according to the instruction from the computer 14.
A position 12 is controlled by using the X-axis galvanometer 4 and the Y-axis galvanometer 6, and corresponds to the amount of change in the angle between the X-axis scanning mirror 3 and the Y-axis scanning mirror 5.

Input of data to the computer 14 is performed by the console 13, and the display of the data is performed on the display 15.

FIG. 2 is a configuration diagram showing a configuration of a switch for controlling a laser irradiation position on the console 13. In the figure, a position determining switch 16, X-direction directional switches 17, 19 and Y-axis directional switches 18, 20 are additionally provided on the console 13. Directional switch 17,19
By pressing, the X-axis scanning mirror 3 is driven,
The Y-axis scanning mirror 5 is driven by depressing the direction designating switches 18 and 20, whereby the laser irradiation position is moved. The movement of the laser irradiation position is performed by the video camera 9
It is displayed on the screen of the monitor TV 11 via and can be observed directly.

Further, when pressing the direction designating switches 17 to 20, if the same direction designating switches 17 to 20 are continuously pressed, the movement of the laser irradiation position increases to a constant speed, and further, in this state, the different direction designating switches 17 to 20 are moved. When 20 is pressed, its movement becomes slow and the laser irradiation position can be easily moved to an appropriate position.

FIG. 3 is a diagram showing a front screen of the display 15.
In the figure, on the display screen of the display 15, the overall view 21 of the workpiece 8, the laser irradiation position 22, and the beam position offset are displayed (representing the deviation of the laser irradiation position).
And trimming data [which position (start point)
Represents a coordinate value indicating from which position (first stop point) to be processed. In the figure, R (1,
1) indicates the order of the cut, in this case register 1
The first cut is shown.] Is displayed.

FIG. 4 is a diagram showing the shape of a cut in laser trimming. In the figure, a to h represent the types of laser trimming cuts.

FIG. 5 is a diagram showing a display screen of the monitor television 11. In the figure, on the display screen of the monitor television 11, a cross-run X-axis 23 and a cross-line Y-axis 24 added by the crosshair adder 10 to the image from the video camera 9 are shown.
The video camera 9 is displayed coaxially with the optical axis of the laser light, so that the intersection of the crossline X-axis 23 and the crossline Y-axis 24 is the laser irradiation position.
22.

Next, the operation of the embodiment of the present invention will be described with reference to FIGS.

When creating new trimming data, console 13
Then, data such as a cut shape, a cutting speed, or a laser frequency is input to the computer 14 and the workpiece 8 is set on a stage (not shown). While observing the laser irradiation position 22 on the workpiece 8 directly on the monitor TV 11, the direction specifying switches 17 to 20 installed on the console 13
By pressing, the X-axis scanning mirror 3 and the Y-axis scanning mirror 5 are driven to move the laser irradiation position 22 to an appropriate position (correct processing position).

At this time, the laser irradiation position 22 is detected by the X-axis galvanometer 4 and the Y-axis galvanometer 6, and the controller 12
Since the coordinates are constantly displayed on the display 15 via the computer 14 and the computer 14, and the laser irradiation position 22 on the workpiece 8 can be accurately grasped, the laser irradiation position 22 is set to the workpiece 8.
When the position determination switch 16 is pressed when the above-mentioned appropriate position is reached, the computer 14 takes in the coordinates at this time as data.

Various shapes are used for laser trimming cutting as shown in Fig. 4. Which cutting is used depends on the machining start point, the first, second and third machining end points, or the circle. The center position can be determined by designating the position determining switch 16 and the direction designating switches 17 to 20 on the console 13, and the coordinates required for trimming can be obtained by this designation. For example, in the case of the straight cut a, by designating the machining start point and the first machining end point, data such as the machining start point necessary for trimming, the cutting direction, and the cutting length can be obtained. .

When changing the trimming data that has already been created, the computer 14 controls the shape of the given cut to drive the X-axis scanning mirror 3 and the Y-axis scanning mirror 5, and the machining start point and the Depending on the processing sequence, the laser irradiation position 22
Move to change. That is, at this time, the laser irradiation position 22 is corrected by using the direction specifying switches 17 to 20, and the coordinates of the laser irradiation position 22 corrected by pressing the position determination switch 16 at an appropriate position are used as data by the computer 14. It is taken in and is sent to the next correction. In this way, the correction can be performed while confirming the actual laser irradiation position.

In this way, while observing the image of the video camera 9 provided coaxially with the optical axis of the laser beam applied to the workpiece 8 on the monitor television 11, the position control by pressing the direction specifying switches 17 to 20 is performed. By doing, by pressing the position determination switch 16 to capture the coordinates of the specified laser irradiation position 22 in the computer 14 as data, when creating new trimming data, the processing start point and the cutting direction, Alternatively, the trimming data such as the first, second, third machining end points and the length of the cut can be accurately obtained in one processing operation.

In the case of already created trimming data, it is possible to correct the trimming data created earlier while confirming the laser irradiation position 22 in one processing operation, so that it can be newly created or recreated. Even in this case, accurate trimming data can be created with a small number of steps.

As described above, according to the present invention, the position control signal is output based on the position information from the monitor provided coaxially with the optical axis of the laser beam applied to the workpiece, and the output signal is output. By moving the laser irradiation position in accordance with the above, pre-storing the laser irradiation position and the locus information after this movement, and performing the laser trimming process based on these information, accurate trimming data can be obtained with a small number of steps. There is an effect that can be created.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a configuration diagram of a switch for controlling a laser irradiation position provided on the console of FIG. 1, and FIG. 3 is a display of FIG. FIG. 4 is a view showing a display screen, FIG. 4 is a view showing a shape of a cut in laser trimming, and FIG. 5 is a view showing a display screen of the monitor television of FIG. Explanation of symbols of main parts 3 …… X-axis scanning mirror 4 …… X-axis galvanometer 5 …… Y-axis scanning mirror 6 …… Y-axis galvanometer 9 …… Video camera 10 …… Crosshair adder 11 …… Monitor TV 13 …… Console 14 …… Computer 15 …… Display 16 …… Positioning switch 17 to 20 …… Direction switch

Claims (1)

[Scope of utility model registration request] 1. A laser trimming device having a varying means for varying a laser beam irradiation position on a substrate to be processed, the laser trimming device being provided coaxially with an optical axis of the laser beam and adjusting the laser beam irradiation position. Monitor means capable of monitoring, designating means capable of designating an irradiation position of the laser light on a monitor screen at the time of monitoring by the monitor means before laser trimming processing, and irradiation start position of the laser light designated by the designating means And storage means for storing end position information and trajectory information of the irradiation position, and the laser trimming processing based on the irradiation start position and end position information and the trajectory information of the irradiation position stored in the storage means. A laser trimming device comprising: means for performing.