JPH0639733A - Plane polishing device - Google Patents
Plane polishing deviceInfo
- Publication number
- JPH0639733A JPH0639733A JP25844392A JP25844392A JPH0639733A JP H0639733 A JPH0639733 A JP H0639733A JP 25844392 A JP25844392 A JP 25844392A JP 25844392 A JP25844392 A JP 25844392A JP H0639733 A JPH0639733 A JP H0639733A
- Authority
- JP
- Japan
- Prior art keywords
- lapping
- mounting plate
- plate
- grindstone
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、被研磨体を、固形砥
石表面に当接し、固形砥石の作用により、研削または研
磨を行うラッピング研磨機等の平面研磨装置に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat polishing apparatus such as a lapping polishing machine for bringing an object to be polished into contact with the surface of a solid grindstone and performing grinding or polishing by the action of the solid grindstone.
【0002】[0002]
【従来の技術】従来、ラッピング研磨機に固形砥石を装
着する場合には、円周方向に回動する金属製定盤表面に
接着剤,ホットメルト等を塗布し、固形砥石を接着する
方法が一般的であった。2. Description of the Related Art Conventionally, when a solid grindstone is mounted on a lapping grinder, a method is generally used in which a solid grindstone is adhered by applying an adhesive, hot melt or the like on the surface of a metal surface plate which rotates in a circumferential direction. It was target.
【0003】[0003]
【発明が解決しようとする課題】しかし、この方法で
は、大型のラッピング定盤を研磨装置から取り外すこと
なく、その表面に砥石を接着する作業にかなりの困難を
伴うため、接着力が弱かったり、一部接着されない部分
が生じたりして完全な接着ができず、研磨作業中に剥
離,脱落したりするトラブルが生じていた。また、破損
した砥石を交換したりする等の作業も極めて困難であっ
た。特に、研磨機の型式が、2枚のラッピング円盤の砥
面を対面させて組み合わせた両面ラッピング研磨機であ
る場合、この傾向が著しかった。However, in this method, since the work of adhering the grindstone to the surface of the lapping platen without removing the large lapping plate from the polishing device is considerably difficult, the adhesive force is weak, There were some parts that were not adhered, so perfect adhesion was not possible, and there was a problem of peeling and falling off during polishing work. Further, it is extremely difficult to replace the broken grindstone. This tendency was remarkable especially when the type of the polishing machine was a double-sided lapping polishing machine in which the polishing surfaces of two lapping disks were faced and combined.
【0004】さらに、研磨作業によって砥石が全て使い
つくされ、新しい砥石を装着する場合は、ラッピング定
盤の表面に残留した砥石片,接着剤等を完全に剥離除去
し、表面を均一に浄化してから装着する必要があるが、
大型の定盤の全面にこの作業を施すためには、装置を分
解して定盤を取り外してから行うという極めて大がかり
な作業になり、多くの労力と時間とを費やして行わなけ
ればならず、稼動率の大幅な低下と運転経費の増大とい
う事態を招いていた。Further, when all the grindstones are used up by the polishing work and a new grindstone is mounted, the grindstone pieces, adhesive, etc. remaining on the surface of the lapping platen are completely peeled and removed to uniformly clean the surface. It is necessary to install it later,
In order to perform this work on the entire surface of a large surface plate, it becomes an extremely large-scale work of disassembling the device and removing the surface plate, which requires a lot of labor and time. This caused a large decrease in operating rate and an increase in operating costs.
【0005】本発明者らは、従来のラッピング研磨機の
有する上述の問題点を解決するために、鋭意研究を行
い、この発明を完成するに至ったものであり、その目的
とするところは、砥石の交換が容易で、かつ確実な装着
が可能であり、それによって稼動率を大幅に向上させう
る平面研磨装置を提供することにある。The present inventors have conducted intensive studies to solve the above-mentioned problems of the conventional lapping and polishing machine, and have completed the present invention. It is an object of the present invention to provide a flat surface polishing apparatus in which the grindstone can be easily replaced and can be reliably mounted, and thereby the operation rate can be significantly improved.
【0006】[0006]
【課題を解決するための手段】上記の目的を達成するた
めに、この発明の平面研磨装置は、円形盤状または環形
盤状のラッピング定盤に固形砥石を装着した構造のラッ
ピング円盤を備えてなる平面研磨装置において、上記定
盤面をその中心部分または内円を横切る線によって区画
した複数個の区域とそれぞれ実質的に等しい平面形状を
有する取付板分割片に固形砥石を配設するとともに、こ
の取付板分割片を前記ラッピング定盤上に着脱自在に装
着したという構成をとる。In order to achieve the above object, the surface polishing apparatus of the present invention comprises a lapping disk having a structure in which a solid grinding stone is mounted on a lapping plate having a circular disk shape or an annular disk shape. In the flat polishing apparatus, the solid grindstone is disposed on the mounting plate divided pieces each having a planar shape substantially equal to a plurality of areas in which the surface plate surface is divided by a line crossing the central portion or the inner circle. The mounting plate divided pieces are detachably mounted on the lapping plate.
【0007】つぎに、この発明を実施例にもとづいて詳
しく説明する。Next, the present invention will be described in detail based on embodiments.
【0008】[0008]
【実施例】図1はこの発明の一実施例を示している。図
において、1はラッピング円盤で、中心穴付きラッピン
グ定盤2に、取付板分割片3を介して略扇形の固形砥石
4を複数個螺着することにより構成されている。3aは
固形砥石4の間に放射状に形成された隙間で、研磨粉や
脱落砥粉を外部に排出する。この場合において、取付板
分割片3は、それぞれ、上記ラッピング定盤2を、その
中心を横切る複数の仮想線分によって区画して形成され
る複数個の区域(全て等面積)の平面形状(略扇形)と
等しい平面形状に構成されていて互換性を有しており、
それぞれに図2に示すように2個のねじ穴5が形成され
ている。この取付板分割片3の上には、その分割片3と
同形の略扇形の固形砥石4が、ねじ穴4aを取付板分割
片3のねじ穴5に合わせて積重され、その状態で図3に
示すように、ねじ6をねじ穴4aに挿入してラッピング
定盤2に螺着される。このようなラッピング円盤1を備
えた平面研磨装置は、ラッピング円盤1および工作物
(図示せず)を相対的に回動させながら湿式法に基づい
て工作物表面の研磨を行う。FIG. 1 shows an embodiment of the present invention. In the figure, reference numeral 1 denotes a lapping disk, which is configured by screwing a plurality of substantially fan-shaped solid whetstones 4 to a lapping platen 2 with a central hole through a mounting plate divided piece 3. 3a is a gap formed radially between the solid whetstones 4 and discharges the polishing powder and the falling abrasive powder to the outside. In this case, each of the mounting plate divided pieces 3 has a planar shape (substantially equal area) of a plurality of areas (all having the same area) formed by partitioning the lapping platen 2 by a plurality of virtual line segments that cross the center thereof. It has the same plane shape as the fan shape and has compatibility,
Two screw holes 5 are formed in each, as shown in FIG. On this mounting plate divided piece 3, a substantially whetstone-shaped solid grindstone 4 having the same shape as the divided piece 3 is stacked with the screw holes 4a aligned with the screw holes 5 of the mounting plate divided piece 3, and in that state As shown in FIG. 3, the screw 6 is inserted into the screw hole 4 a and screwed onto the lapping plate 2. The flat surface polishing apparatus provided with such a lapping disc 1 polishes the surface of the workpiece based on the wet method while relatively rotating the lapping disc 1 and the workpiece (not shown).
【0009】この装置においては、1個のラッピング円
盤1に対して2組の取付板分割片3を用意し、常に1組
を予備としておく。そして、研磨装置が稼動中に、予備
の取付板分割片3の表面を清浄化したうえで、固形砥石
4を取り付けて、準備を整える。稼動中のラッピング円
盤1の砥石4が使いつくされた場合、または砥石の種
類,番手を交換する必要が生じた場合等は、ラッピング
円盤1より固形砥石4を取付板分割片3ごと取り外し、
予備の組と交換する。このようにすることにより、容易
迅速に運転を再開することができるようになる。In this apparatus, two sets of mounting plate divided pieces 3 are prepared for one lapping disk 1, and one set is always reserved. Then, while the polishing apparatus is in operation, the surface of the spare mounting plate divided piece 3 is cleaned, and then the solid grindstone 4 is mounted to prepare for it. When the whetstone 4 of the lapping disc 1 in operation is exhausted, or when it is necessary to replace the whetstone type and count, the solid whetstone 4 is removed from the lapping disc 1 together with the mounting plate divided piece 3,
Replace with a spare set. By doing so, the operation can be restarted easily and quickly.
【0010】なお、取付板分割片3の材質は特に限定さ
れていが、軽量性,強度およびコスト面等から考えて、
アルミニウム合金等の軽金属,プラスチック板およびガ
ラス繊維補強プラスチック板等の軽量構造材料が好適で
ある。さらに、ラッピング円盤1の表面に取り付けられ
る取付板分割片3の数は、ラッピング円盤1の大きさに
より適宜変えることが望ましい。例えば外径1000mm
以上の大型円盤においては16〜24分割し、それ以下
の小型円盤では2〜16分割といった比較的少ない分割
で充分である。The material of the mounting plate divided piece 3 is not particularly limited, but considering the lightness, strength and cost,
Light structural materials such as light metals such as aluminum alloys, plastic plates and glass fiber reinforced plastic plates are suitable. Furthermore, it is desirable that the number of the mounting plate divided pieces 3 mounted on the surface of the lapping disc 1 be appropriately changed depending on the size of the lapping disc 1. For example, outer diameter 1000mm
A relatively small division such as 16 to 24 divisions for the above large discs and 2 to 16 divisions for smaller discs smaller than that is sufficient.
【0011】図4はこの発明の他の実施例の構成図であ
る。図において、7はラッピング定盤、8は取付板分割
片、9は円柱状砥石、10はラッピング円盤である。す
なわち、この平面研磨装置のラッピング円盤10は、図
5に示すように、略扇形の取付板分割片8に、柱状の円
柱状砥石9を、その頂部研磨面を同一平面上に位置さ
せ、かつ相互に所定間隔を保って植設し、図6に示すよ
うに、略扇形取付板分割片8に設けられたねじ11にね
じ12を挿入してラッピング定盤7に螺着することによ
り構成されている。FIG. 4 is a block diagram of another embodiment of the present invention. In the figure, 7 is a lapping plate, 8 is a mounting plate divided piece, 9 is a cylindrical grindstone, and 10 is a lapping disk. That is, as shown in FIG. 5, the lapping disc 10 of this flat surface polishing apparatus has a columnar cylindrical grindstone 9 on a substantially fan-shaped mounting plate divided piece 8, and its top polishing surface is located on the same plane, and It is constructed by implanting at a predetermined interval from each other, and inserting the screw 12 into the screw 11 provided on the substantially fan-shaped mounting plate divided piece 8 and screwing it onto the lapping plate 7 as shown in FIG. ing.
【0012】この平面研磨装置は、上記のように、外周
面の接触抵抗の小さい円柱状砥石9を、間隔をあけて配
設することによりラッピング円盤10を構成しているた
め、研磨粉や脱落砥粒が、生成すると同時に円柱状砥石
9の間を通って速やかにラッピング円盤10外に排出さ
れる。そのため円柱状砥石9の目づまりが効果的に防止
され、ドレッシングを要することなく、初期の研磨精度
および研磨能率が長時間保持されるようになる。As described above, this flat polishing apparatus forms the lapping disk 10 by arranging the cylindrical grindstones 9 having a low contact resistance on the outer peripheral surface at intervals, so that the polishing powder and the falling powder are removed. At the same time as the abrasive grains are produced, they are quickly discharged through the gap between the cylindrical grindstones 9 to the outside of the lapping disk 10. Therefore, the cylindrical grindstone 9 is effectively prevented from being clogged, and the initial polishing accuracy and polishing efficiency can be maintained for a long time without the need for dressing.
【0013】図7はこの発明のさらに他の実施例に用い
る金属製ラッピング定盤の平面図である。図において、
ラッピング定盤13は円形盤状または中央内円部分が透
孔に形成されている環形盤状になっている。この定盤1
3はその中心Jまたは内円Kを横切る仮想線分a〜dに
よって複数個の区域A〜Hに区画されている。この場
合、上記仮想線分a〜dは直線であり、区域A〜Hを全
て同一形状,等面積の略扇形に区画することが最も好ま
しい。上記定盤13の各区域には、それぞれねじ穴21
が穿設されている。上記定盤13の定盤面の区画された
区域には、図8に示すように、それぞれの区域と実質的
に等しい平面形状を有する取付板分割片13aが装着さ
れる。ここにいう「実質的に等しい」とは、例えば略扇
形の区域に対して台形の取付板分割片を装着したり、隣
接する取付板分割片の間に若干の間隙を設ける必要があ
る場合等における僅少の誤差と許容されることを意味す
るものである。この取付板分割片13aは、前記定盤面
の略扇形区域に対応するもので、前記ねじ穴21と合致
するねじ穴14を有している。取付板分割片13aの表
面には、図9に示すように、2個の固形砥石15,15
aが接着固定されている。これら固形砥石15,15a
は、2個1組で取付板分割片13aの略扇形と等しい平
面形状をなしている。15bは上記2個の固形砥石1
5,15aの間に形成された隙間で、研磨粉や脱落砥粒
を回転による遠心力によって外部に排出する作用をす
る。16は前記ねじ穴14に合致するようにそれぞれの
固形砥石15,15aに穿設されたねじ挿通孔16であ
る。FIG. 7 is a plan view of a metal lapping plate used in still another embodiment of the present invention. In the figure,
The lapping platen 13 has a circular plate shape or an annular plate shape in which a central inner circular portion is formed as a through hole. This surface plate 1
3 is divided into a plurality of sections A to H by virtual line segments a to d crossing the center J or the inner circle K thereof. In this case, the imaginary line segments a to d are straight lines, and it is most preferable to partition the sections A to H into substantially fan-shaped sections having the same shape and the same area. Each area of the surface plate 13 has a screw hole 21.
Has been drilled. As shown in FIG. 8, mounting plate divided pieces 13a having a plane shape substantially equal to the respective areas are attached to the divided areas of the surface plate of the surface plate 13. The term "substantially equal" as used herein means that, for example, it is necessary to attach trapezoidal mounting plate divided pieces to a substantially fan-shaped area, or to provide a slight gap between adjacent mounting plate divided pieces. It means that there is a slight error in and that it is allowed. The mounting plate divided piece 13a corresponds to a substantially fan-shaped area of the surface plate surface and has a screw hole 14 that matches the screw hole 21. As shown in FIG. 9, two solid whetstones 15, 15 are provided on the surface of the mounting plate divided piece 13a.
a is adhesively fixed. These solid whetstones 15 and 15a
Each of the two sets has a planar shape that is substantially the same as the fan shape of the mounting plate divided pieces 13a. 15b is the above-mentioned two solid grindstones 1
In the gap formed between 5 and 15a, the polishing powder and the falling abrasive grains are discharged to the outside by the centrifugal force due to the rotation. Reference numeral 16 is a screw insertion hole 16 formed in each of the solid whetstones 15 and 15a so as to match the screw hole 14.
【0014】固形砥石15,15aを接着担持した取付
板分割片13aは、図10に示すように、定盤13に穿
孔されている。ボルト孔21にボルト17をねじ込み螺
着される。このようにして、定盤13全面に固形砥石1
5,15aが装着されてなるラッピング円盤18を図1
1に示す。ラッピング円盤18を備えた平面研磨装置
は、前記実施例の平面研磨装置と同様の作用効果を奏す
る。As shown in FIG. 10, the mounting plate divided piece 13a having the solid whetstones 15 and 15a adhered thereon is perforated in the surface plate 13. As shown in FIG. The bolt 17 is screwed into and screwed into the bolt hole 21. In this way, the solid grindstone 1 is formed on the entire surface of the surface plate 13.
Fig. 1 shows a lapping disk 18 having 5,15a mounted thereon.
Shown in 1. The flat surface polishing apparatus provided with the lapping disk 18 has the same effects as the flat surface polishing apparatus of the above-described embodiment.
【0015】[0015]
【発明の効果】この発明に係る平面研磨装置によれば、
砥石のラッピング円盤への砥石の取り付けあるいは交換
作業が極めて容易迅速となり、作業者の負担を著しく軽
減しうると同時に装置の稼動率を大幅に向上させること
が可能となる。すなわち、従来、ラッピング定盤に砥石
を接着するためには、少なくとも1日は稼動を休止し剥
離,接着作業をしなければならないところ、この発明の
装置では、取付板分割片を別に1組準備しておき、これ
に予め砥石を接着しておくことにより、砥石交換に要す
る時間を著しく短縮しうるのである。さらに種類,番手
を変えた砥石を必要に応じて準備しておけば、随時交換
も可能であり、1台の研磨装置を多目的に使用すること
も可能となる。また、何等かの事由により砥石の一つが
破損したり異常品質のものが混入した場合もその部分の
み容易に交換が可能になり、経済的である。また、砥石
の接着作業が比較的軽量小型であって取り扱い容易な取
付板分割片について行われるため、綿密丹念な作業が可
能となり、接着ミス,接着不良による事故が殆どなくな
り、稼動率の向上,労働力の節減と相俟って、運転経費
を著しく低減することができる等の顕著な効果が得られ
るものである。According to the flat polishing apparatus of the present invention,
The work of attaching or exchanging the grindstone to the lapping disk of the grindstone becomes extremely easy and quick, and the burden on the operator can be significantly reduced, and at the same time, the operating rate of the apparatus can be greatly improved. That is, conventionally, in order to bond the grindstone to the lapping platen, it has been necessary to suspend the operation for at least one day to perform the peeling and bonding work. However, in the apparatus of the present invention, one set of separate mounting plate pieces is prepared. However, by preliminarily adhering the grindstone to this, the time required for exchanging the grindstone can be significantly shortened. Furthermore, by preparing grindstones of different types and counts as needed, they can be replaced at any time, and one polishing device can be used for multiple purposes. Further, even if one of the whetstones is damaged or abnormal quality is mixed for some reason, only that part can be easily replaced, which is economical. In addition, since the grindstone bonding work is performed on the mounting plate divided pieces that are relatively lightweight and small and easy to handle, careful work can be performed, and accidents due to bonding mistakes and bonding defects are almost eliminated, improving the operation rate, Combined with the labor saving, it is possible to obtain remarkable effects such as a significant reduction in operating costs.
【図1】この発明の一実施例に用いるラッピング円盤の
斜視図である。FIG. 1 is a perspective view of a lapping disk used in an embodiment of the present invention.
【図2】その構成部品の説明図である。FIG. 2 is an explanatory diagram of its constituent parts.
【図3】その構成部品の説明図である。FIG. 3 is an explanatory diagram of its constituent parts.
【図4】この発明の他の実施例に用いるラッピング円盤
の斜視図である。FIG. 4 is a perspective view of a lapping disk used in another embodiment of the present invention.
【図5】その構成部品の説明図である。FIG. 5 is an explanatory diagram of its constituent parts.
【図6】その構成部品の説明図である。FIG. 6 is an explanatory diagram of its constituent parts.
【図7】この発明のさらに他の実施例に用いるラッピン
グ円盤の組立説明図である。FIG. 7 is an assembly explanatory diagram of a lapping disk used in still another embodiment of the present invention.
【図8】この発明のさらに他の実施例に用いるラッピン
グ円盤の組立説明図である。FIG. 8 is an assembly explanatory diagram of a lapping disk used in still another embodiment of the present invention.
【図9】この発明のさらに他の実施例に用いるラッピン
グ円盤の組立説明図である。FIG. 9 is an assembly explanatory diagram of a lapping disk used in still another embodiment of the present invention.
【図10】この発明のさらに他の実施例に用いるラッピ
ング円盤の組立説明図である。FIG. 10 is an assembly explanatory diagram of a lapping disk used in still another embodiment of the present invention.
【図11】そのラッピング円盤の斜視図である。FIG. 11 is a perspective view of the lapping disk.
【符号の説明】 1 ラッピング円盤 2 ラッピング定盤 3 取付板分割片 4 固形砥石[Explanation of symbols] 1 lapping disk 2 lapping plate 3 mounting plate division piece 4 solid whetstone
Claims (3)
盤に固形砥石を装着した構造のラッピング円盤を備えて
なる平面研磨装置において、上記定盤面をその中心部分
または内円を横切る線によって区画した複数個の区域を
それぞれ実質的に等しい平面形状を有する取付板分割片
に固形砥石を配設するとともに、この取付板分割片を前
記ラッピング定盤上に着脱自在に装着したことを特徴と
する平面研磨装置。1. A flat polishing apparatus comprising a lapping disk having a structure in which a solid grindstone is mounted on a lapping plate having a circular plate shape or an annular plate shape, and the surface plate surface is divided by a line crossing a central portion or an inner circle thereof. The plurality of sections are arranged on a mounting plate divided piece having substantially the same planar shape with a solid grindstone, and the mounting plate divided piece is detachably mounted on the lapping platen. Surface polishing machine.
あって、定盤面が等面積の略扇形区域に区画されている
特許請求の範囲第1項記載の平面研磨装置。2. The surface polishing apparatus according to claim 1, wherein a line crossing the central portion or the inner circle is a straight line, and the surface plate surface is divided into substantially fan-shaped areas having the same area.
ラスチックスまたはガラス繊維補強プラスチックスから
なる軽量構造材料で構成されている請求項1または請求
項2記載の平面研磨装置。3. The flat polishing apparatus according to claim 1, wherein the mounting plate divided piece is made of a lightweight structural material made of aluminum alloy, plastics, or glass fiber reinforced plastics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4258443A JPH0834737B2 (en) | 1992-09-28 | 1992-09-28 | Flat polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4258443A JPH0834737B2 (en) | 1992-09-28 | 1992-09-28 | Flat polishing machine |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60039464A Division JPS60217062A (en) | 1985-02-28 | 1985-02-28 | Surface polishing device |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8343771A Division JP2837661B2 (en) | 1996-12-24 | 1996-12-24 | Flat polishing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0639733A true JPH0639733A (en) | 1994-02-15 |
| JPH0834737B2 JPH0834737B2 (en) | 1996-03-29 |
Family
ID=17320280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4258443A Expired - Lifetime JPH0834737B2 (en) | 1992-09-28 | 1992-09-28 | Flat polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0834737B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009025533A3 (en) * | 2007-08-23 | 2009-04-30 | Kolon Inc | Polishing pad, polishing pad tile and method of manufacturing the polishing pad |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5596035A (en) * | 1979-01-17 | 1980-07-21 | Kao Corp | Cultivating of *shiitake* *mashroom* |
| JPS59232768A (en) * | 1983-06-16 | 1984-12-27 | Kanebo Ltd | Flat polishing device |
-
1992
- 1992-09-28 JP JP4258443A patent/JPH0834737B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5596035A (en) * | 1979-01-17 | 1980-07-21 | Kao Corp | Cultivating of *shiitake* *mashroom* |
| JPS59232768A (en) * | 1983-06-16 | 1984-12-27 | Kanebo Ltd | Flat polishing device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009025533A3 (en) * | 2007-08-23 | 2009-04-30 | Kolon Inc | Polishing pad, polishing pad tile and method of manufacturing the polishing pad |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0834737B2 (en) | 1996-03-29 |
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