JPH0640461A - Box for wafer carrier - Google Patents

Abstract

(57) [Summary] [Purpose] The cover of a box for storing semiconductor wafers can be removed. Configuration: The box has a box bottom and a cover. The box bottom and cover are connected to each other by a two-piece removable hinge assembly. The two members of the hinge assembly are fixedly secured to each other during normal opening and closing operations on the cover. When the cover is rotated past its normally open position and the cover rests on the surface with which the box bottom is engaged, and when the cover is rotated below the box bottom, the hinge members will Can be removed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention is for sawing wafer carriers containing semiconductor wafers which are temporarily stored while processing the semiconductor wafers.
Regarding the box to do. More particularly, this invention relates to the hinge structure of such boxes.

[0002]

BACKGROUND OF THE INVENTION Semiconductor wafers are very carefully handled when they are being processed and are contained from normal atmospheric conditions. Therefore, the wafer contained in the above-mentioned wafer carrier is prevented from being contaminated by particles floating in the air or other particles carried to the wafer. When handling such wafers, the entire carrier is stored in a box between the various steps through which the wafer is processed. Boxes are moved in plants and clean rooms for processing and also transported from one location to another.

[0003]

The box for accommodating the wafer carrier is molded from plastic and is preferably reused several times. It is desirable that the box be washable between uses to prevent particulates and other contaminants from collecting near and on the box as much as possible, and to eliminate static electricity carried by the box. When cleaning, it is highly desirable to be able to completely remove the cover from the bottom of the box and clean the cover independently. The structure of the box bottom, the cover and the hinge member is such that contaminants do not accumulate as much as possible during and after the cleaning process. Of course, during normal use of the box, the cover must, for some reason, not come off the bottom of the box. However, it is necessary that the cover can be immediately reassembled when the cleaning is completed so that the box can be put back into use.

It is an object of the present invention to provide an improved hinge for a box for storing wafer carriers so that the cover can be removed from the bottom of the box.

[0005]

A feature of the present invention is a hinge having a socket provided in a part of a box and a hinge pin provided in the other part of the box. The socket holds the hinge pin above the bottom of the box when the cover is normally opened and closed. The socket has access slots or entrance openings oriented to allow the hinge pins to be removed when the cover is fully open or when it is rotated further to another position below the level of the bottom of the box. Has a sit slot or passage.

Another feature of the invention is to provide a partable hinge on the wafer carrier box. The rotatable hinge member and the fixed hinge member have smooth-shaped surfaces. Once separated, these surfaces can be washed immediately and completely.

Yet another feature of the invention is the provision of a removable hinge on a plastic molded box for storing wafer carriers. The fixed hinge portion provided on the bottom of the box has a simple cylindrical hinge pin extending between a pair of mounting brackets. The rotatable part provided on the cover has a hook. The hook provides a socket for receiving the hinge pin and an entrance-exit passage or slot leading to the socket. The hook bite engages the upper rim of the box bottom to prevent the hook from coming off the pin. Also, the entrance-
The exit passage extends diagonally upward toward the box cover to allow the cover to be completely inverted to remove the cover or to rotate further than in the inverted position.

[0008]

Embodiments of the present invention will be described below with reference to the accompanying drawings. 1 to 14 show one embodiment of the present invention. The plastic molded box is designated by the reference numeral 10. The box 10 has a box bottom 11 and a box cover 12. Box bottom 1
1 and the box cover 12 are detachably connected to each other by a detachable hinge assembly 13 formed of two members. The hinge assembly 13 lifts the cover to the dotted position "O" or past the inverted position, ie the surface "S" on which the box 10 rests.
It makes it easy to open to a position "P" below the height of the. The box is used in particular for storing wafer cassettes or wafer carriers 14 in a tilted state. Therefore, the wafer "W" in the wafer carrier is usually placed in a tilted position so that when moved, the wafer is as rattled as possible in the box.

The box bottom 11 has a bottom wall 65 that engages the surface "S" to support the box. A pair of panels 66 of the box are provided diagonally to support the wafer carrier 14 in a tilted position as shown in FIG. In addition, the box bottom 11 also has another inclined panel 67. The edge of the wafer carrier abuts panel 67 when the wafer carrier is stored in the box. The box bottom 11 has side walls 68 that are slightly sloped but generally extend vertically. The side wall 68 surrounds the bottom of the box. The box bottom 11 also has an upper rim portion 69 extending entirely around the side wall 68 of the box bottom.

The box cover 12 is shaped to fit snugly onto the bottom 11 of the box. The box cover 12 has an upper wall 70 and a side wall 71 extending over the entire periphery of the box cover. The box cover 12 is an offset panel 72, 7 oriented to accommodate the wafer carrier 14 in a tilted manner within the box.
Have three. A bottom rim portion 74 of the box cover 12 is formed on the side wall 71 around the box cover 12.
As can be seen, a groove 75 is formed around the bottom rim portion 74 of the cover. The groove 75 closely receives the upper rim portion 69 at the bottom of the box therein. A flange 76 extending obliquely downward is also formed on the bottom rim portion of the cover. The flange 76 shields the entire upper rim 69 from outside influences when the box is closed.

The respective portions 66.1 and 73.1 of the panel 66 and the offset panel 73 extend outward in a substantially horizontal direction to the peripheral portions of the box bottom portion 11 and the box cover 12, and the peripheral portions of the box bottom portion and the box cover. It cooperates with the side walls 68, 71 to form a top rim portion 69 and a bottom rim portion 74, and the hinge assembly 13 is attached thereto.

The hinge assembly 13 has a box bottom 11
Has a fixed hinge portion denoted by the reference numeral 77 mounted on the top and a rotary hinge portion denoted by the reference numeral 78 attached to the box cover. The fixed hinge portion has a hinge pin 79 provided in the horizontal direction. Hinge pin 7
9 extends horizontally along the upper rim portion 69 of the box bottom portion 11 at a position spaced apart from the upper rim portion 69, and a receiving space 80 is provided between the hinge pin 79 and the upper rim portion 69.
Is formed. The end portion 79.1 of the hinge pin is formed integrally with the supporting bracket 81. Bracket 8
1 is also integrally formed with the adjacent side wall 68, the portion 66.1 of the panel 66, and the upper rim portion 69 at the bottom of the box. As best seen in FIGS. 10 and 11, the bracket 81 has a partially circular bracket portion 81.1 integrally formed with a cylindrical hinge pin 79. The brace portion 81.2 is provided on the bracket 81 in the horizontal direction, and is integrally formed with the adjacent portion of the bottom of the box to prevent the hinge pin 79 from moving as much as possible.

The fixed hinge portion 77 is an obstruction portion (o) adjacent to the upper rim portion 69 at the bottom of the box and the receiving space 80.
bstrucion portion) 82. The obstruction portion 82 holds the rotating hinge portion 78 in an appropriate position with respect to the hinge pin 79 when the hinge pin 79 rotates, and the rotating hinge portion 7
8 does not accidentally come off the bottom of the box.

The rotary hinge portion 78 is formed integrally with the adjacent portion of the box cover 12, such as the bottom rim portion 74, the panel portion 73.1 and the side wall 71 around the cover.
A hinge hook 83 that is releasably attached to the hinge pin 79 is formed on the rotary hinge portion 78. The hinge hook 83 is composed of a pair of same side portions 84 which are substantially mirror images of each other. The side portions 84 are separated from each other by an open space 85. Generally, each of the hinge hooks 83 and sides 84 has a distal or outer end 85, a proximal or inner end 86, and a central portion 87. The central portion 87 forms the bite portion of the hook. The bite or center 87 on both sides 84 of the hinge hook 83 forms a round socket cavity or socket 88. The rotating hinge portion 78 is the hinge pin 7.
As it rotates around 9, the hinge pin 79 is constrained in the socket portion 88.

The outer end 85 and the inner end 86 of the hinge hook 83 form an entrance-exit passage 89. When the box cover 12 is in the closed state as shown in FIGS. 1 and 4, the access passage 89 extends obliquely upward from the socket portion 88 toward the box cover 12, and more specifically to the rear wall 71. Extending towards. Adjacent outer and inner ends 85 and 86 of both sides 84 of the hook extend generally straight up and diagonally as seen in FIGS. 4 and 14 to orient the passage 89 for access. There is.

The hinge hook 83 is a substantially flat panel 9
Also has 0. The panel 90 has a side portion 84 of the hinge hook 83.
Between the outer ends 85 of the. The panel 90 is integrally formed with both sides 84 to keep the sides 84 from moving relative to each other. It will be seen that the panel 90 extends all the way to the outer end 85 of the hook. Also, the opposite end is close to the center of the round socket portion 88 and the lower portion of the side portion 84 of the hinge hook 83 is unobstructed with everything open so that this portion of the hinge assembly is In addition, it is easy to clean.

The rotating hinge portion 78 also has a guide rim 91 on both sides 84 of the hinge hook 83. The guide rim 91 partially surrounds the socket portion 88 from the inner end 86 through the central portion 87 of the hinge hook 83 to the outer end 85. The guide rim 91 has an obstructing portion that opposes the obstructing portion 82 provided on the fixed hinge portion 77, and the box cover 12 and the rotating hinge portion 77 rotate to a reversing position or a position after the reversing position to rotate. The rotary hinge portion 78 is prevented from coming off the fixed hinge portion 77 until it comes close to the position shown in FIG. 1 and FIG. Nearly flat or straight end 9 on the guide rim
2 is arranged substantially parallel to the passage 89 for loading and unloading, and when the rotary hinge portion 78 is sufficiently rotated to reach the position shown in FIG. 8, the outer end portion 85 is fixed to the fixed hinge portion 77.
It can be moved smoothly through the receiving space 80 of the.

As can be seen in the drawings, the obstruction of the guide rim ends at the outer end 85 and the inner end 86 of the hook. The box 10 of FIGS. 1 and 2 is shown in FIGS.
Plastic molded box 20 which is very similar to
The modified hinge assembly 31 provided above is shown in detail.

The two hinge assemblies 31 are arranged in mirror image symmetry close to the rear wall 21 of the box bottom portion 15 so that the box cover 28 can be opened. Each of the hinge assemblies 31 has a pair of rigidly fixed hinge portions or hinge hooks 55. The hinge hook 55 is attached to the box bottom portion 15,
It is formed integrally with this. More specifically, the hinge hook 55 is formed integrally with the rear wall 21 at the bottom of the box. Each of the hinge hooks 55 has two separate round cavities or socket portions 56, 57 that are joined together.
Have. Each of the hinge hooks 55 has two separate elongated access slots or access passages 58, 59 joined together. Passageways 58, 5 for access
9 are open into the round sockets 56, 57 respectively. As can be seen, the elongated passageway 58 has a width equal to the entire diameter of the round socket portion 56. The passage 59 is partially obstructed and has a width that is significantly smaller than the diameter of the socket portion 57. Further, the elongated passage 59 is arranged asymmetrically with respect to the central axis of the round socket portion 57. Each of the hinge hooks 55 has a lip or obstruction 5
Have 5.1. The obstruction 55.1 makes the passage 59 smaller than the socket 57. The passage 59 extends parallel to the diameter of the round socket 57, but is offset from the center of the round socket 57. The slot extends at an acute angle to the radius of the round socket 57.

Each of the hinge assemblies 31 has a rotating hinge portion 60.1. The rotary hinge portion 60.1 is attached to the wall 28.1 of the box cover 28 and the rim portion 27, and is molded integrally with them. Rotating hinge part 6
0.1 has a pair of rotatable inserts 60,61 respectively received in round sockets 56,57. The insertion member 60 is a hinge pin having a cylindrical shape and substantially occupies the entire socket portion 56. When the box cover 28 is rotated from the closed state to the open position as shown in FIG. 1, the box cover 28 is rotated. Support. Whenever the insert 61 is released from its socket 57, the insert 60 is lifted from the socket 56.

As shown in FIGS. 17 and 18,
The insertion member 61 is a substantially eccentric semi-cylindrical member.
The insert 61 has one flat side 61.1 and one round side 61.2. The side portion 61.2 is the socket portion 57.
It has a width slightly smaller than the width of the passage 59 for taking in and out. Therefore, when the insert member 61 is in the proper orientation within the socket 57, the insert member 61 can be lifted through the passage.

Box cover 2 of semi-circular insert member 61
Pay particular attention to the direction with respect to 8. The shape and location of the access passages 59, as well as the structure of the inserts are such that the hinge assembly does not disassemble when the cover is closed as shown in FIG. That is, the cover insertion member 61 is prevented from being lifted up from the socket portion 57. When the socket cover 28 is flipped over to engage the surface "S" on which the box rests as shown in FIG. 1, the insert 61 remains immovable through the passage 59. This is because the position of the insertion member 61 is not yet aligned with the restricted passage 59 when the box cover 28 is in the open or inverted position.

However, when the cover can be rotated slightly further to another position represented by the dotted line and the letter "P" in FIG. 1 and to the position represented by the dotted line and the letter "P" in FIG. The insertion member 61 is aligned with the passage 59 so that the insertion member 61 can be lifted from the socket portion 57 and the box cover 28 can be removed from the box bottom portion 15.

The present invention may be embodied in other forms without departing from its spirit and essence. Therefore, the embodiments described above are merely illustrative and do not limit the invention. For the scope of the invention, reference should be made to the appended claims rather than to the embodiments described above.

[Brief description of drawings]

FIG. 1 is a side view of a plastic molded box showing the cover in dotted lines with the cover in a slightly open and inverted position.

FIG. 2 is a detailed elevational view of a portion of the box behind the conveyor.

FIG. 3 is an enlarged detailed sectional view taken along line 3-3 of FIG.

FIG. 4 is an enlarged detailed sectional view taken along line 4-4 of FIG.

5 is a view of FIG. 2 in a state where the cover is slightly opened.
FIG. 4 is an enlarged detailed sectional view taken along line 4;

FIG. 6 4 of FIG. 2 with the cover further open
FIG. 4 is an enlarged detailed sectional view taken along line -4.

FIG. 7: 4 of FIG. 2 with the cover further opened
FIG. 4 is an enlarged detailed sectional view taken along line -4.

FIG. 8: 4 of FIG. 2 with the cover fully open
FIG. 4 is an enlarged detailed sectional view taken along line -4.

FIG. 9 is a detailed plan view of a fixed hinge portion attached to the bottom of the box.

10 is an enlarged detailed sectional view taken along line 10-10 of FIG.

11 is an enlarged detailed cross-sectional view taken along line 11-11 of FIG.

FIG. 12 is a detailed plan view of a rotatable hinge portion provided on the cover of the box.

13 is an enlarged detailed sectional view taken along line 13-13 of FIG.

14 is an enlarged detailed sectional view taken along line 14-14 of FIG.

FIG. 15 is a detailed plan view of another embodiment of the hinge structure.

16 is an enlarged detailed sectional view taken along line 16-16 of FIG.

17 is an enlarged detailed cross-sectional view taken along line 17-17 of FIG.

FIG. 18: The cover and hinge assembly are rotated,
FIG. 17 is an enlarged detailed cross-sectional view taken along line 17-17 of FIG. 15 in a state in which the box cover has been turned up to a position beyond the turning position.

[Explanation of symbols]

 11 Box Bottom 12 Box Cover 13 Hinge Assembly 15 Box Bottom 31 Hinge Assembly 55 Hinge Hook 55.1 Interference 56,57 Socket 58,59 Passage 60,61 Insert 60.1 Rotating Hinge 77 Fixed Hinge 78 Rotating Hinge Part 79 Hinge pin 82 Interference part 83 Hinge hook 87 Central part 88 Socket part 89 Passage 90 Panel 91 Guide rim 92 End part

Claims (15)

[Claims] 1. A plastic molded box for storing carriers for semiconductor wafers, the box bottom having a bottom wall and a sidewall having a top rim formed therein, and an upper rim portion of the box bottom. A cover having a top side wall with a bottom rim overlying the box, and a removable hinge assembly consisting of two members interconnecting the box bottom rim and the cover rim. The hinge assembly has a rotatable hinge part and a fixed hinge part, one of the hinge parts has an insert part, the other of the hinge parts has a socket part, and a passage for inserting and removing the insert part, The fixed hinge part and the rotatable hinge part have interfering parts that cooperate with each other, and these obstructing parts face each other, and the cover and the rotatable hinge part are in the inverted position. Alternatively, the obstruction portion prevents the insertion portion from coming off the socket portion and the passage for taking in and out, except when a part of the cover is rotated to a position past the inversion position where it is below the bottom wall of the box bottom. Box that is restricted. 2. The socket part and the passage for loading and unloading are provided on a rotatable hinge part, and a fixed hinge part has a horizontal hinge pin attached to a bottom part of the box. The box of claim 1 constrained within a socket portion. 3. The rotatable hinge part, wherein the access passage extends obliquely upward toward the cover, and the obstruction part of the fixed hinge part is horizontally separated from the hinge pin and the adjacent upper rim part. Has a guide rim which partially surrounds the socket part and is arranged radially outwardly therefrom, the guide rim extending between the hinge pin and the obstruction on the bottom of the box and the cover being inverted. 2. The box according to claim 1, wherein the guide rim is set so as to reach a position adjacent to the passage for loading and unloading and allow the hinge pin to pass therethrough. 4. The box according to claim 1, wherein the socket portion and the passage for loading and unloading are provided on a fixed hinge portion. 5. The access passage extends upward from the socket portion, and the obstruction portion of the fixed hinge portion partially opposes the socket portion to partially close the passage passage. 5. A box as claimed in claim 4, in which the obstruction part of the possible hinge part has an eccentric part, the rotation of which allows the eccentric part to align with the partially closed passage for access. 6. A plastic molded box for storing carriers for semiconductor wafers, the box bottom having a bottom wall and a sidewall having a top rim formed therein, the box rim having an upper rim portion A box cover having an upper side wall with a bottom rim portion thereon, and a removable hinge assembly consisting of two members interconnecting the box bottom rim portion and the box cover rim portion, The hinge assembly includes a horizontally mounted hinge pin that is horizontally outwardly spaced from an upper rim portion of the box bottom and extends parallel to the hinge pin between the hinge pin and the rim portion. It forms a receiving space, the hinge pin also has an end with a bracket on it, which end adjoins the bottom of the box. A hinge hook having an outer end, an inner end, and a central portion between the ends, the hinge hook being attached to the upper rim of
The hinge hook forms an inner socket portion that receives the hinge pin and rotates about the hinge pin, and an inner end of the hinge hook extends into the receiving space adjacent the hinge pin to a bottom rim portion of the box cover. The hinge hook also has an outer guide rim that is attached and the end of the hinge hook provides access to the socket for access to and from the socket, and the hinge hook also has an outer guide rim spaced from the socket. The guide rim extends partially circularly around the socket from both ends of the hinge hook to the center, so that the guide rim extends in the receiving space very close to the rim at the bottom of the box. Box. 7. The box according to claim 6, wherein said access passage extends upward from the socket portion so that the box cover can be at least completely inverted so that the cover can be easily removed from the bottom of the box. 8. The access passage extends obliquely upward from the socket portion toward the box cover, and the box cover can be easily rotated from the bottom of the box by rotating the box cover to a reversing position or a position beyond the reversing position. The box according to claim 6, wherein the box is removable. 9. The hinge hook has a pair of mirror-imaged side portions spaced apart from each other, each of the side portions being the outer end portion, the inner end portion, the central portion and the guide rim. 7. The box of claim 6, further comprising: a side portion adjacent each bracket member for receiving an adjacent end of a hinge pin in the socket portion. 10. The hinge hook has a panel portion,
10. The box of claim 9 wherein the panel portion extends between and attaches to the outer ends of the sides of the hinge hooks. 11. The box according to claim 5, wherein the eccentric part of the rotatable hinge part has a semi-cylindrical shape. 12. The socket part has a round socket cavity for restraining an insertion part, and passages for taking in and out are arranged asymmetrically with respect to a central axis of the round cavity,
6. A box according to claim 5, wherein the insert has a size which is compatible with the size of the passage for access and allows passage therethrough. 13. The box of claim 12 wherein said elongated access passages are parallel to and offset from the diameter of the round cavity. 14. The insert has a flat side and a round side corresponding to the shape of a round cavity.
Box described. 15. The bottom wall of the box bottom rests on a support surface and the box cover engages the support surface in the inverted open position to facilitate removal of the box cover from the box bottom. 14. The box of claim 13, wherein the cover is configured to rotate below the support surface and bottom wall for