JPH0640731A - Method for conveying optical element member by attraction - Google Patents
Method for conveying optical element member by attractionInfo
- Publication number
- JPH0640731A JPH0640731A JP21551392A JP21551392A JPH0640731A JP H0640731 A JPH0640731 A JP H0640731A JP 21551392 A JP21551392 A JP 21551392A JP 21551392 A JP21551392 A JP 21551392A JP H0640731 A JPH0640731 A JP H0640731A
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- suction
- element member
- molding
- transporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Manipulator (AREA)
- Specific Conveyance Elements (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
(57)【要約】
【目的】 成形された最終製品である光学素子に有害な
欠陥を発生させることなく、又、成形型から成形された
光学素子を取り出す際に、成形型と光学素子が再密着を
起こすことなく、スムースに光学素子を成形型から取り
出させる事により、欠陥のない光学素子を、連続的に製
造できる光学素子部材の吸着搬送方法を提供する。
【構成】 光学素子部材を吸着搬送し、あるいは、載置
する工程において、前記光学素子部材を吸着部材で吸着
する際に、前記吸着部材の吸着面と光学素子部材との間
に所定の間隔をあけた状態で、前記光学素子部材を前記
吸着部材に吸着させ、あるいは、吸着部材で吸着された
前記光学素子部材を成形型の下型成形面上あるいは受け
台上に載置する際に、前記下型成形面上あるいは受け台
の受け面上と前記光学素子部材との間に所定の間隔をあ
けた状態で、前記光学素子部材に対する吸着を解除し、
前記間隔で前記光学素子を落下させ、前記下型成形面上
あるいは受け台の受け面上に載置させる。
(57) [Summary] [Purpose] The molding die and the optical element are not regenerated when the molded optical element is taken out from the molding die without causing harmful defects in the molded optical element which is the final product. Provided is a method for sucking and transporting an optical element member, by which an optical element having no defects can be continuously manufactured by smoothly taking out the optical element from a molding die without causing adhesion. In a process of sucking and transporting or placing an optical element member, a predetermined gap is provided between the suction surface of the suction member and the optical element member when the optical element member is sucked by the suction member. In the opened state, the optical element member is adsorbed to the adsorption member, or when the optical element member adsorbed by the adsorption member is placed on the lower molding surface of the molding die or on the pedestal, With a predetermined gap between the lower die molding surface or the receiving surface of the pedestal and the optical element member, the adsorption to the optical element member is released,
The optical element is dropped at the interval and placed on the molding surface of the lower mold or the receiving surface of the pedestal.
Description
【0001】[0001]
【産業上の利用分野】本発明は、例えば、非球面レンズ
などの高精度な光学素子をプレス成形で形成する場合
に、プレス成形の前後で、光学素子の素材や、成形され
た光学素子を、吸引作用により吸着し、搬送する時に用
いる光学素子部材の吸着搬送方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention, for example, when forming a high-precision optical element such as an aspherical lens by press molding, the material of the optical element and the molded optical element are formed before and after the press molding. The present invention relates to a method for attracting and transporting an optical element member that is attracted by a suction action and transported.
【0002】[0002]
【従来の技術】近年、研削・研磨による光学素子の加工
方法に代わり、加熱軟化させたガラス素材を、成形型内
で直接プレス成形する方法が注目されている。通常、こ
の種の成形には、胴型内で前記胴型に摺動する上下型よ
りなる成形用型部材を用いて、軟化状態に有るガラス素
材をプレスし、前記型部材の成形面に対応した光学機能
面を前記ガラス素材に形成し、その後、冷却を行い、前
記型部材を分解したり、場合によっては、上下型のどち
らかを、形成された光学素子より引き離し、その後、前
記光学素子を取り出す方法が用いられている。2. Description of the Related Art In recent years, a method of directly press-molding a heat-softened glass material in a molding die has attracted attention, instead of a method of processing an optical element by grinding and polishing. Usually, for this type of molding, a molding die member consisting of an upper die and a lower die that slides in the body die is used to press the glass material in a softened state to correspond to the forming surface of the die member. The optical functional surface is formed on the glass material, then cooled, the mold member is disassembled, or, depending on the case, one of the upper and lower molds is separated from the formed optical element, and then the optical element is formed. Is used.
【0003】この種の取出しの方法として、特開昭63
−297229号公報には、金型冷却機構を備えた真空
チャック式のプレス成形品の離型装置が提案されてい
る。これは、プレス終了後、上型を上昇させ、型内から
プレス成形品を取り出す時、金型冷却機構を備えた真空
チャックが、下型上部に進入して、下型を冷却し、ベロ
ーズを介して、真空チャックのホルダーに取りつけられ
た吸着板を、成形品に接触させ、真空吸着により成形品
を取り出すというものである。As a method of taking out of this kind, Japanese Patent Application Laid-Open No. 63-63
Japanese Patent Laid-Open No. 297229 proposes a vacuum chuck type press-molded product releasing apparatus equipped with a mold cooling mechanism. This is because when the upper die is lifted after the press is completed and the press-molded product is taken out from the die, the vacuum chuck equipped with a die cooling mechanism enters the upper portion of the lower die to cool the lower die and remove the bellows. Through this, the suction plate attached to the holder of the vacuum chuck is brought into contact with the molded product, and the molded product is taken out by vacuum suction.
【0004】又、特開昭64−42332にも、同様の
真空吸着による搬送方法として、下方に弾性的に押圧付
勢されて上下動可能に支持された吸着保持手段によるレ
ンズ成形用材料及びレンズ成形品の吸着搬送方法が開示
されている。In Japanese Patent Laid-Open No. 64-42332, as a similar method of carrying by vacuum suction, a lens molding material and a lens by suction holding means elastically pressed downward and supported so as to be vertically movable. A method for sucking and conveying a molded article is disclosed.
【0005】[0005]
【発明が解決しようとしている課題】しかしながら、プ
レス成形による光学素子の成形は、数百度の高温で行わ
れる為、吸着搬送される光学素子部材の温度も必然的に
高くなり、それに用いる吸着部材や受け台にゴム等の弾
性体を用いることが出来ず、金属等の耐熱性を有する材
料を用いなければならない。それ故、前記従来例では、
成形された光学素子や、成形前の光学素子素材等の光学
素子部材が、吸着に際して、先ず、吸着部材に接触され
る為、接触時に、押圧力が働き、光学素子部材と吸着部
材とのわずかな位置ずれや、装置側から発生する振動な
どにより、吸着部材に対して擦られ、光学的に有害な傷
が発生し、最終製品である光学素子に欠陥を残すという
問題があった。又、光学素子部材を下型の成形面上や受
け台上に載置する際にも、光学素子部材が下型や受け台
の受け面に接触させる際、押圧がなされ、同様の問題が
発生していた。更に、成形型から成形された光学素子を
取り出す際に、成形された光学素子が成形型から離型さ
れていても、成形型と光学素子の形状がほぼ同一であ
り、両者ともに接触面が光学機能を有するように、非常
に平滑になっている為、成形型と光学素子とは、わずか
に圧力を加えただけで、再度、密着を起こし易く、真空
吸着による離型取出しが不可能になるという問題があっ
た。However, since the molding of the optical element by press molding is performed at a high temperature of several hundreds of degrees, the temperature of the optical element member that is sucked and conveyed is inevitably high, and the suction member used An elastic body such as rubber cannot be used for the cradle, and a heat-resistant material such as metal must be used. Therefore, in the conventional example,
When a molded optical element or an optical element member such as an optical element material before molding is first contacted with the suction member at the time of suction, a pressing force is exerted at the time of contact, and a small amount of force between the optical element member and the suction member. However, there is a problem in that the optical element, which is the final product, has a defect because the optical element, which is the final product, is rubbed against the suction member due to such a positional displacement or vibration generated from the device side, which causes an optically harmful scratch. Also, when the optical element member is placed on the molding surface of the lower die or on the pedestal, when the optical element member is brought into contact with the receiving surface of the lower die or the pedestal, pressure is applied and the same problem occurs. Was. Further, when the molded optical element is taken out of the molding die, even if the molded optical element is released from the molding die, the shapes of the molding die and the optical element are almost the same, and the contact surfaces of both are optical. Since it has a very smooth surface so that it has a function, the mold and the optical element are likely to come into close contact again with a slight pressure, making it impossible to remove the mold by vacuum suction. There was a problem.
【0006】[0006]
【発明の目的】そこで、本発明は、成形された最終製品
である光学素子に有害な欠陥を発生させることなく、
又、成形型から成形された光学素子を取り出す際に、成
形型と光学素子が再密着を起こすことなく、スムースに
光学素子を成形型から取り出させる事により、欠陥のな
い光学素子を、連続的に製造できる光学素子部材の吸着
搬送方法を提供しようとするものである。SUMMARY OF THE INVENTION Therefore, the present invention is to prevent the optical element which is a molded final product from causing harmful defects.
Moreover, when taking out the molded optical element from the molding die, the optical element can be smoothly taken out from the molding die without causing re-adhesion between the molding die and the optical element. Another object of the present invention is to provide a method for adsorbing and conveying an optical element member that can be manufactured according to the above method.
【0007】[0007]
【課題を解決するための手段】このため、本発明では、
例えば、光学素子部材の吸着の際に、吸着部と光学素子
の間に2mm以下の隙間を設けた状態で真空吸着を行う
事で、吸着部が金属等の固い材質で作られていても、光
学素子部材に有害な傷等を発生させない事により、更
に、鏡面状に研磨された成形型上から、成形型の面形状
を転写させられた光学素子を吸着する際には、1mm以
下の隙間を設けた状態で真空吸着を行う事で、再密着を
発生させない事により、及び、吸着搬送後の光学素子部
材の下型上や、受け台上への載置の際に、下型や受け台
と、吸着された光学素子部材との間に2mm以下の隙間
を開けた状態から吸着を解除し、多少の自由落下をとも
ないながら吸着解除を行う事により、欠陥のない光学素
子を安定的に、連続して製造できる様にしている。Therefore, in the present invention,
For example, when suctioning an optical element member, vacuum suction is performed with a gap of 2 mm or less provided between the suction section and the optical element, so that even if the suction section is made of a hard material such as metal, By not causing harmful scratches on the optical element member, and when adsorbing the optical element having the surface shape of the molding die transferred from the mirror-polished molding die, a gap of 1 mm or less By performing vacuum suction in the state where the vacuum mold is installed, re-adhesion does not occur, and when mounting on the lower mold of the optical element member after suction conveyance or on the receiving stand, the lower mold and the receiving mold By releasing the suction from the state where a gap of 2 mm or less is opened between the table and the sucked optical element member, and by releasing the suction with some free fall, it is possible to stabilize the optical element without defects. , So that it can be manufactured continuously.
【0008】[0008]
【実施例】以下、本発明の実施例を、図面を参照して具
体的に説明する。図1には、本発明の自動プレス成形装
置が概略的に示されており、窒素ガス雰囲気等の不活性
ガス雰囲気中で光学素子素材を加熱し、プレス成形を行
う成形部Aと;成形部Aへ光学素子素材を供給し、更
に、成形された光学素子を成形部Aより大気中に取り出
す供給部Bと;供給部Bにあらかじめストックされてい
る光学素子素材を順次供給し、又、成形された光学素子
を供給部Bより搬出し、順次ストックして行くロボット
部Cと;から構成されている。Embodiments of the present invention will be specifically described below with reference to the drawings. FIG. 1 schematically shows an automatic press molding apparatus of the present invention. A molding section A for heating an optical element material in an inert gas atmosphere such as a nitrogen gas atmosphere to perform press molding; and a molding section. A supply unit B for supplying the optical element material to A, and a supply section B for taking out the formed optical element from the forming section A into the atmosphere; The robot unit C carries out the produced optical elements from the supply unit B and sequentially stocks them.
【0009】上記成形部Aは、気密構造の成形チャンバ
ー1と、その中に設置されている成形型2と、成形型2
の開閉および加圧を行う為のプレス機構6と、成形型2
へ光学素子素材を挿入し、成形された光学素子を取り出
す為の旋回ハンド機構12とより成り立っている。成形
型2は、光学素子部材の挿入取り出し用の開口部3bを
有した胴型3に、その、ほぼ中心に開けられた貫通穴の
上下から、上型4と下型5とを挿入することで、組み立
てられており、更に、その底部に、下型5の位置規制の
為の底板3aがねじ止めされた構造になっている。The molding section A includes a molding chamber 1 having an airtight structure, a molding die 2 installed therein, and a molding die 2.
Pressing mechanism 6 for opening and closing and pressurizing, and forming die 2
It is composed of a turning hand mechanism 12 for inserting the optical element material into and removing the molded optical element. In the molding die 2, the upper die 4 and the lower die 5 are inserted into the body die 3 having the opening 3b for inserting and withdrawing the optical element member, from above and below the through hole opened substantially at the center thereof. Then, the bottom plate 3a for restricting the position of the lower die 5 is screwed to the bottom of the assembly.
【0010】プレス機構6は、成形型2の上型4を引き
上げる為のフツク8を有したプレス軸7と、プレス軸7
の上昇と加圧下降の為のプレスシリンダー9と、プレス
軸7に締結されているプレスシリンダーシャフト10と
から構成されており、更に、プレス軸7は成形チャンバ
ー1内の気密を保持する為、図示の様に、成形チャンバ
ー1との間をOリング11によりシールされていて、プ
レスシリンダー9の動きに合わせ、光学素子素材の挿
入、成形された光学素子の取り出しの為の上型4の上
昇、及び、プレス成形の為の上型4への加圧が出来る様
になっている。The press mechanism 6 includes a press shaft 7 having a hook 8 for pulling up the upper mold 4 of the mold 2, and a press shaft 7.
And a press cylinder 9 for raising and lowering the pressure and a press cylinder shaft 10 fastened to the press shaft 7. Further, since the press shaft 7 maintains airtightness in the molding chamber 1, As shown in the drawing, the O-ring 11 is sealed between the molding chamber 1 and the upper die 4 for inserting the optical element material and taking out the molded optical element according to the movement of the press cylinder 9. In addition, the upper mold 4 for press molding can be pressed.
【0011】又、旋回ハンド機構12は、成形チャンバ
ー1の底部を貫通して垂直に立てられた旋回軸13と、
旋回軸13に水平に取りつけられた旋回アーム15と、
旋回アーム15の先端に釣り下げられた状態で取りつけ
られた吸着ハンド14とより構成されている。旋回軸1
3はプレス軸7と同様に、気密保持の為、成形チャンバ
ー1に、Oリング(図示せず)を介して、取りつけられ
て、同様に、回転旋回機構(図示せず)と、上下動機構
とにより、図示の様に、旋回及び上下動作が可能な構造
となっており、更に、旋回軸13の軸内に設けられた吸
着用の吸気穴(図示せず)に接続された吸着配管16
が、吸着ハンド14の吸着用吸気穴14aに接続されて
いて、供給部Bにより供給された光学素子素材を、成形
型2の下型5上に挿入し、更に、成形された光学素子を
下型5から取り出し、供給部B上に載置することが出来
る様になっている。又、成形チャンバー1の供給部Bと
の接続部には、ゲート弁17が設けられており、供給部
Bとの接続、分離の際に成形室内の気密を保持出来る様
になっている。The swivel hand mechanism 12 has a swivel shaft 13 which extends vertically through the bottom of the molding chamber 1,
A swivel arm 15 mounted horizontally on the swivel shaft 13,
It is composed of a suction hand 14 attached to the tip of the swivel arm 15 in a suspended state. Swivel axis 1
Similarly to the press shaft 7, 3 is attached to the molding chamber 1 via an O-ring (not shown) for keeping airtightness, and similarly, a rotary swivel mechanism (not shown) and a vertical movement mechanism. As shown in the figure, the structure allows swiveling and vertical movement, and further, the suction pipe 16 connected to the suction hole (not shown) for suction provided in the shaft of the swivel shaft 13.
, Which is connected to the suction air intake hole 14a of the suction hand 14, inserts the optical element material supplied by the supply section B into the lower mold 5 of the molding die 2, and further lowers the molded optical element. It can be taken out from the mold 5 and placed on the supply section B. Further, a gate valve 17 is provided at the connection portion of the molding chamber 1 with the supply portion B, so that the airtightness inside the molding chamber can be maintained at the time of connection with and separation from the supply portion B.
【0012】供給部Bでは、架台22がスライドベース
21の上に取り付けられており、シリンダー23のシリ
ンダーシャフト23aが架台22に締結されており、シ
リンダー23の動きに合わせ、架台22がスライドベー
ス21の上を水平に移動出来る様になっている。更に、
架台22の上部にはシリンダー31が固定されていて、
シリンダー31のシリンダーシャフト31aを介して置
換室27が上下動作可能に設けられている。In the supply section B, the pedestal 22 is mounted on the slide base 21, the cylinder shaft 23a of the cylinder 23 is fastened to the pedestal 22, and the pedestal 22 is moved in accordance with the movement of the cylinder 23. It can be moved horizontally on top of. Furthermore,
The cylinder 31 is fixed to the upper part of the gantry 22,
The substitution chamber 27 is provided so as to be vertically movable via a cylinder shaft 31a of the cylinder 31.
【0013】又、置換室27の中央部を貫通して、シフ
ター24が配置されていて、その上部に光学素子素材の
受け台25と成形された光学素子の受け台26とが取り
つけられている。そして、シリンダー30が架台22の
下部に固定されており、シリンダー30のシリンダーシ
ャフト30aがシフター24の底部に締結されている。
置換室27の上部開放面とシフター24との擦り合わせ
部には、それぞれ、Oリング28.29が設けられてい
て、ゲート弁17との接続時に、成形チャンバー内の気
密を保持出来る構造になっている。Further, a shifter 24 is arranged so as to pass through the central portion of the substitution chamber 27, and a pedestal 25 of an optical element material and a pedestal 26 of the molded optical element are mounted on the shifter 24. . The cylinder 30 is fixed to the lower part of the pedestal 22, and the cylinder shaft 30a of the cylinder 30 is fastened to the bottom of the shifter 24.
O-rings 28.29 are provided at the rubbed portions of the upper open surface of the displacement chamber 27 and the shifter 24, respectively, so that the airtightness in the molding chamber can be maintained when the gate valve 17 is connected. ing.
【0014】ロボット部Cは、光学素子素材と成形され
た光学素子とをストックして置くパレット32と、吸着
用排気配管34が接続された吸着フィンガー33と、吸
着フィンガー33の上下動を行う為のシリンダー35及
び36と、吸着フィンガー33をパレット32上の任意
の点に水平移動させる為のXYステージ37とから構成
されている。The robot section C moves the pallet 32 on which the optical element material and the molded optical element are stocked, the suction finger 33 to which the suction exhaust pipe 34 is connected, and the vertical movement of the suction finger 33. Cylinders 35 and 36, and an XY stage 37 for horizontally moving the suction finger 33 to an arbitrary point on the pallet 32.
【0015】又、図2、図3は、上記システムにおい
て、光学素子素材である、外周表面を研磨、火炎処理又
は酸処理により、滑らかに加工されたボール状のブラン
ク40、あるいは、成形された光学素子41を、それぞ
れの工程で吸着し、あるいはその吸着を解除する時の隙
間の状態を示している。2 and 3, in the above system, a ball-shaped blank 40 or a ball-shaped blank 40 whose outer peripheral surface, which is an optical element material, is smoothly processed by polishing, flame treatment or acid treatment. The state of the gap when the optical element 41 is adsorbed in each step or released from the adsorption is shown.
【0016】そして、図2(a)は、吸着フィンガー3
3で、ブランク40をパレット32から吸着する時、そ
のブランク40と吸着フィンガー33の接触部との隙間
Laの状態を示しており、図2(b)は、前記パレット
32から吸着したブランク40を、光学素子素材の受け
台25に載置する時、そのブランク40と、受け台25
の接触部との隙間Lbの状態を示している。FIG. 2A shows the suction finger 3
3 shows the state of the gap La between the blank 40 and the contact portion of the suction finger 33 when the blank 40 is sucked from the pallet 32. FIG. 2B shows the blank 40 sucked from the pallet 32. When the optical element material is placed on the pedestal 25, the blank 40 and the pedestal 25
The state of the gap Lb with the contact portion is shown.
【0017】以下、同様に、図2(c)は、吸着ハンド
14で、受け台25からブランク40を吸着する時の状
態、図2(d)は、吸着ハンド14からブランク40を
離して、下型5に載置する時の状態、図3(a)は、吸
着ハンド14で、成形された光学素子41を下型5から
吸着し、取出しする時の状態、図3(b)は、吸着ハン
ド14から光学素子41を離して、光学素子の受け台2
6に載置する時の状態、図3(c)は、吸着フィンガー
33で、受け台26から光学素子41を吸着する時の状
態、図3(d)は、吸着フィンガー33から光学素子4
1を離して、パレット32に載置する時の状態を示して
おり、それぞれ、吸着、吸着解除の時に、必要な隙間L
c,Ld,Le,Lf,Lg,Lhがあけられた様子が
示されている。又、それぞれの隙間の内、吸着フィンガ
ー33に関係する隙間La,Lb,Lg,Lhは、前記
シリンダー35,36のストロークを規制する事で調整
可能であり、吸着ハンド14に関係する隙間Lc,L
d,Le,Lfは、図示の様に、吸着ハンド14に設け
られたストッパー14bを、受け台25,26と胴型3
の一部とに、突き当てる事で確保される。Similarly, FIG. 2C shows the state when the suction hand 14 sucks the blank 40 from the receiving table 25, and FIG. 2D shows the state where the blank 40 is separated from the suction hand 14. 3A is a state when the optical element 41 is sucked from the lower mold 5 by the suction hand 14, and FIG. 3B is a state when the optical device 41 is sucked out from the lower mold 5. The optical element 41 is separated from the suction hand 14, and the optical element support 2
3 is a state when the optical element 41 is sucked from the receiving table 26 by the suction finger 33, and FIG. 3C is a state when the optical element 4 is moved from the suction finger 33.
1 shows a state in which they are separated from each other and placed on the pallet 32, and the necessary clearance L is set at the time of suction and suction release, respectively.
It is shown that c, Ld, Le, Lf, Lg, and Lh are opened. Further, among the respective gaps, the gaps La, Lb, Lg, and Lh related to the suction finger 33 can be adjusted by restricting the strokes of the cylinders 35 and 36, and the gap Lc related to the suction hand 14, L
As shown in the figure, d, Le, and Lf are stoppers 14b provided on the suction hand 14, the pedestals 25 and 26, and the body mold 3.
It is secured by abutting against a part of.
【0018】更に、吸着ハンド14、吸着フィンガー3
3、および、受け台26には、温度調節の為のヒーター
(図示せず)が内蔵されていて、高温での成形直後の光
学素子に急激な温度変化による割れが発生しない様に、
温度調節されており、また、吸着ハンド14はモリブデ
ンで、大気中でも用いられる吸着フィンガー33および
受け台26はステンレスで、更に、比較的高温(200
〜350℃)の光学素子が載置されるパレット32、お
よび、高温の雰囲気にさらされる受け台25は、同様
に、ステンレスでそれぞれ作られている。又、受け台2
5,26及びパレット32には、吸着時に光学素子部材
の反吸着面に正圧がかかりやすくする事で吸着を安定さ
せる目的のため、息抜き穴25a,26a,32aが設
けられている。Further, the suction hand 14 and the suction finger 3
3, and the pedestal 26 has a built-in heater (not shown) for temperature control so that the optical element immediately after molding at high temperature will not be cracked due to a sudden temperature change.
The temperature is controlled, the suction hand 14 is molybdenum, the suction fingers 33 and the pedestal 26 used in the atmosphere are stainless steel, and the temperature is relatively high (200
Similarly, the pallet 32 on which the optical element of up to 350 ° C. is placed and the pedestal 25 exposed to the high temperature atmosphere are made of stainless steel, respectively. Also, the cradle 2
5, 26 and the pallet 32 are provided with breather holes 25a, 26a, 32a for the purpose of stabilizing positive suction by making it easier to apply positive pressure to the non-suction surface of the optical element member during suction.
【0019】次に、前述のシステムを使用して光学素子
成形品を成形する工程を、より具体的に説明する。な
お、ここで成形される光学素子は、カメラ、ビデオカメ
ラ等に用いられる、上型により形成される面の曲率がR
=16mm、下型で形成される面の非球面の近似の曲率
が約R=15mmの形状を有する直径14mmの非球面
レンズで有り、ここで用いられた硝材は、温度が620
℃の時に109.5 ポアズ、534℃の時に1013ポア
ズ、480℃の時に1016ポアズの粘度となる粘性特性
を持ったSK12である。又、成形は、型の酸化を防止
する為にN2 雰囲気の密閉炉内で行った。Next, the step of molding an optical element molded article using the above system will be described more specifically. The optical element molded here has a curvature R of the surface formed by the upper mold used in a camera, a video camera, or the like.
= 16 mm, the surface formed by the lower mold has an approximate curvature of about R = 15 mm, and is an aspherical lens with a diameter of 14 mm. The glass material used here has a temperature of 620.
It is a viscous SK12 having a viscosity of 10 9.5 poise at ℃, 10 13 poise at 534 ℃, and 10 16 poise at 480 ℃. The molding was performed in a closed furnace in an N 2 atmosphere in order to prevent the mold from being oxidized.
【0020】成形開始前に、吸着及び吸着解除に必要な
吸着ハンド14、吸着フィンガー33の吸着中心と、下
型5、受け台25,26及びパレット32の置き位置の
中心とのずれ量が±0.1mm以内となる様に軸芯合わ
せを行った後に、図2、3に示すように、それぞれの隙
間の内、Le=0.3mm、とし、残りの隙間を全て
0.6±0.2mmとなる様に調整した。次に、吸着ハ
ンド14を400℃、受け台26を275℃、吸着フィ
ンガー33を200℃の温度に設定し、成形チャンバー
1の内部を窒素雰囲気に置換した。Before the start of molding, the amount of deviation between the suction center of the suction hand 14 and the suction finger 33 necessary for suction and release of suction and the center of the placement position of the lower die 5, the receiving trays 25, 26 and the pallet 32 is ±. After aligning the axes so that the distance is within 0.1 mm, as shown in FIGS. 2 and 3, Le = 0.3 mm in each gap, and the remaining gaps are all 0.6 ± 0. It was adjusted to be 2 mm. Next, the suction hand 14 was set to 400 ° C., the pedestal 26 was set to 275 ° C., the suction finger 33 was set to 200 ° C., and the inside of the molding chamber 1 was replaced with a nitrogen atmosphere.
【0021】吸着ハンド14と受け台26と吸着フィン
ガー33とが所定の温度に到達後、成形を開始した。ま
ず初めに、シリンダー35,36を上昇させ、XYステ
ージ37により、吸着フィンガー33をパレット32上
の最初のブランク40の真上に移動させ、シリンダー3
5及び36を降下させ、図2(a)に示す状態にし、吸
着用吸気配管34に接続されている吸着源(図示せず)
を作動させ、ブランク40を吸着フィンガー33に吸着
させた。After the suction hand 14, the pedestal 26 and the suction fingers 33 have reached a predetermined temperature, molding is started. First, the cylinders 35 and 36 are lifted, and the suction finger 33 is moved right above the first blank 40 on the pallet 32 by the XY stage 37, and the cylinder 3 is moved.
An adsorption source (not shown) connected to the adsorption intake pipe 34 by lowering 5 and 36 to the state shown in FIG.
Was operated to adsorb the blank 40 on the adsorption finger 33.
【0022】次に、シリンダー35,36を上昇させ、
吸着フィンガー33が受け台26の真上に来る様に、X
Yステージ37を移動させてから、シリンダー35を下
降させ、図2(b)に示す状態にし、吸着を解除し、ブ
ランク40を受け台25の上に自由落下させた。次い
で、ブランク40を受け台25の上に乗せた状態で、シ
リンダー23を引き込み、供給部Bをゲート弁17の下
に移動させ、シリンダー31を作動させ、置換室27を
上昇させ、置換室の上部とゲート弁17の下部とがOリ
ング28を介して密着した後に、真空排気装置および窒
素供給装置(図示せず)により、置換室27とゲート弁
17とで囲われた部分を窒素雰囲気に置換した。Next, the cylinders 35 and 36 are raised,
X so that the suction finger 33 is directly above the pedestal 26
After moving the Y stage 37, the cylinder 35 was lowered to the state shown in FIG. 2B, the suction was released, and the blank 40 was allowed to fall freely on the pedestal 25. Next, with the blank 40 placed on the pedestal 25, the cylinder 23 is retracted, the supply part B is moved below the gate valve 17, the cylinder 31 is operated, the replacement chamber 27 is raised, and the replacement chamber 27 After the upper portion and the lower portion of the gate valve 17 are brought into close contact with each other through the O-ring 28, a portion surrounded by the displacement chamber 27 and the gate valve 17 is made into a nitrogen atmosphere by a vacuum exhaust device and a nitrogen supply device (not shown). Replaced.
【0023】その後、ゲート弁17を開け、シリンダー
30を作動させる事により、シフター24を成形チャン
バー1の内部に挿入し、旋回軸13を旋回下降させて、
吸着ハンド14のストッパー14bを受け台25の肩の
部分につき当て、図2(c)に示す状態にし、同時に成
形型3の加熱を開始した。成形型の温度が450℃にな
った所で、吸着源を作動させ、ブランク40を吸着ハン
ド14に吸着させ、旋回軸13を上昇、旋回させる事に
より、吸着ハンド14を成形型2の胴型3の開口部3b
に挿入し、旋回軸13を再度下降させて、吸着ハンドの
ストッパー14bを胴型につき当て、図2(d)に示す
状態にしてから、吸着を解除し、ブランク40を下型上
に自由落下させた。After that, the gate valve 17 is opened and the cylinder 30 is operated to insert the shifter 24 into the molding chamber 1 and swivel down the swivel shaft 13.
The stopper 14b of the suction hand 14 was pressed against the shoulder portion of the pedestal 25 to bring it into the state shown in FIG. 2C, and at the same time, heating of the mold 3 was started. When the temperature of the molding die reaches 450 ° C., the suction source is operated, the blank 40 is suctioned by the suction hand 14, and the swivel shaft 13 is raised and swung to move the suction hand 14 to the die of the molding die 2. Opening 3b of 3
2), the revolving shaft 13 is lowered again, the stopper 14b of the suction hand is brought into contact with the barrel die, and the state shown in FIG. 2 (d) is reached. Then, the suction is released and the blank 40 is freely dropped onto the lower die. Let
【0024】ブランク40を下型5上に載置した後、旋
回軸13を上昇、旋回させ、吸着ハンド14を図1に示
す位置に戻し、成形型2が620℃になった所で、プレ
スシリンダー9を下降させ、ブランク40が上型4と下
型5とで形成されるキャビティ形状に一致する様に圧力
を加え、加圧1分後に成形型の冷却を開始した。After placing the blank 40 on the lower die 5, the swivel shaft 13 is lifted and swung to return the suction hand 14 to the position shown in FIG. 1, and when the forming die 2 reaches 620 ° C., the press is performed. The cylinder 9 was lowered, pressure was applied so that the blank 40 conformed to the cavity shape formed by the upper mold 4 and the lower mold 5, and cooling of the mold was started 1 minute after pressurization.
【0025】一方、シフター24は、吸着ハンド14が
受け台25よりブランク40を吸着した直後に、シリン
ダー30を戻してから、ゲート弁17を閉じ、シリンダ
ー31を戻し、更にシリンダー23を出す事により、図
1の破線で示される初期の位置に戻され、その状態で、
前述のごとく、XYステージ37、シリンダー35,3
6及び吸着フィンガー33により、次のブランクが受け
台25の上に載置され、前述と同じ工程を経て、再度成
形チャンバー1の内部に挿入され、前のブランクが光学
素子に成形され成形型2から取り出されるまで、待機さ
せた。On the other hand, the shifter 24 returns the cylinder 30 immediately after the suction hand 14 has sucked the blank 40 from the cradle 25, then closes the gate valve 17, returns the cylinder 31, and further ejects the cylinder 23. , Returned to the initial position shown by the broken line in FIG. 1, and in that state,
As described above, the XY stage 37, the cylinders 35 and 3
The next blank is placed on the pedestal 25 by the 6 and the suction fingers 33, and is again inserted into the molding chamber 1 through the same steps as described above, and the previous blank is molded into an optical element to mold the mold 2. It was kept waiting until it was taken out from.
【0026】成形型2の温度が450℃迄冷却された時
点で、プレスシリンダー9が上昇し、プレスシリンダー
シャフト10のフック8により上型4が引き上げられる
と、旋回軸13が旋回し、吸着ハンド14を胴型3の開
口部3bに挿入させ、更に旋回軸13が下降する事によ
り、図3(a)の状態にさせた。この時の成形された光
学素子41と吸着ハンドの隙間Laは、前述の様に、光
学素子41と吸着ハンド14とを直接に接触させず、か
つ、確実に吸着する寸法である、0.3mmに設定され
ている。When the temperature of the molding die 2 is cooled to 450 ° C., the press cylinder 9 rises, and when the upper die 4 is pulled up by the hook 8 of the press cylinder shaft 10, the swivel shaft 13 swivels and the suction hand. 14 was inserted into the opening 3b of the barrel die 3, and the turning shaft 13 was further lowered to bring the state of FIG. 3 (a). The clearance La between the molded optical element 41 and the suction hand at this time is 0.3 mm, which is a dimension for surely sucking the optical element 41 and the suction hand 14 without directly contacting each other, as described above. Is set to.
【0027】図3(a)の状態で、光学素子41を吸着
ハンド14に吸着させ、旋回軸13を上昇、旋回させ、
吸着ハンド14を受け台26の上に持って行き、旋回軸
13を下降させ、図3(b)の状態にし、吸着を解除
し、光学素子41を受け台26の上に自由落下させた。
この時点で、成形型2の加熱を開始し、成形型の温度が
450℃になった所で、受け台25の上で、既に、待機
状態にあるブランク40を、前述と同じ工程により成形
型2の下型5上に載置した。In the state of FIG. 3 (a), the optical element 41 is sucked by the suction hand 14, and the swivel shaft 13 is raised and swung,
The suction hand 14 was brought onto the pedestal 26, the revolving shaft 13 was lowered to the state of FIG. 3B, the suction was released, and the optical element 41 was allowed to fall freely on the pedestal 26.
At this point, heating of the molding die 2 is started, and when the temperature of the molding die reaches 450 ° C., the blank 40 already in the standby state is placed on the pedestal 25 by the same process as described above. It was placed on the lower mold 5 of 2.
【0028】受け台25上のブランク40が吸着ハンド
14に吸着された時点で、シフター24は、前述と同様
にして図1の破線で示す最初の位置に戻され、吸着フィ
ンガー33が、XYステージ37の水平動作とシリンダ
ー35の下降とにより、図3(c)に示す状態の位置に
来る。図3(c)に示す隙間Lg(=0.6±0.2m
m)を保った状態で、光学素子41は、吸着フィンガー
33に吸着され、シリンダー35の上昇、XYステージ
の移動、シリンダー35の下降の動作を経て、図3
(d)の状態にされ、吸着解除により、すでにブランク
を取り出して空の状態になっているパレット32の所定
の位置に、自由落下で載置された。When the blank 40 on the pedestal 25 is sucked by the suction hand 14, the shifter 24 is returned to the initial position shown by the broken line in FIG. 1 in the same manner as described above, and the suction finger 33 moves the XY stage. The horizontal movement of 37 and the lowering of the cylinder 35 bring them to the position shown in FIG. The gap Lg (= 0.6 ± 0.2 m shown in FIG. 3C)
3), the optical element 41 is adsorbed by the adsorption finger 33, moves up the cylinder 35, moves the XY stage, and moves down the cylinder 35.
In the state of (d), the blank is taken out by adsorption release and placed on a predetermined position of the pallet 32 that has been emptied by free fall.
【0029】その後、前述と同様に、新たな次のブラン
クが受け台25の上に載置され、また、すでに成形型2
に挿入されて成形途中の光学素子を搬出して、次に成形
されるブランクをその成形型2に供給する為に、シタフ
ー24が、成形チャンバー内に挿入され、前述の工程が
繰り返され、光学素子素材が順次成形され、所望の形状
の光学素子が連続的に生産された。Then, as described above, a new next blank is placed on the pedestal 25, and the mold 2 is already used.
In order to carry out the optical element which is being molded and is being molded, and to supply the blank to be molded next to the molding die 2, the Shitahoo 24 is inserted into the molding chamber, and the above-described steps are repeated to Element materials were sequentially molded, and optical elements having a desired shape were continuously produced.
【0030】このようにして、上記のシステムを用い、
数千ショットの成形を試みたが、吸着及び吸着解除の際
に、上記の隙間を設けた条件で成形された光学素子は、
吸着ハンド14や吸着フィンガー33による吸着搬送に
よる、光学的に有害なすり傷等の発生が皆無であり、
又、成形型2からの取り出しの際にも、吸着ハンド14
で、成形された光学素子を押圧することがなく、その再
密着による取りだし不能の現象が全く発生しなかった。In this way, using the above system,
We tried molding several thousand shots, but the optical element molded under the conditions with the above-mentioned gap at the time of adsorption and desorption,
There is no occurrence of optically harmful scratches or the like due to suction conveyance by the suction hand 14 or the suction finger 33.
In addition, when taking out from the molding die 2, the suction hand 14
Then, the molded optical element was not pressed, and the phenomenon of being unable to be taken out due to the re-adhesion did not occur at all.
【0031】それに反し、従来のように、各部の隙間を
0とした条件、及び、吸着ハンド14と旋回アーム15
との間、および、吸着フィンガー33とシリンダー35
との間に、接触時の衝撃を和らげる為にバネ状の緩衝材
を設け、光学素子部材が、吸着時と吸着解除時に、吸着
ハンドや受け台等にソフトに接触し、押圧される状態
で、吸着搬送された光学素子の場合には、成形された数
のほぼ半数以上に、接触に起因する有害なすり傷等の欠
陥が確認された。又、光学素子の成形型2の下型5から
の取り出し時に、押圧による再密着が2〜3割りの割り
合いで発生し、その度に、装置の運転を止め、人手によ
る離型処置を行う事が必要となり、連続的な生産を行う
事が全く不可能な状態であった。On the contrary, as in the conventional case, the condition that the gap between the respective parts is 0, and the suction hand 14 and the swivel arm 15 are used.
And between the suction finger 33 and the cylinder 35.
A cushioning material in the shape of a spring is provided between the and to soften the shock when contacting, and the optical element member is softly contacted and pressed by the suction hand or the pedestal during suction and release. In the case of the sucked and conveyed optical element, defects such as harmful scratches due to contact were confirmed in more than half of the molded number. Further, when the optical element is taken out from the lower mold 5 of the molding die 2, re-adhesion due to pressing occurs at a rate of 20 to 30 times, and the operation of the apparatus is stopped and a mold releasing treatment is manually performed each time. Things were needed and continuous production was impossible at all.
【0032】更に、上記の各隙間の設定値を変化させ、
上記と同じシステムおよび形状の光学素子部材を用い
て、各部の隙間の限界値を求める実験を実施した結果、
隙間Leは0.6mmを超えると吸着が不安定となり、
吸着が出来ないものが発生し始め、1mmを超えると、
ほとんどのものが吸着不能となり、隙間Leを除く他の
隙間は、1.2mmを超えると、隙間Leと同様に吸着
が不安定となり、2mmを超えると、同様に吸着不能と
なった。しかし、吸着解除時の自由落下による傷等の発
生は、3mmを超えても発生せず、5mmを超えた段階
で、約2割りの光学素子について、光学機能上、限度ぎ
りぎりのすり傷や、打ち傷の発生が認められた。Further, by changing the set value of each gap,
Using an optical element member of the same system and shape as the above, as a result of performing an experiment to determine the limit value of the gap of each part,
If the gap Le exceeds 0.6 mm, adsorption becomes unstable,
Something that cannot be adsorbed begins to occur, and when it exceeds 1 mm,
Most of the gaps cannot be adsorbed, and when the gaps other than the gap Le exceed 1.2 mm, the adsorption becomes unstable like the gap Le, and when it exceeds 2 mm, the adsorption becomes impossible. However, the occurrence of scratches and the like due to free fall when adsorbing is released does not occur even if it exceeds 3 mm, and when it exceeds 5 mm, about 20% of the optical elements have scratches and scratches that are marginal in terms of optical function. Occurrence of bruising was observed.
【0033】上記実施例とは別に、上型により形成され
る面の曲率がR=17mm、下型により形成される面の
曲率がR=8mmの形状を有する、直径11mmの球面
レンズの成形を行い隙間の状態を検証したが、上記とほ
ぼ同様の結果が得られ、隙間Leの安定域は0.6m
m、残りの隙間の安定域は1.2mmとなり、隙間Le
が1mm、残りの隙間に関しては2.1mmを超えると
吸着不能となり、光学的に有害な傷の発生は6mmを超
えた時点で確認された。Separately from the above embodiment, a spherical lens having a diameter of 11 mm having a curvature of the surface formed by the upper mold R = 17 mm and a curvature of the surface formed by the lower mold R = 8 mm was molded. Then, the state of the gap was verified, but almost the same result as above was obtained, and the stable range of the gap Le was 0.6 m.
m, the stable area of the remaining gap is 1.2 mm, and the gap Le
Was 1 mm, and the remaining gap was 2.1 mm or more, adsorption was impossible, and the occurrence of optically harmful scratches was confirmed at a time of 6 mm or more.
【0034】なお、本実施例では、光学素子部材の接触
部材の材質にステンレス、モリブデンを用いていたが、
これに限られることなく、耐熱性を有するセラミックや
サーメットや型材と同じ超硬合金等を用いても、同様の
結果が得られる事は明らかである。In this embodiment, stainless steel and molybdenum are used as the material of the contact member of the optical element member.
Not limited to this, it is clear that the same result can be obtained by using a heat-resistant ceramic, cermet, or the same cemented carbide as the mold material.
【0035】[0035]
【発明の効果】本発明は、以上説明した様に、光学素子
部材の真空吸着により搬送において、吸着時には、或る
所定の隙間を有した状態で光学素子部材を吸着吸引し、
更に、吸着解除の時には、所定の隙間を有した状態から
の自由落下を伴う吸着解除を行う事で、成形された光学
素子に光学的に有害な欠陥を発生させることなく、又、
成形された光学素子の成形型からの取り出しにおいて
は、再密着に起因する吸着取り出し不能という事態を発
生させることなく、スムーズに安定的に欠陥のない光学
素子を連続的に製造することができる。As described above, according to the present invention, when the optical element member is conveyed by vacuum suction, the optical element member is sucked and sucked with a certain predetermined gap during suction.
Further, at the time of releasing the suction, by performing the suction release accompanied by free fall from a state having a predetermined gap, without causing an optical harmful defect in the molded optical element,
When the molded optical element is taken out from the molding die, it is possible to smoothly and stably manufacture the optical element without defects without causing a situation in which adsorption and removal cannot be performed due to re-adhesion.
【図1】本発明の一実施例に用いる自動プレス成形装置
の概略正面図である。FIG. 1 is a schematic front view of an automatic press molding apparatus used in an embodiment of the present invention.
【図2】本発明に用いられる光学素子素材の吸着搬送の
状態を表す図である。FIG. 2 is a diagram showing a state of suction conveyance of an optical element material used in the present invention.
【図3】本発明で用いられる光学素子の吸着搬送の状態
を表す図である。FIG. 3 is a diagram illustrating a suction conveyance state of an optical element used in the present invention.
【符号の説明】 A 成形部 B 供給部 C ロボット部 1 成形チャンバー 2 成形型 4 上型 5 下型 6 プレス機構 12 旋回ハンド機構 13 旋回軸 14 吸着ハンド 17 ゲート弁 25 受け台 26 受け台 32 パレット 33 吸着フィンガー[Explanation of reference symbols] A molding unit B supply unit C robot unit 1 molding chamber 2 molding mold 4 upper mold 5 lower mold 6 press mechanism 12 swivel hand mechanism 13 swivel shaft 14 suction hand 17 gate valve 25 cradle 26 cradle 32 pallet 33 suction finger
Claims (8)
いて、前記光学素子部材を吸着部材で吸着する際に、前
記吸着部材の吸着面と光学素子部材との間に所定の間隔
をあけた状態で、前記光学素子部材を前記吸着部材に吸
着させることを特徴とする光学素子部材の吸着搬送方
法。1. A step of adsorbing and transporting an optical element member, wherein a predetermined space is provided between the optical element member and an adsorption surface when the optical element member is adsorbed by the adsorption member. Then, the method for adsorbing and transporting an optical element member, characterized in that the optical element member is adsorbed to the adsorption member.
において、吸着部材で吸着された前記光学素子部材を成
形型の下型成形面上あるいは受け台上に載置する際に、
前記下型成形面上あるいは受け台の受け面上と前記光学
素子部材との間に所定の間隔をあけた状態で、前記光学
素子部材に対する吸着を解除し、前記間隔で前記光学素
子を落下させ、前記下型成形面上あるいは受け台の受け
面上に載置させることを特徴とする光学素子部材の吸着
搬送方法。2. In the step of sucking and transporting and mounting the optical element member, when mounting the optical element member sucked by the suction member on the lower molding surface of the molding die or on the pedestal,
With a predetermined gap between the optical element member and the lower die molding surface or the receiving surface of the pedestal, the suction to the optical element member is released, and the optical element is dropped at the gap. A method for sucking and transporting an optical element member, characterized by placing the optical element member on the lower die molding surface or on the receiving surface of a receiving table.
された光学機能面を有する光学素子と、少なくとも成形
後に光学機能面となる表面が、研磨、酸処理、火炎処理
などにより、滑らかに処理されている光学素子の素材で
あることを特徴とする請求項1あるいは2に記載の光学
素子部材の吸着搬送方法。3. The optical element member, wherein the optical element has an optical functional surface molded by a molding die, and at least the surface which becomes the optical functional surface after molding is smoothly treated by polishing, acid treatment, flame treatment or the like. The method for sucking and transporting an optical element member according to claim 1 or 2, which is a material of an optical element that is provided.
属、セラミック、サーメットなどの耐熱性を有する硬質
の材料で構成されていることを特徴とする請求項1に記
載の光学素子部材の吸着搬送方法。4. The optical element member according to claim 1, wherein the suction surface of the suction member is made of a hard material having heat resistance such as cemented carbide, metal, ceramics, and cermet. Adsorption transfer method.
金、金属、セラミック、サーメットなどの耐熱性を有す
る硬質の材料で構成されていることを特徴とする請求項
2に記載の光学素子部材の吸着搬送方法。5. The lower die and the receiving surface of the pedestal are made of a hard material having heat resistance such as cemented carbide, metal, ceramics, cermet and the like. Method for sucking and transporting optical element members.
0.1〜1.2mmの範囲であることを特徴とする請求
項1あるいは2に記載の光学素子部材の吸着搬送方法。6. The distance is 2 mm or less, preferably,
The range of 0.1-1.2 mm is set, The adsorption | suction conveyance method of the optical element member of Claim 1 or 2 characterized by the above-mentioned.
光学素子を吸着により取り出す工程であることを特徴と
する請求項1に記載の光学素子部材の吸着搬送方法。7. The method for sucking and transporting an optical element member according to claim 1, wherein the step of sucking and transporting is a step of taking out an optical element from a molding die by suction.
1〜0.6mmの範囲であることを特徴とする請求項7
に記載の光学素子部材の吸着搬送方法。8. The distance is preferably 1 mm or less, more preferably 0.
8. The range of 1 to 0.6 mm.
The method for adsorbing and transporting an optical element member according to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4215513A JP2970790B2 (en) | 1992-07-21 | 1992-07-21 | Suction and transport method for optical element members |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4215513A JP2970790B2 (en) | 1992-07-21 | 1992-07-21 | Suction and transport method for optical element members |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0640731A true JPH0640731A (en) | 1994-02-15 |
| JP2970790B2 JP2970790B2 (en) | 1999-11-02 |
Family
ID=16673661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4215513A Expired - Lifetime JP2970790B2 (en) | 1992-07-21 | 1992-07-21 | Suction and transport method for optical element members |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2970790B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008192778A (en) * | 2007-02-02 | 2008-08-21 | Nippon Saabitsuku Kk | Method and device related to core supply or core winding of cored coil |
| US8925515B2 (en) | 2013-02-27 | 2015-01-06 | Deere & Company | Power system comprising a turbocharger bypass passage |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5017658B2 (en) * | 2007-11-15 | 2012-09-05 | キリンテクノシステム株式会社 | Preform inspection device |
-
1992
- 1992-07-21 JP JP4215513A patent/JP2970790B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008192778A (en) * | 2007-02-02 | 2008-08-21 | Nippon Saabitsuku Kk | Method and device related to core supply or core winding of cored coil |
| US8925515B2 (en) | 2013-02-27 | 2015-01-06 | Deere & Company | Power system comprising a turbocharger bypass passage |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2970790B2 (en) | 1999-11-02 |
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