JPH0645329Y2 - Dresser for polishing pad - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a dresser for a polishing pad.

[Conventional technology]

When mirror-polishing is performed with a polishing pad, dressing is necessary because polishing grains settle on the pad surface with the passage of time and cause a clogging.

Therefore, conventionally, dressing is performed by rotating a resin plate having dispersion protrusions or using a nylon brush.

Recently, it has been attempted to perform dressing by seasoning using a diamond pellet or diamond electrodeposition ring for seasoning.

[Problems to be solved by the device]

As described above, the method of dressing by rotating the resin plate having the dispersion protrusions or using a nylon brush has a problem that the dressing effect is not sufficiently obtained and the pad surface is roughened. . Further, in the method of performing the dressing by seasoning as described above, the surface of the pad is forcibly shaved off, so that there is a problem in that the physical properties of the pad may be rapidly changed as the pad is polished.

The present invention has been made to solve such a problem, and an object thereof is to obtain a dressing pad dresser capable of efficiently removing clogging without roughening the pad surface.

[Means for Solving the Problems]

The polishing pad dresser according to the present invention is provided with a large number of chevron-shaped ridges in cross section which are inclined in the directions facing each other on the entire dressing surface with the diameter line as a boundary.

[Action]

In the present invention, during rotation, a large number of chevron-shaped projecting members that are inclined in opposite directions face each other while the slurry that settles on the pad surface is scraped out, while the slurry that is scraped out is swept off onto a rotating parabola.

〔Example〕

An embodiment of the present invention will be described with reference to FIGS. 1 is a plan view, FIG. 2 is a front view, FIG. 3 is a side view, and FIG. 4 is a sectional view taken along line IV-IV in FIG. In the figure, (1) is a disk made of high density polyolefin resin, which is attached to a rotary shaft (not shown) through a central hole (2). (3) is a dressing surface formed on both sides (1a) of the disk (1), and (4a) and (4b) are a large number of ridges juxtaposed on the entire surface of the dressing surface (1a), the diameter line (4c). It is formed in a mountain shape in cross section so that (4a) and (4b) are inclined in a direction facing each other with the upper boundary as a boundary.

When the ridges (4a) and (4b) inclined in the facing direction are provided on the dressing surface (3) in this manner, one of the ridges (4a) and (4b) (for example, 4a) is rotated during rotation. The slurry that settles on the pad surface is scraped off and the slurry that is scraped off on the other hand (4b) is drained off onto the paraboloid of revolution, so clogging can be removed efficiently without roughening the pad surface. Also, due to the excellent slip characteristics and lubricity of the high density polyolefin resin used as the material, smooth rotation can be obtained without damaging the pad surface, and high wear resistance,
The impact resistance and chemical resistance can greatly improve the durability of the dresser. Furthermore, this material used has the following excellent physical properties.

(1) High-level slip characteristics: Shows excellent slip characteristics comparable to fluorine due to its low friction coefficient.

Loss-resistant wear resistance: The best in plastics, with significantly higher wear resistance than nylon and fluororesin, and significantly improved durability.

Excellent impact resistance: Has the same impact resistance as polycarbonate and Kaidatta, ensuring safety during use.

D. Non-adhesion and self-lubrication: This property prevents the adhesion of abrasive grains and facilitates maintenance.

E Excellent chemical resistance and water resistance: Strong against alkali-resistant organic solvents, can be used with hydrofluoric acid and chromic acid, and has the best water resistance among plastics with almost no problems due to water absorption.

F Lightweight: The specific gravity is 0.94 to 1.00 and it is easy to handle.

In the above embodiment, the ridges (4a) on the dressing surface (3),
Although the orientation of (4b) is the same on both sides (1a) and (1a), it may be shifted by 90 degrees. When the dressing surface (3) is a single side, the ridges (4a) and (4b) may be provided on the single side dressing surface (3).

As the material of the disc (1), in addition to high-density polyolefin resin, high-molecular polyethylene, ABS resin, tetrafluoroethylene, AS resin, polyamide (nylon), polypropylene resin, polyimide, (Heiden) polyethylene resin, There are polycarbonate, polyurethane resin, and polyacetal.

[Effect of device]

As described above, according to this invention, it is possible to effectively remove the clogging without roughening the pad surface.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a front view, FIG. 3 is a side view, and FIG. 4 is a sectional view taken along line IV-IV in FIG. In the figure, (1) is a disk, (3) is a dressing surface,
(4a) and (4b) show the ridges.

Claims (1)

[Scope of utility model registration request] 1. A dresser for a polishing pad, characterized in that a large number of chevron-shaped ridges having a cross section are provided on the entire dressing surface so as to incline in a direction facing each other with a diametrical line as a boundary.