JPH0645665Y2 - Chemical liquid pump with bubble separation function - Google Patents
Chemical liquid pump with bubble separation functionInfo
- Publication number
- JPH0645665Y2 JPH0645665Y2 JP1986179250U JP17925086U JPH0645665Y2 JP H0645665 Y2 JPH0645665 Y2 JP H0645665Y2 JP 1986179250 U JP1986179250 U JP 1986179250U JP 17925086 U JP17925086 U JP 17925086U JP H0645665 Y2 JPH0645665 Y2 JP H0645665Y2
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- pump
- drug solution
- bubble separation
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Details Of Reciprocating Pumps (AREA)
- Degasification And Air Bubble Elimination (AREA)
Description
【考案の詳細な説明】 〔概要〕 発泡性薬液を循環濾過する場合に発泡性薬液中に発生す
る気泡を除去するために、気泡が混入した薬液を送り込
む薬液吐出管と、送り込まれた薬液が衝突して気泡を分
離する気泡分離壁と、気泡のみを透過させる撥水性フィ
ルタを設けた気泡分離室を持つ気泡分離機能付薬液用ポ
ンプ。[Detailed Description of the Invention] [Outline] In order to remove bubbles generated in the effervescent drug solution when circulating and filtering the effervescent drug solution, a drug solution discharge pipe for feeding the drug solution containing the air bubbles and a drug solution sent in are introduced. A chemical liquid pump with a bubble separation function, which has a bubble separation wall for colliding and separating bubbles and a bubble separation chamber provided with a water repellent filter for allowing only bubbles to pass.
本考案は、薬液用ポンプに係り、特に発泡性薬液を圧送
する薬液用ポンプに関するものである。The present invention relates to a chemical liquid pump, and more particularly to a chemical liquid pump for pumping a foaming chemical liquid.
薬液用ポンプを用いて発泡性薬液例えば、半導体装置の
製造工程で使用する150℃に加熱した過酸化水素と硫酸
の混液を循環濾過して圧送する場合には、薬液中に気泡
が発生して気泡の圧縮、膨張の影響で吐出量が著しく減
少する。Foaming chemicals using a chemical pump, for example, when circulating and filtering a mixed solution of hydrogen peroxide and sulfuric acid heated to 150 ° C used in the manufacturing process of semiconductor devices by pressure filtration, bubbles are generated in the chemical solution. The discharge amount is significantly reduced due to the compression and expansion of bubbles.
このような場合にも何等かの手段で気泡を除去しながら
圧送して、吐出量を維持した循環濾過を継続することが
可能な気泡分離機能付薬液用ポンプが特に要求されてい
る。Even in such a case, there is a particular demand for a chemical liquid pump with a bubble separation function, which can pump while removing bubbles by some means and continue circulation filtration while maintaining the discharge amount.
従来は発泡性薬液は循環濾過せずに使用の都度廃棄して
いたが、薬液の使用量削減のために再使用するので循環
濾過するようになった。Conventionally, effervescent chemicals were discarded without use of circulation filtration each time they were used, but since they are reused to reduce the amount of chemicals used, they have been circulated and filtered.
しかしながら、発泡性薬液を圧送する薬液用ポンプはそ
の形式の如何を問わず、薬液液中に発生する気泡によ
り、その機能に障害を受けている。However, the function of a chemical pump for pumping an effervescent chemical is impaired by the bubbles generated in the chemical regardless of its type.
例えば第２図に示すようなダイアフラムポンプで発泡性
薬液を循環して圧送する場合には、薬液中に発生した気
泡の圧縮、膨張の影響で吐出量が著しく減少する。For example, when a foaming chemical solution is circulated and pressure-fed by a diaphragm pump as shown in FIG. 2, the discharge amount is significantly reduced due to the compression and expansion of bubbles generated in the chemical solution.
このために、発泡性薬液の圧送の場合は、ポンプの吐出
口から直ちに下方に配管することができず、吐出口から
フィルタ入口までの配管には上向きの勾配をつけなけれ
ばならない。For this reason, in the case of pumping the effervescent chemical, it is not possible to immediately pipe downward from the discharge port of the pump, and the pipe from the discharge port to the filter inlet must have an upward slope.
本考案は以上のような状況から簡単且つ安価に設けるこ
とが可能な気泡分離室を持つ気泡分離機能付薬液用ポン
プの提供を目的としたものである。The present invention has been made in view of the above circumstances, and an object thereof is to provide a chemical liquid pump having a bubble separation function, which has a bubble separation chamber and can be easily and inexpensively provided.
上記目的を達成する本考案の気泡分離機能付ポンプは、
発泡性薬液を圧送するポンプにおいて、薬液吸入口から
前記発泡性薬液を吸入し薬液吐出管から吐出するポンプ
と、該薬液吐出管から吐出された薬液が注入され薬液吐
出口から排出する気泡分離室とからなり、前記気泡分離
室には、前記吐出管から注入された薬液が当たるように
前記吐出管の出口に対向するように配置された気泡分離
壁と、前記気泡分離壁に当たった前記薬液から分離した
気泡が移動する方向に対向するように配置され、気体の
みを透過させる性質を有し、且つ収集された気体が排出
される管が接続された撥水性フィルタとを備えたもので
ある。The pump with bubble separation function of the present invention that achieves the above object is
In a pump for pumping an effervescent drug solution, a pump for inhaling the effervescent drug solution from a drug solution inlet and discharging it from a drug solution discharge pipe, and a bubble separation chamber for injecting the drug solution discharged from the drug solution discharge pipe and discharging it from the drug solution discharge port. And a bubble separation wall disposed so as to face the outlet of the discharge pipe so that the chemical liquid injected from the discharge pipe hits the bubble separation chamber, and the chemical liquid hitting the bubble separation wall. And a water repellent filter which is arranged so as to face each other in the direction in which the bubbles separated from have a property of allowing only gas to permeate, and to which is connected a pipe through which collected gas is discharged. .
即ち本考案においては、薬液用ポンプから吐出された薬
液は気泡分離壁の側壁に設けた薬液吐出管から送り込ま
れ、反対側の側壁に当たり、90°方向を変えて、前記薬
液吐出管より大きい断面積を有する筒状の気泡分離壁の
上部開口端部より気泡分離室の上方に減速されて流出す
る。That is, in the present invention, the chemical liquid discharged from the chemical liquid pump is sent from the chemical liquid discharge pipe provided on the side wall of the bubble separating wall, hits the opposite side wall, changes the direction by 90 °, and is cut off larger than the chemical liquid discharge pipe. It is decelerated and flows out above the bubble separation chamber from the upper opening end of the cylindrical bubble separation wall having an area.
この方向変換と減速の効果により、薬液中の気泡は気泡
分離室の上部に集まり、逐次送り込まれる薬液の圧力に
よって、そこに設けられた撥水性フィルタの撥水性のPT
FE膜を透過して外部に放出され、気泡が分離された薬液
は順調に薬液吐出口から吐出される。Due to the effect of this direction change and deceleration, the bubbles in the chemical solution gather in the upper part of the bubble separation chamber, and the pressure of the chemical solution fed successively causes the water-repellent PT of the water-repellent filter provided there.
The chemical liquid that has passed through the FE film and is discharged to the outside and the air bubbles are separated is smoothly discharged from the chemical liquid discharge port.
また、気泡分離室の上部の気泡部分の圧縮、膨張により
ポンプの脈動が緩和されるので、薬液の円滑な圧送が可
能となる。Further, since the pulsation of the pump is alleviated by the compression and expansion of the bubble portion above the bubble separation chamber, it is possible to smoothly pump the chemical liquid.
〔実施例〕 以下第１図について本考案の一実施例をダイアフラムポ
ンプの場合について説明する。[Embodiment] An embodiment of the present invention will be described below with reference to FIG. 1 in the case of a diaphragm pump.
本考案の気泡分離機能付薬液用ダイアフラムポンプは第
１図に示すような構造をしており、従来のダイアフラム
ポンプの上に気泡分離室３を備え、気泡分離室３の上部
に撥水性フィルタ２を、下部には薬液吐出管1a及び薬液
吐出管1bが接続された耐薬品性の合成樹脂例えば、PFA
からなる円筒形の気泡分離壁１を設けてある。The diaphragm pump for chemical liquid with bubble separating function of the present invention has a structure as shown in FIG. 1, and has a bubble separating chamber 3 on a conventional diaphragm pump, and a water repellent filter 2 is provided on the bubble separating chamber 3. , A chemical-resistant synthetic resin having a chemical liquid discharge pipe 1a and a chemical liquid discharge pipe 1b connected to the lower part, such as PFA
There is provided a cylindrical bubble separating wall 1 consisting of
図示の左側のエア室（Ａ）６にエアが供給され、右側の
エア室（Ｂ）７からエアが排出されると、センターロッ
ド９が左方に移動し、薬液室（Ａ）４にあった薬液が上
方に吐出されて気泡分離壁１の一方の側壁に設けた薬液
吐出管1aを通して送り込まれる。この場合には右側の薬
液室（Ｂ）５には薬液吸入口10から薬液が新たに吸入さ
れる。When air is supplied to the air chamber (A) 6 on the left side of the drawing and air is discharged from the air chamber (B) 7 on the right side, the center rod 9 moves to the left and is located in the chemical liquid chamber (A) 4. The chemical liquid is discharged upward and sent through the chemical liquid discharge pipe 1a provided on one side wall of the bubble separating wall 1. In this case, the drug solution is newly sucked into the drug solution chamber (B) 5 on the right side from the drug solution inlet 10.
次いで、右側のエア室（Ｂ）７にエアが供給され、左側
のエア室（Ａ）６からエアが排出されると、センターロ
ッド９が右方に移動し、薬液室（Ｂ）５にあった薬液が
上方に吐出されて気泡分離壁１のもう一方の側壁に設け
た薬液吐出管1bを通して送り込まれる。この場合は左側
の薬液室（Ａ）４には吸入口10から薬液が新たに吸入さ
れる。Next, when air is supplied to the air chamber (B) 7 on the right side and air is discharged from the air chamber (A) 6 on the left side, the center rod 9 moves to the right and is located in the chemical liquid chamber (B) 5. The liquid medicine is discharged upward and sent through the liquid medicine discharge pipe 1b provided on the other side wall of the bubble separating wall 1. In this case, the drug solution is newly sucked into the drug solution chamber (A) 4 on the left side from the suction port 10.
上記のいずれの場合でも、Ａ−Ａ断面図に示すように薬
液が薬液吐出管1bから気泡分離壁１の内部に入ると、流
路の断面積が急に大きくなるので減速される。この際、
気泡は上方に浮上し、薬液と分離して気泡分離室３の上
部の気泡部分と合体し、逐次送り込まれてくる薬液の圧
力によって、気泡分離室３の側壁に設けられている撥水
性フィルタ２の撥水性のPTFE膜を透過して外部に放出さ
れる。気泡が分離された薬液は順調に薬液吐出口11から
吐出される。In any of the above cases, when the chemical liquid enters the inside of the bubble separation wall 1 from the chemical liquid discharge pipe 1b as shown in the AA cross-sectional view, the cross-sectional area of the flow path suddenly increases, and therefore the speed is reduced. On this occasion,
The bubbles float upward, separate from the chemical liquid and combine with the bubble portion in the upper part of the bubble separation chamber 3, and due to the pressure of the chemical liquid that is successively fed in, the water-repellent filter 2 provided on the side wall of the bubble separation chamber 3 Permeate through the water-repellent PTFE film and is released to the outside. The chemical liquid from which the air bubbles are separated is smoothly discharged from the chemical liquid discharge port 11.
また、気泡分離室の上部の気泡部分の圧縮、膨張により
ポンプの脈動が緩和されるので、薬液の円滑な圧送が可
能となる。Further, since the pulsation of the pump is alleviated by the compression and expansion of the bubble portion above the bubble separation chamber, it is possible to smoothly pump the chemical liquid.
なお、他の方式のポンプ例えば、複動ベローズポンプ等
のポンプの場合においても、本考案の気泡分離機能は有
効であり、適用が可能である。The bubble separation function of the present invention is also effective and applicable to pumps of other systems, such as double-acting bellows pumps.
このように薬液用ポンプから吐出された薬液を薬液吐出
管1a,1bを通して気泡分離壁１に送り込むことにより、
薬液中の気泡を分離して撥水性フィルタ２を透して外部
に放出できるから、吐出直後の配管を立ち下げることが
できるので配管をコンパクトに構成することができる。In this way, by sending the chemical solution discharged from the chemical solution pump to the bubble separation wall 1 through the chemical solution discharge pipes 1a, 1b,
Since air bubbles in the chemical liquid can be separated and passed through the water-repellent filter 2 to be discharged to the outside, the pipe immediately after the discharge can be lowered, so that the pipe can be made compact.
さらに気泡分離室３の上部の気泡の圧縮、膨張の効果に
よりポンプの脈動も緩和されるので、薬液用ポンプから
吐出した薬液を順調に圧送することが可能となる。Further, the pulsation of the pump is alleviated by the effect of compression and expansion of the bubbles in the upper part of the bubble separation chamber 3, so that the chemical liquid discharged from the chemical liquid pump can be smoothly fed under pressure.
以上説明したように本考案によれば、極めて簡単な構成
の気泡分離室を薬液用ポンプに設けることにより、薬液
用ポンプから吐出された薬液中の気泡を分離して外部に
放出できるから、吐出直後の配管の立ち下げが可能とな
るので配管をコンパクトに構成することができる。As described above, according to the present invention, by providing a bubble separation chamber having an extremely simple structure in the chemical pump, the bubbles in the chemical discharged from the chemical pump can be separated and discharged to the outside. Since the pipe can be stopped immediately after that, the pipe can be made compact.
さらに気泡分離室の上部の気泡の効果によりポンプの脈
動も緩和されるので、薬液用ポンプから吐出した薬液を
順調に圧送することが可能となる。Further, since the pulsation of the pump is alleviated by the effect of the bubbles in the upper part of the bubble separation chamber, the chemical liquid discharged from the chemical liquid pump can be smoothly fed under pressure.
第１図は本考案による一実施例の気泡分離機能付薬液用
ポンプの側断面図、 第２図は従来の薬液用ポンプの側断面図、である。 図において、 １は気泡分離壁、1aは薬液吐出管、 1bは薬液吐出管、２は撥水性フィルタ、 ３は気泡分離室、４は薬液室（Ａ）、 ５は薬液室（Ｂ）、６はエア室（Ａ）、 ７はエア室（Ｂ）、８はダイアフラム、 ９はセンターロッド、10は薬液吸入口、 11は薬液吐出口、 である。FIG. 1 is a side sectional view of a chemical liquid pump with a bubble separating function according to an embodiment of the present invention, and FIG. 2 is a side sectional view of a conventional chemical liquid pump. In the figure, 1 is a bubble separation wall, 1a is a chemical discharge pipe, 1b is a chemical discharge pipe, 2 is a water repellent filter, 3 is a bubble separation chamber, 4 is a chemical chamber (A), 5 is a chemical chamber (B), 6 Is an air chamber (A), 7 is an air chamber (B), 8 is a diaphragm, 9 is a center rod, 10 is a chemical solution inlet, and 11 is a chemical solution outlet.
───────────────────────────────────────────────────── フロントページの続き (72)考案者 押田 祐 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 (72)考案者 藤江 信夫 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 (56)参考文献 実開 昭51−137101（ＪＰ，Ｕ) 特公 昭46−36315（ＪＰ，Ｂ１) 実公 昭57−45404（ＪＰ，Ｙ１) 実公 昭43−15903（ＪＰ，Ｙ１) 実公 昭48−35376（ＪＰ，Ｙ２) ─────────────────────────────────────────────────── ─── Continuation of front page (72) Yu Oshida, 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa, Fujitsu Limited (72) Creator Nobuo Fujie 1015, Kamiodanaka, Nakahara-ku, Kawasaki, Kanagawa, Fujitsu Limited ( 56) References 51-137101 (JP, U) Japanese public 46-36315 (JP, B1) Japanese public 57-45404 (JP, Y1) Japanese public 43-15903 (JP, Y1) Japanese public 48-35376 (JP, Y2)
Claims (1)
吐出するポンプと、該薬液吐出管から吐出された薬液が
注入され薬液吐出口から排出する気泡分離室とからな
り、 前記気泡分離室内には、 前記吐出管から注入された薬液が当たるように前記吐出
管の出口に対向するように配置された気泡分離壁と、 前記気泡分離壁に当たった前記薬液から分離した気泡が
移動する方向に対向するように配置され、気体のみを透
過させる性質を有し、且つ収集された気体が排出される
管が接続された撥水性フィルタとを有することを特徴と
する気泡分離機能付薬液用ポンプ。1. A pump for pumping an effervescent drug solution, comprising: a pump for inhaling the effervescent drug solution from a drug solution inlet and discharging it from a drug solution discharge pipe; and a pump for injecting the drug solution discharged from the drug solution discharge pipe from the drug solution discharge port. A bubble separation chamber for discharging, and in the bubble separation chamber, a bubble separation wall arranged to face the outlet of the discharge pipe so that the chemical liquid injected from the discharge pipe hits the bubble separation wall. A water-repellent filter, which is arranged so as to face each other in the direction in which bubbles separated from the chemical solution hitting, has a property of allowing only gas to permeate, and to which a pipe through which collected gas is discharged is connected. A chemical liquid pump having a bubble separating function, which has.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986179250U JPH0645665Y2 (en) | 1986-11-20 | 1986-11-20 | Chemical liquid pump with bubble separation function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986179250U JPH0645665Y2 (en) | 1986-11-20 | 1986-11-20 | Chemical liquid pump with bubble separation function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6383473U JPS6383473U (en) | 1988-06-01 |
| JPH0645665Y2 true JPH0645665Y2 (en) | 1994-11-24 |
Family
ID=31122146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986179250U Expired - Lifetime JPH0645665Y2 (en) | 1986-11-20 | 1986-11-20 | Chemical liquid pump with bubble separation function |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645665Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2649042B2 (en) * | 1987-04-24 | 1997-09-03 | 日本フイ−ダ−工業株式会社 | Pump venting mechanism |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4315903Y1 (en) * | 1966-04-16 | 1968-07-02 | ||
| JPS4835372U (en) * | 1971-09-01 | 1973-04-27 | ||
| JPS51137101U (en) * | 1975-04-28 | 1976-11-05 | ||
| JPS5745404U (en) * | 1980-08-29 | 1982-03-12 |
-
1986
- 1986-11-20 JP JP1986179250U patent/JPH0645665Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6383473U (en) | 1988-06-01 |
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