JPH0646678B2 - Shutter device for electromagnetic wave shield - Google Patents

Description

The present invention relates to a shutter device for opening and closing an entrance of an electromagnetic wave shield room.

[Conventional technology]

As electronic equipment develops and becomes digital, and as the degree of integration increases and electronic equipment operates with minute current, the signals are disturbed by the electromagnetic waves generated by the electronic equipment itself and the interfering radio waves from other electronic equipment. The Rukoto. Therefore, the electromagnetic waves should be blocked so that the electronic equipment does not generate harmful radio waves and adversely affect the surrounding electronic equipment, and that the electronic equipment does not malfunction due to external interference. )is necessary.

Therefore, in semiconductor manufacturing factories, hospitals, etc., when constructing a clean room or an intensive care unit to prevent malfunction of equipment,
These are used as electromagnetic wave shielding rooms (hereinafter referred to as "shielding rooms") using shielding materials, but in general, when building a shielding room, electricity at the door opening (doorway of the shielding room) It is important to maintain the electrical connection, and if there is an "electrical gap" in the shield room, the shielding effect will be reduced by the leakage of electromagnetic waves from this "gap", especially at high frequencies.

Thus, conventionally, the shield door of the shield room has a hinged opening / closing structure, and the electromagnetic wave shielding function is obtained by mechanically pressing the shield door against the wall of the entrance / exit of the shield room. The doors were opened and closed manually. The reason why the shield door has a hinged opening / closing structure is that it is difficult to sufficiently exhibit the electromagnetic wave shielding function with other opening / closing structures.

[Problems to be solved by the invention]

However, the conventional electromagnetic wave shield structure, in which the shield door and the wall of the entrance / exit are pressed against each other to shield the electromagnetic wave, requires a receiving frame for adhering the shield door to the floor surface of the entrance / exit, and Since the receiving frame has to be straddled when it is carried in and out, this receiving frame becomes an obstacle, and it is impossible to automate the carrying in and out of devices and materials.

Further, Japanese Patent Laid-Open No. 55-101691 proposes a door device in which a conductive shield brush is provided on the bottom surface of the shield door and a metal pipe is embedded in the floor surface of the entrance / exit to facilitate passage of people and stretchers. Has been done. However, in this prior art, the metal pipe is exposed on the floor surface so that the floor surface is not always flat, and the electromagnetic wave shield is not sufficient because the conductive shield brush is simply contacted with the metal pipe. there were. Furthermore, the opening and closing of the shield door is still manual.

[Object of the Invention]

The present invention has been devised in view of the above circumstances, and makes it possible to remotely control the loading and unloading of equipment and materials by smoothing the floor surface of the entrance and exit of a shield room, and at the same time opening the shield screen and driving the shield function. It is also an object of the present invention to provide a shutter device for a shielded room, which can automatically perform electromagnetic wave shielding and can completely shield an electromagnetic wave when the entrance is closed.

[Means for solving problems]

In order to achieve such an object, a shutter device for a shielded room according to the present invention is provided with a conductive fixed frame provided around the entrance and exit of the shielded room and a fixed frame facing the fixed frame. A movable frame, a pressing means for automatically pressing the movable frame to the fixed frame, an electromagnetic shield material with high bending performance for opening and closing the entrance of the shield room, and the electromagnetic shield material between the fixed frame and the movable frame. It consists of an elevating device that automatically raises and lowers the doorway to open and close the entrance.When the entrance is closed by the electromagnetic shield material, the movable frame presses the peripheral edge of the electromagnetic shield material against the fixed frame and fixes it to the electromagnetic shield material. The frame and the frame are electrically integrated.

[Operation of the invention]

According to the present invention, the electromagnetic shield material is moved up and down by the elevating device to automatically open and close the entrance. Then, when the electromagnetic shield material descends and closes the entrance / exit, the movable frame presses the peripheral end portion of the electromagnetic shield material against the fixed frame by the operation of the pressure contact means to perform electromagnetic wave shielding.

Example of Invention

 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

In FIG. 1, reference numeral 1 is a shield room constructed of a conductive shield material, 3 is an entrance / exit of the shield room 1, and horizontal members 5a, 5a and vertical members 5b, 5b are provided around the entrance / exit 3. A conductive fixed frame 5 made of is attached. The horizontal member 5a on the lower side of the fixed frame 5 is arranged in the recess 13 of the structural floor 11 so that its upper surface 5a 'forms the same plane as the shield floor 7 and the floor 9.
On the back of the ceiling 15 of the entrance / exit 3, a well-known shutter opening / closing device 19 in which a shield screen 17 as an electromagnetic shield material is wound is mounted.

This shutter opening / closing device 19 is automatically opened / closed by remote control like the conventional device, and the shield screen 17 is moved up and down when loading / unloading equipment or articles.
It is designed to open and close. As shown in FIG. 2, the shield screen 17 is formed by coating a sheet-like elastic body 21 made of a high molecular elastomer or a metal fiber woven cloth with a metal foil 23 such as copper and has a thickness of 5 mm or less. It has high electromagnetic wave shielding performance and bending performance.
The lower end of the shield screen 17 is set so as to descend into the recess 13 through a gap between the horizontal member 5a of the fixed frame 5 and the floor 9 as shown in FIG. Therefore, the floor surface of the entrance / exit 3 is provided with only such a gap into which the thin shield screen 17 is inserted, and has a smooth surface that does not hinder the transportation of devices and the like.

Further, as shown in FIG. 3, a movable frame 29 is attached to the entrance / exit 3 so as to face the fixed frame 5 via a plurality of support arms 27 hingedly connected to the shield wall 25. The screen 17 moves up and down between the fixed frame 5 and the movable frame 29. Incidentally, FIG. 4 is a sectional view taken along the line II of FIG.
b is a horizontal frame and a vertical frame forming the movable frame 29, 31 is a hinge connecting the support arm 27 and the movable frame 29, and 3
Reference numeral 3 is a spring that holds a predetermined distance between the movable frame 29 and the fixed frame 5.

Further, on the shield wall 25 near the support arms 27, jacks 35 driven by remote control are provided for each support arm 2.
It is attached corresponding to No. 7, and when the jack 35 is driven to insert the wedge-shaped cylinder 37 between the rear end 27a of the support arm 27 and the shield wall 25 as shown in FIG. As shown in FIG. 6, the movable frame 29 is pressed against the fixed frame 5 while moving in the direction of arrow A against the spring force of the spring 33. Therefore, when the shield screen 17 descends between the fixed frame 5 and the movable frame 29 to close the entrance / exit 3, the jack 35 is remotely operated to move the support arm 27 in the arrow A direction to move the movable frame. When 29 is pressed against the fixed frame 5, the peripheral edge of the shield screen 17 is clamped between the fixed frame 5 and the movable frame 29.
Therefore, the fixed frame 5 and the shield screen 17 are electrically integrated.

Since the present embodiment is configured in this way, in order to carry in and out the equipment and materials to and from the shield room 1, the shield screen 17 is opened by the shutter opening / closing device 1 by remote control.
It suffices to wind up by 9 to open the entrance / exit 3. If the shield screen 17 is lowered by the shutter opening / closing device 19 after the loading / unloading work of equipment and materials is completed, the entrance / exit 3 is closed by the shield screen 17. When the jack 35 is driven with the doorway 3 closed by the shield screen 17 and the wedge-shaped cylinder 37 is inserted between the rear end 27a of the support arm 27 and the shield wall 25, the support arm 27 moves to the sixth position. Spring 33 as shown
The movable frame 29 presses the peripheral edge of the shield screen 17 against the fixed frame 5 against the spring force of the fixed frame 5 to electrically integrate the fixed frame 5 and the shield screen 17. . Thus, the shield screen 17 shields the entrance / exit 3 from electromagnetic waves by being electrically integrated with the fixed frame 5.

Thus, in order to carry in / out the device etc. into / from the shield room 1 shielded by the shield screen 17 for electromagnetic waves again, the jack 35 is driven to move the wedge-shaped cylinder 37 to the rear end 27a of the support arm 27 and the shield. Wall 25
It suffices to retract the support arm 27 from the space between them, and the support arm 27 is moved by the restoring force of the spring 33 with the hinge 31 as the fulcrum.
The shield screen 1 that rotates in the direction and is moved by the movable frame 29
The contact between 7 and the fixed frame 5 is released. Then, the shutter opening / closing device 19 may be operated to wind up the shield screen 17 to open the doorway 3.

As described above, in this embodiment, the entrance 3 of the shield room 1
In addition to automating the opening / closing mechanism, the floor of the entrance / exit 3 is made flat, and the movable frame 29 automatically presses the shield screen 17 against the fixed frame 5 to achieve a good electromagnetic wave shield. Therefore, according to this embodiment, it is possible to mechanically automate the loading and unloading of devices and materials into and from the shielded room 1, and it is possible to achieve significant labor saving and efficiency improvement. Further, by automating the opening / closing mechanism of the entrance / exit 3 of the shield room 1, there is an advantage that unnecessary dust can be prevented from being generated when opening / closing the entrance / exit 3 as compared with the conventional case where the opening / closing of the entrance / exit 3 is input.

In the above embodiment, the shutter opening / closing device 19 and the jack 35 are driven by remote control.
A well-known infrared sensor may be attached to the entrance / exit 3 and automatically driven by control means to which a signal from the infrared sensor is input. Further, the material of the shield screen 17 is not limited to the above embodiment.

〔The invention's effect〕

As described above, according to the present invention, it is possible to mechanically automate the loading and unloading of devices and materials into and from the shielded room while achieving reliable electromagnetic wave shielding of the entrance and exit of the shielded room, which is a significant labor saving. It has become possible to improve efficiency.

[Brief description of drawings]

1 is a vertical sectional view of a shutter device according to an embodiment of the present invention, FIG. 2 is a partial sectional view of a shield screen, and FIG.
FIG. 4 is a front view of the shutter device according to the above embodiment, FIG. 4 is a sectional view taken along the line I--I of FIG. 3, and FIGS. 5 and 6 are structures and functions of the electromagnetic wave shield mechanism according to the above embodiment. FIG. 1 ... Shield room, 3 ... Doorway, 5 ... Fixed frame,
17 ... shield screen, 19 ... shutter opener, 25 ... shield wall, 27 ... support arm, 29 ...
… Movable frame, 31 …… Hinge, 33 …… Spring, 35
...... Jack, 37 …… wedge-shaped cylinder.

Claims (2)

[Claims] 1. A conductive fixed frame provided around the entrance of an electromagnetic wave shielded room, a movable frame provided facing the fixed frame with a predetermined gap, and the movable frame is automatically set as the fixed frame. Pressing means for making pressure contact with, electromagnetic shielding material with high bending performance for opening and closing the entrance and exit of the electromagnetic shield room, and lifting and lowering the electromagnetic shield material between the fixed frame and the movable frame to automatically open and close the entrance and exit When the entrance and exit is closed by the electromagnetic shield material, the movable frame presses the peripheral edge of the electromagnetic shield material against the fixed frame to electrically integrate the electromagnetic shield material and the fixed frame. Shutter device for electromagnetic wave shielded room. 2. The electromagnetic shield according to claim 1, wherein the electromagnetic shield material is a sheet-shaped elastic body made of a high-molecular elastomer or a metal fiber woven cloth covered with a metal foil. Room shutter device.