JPH0648328Y2 - 光学式膜厚自動測定装置 - Google Patents

光学式膜厚自動測定装置

Info

Publication number
JPH0648328Y2
JPH0648328Y2 JP3125289U JP3125289U JPH0648328Y2 JP H0648328 Y2 JPH0648328 Y2 JP H0648328Y2 JP 3125289 U JP3125289 U JP 3125289U JP 3125289 U JP3125289 U JP 3125289U JP H0648328 Y2 JPH0648328 Y2 JP H0648328Y2
Authority
JP
Japan
Prior art keywords
substrate
measured
calibration
film thickness
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3125289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02122306U (it
Inventor
政和 斉田
正昭 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP3125289U priority Critical patent/JPH0648328Y2/ja
Publication of JPH02122306U publication Critical patent/JPH02122306U/ja
Application granted granted Critical
Publication of JPH0648328Y2 publication Critical patent/JPH0648328Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP3125289U 1989-03-17 1989-03-17 光学式膜厚自動測定装置 Expired - Lifetime JPH0648328Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3125289U JPH0648328Y2 (ja) 1989-03-17 1989-03-17 光学式膜厚自動測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3125289U JPH0648328Y2 (ja) 1989-03-17 1989-03-17 光学式膜厚自動測定装置

Publications (2)

Publication Number Publication Date
JPH02122306U JPH02122306U (it) 1990-10-05
JPH0648328Y2 true JPH0648328Y2 (ja) 1994-12-12

Family

ID=31256980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3125289U Expired - Lifetime JPH0648328Y2 (ja) 1989-03-17 1989-03-17 光学式膜厚自動測定装置

Country Status (1)

Country Link
JP (1) JPH0648328Y2 (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002267419A (ja) * 2001-03-14 2002-09-18 Horiba Ltd 膜厚測定装置
EP3081921B1 (en) * 2015-04-16 2019-08-14 Heraeus Electro-Nite International N.V. Spectrometer calibration method

Also Published As

Publication number Publication date
JPH02122306U (it) 1990-10-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term