JPH0650701B2 - 積層コンデンサ素子とその製造方法 - Google Patents

積層コンデンサ素子とその製造方法

Info

Publication number
JPH0650701B2
JPH0650701B2 JP1124830A JP12483089A JPH0650701B2 JP H0650701 B2 JPH0650701 B2 JP H0650701B2 JP 1124830 A JP1124830 A JP 1124830A JP 12483089 A JP12483089 A JP 12483089A JP H0650701 B2 JPH0650701 B2 JP H0650701B2
Authority
JP
Japan
Prior art keywords
copper
internal electrode
multilayer capacitor
capacitor element
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1124830A
Other languages
English (en)
Other versions
JPH02303107A (ja
Inventor
洋一郎 横谷
博司 加賀田
純一 加藤
誠一 中谷
幸男 寺田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1124830A priority Critical patent/JPH0650701B2/ja
Priority to US07/525,024 priority patent/US5036424A/en
Publication of JPH02303107A publication Critical patent/JPH02303107A/ja
Publication of JPH0650701B2 publication Critical patent/JPH0650701B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
    • C04B35/4686—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on phases other than BaTiO3 perovskite phase
    • C04B35/4688—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on phases other than BaTiO3 perovskite phase containing lead compounds
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/472—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on lead titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
    • C04B35/497—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates based on solid solutions with lead oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/6261—Milling
    • C04B35/6262—Milling of calcined, sintered clinker or ceramics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
    • H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
    • H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
    • H01G4/1254—Ceramic dielectrics characterised by the ceramic dielectric material based on niobium or tungsteen, tantalum oxides or niobates, tantalates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3213—Strontium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3258—Tungsten oxides, tungstates, or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3279—Nickel oxides, nickalates, or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3281—Copper oxides, cuprates or oxide-forming salts thereof, e.g. CuO or Cu2O
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3284—Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/652—Reduction treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6562—Heating rate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6565—Cooling rate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567—Treatment time
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
    • C04B2235/6584—Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage below that of air
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/79—Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/346—Titania or titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/68—Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Power Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Capacitors (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は積層コンデンサ素子とその製造方法に関し、と
くに鉛ぺロブスカイト酸化物を誘電体に用い銅または銅
を主成分とする合金を内部電極とする積層コンデンサ素
子とその製造方法に関する。
従来の技術 近年セラミックコンデンサは、小型大容量化への要求か
ら積層コンデンサが急速に普及しつつある。、また回路
の高周波化により従来電解コンデンサが用いられてきた
高容量の領域に積層型セラミックコンデンサ素子を用い
る必要が発生している。またこれらの素子は表面実装部
品として、素子を樹脂でモールドしていない形態での使
用が求められている。小型化大容量化の要求を満足する
素子としては、高誘電率材料を誘電体層として用い且つ
安価の電極材料を用いた素子の実現が必要となる。
これに対し、特開昭６２−２１０６１３号公報および６
３−２６５４１２号公報では、鉛ペロブスカイト系の誘
電体を用い銅または銅を主成分とする合金を内部電極に
用いた積層コンデンサ素子が提案されている。なお、こ
れと関連した製造方法としては、上記公報のほか特開昭
６２−１１５８１７号公報、６２−１２８５１３号公
報、６２−２０３３２１号公報、６３−２５４７１４号
公報などに記載されているような方法が知られている
が、何れも焼成時に水素、ＣＯおよびアンモニアのよう
な還元性ガスを含む雰囲気中で酸素分圧が温度とともに
変化するような条件で焼成がおこなわれている。
発明が解決しようとする課題 特開昭６２−２１０６１３号公報および特開昭６３−２
６５４１２号公報に記載されているように、鉛ペロブス
カイト系の誘電体を用い銅または銅を主成分とする合金
を内部電極に用いた積層コンデンサ素子は、優れた誘電
特性を有する鉛ペロブスカイト系誘電体と銅内部電極を
用いる積層コンデンサの条件を初めて明らかにしたもの
である。
しかしこの製造方法は焼成雰囲気の制御が困難で焼成炉
中に酸素センサを挿入して酸素分圧を管理しながら焼成
する必要があった。そこでより容易な製造方法である窒
素ガス単味を流して焼成する方法をとると、素子の耐湿
高温負過寿命特性が劣化する問題点を有していた。
本発明ではかかる問題点に鑑み、窒素中で焼成しても素
子の寿命特性が劣化せず、焼成雰囲気の制御が容易で量
産性にすぐれた積層コンデンサ素子とその製造方法を提
供することを課題としている。
課題を解決するための手段 誘電体磁器層として、Ｐｂ、Ｃａ、Ｓｒ、およびＢａか
らなる群Ａから選ばれた成分Ｘと、Ｍｇ、Ｎｉ、Ｚｎ、
Ｔｉ、Ｔａ、Ｎｂ、およびＷからなる群Ｂから選ばれた
成分Ｙと、Ｃｕとの三者の成分を含む酸化物からなる組
成物であって、Ｘは少なくともＰｂを含み、Ｙは群Ｂの
成分の少なくとも２種を含み、Ｘのモル数の合計をａ、
Ｙのモル数の合計をｂとしたとき、 0.９８５≦ａ／ｂ≦1.１１０ であり、さらにＣｕのＣｕ２Ｏ換算したときの他成分に
対する重量％をｃ％としたとき、 0.６５０＜Ｃ≦5.２００ であるような組成物を用いる。
製造方法としては銅内部電極の出発原料に銅酸化物を用
い、焼成温度より低い温度であらかじめ内部電極を還元
し金属化した後、焼成する積層コンデンサ素子の製造方
法において、内部電極の還元を１１０℃以上３００℃以
下の還元雰囲気下で行い、かつ素子の焼成を酸素含有率
0.１００％以下の窒素中で行なう。
作用 本発明の積層コンデンサ素子および、その製造方法にお
いて誘電体磁器として用いられる上記鉛ペロブスカイト
系の組成物焼結体は、上記製造条件下で優れた誘電特性
と高い抵抗率を示すほか、ち密性が向上するため、積層
コンデンサ素子は優れた初期特性を有するほか寿命特性
が劣化しなくなる。
また本発明の製造方法は低温で内部電極を還元処理する
こと、焼成時の雰囲気に窒素ガスのみを用いることによ
って内部電極還元処理時に誘電体が同時に還元してしま
う現象を防止し、さらに焼成時に一部電極表面を酸化さ
せて誘電体層と反応させることにより、誘電体のち密
性、誘電体層と電極層の間の密着性を改善し、所期の特
性を有する素子を製造でき、また焼成時の雰囲気制御が
容易であるため、量産性が向上する。
実施例−１ 誘電体として次に示す組成式で表わされる材料Ａ〜Ｄに
銅酸化物を所定量加えた組成物を用いた。
Ａ：Ｐb1.03（Ｍg1/3Ｎb2/3）0.80Ｔi0.14 （Ｎi1/2Ｗ1/2）0.06Ｏ3.03 Ｂ：Ｐb0.96Ｓr0.07）（Ｎi1/3Ｎb2/3）0.62 Ｔi0.38Ｏ3.03 Ｃ：（Ｐb1.00Ｃa0.03）（Ｍg1/3Ｎb2/3）0.48 Ｔi0.30（Ｚn1/2Ｗ1/2）0.30Ｏ3.03 Ｄ：（Ｐb0.87Ｂa0.18）（Ｚn1/3Ｎb2/3）0.70 Ｔi0.20（Ｍg1/2Ｗ1/2）0.10Ｏ3.05 誘電体粉末は通常のセラミック製造方法に従い製造し
た。仮焼条件は７５０℃２時間とした。粉砕は直径0.５
mmのジルコニア質玉石を用い、平均粒体粒径が0.２μｍ
となるよう粉砕した。粉砕した粉末は５ｗｔ％のブチラ
ール樹脂５０ｗｔ％の有機溶剤とともに混合し厚さ３０
μｍのグリーンシートに成形した。内部電極としては次
に示す組成式で表わされる材料Ｅ、Ｆを出発原料とし
た。
Ｅ：Ｃu2Ｏ Ｆ：ＣuO−３ｗｔ％Ag Ｃu2Ｏ、ＣuOおよびAgは粒径0.５〜2.０μｍのものを用
い所定比に混合した後粉体重量に対し５ｗｔ％のセルロ
ース樹脂、３０ｗｔ％の溶剤とともに三本ロールで混練
し電極ペーストとしスクリーン印刷法を用いてグリーン
シート上に内部電極パターンを印刷した。これを電極が
交互に引き出されるように積層し、上下に無効層を積層
したのち切断した。
このようにして作製した積層体を磁器容器中に粗粒マグ
ネシアを敷いたうえにのせ水素ガス中１８０℃で５時間
処理し内部電極の金属化をおこなった。つぎにこの積層
体を金属化処理をした磁器容器にいれたまま0.０１５％
の酸素を含有する窒素ガスを流した管状炉中で焼成し
た。管状炉中のガス流量は３０cm／分とし、試料の最高
温度保持時間は２０分、昇温、降温速度は約６００℃／
時とした。
焼成後の素子は内部電極露出面をバレル研磨したのちガ
ラスフリットを含有した金属銅電極ペーストを内部電極
露出端面を覆うようにして塗布し乾燥後窒素中６００℃
で７分処理し外部電極を焼き付けた。
積層コンデンサ素子の外形は2.８mm×1.４mm×0.７mmで
有効電極面積は１層あたり1.３１mm2、電極層の厚みは
2.０μｍ、誘電体層は１層あたり２２μｍで有効層は５
層、上下に無効層を１１層ずつ設けた。
積層コンデンサ素子は容量、ｔａｎδを１Ｖ１ＫHzと１
ＭHzの交流電圧を印加し測定した。また抵抗率は５０Ｖ
の直流電圧を印加後１分値から求めた。さらに素子をガ
ラス−エポキシ基板上の銅配線部に半田づけし、８０℃
湿度８５％の雰囲気下で２５Ｖの直流電圧を印加し５０
０時間経過したのち素子の抵抗値を測定し、抵抗値が１
×１０8Ω以下に低下したものを不良とみなす加速寿命
試験を実施した。
また試料は作用の項で述べた様に焼成中に内部電極より
銅が酸化して誘電体中に拡散する。このため誘電体粉末
合成時に添加した組成以上に酸化銅含有量が増加する。
焼成後の試料の銅含有量は試料の研磨断面の内部電極に
はさまれた部分の電子線によって励起された特性Ｘ線の
波長分散法による測定により予め作成した検量線より求
めた。分析部は約直径２μｍ程度の部分であり５点測定
の平均値を組成とした。
第１表に誘電体組成、Ｃu2Ｏ添加量、焼成後のＣu2Ｏ含
有量、内部電極組成、焼成温度、素子の容量、ｔａｎδ
（１Ｋｈｚと１Ｍｈｚ）、抵抗値、加速寿命不良数（１
６ケ中）を示す。また比較例（番号６、１１）として、
銅含有量が本発明の範囲（0.６５０＜ｃ≦5.２００、但
しｃはＣｕのＣu2Ｏ換算したときの他成分に対する重量
％）外のものを示す。
第１表より明らかなように焼成後の銅含有量が上記範囲
に含まれる物は容量、ｔａｎδ、絶縁抵抗などの素子特
性を大きく低下させることなく加速寿命試験での不良数
を減少させる。焼成後の銅含有量が0.６５％以下のもの
は不良数が大きい。なお、2.２％以上のものは容量、ｔ
ａｎδ、絶縁抵抗がいずれも低下するものの、不良数は
小さい。
実施例−２ 誘電体組成物としては実施例−１に記載のＡの組成物と
し、これにＣu2Ｏを0.７ｗｔ％添加したものを用いた。
電極材料としては実施例−１に記載のＥを用いた。誘電
体粉末の作成、シート化、内部電極の印刷、積層体の構
成と積層方法、特に下記に述べる以外の還元、焼成プロ
セス、その他は実施例−１と同様とした。
内部電極の還元には高純度の水素ガスを用い、所定温度
で所定時間処理した。
これを所定濃度の酸素を含有する窒素ガス中および0.０
１５％の酸素を含有する窒素ガスを７００℃のスポンジ
チタンで脱酸素処理したガスで８９０℃で焼成した。脱
酸素処理したガスは酸素含有率は１ppm以下であった。
この後外部電極の焼付けを行い実施例−１同様に特性を
評価した。
第２表に内部電極還元温度、時間、焼成時の雰囲気ガス
酸素含有量、焼成後のＣu2Ｏ含有量、素子容量、ｔａｎ
δ（１Ｋｈｚと１Ｍｈｚ）、抵抗値、加速寿命不良数
（１６ケ中）を示す。
第２表より明らかなように焼成条件が本発明範囲（還元
雰囲気：１１０℃以下３００℃以上、焼成時の雰囲気中
の酸素含有率：0.１００％以下）内に含まれる物は容
量、ｔａｎδ、絶縁抵抗などの素子特性を大きく低下さ
せることなく加速寿命試験での不良数を減少させる。還
元時の温度が１１０℃より低いもの３００℃より高いも
の、また焼成時の雰囲気中の酸素含有量が0.１００％よ
り大きいものは不良数、容量、ｔａｎδ、絶縁抵抗がい
ずれも低下する。
発明の効果 本発明は、窒素中で焼成しても素子の寿命特性が劣化せ
ず、焼成雰囲気の制御が容易で量産性にすぐれた積層コ
ンデンサ素子とその製造方法を提供することができる。
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中谷 誠一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 寺田 幸男 大阪府門真市大字門真1006番地 松下電器 産業株式会社内

Claims (2)

    【特許請求の範囲】
  1. 【請求項１】誘電体磁器を介して少なくとも２層以上の
    内部電極層を積層し交互に引き出した積層コンデンサ素
    子において、誘電体磁器層として、Ｐｂ、Ｃａ、Ｓｒ、
    およびＢａからなる群Ａから選ばれた成分Ｘと、Ｍｇ、
    Ｎｉ、Ｚｎ、Ｔｉ、Ｔａ、Ｎｂ、およびＷからなる群Ｂ
    から選ばれた成分Ｙと、Ｃｕとの三者の成分を含む酸化
    物からなる組成物であって、Ｘは少なくともＰｂを含
    み、Ｙは群Ｂの成分の少なくとも２種を含み、Ｘのモル
    数の合計をａ、Ｙのモル数の合計をｂとしたとき、 0.９８５≦ａ／ｂ≦1.１１０ であり、さらにＣｕのＣｕ２Ｏ換算したときの他成分に
    対する重量％をｃ％としたとき、 0.６５０＜Ｃ≦5.２００ であるような組成物を用い、内部電極層に銅または銅を
    主成分とする合金を用いたことを特徴とする積層コンデ
    ンサ素子。
  2. 【請求項２】銅内部電極の出発原料に銅酸化物を用い、
    焼成温度より低い温度であらかじめ内部電極を還元し金
    属化した後、焼成する積層コンデンサ素子の製造方法に
    おいて、内部電極の還元を１１０℃以上３００℃以下の
    還元雰囲気下で行い、かつ素子の焼成を酸素含有率0.１
    ００％以下の窒素中で行なうことを特徴とする請求項１
    記載の積層コンデンサ素子の製造方法。
JP1124830A 1989-05-18 1989-05-18 積層コンデンサ素子とその製造方法 Expired - Fee Related JPH0650701B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1124830A JPH0650701B2 (ja) 1989-05-18 1989-05-18 積層コンデンサ素子とその製造方法
US07/525,024 US5036424A (en) 1989-05-18 1990-05-18 Multilayer ceramic capacitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1124830A JPH0650701B2 (ja) 1989-05-18 1989-05-18 積層コンデンサ素子とその製造方法

Publications (2)

Publication Number Publication Date
JPH02303107A JPH02303107A (ja) 1990-12-17
JPH0650701B2 true JPH0650701B2 (ja) 1994-06-29

Family

ID=14895153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1124830A Expired - Fee Related JPH0650701B2 (ja) 1989-05-18 1989-05-18 積層コンデンサ素子とその製造方法

Country Status (2)

Country Link
US (1) US5036424A (ja)
JP (1) JPH0650701B2 (ja)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04221888A (ja) * 1990-12-21 1992-08-12 Matsushita Electric Ind Co Ltd セラミック配線基板とその製造方法
US5072329A (en) * 1991-04-01 1991-12-10 Avx Corporation Delamination resistant ceramic capacitor and method of making same
US5179773A (en) * 1991-08-30 1993-01-19 Bmc Technology Corporation Process of manufacturing multilayer ceramic capacitors
KR100215861B1 (ko) * 1996-03-13 1999-08-16 구본준 유전체 박막 제조방법 및 이를 이용한 반도체 장치제조방법
BR9709333A (pt) * 1996-05-21 1999-08-10 Siemens Aktienesellschaft Condensador de camadas múltiplas com alta capacidade específica e processo e produção para o mesmo
JP2998639B2 (ja) * 1996-06-20 2000-01-11 株式会社村田製作所 積層セラミックコンデンサ
JP3039403B2 (ja) * 1996-12-06 2000-05-08 株式会社村田製作所 積層セラミックコンデンサ
DE69841227D1 (de) * 1997-11-18 2009-11-19 Panasonic Corp Mehrschichtprodukt, Kondensator und Verfahren zur Herstellung des Mehrschichtprodukts
US6243254B1 (en) * 1998-08-11 2001-06-05 Murata Manufacturing Co., Ltd. Dielectric ceramic composition and laminated ceramic capacitor using the same
US6470545B1 (en) 1999-09-15 2002-10-29 National Semiconductor Corporation Method of making an embedded green multi-layer ceramic chip capacitor in a low-temperature co-fired ceramic (LTCC) substrate
KR100335494B1 (ko) 1999-10-30 2002-05-08 윤종용 Ｂｓｔ 유전막에 구리를 함유한 커패시터 및 그 제조방법
JP3391322B2 (ja) * 1999-12-10 2003-03-31 株式会社村田製作所 積層コンデンサ及びその製造方法
US6556422B2 (en) * 2000-07-05 2003-04-29 Samsung Electro-Mechanics Co., Ltd. Dielectric ceramic composition, multi-layer ceramic capacitor using the same, and manufacturing method therefor
JP3965300B2 (ja) * 2002-01-18 2007-08-29 Ｎｅｃトーキン株式会社 Ｎｂ固体電解コンデンサおよびその製造方法
CN1716473B (zh) * 2004-06-29 2010-05-05 王蕾雅 一种以真空溅镀法制作多层陶瓷电容器的方法
US20060169389A1 (en) * 2005-01-31 2006-08-03 Barber Daniel E Electrode paste for thin nickel electrodes in multilayer ceramic capacitors and finished capacitor containing same
WO2012099193A1 (ja) * 2011-01-21 2012-07-26 株式会社村田製作所 積層セラミックコンデンサおよび積層セラミックコンデンサの製造方法
JP2018037473A (ja) * 2016-08-30 2018-03-08 株式会社村田製作所 積層セラミックコンデンサ
CN110024498B (zh) * 2016-12-08 2021-12-31 株式会社村田制作所 多层陶瓷基板以及电子装置
JP7089402B2 (ja) * 2018-05-18 2022-06-22 太陽誘電株式会社 積層セラミックコンデンサおよびその製造方法
JP7145652B2 (ja) * 2018-06-01 2022-10-03 太陽誘電株式会社 積層セラミックコンデンサおよびその製造方法
JP7446705B2 (ja) * 2018-06-12 2024-03-11 太陽誘電株式会社 積層セラミックコンデンサおよびその製造方法
US11715602B2 (en) * 2019-08-02 2023-08-01 Samsung Electro-Mechanics Co., Ltd. Multilayer electronic component
CN114751743B (zh) * 2022-04-29 2023-03-07 电子科技大学 一种多层陶瓷电容器用改性Ni-Ti-Ta介质材料及其低温制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4063341A (en) * 1975-07-09 1977-12-20 E. I. Du Pont De Nemours And Company Process for making multilayer capacitors
US4714570A (en) * 1984-07-17 1987-12-22 Matsushita Electric Industrial Co., Ltd. Conductor paste and method of manufacturing a multilayered ceramic body using the paste
JPS62210613A (ja) * 1986-03-12 1987-09-16 松下電器産業株式会社 積層コンデンサ素子
US4855266A (en) * 1987-01-13 1989-08-08 E. I. Du Pont De Nemours And Company High K dielectric composition for use in multilayer ceramic capacitors having copper internal electrodes

Also Published As

Publication number Publication date
US5036424A (en) 1991-07-30
JPH02303107A (ja) 1990-12-17

Similar Documents

Publication Publication Date Title
JPH0650701B2 (ja) 積層コンデンサ素子とその製造方法
EP0814486B1 (en) Dielectric ceramic composition and monolithic ceramic capacitor using same
EP0690462B1 (en) Multilayer ceramic capacitor and process for producing the same
EP0817216B1 (en) Dielectric ceramic composition and monolothic ceramic capacitor using same
CN115148499A (zh) 陶瓷电子器件及其制造方法
EP1134203B1 (en) Dielectric ceramic composition, electronic device, and method for producing the same
EP1705674B1 (en) Method of production of multilayer ceramic electronic device
US4809131A (en) Low temperature sintered ceramic capacitor having a high resistivity and bending strength, and method of manufacture
US4809130A (en) Low temperature sintered ceramic capacitor having a high resistivity and bending strength, and method of manufacture
JPH0528891B2 (ja)
JPH05335177A (ja) 積層型電子部品の製造方法
JPH06251990A (ja) 磁器コンデンサ及びその製造方法
JP2831894B2 (ja) 磁器コンデンサ及びその製造方法
JP4376508B2 (ja) 誘電体磁器組成物および電子部品
JP2514358B2 (ja) 磁器コンデンサ
JP3029502B2 (ja) 磁器コンデンサ及びその製造方法
JP2514359B2 (ja) 磁器コンデンサ
JP2938671B2 (ja) 磁器コンデンサ及びその製造方法
JP2521855B2 (ja) 磁器コンデンサ及びその製造方法
JPH06251987A (ja) 磁器コンデンサ及びその製造方法
JPH0515291B2 (ja)
JPH0646620B2 (ja) 積層コンデンサ素子の製造方法
JPH0831394B2 (ja) 積層コンデンサ素子の製造方法
JPH05282917A (ja) 磁器コンデンサ及びその製造方法
JPS63265411A (ja) 積層コンデンサ素子の製造方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees