JPH065391A - Particle accelerator vacuum chamber heater mounting structure - Google Patents

Abstract

(57) [Summary] [Constitution] In the heater mounting structure of the particle accelerator vacuum chamber of the present invention, a plurality of protrusions 13, 13 are formed on the outer surface 12a of the vacuum chamber 11, and these protrusions 13,
It is characterized in that the heater 2 is fitted and fixed between 13 and. Further, instead of forming the plurality of protrusions 13, 13, grooves may be formed. [Effect] The heater can be firmly fixed in a state in which it is in close contact with the outer surface of the vacuum chamber. Further, even if the sheath portion of the heater is made of a material that cannot be welded, it can be firmly fixed. In addition, the heat transfer area can be increased by bringing the heater into close contact with the outer surface. Further, there is also an excellent effect that a mounting bracket is unnecessary and welding work is unnecessary.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater mounting structure for a vacuum chamber of a particle accelerator such as a synchrotron.

[0002]

2. Description of the Related Art In recent years, in various fields such as manufacturing of VLSI, diagnosis in the medical field, molecular analysis, structural analysis, etc., synchrotron radiation (Synchrotron Radial Ratio)
n) The SOR lithography technique using light (abbreviated as SOR light) is considered promising. This SOR light impinges on an electron beam accelerated to near the speed of light by a linear accelerator (linac) into a storage ring, and deflects the electron beam while accelerating the electron beam while giving energy to the electron beam. It is generated when deflected by an electromagnet, and has excellent features such as high beam output, strong directivity and high brightness. Then, in the semiconductor industry such as VLSI, the generated SOR light is sent to a semiconductor fine processing apparatus such as an exposure apparatus through a beam channel and used as a light source for fine processing of VLSI.

The storage ring is a ring-shaped structure in which vacuum chambers made of aluminum are sequentially connected by flanges so as to form a ring shape. In order to maintain the inside of the vacuum chamber at an ultra-high vacuum, heat is applied to an electric heater or a channel of the chamber. Heat degassing by flowing water. Further, the shape of the vacuum chamber is designed variously depending on the place where it is arranged. As a structure in which a sheath heater is attached to this vacuum chamber, for example, as shown in FIG. 5, a sheath heater 2 whose outer tube is made of aluminum is disposed at a predetermined position on the outer surface 1a of the vacuum chamber 1, and the sheath heater 2 has a predetermined structure. A fitting 3 made of an aluminum plate having a cross section of approximately Ω is fitted at the position of, and the fitting 3 is welded 4 to the outer surface 1a, or the sheath heater 2 disposed on the outer surface 1a is directly attached as shown in FIG. A structure in which the outer surface 1a is welded 5 is known.

[0004]

However, the conventional sheath heater mounting structure has the following problems. For example, in the structure using the mounting bracket 3, since the mounting bracket 3 is fitted to the sheath heater 2 and then the mounting bracket 3 is welded to the outer surface 1a, the welding heat may cause distortion in the vacuum chamber 1. was there. Further, there is a problem that the vacuum chamber 1 and the sheath heater 2 have poor adhesion and a large heat transfer area cannot be taken. There is also a problem that an extra member such as the mounting member 3 is required, and that the welding work takes a long time and the work efficiency is reduced.

Further, in the structure in which the sheath heater 2 is directly welded 5 to the outer surface 1a, the welding heat may cause distortion in the vacuum chamber 1. Further, the vacuum chamber 1 and the sheath heater 2 have poor adhesion, and there is a problem that a large heat transfer area cannot be taken as in the case of using the mounting bracket 3. Further, since the vacuum chamber 1 is made of aluminum, the material of the sheath that can be welded to the outer surface 1a is limited, and it takes a long time for the welding work, resulting in a decrease in work efficiency.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a heater mounting structure for a particle accelerator vacuum chamber, which can solve the conventional problems.

[0007]

In order to solve the above problems, the present invention adopts the following heater attachment structure for a particle accelerator vacuum chamber. That is, the heater mounting structure of the particle accelerator vacuum chamber according to claim 1 is characterized in that a plurality of protrusions are formed on the outer surface of the vacuum chamber, and the heater is fitted and fixed between these protrusions.

The heater mounting structure of the particle accelerator vacuum chamber according to claim 2 is characterized in that a groove is formed on the outer surface of the vacuum chamber, and the heater is fitted and fixed in this groove.

[0009]

In the heater mounting structure of the particle accelerator vacuum chamber according to the first aspect of the present invention, the heater is fitted between the plurality of protrusions formed on the outer surface of the vacuum chamber.
This allows the heater to be accurately and easily fixed in place on the outer surface of the vacuum chamber.

Further, in the heater mounting structure of the particle accelerator vacuum chamber according to the second aspect, the heater is fitted in the groove formed on the outer surface of the vacuum chamber. This allows the heater to be accurately and easily fixed in place on the outer surface of the vacuum chamber.

[0011]

1 is a sectional view showing a heater mounting structure of a vacuum chamber of a synchrotron (particle accelerator) of the present invention. The vacuum chamber 11 has an outer peripheral surface 12a of a chamber body 12 made of aluminum and having a substantially circular cross section.
In addition, two projecting pieces (projecting sections) 13 for fitting the sheath heater 2 therein are integrally formed.

In order to fix the sheath heater 2 to the outer peripheral surface 12a of the vacuum chamber 11, first, as shown in FIG. 1, the sheath heater 2 is fitted between the two projecting pieces 13, 13 and the sheath heater 2 is attached. It is brought into close contact with the outer peripheral surface 12a. Then, as shown in FIG.
The tip portions 13a, 13a of 3 are bent inward (in a direction in which they approach each other) and pressed against the back surface of the sheath heater 2 to fix the sheath heater 2 at a predetermined position on the outer peripheral surface 12a.

According to the heater mounting structure of the vacuum chamber 11 of this embodiment, the outer peripheral surface 1 of the chamber body 12 is
Since the two projecting pieces 13, 13 for fitting the sheath heater 2 into the 2a are integrally formed, the sheath heater 2 can be accurately and easily fixed in a close contact with the outer circumferential surface 11a of the vacuum chamber 11 at a predetermined position. be able to. Also,
Even if the sheath portion of the sheath heater 2 is made of a material that cannot be welded, it can be fixed accurately and easily. Also,
The heat transfer area can be increased by bringing the sheath heater 2 into close contact with the outer peripheral surface 12a. Further, there is also an excellent effect that the mounting bracket 3 is unnecessary and welding work is unnecessary.

FIG. 3 is a sectional view showing a vacuum chamber 21 which is a modified embodiment of the vacuum chamber 11. This vacuum chamber 21 is provided with two sheath heaters 2 for fitting the sheath heater 2 at respective positions facing each other on the outer peripheral surface 22a of the chamber body 22 made of aluminum and having a substantially circular cross section with respect to the center point of the chamber body 22. Protrusion 1
3 and 13 are integrally formed. The vacuum chamber 21 is provided with a cooling water pipe 23 at each intermediate point between the protruding pieces 13a, 13a and the protruding pieces 13b, 13b on the outer peripheral surface 22a.

Also in this vacuum chamber 21, the same operation and effect as the vacuum chamber 11 can be achieved.

FIG. 4 is a sectional view showing a vacuum chamber 31 which is a modified embodiment of the vacuum chambers 11 and 21. In this vacuum chamber 31, two projecting pieces 13, 13 for fitting the sheath heater 2 are integrally formed at respective positions facing each other on an outer peripheral surface 32a of a chamber main body 32 made of aluminum and having a substantially rectangular cross section. It is a thing.

Also in this vacuum chamber 31, the same operation and effect as the vacuum chambers 11 and 21 can be achieved.

The vacuum chamber 11 (2 of these embodiments is
1, 31) in the heater mounting structure, the outer peripheral surface 12a (22a, 22a, 22a) of the chamber body 12 (22, 32)
32a), the two projecting pieces 13 and 13 for fitting the sheath heater 2 are integrally formed.
Even if a groove is formed instead of 13, similar effects can be obtained. In this case, the size of the groove may be large enough to fit the sheath heater 2 therein.

[0019]

As described above, according to the heater mounting structure of the particle accelerator vacuum chamber according to claim 1 of the present invention, a plurality of protrusions are formed on the outer surface of the vacuum chamber, and the protrusions are formed between these protrusions. Since the heater is fitted and fixed, the heater can be fixed accurately and easily in a state of being in close contact with the outer surface of the vacuum chamber. Even if the sheath portion of the heater is made of a material that cannot be welded, it can be fixed accurately and easily. In addition, the heat transfer area can be increased by bringing the heater into close contact with the outer surface. Further, there is also an excellent effect that a mounting bracket is unnecessary and welding work is unnecessary.

Further, according to the heater mounting structure of the particle accelerator vacuum chamber of the second aspect, since the groove is formed on the outer surface of the vacuum chamber and the heater is fitted and fixed in the groove, the heater is vacuumed. It can be fixed accurately and easily in a state of being in close contact with the inner surface of the groove of the chamber. Even if the sheath portion of the heater is made of a material that cannot be welded, it can be fixed accurately and easily. Further, the heat transfer area can be increased by bringing the heater into close contact with the inner surface of the groove. Further, there is also an excellent effect that a mounting bracket is unnecessary and welding work is unnecessary.

As described above, it is possible to provide a heater mounting structure for a particle accelerator vacuum chamber that can take a large heat transfer area and that the material of the sheath is not limited and can be fixed accurately and easily. .

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a heater mounting structure of a particle accelerator vacuum chamber of the present invention.

FIG. 2 is a cross-sectional view showing a state in which a heater is fixed in the heater mounting structure of the particle accelerator vacuum chamber of the present invention.

FIG. 3 is a sectional view showing a modified example of the vacuum chamber of the heater mounting structure of the particle accelerator vacuum chamber of the present invention.

FIG. 4 is a cross-sectional view showing a modified example of the vacuum chamber of the heater attachment structure of the particle accelerator vacuum chamber of the present invention.

FIG. 5 is a perspective view showing a heater mounting structure of a conventional particle accelerator vacuum chamber.

FIG. 6 is a perspective view showing a heater mounting structure of a conventional particle accelerator vacuum chamber.

[Explanation of symbols] 11 vacuum chamber 12 chamber body 12a outer peripheral surface 2 sheath heater 13 projecting piece (projection) 13a tip 21 vacuum chamber 22 chamber main body 22a outer peripheral surface 23 cooling water pipe 31 vacuum chamber 32 chamber main body 32a outer peripheral surface

Claims (2)

[Claims] 1. A structure for attaching a heater to a vacuum chamber of a particle accelerator, wherein a plurality of protrusions are formed on an outer surface of the vacuum chamber, and the heater is fitted and fixed between these protrusions. Particle accelerator vacuum chamber heater mounting structure. 2. A structure for attaching a heater to a vacuum chamber of a particle accelerator, wherein a groove is formed on an outer surface of the vacuum chamber, and the heater is fitted and fixed in the groove to fix the vacuum chamber of the particle accelerator. Heater mounting structure.