JPH065568B2 - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH065568B2 JPH065568B2 JP19172486A JP19172486A JPH065568B2 JP H065568 B2 JPH065568 B2 JP H065568B2 JP 19172486 A JP19172486 A JP 19172486A JP 19172486 A JP19172486 A JP 19172486A JP H065568 B2 JPH065568 B2 JP H065568B2
- Authority
- JP
- Japan
- Prior art keywords
- ferromagnetic alloy
- thin film
- substrate
- head
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、磁気記録再生の電磁変換器すなわち磁気ヘッ
ドに係わり、特に、広帯域記録再生を行うVTR用の薄膜
形ビデオヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic transducer for magnetic recording / reproducing, that is, a magnetic head, and more particularly to a thin film type video head for a VTR for wideband recording / reproducing.
従来、強磁性合金多層薄膜形ヘッドは、熱膨張係数が強
磁性合金とほぼ一致する非磁性の金属あるいはセラミッ
クの基板に、強磁性合金薄膜と電気的絶縁膜とを交互に
スパッタリングあるいは蒸着等の手段により付着させて
多層膜を構成し、これをコア材料として使用していた。
また、同種の基板を当て板として用いサンドウィッチ構
造としていた。これらの強磁性合金多層薄膜形ヘッドは
例えば以下の文献に記載されている。柴谷ほか「スパッ
タリングによる磁性合金膜の製作とその狭トラックビデ
オヘッドへの応用」電子通信学会論文誌57C-9〔p325〕
(昭49),川野ほか「メタルテープ用センダストビデオ
ヘッド」テレビジョン学会全国大会予稿8-3〔p197〕
(昭56),黒江ほか「スパッタアモルファスビデオヘッ
ド」電子通信学会総合全国大会予稿239〔p1-241〕(昭5
9),斉藤ほか「Fe-Al-Si合金スパッタ膜ビデオヘッ
ド」日本応用磁気学会学術講演会概要集29PA-2〔p288〕
(昭60)。Conventionally, a ferromagnetic alloy multi-layer thin film head has a non-magnetic metal or ceramic substrate whose coefficient of thermal expansion is almost the same as that of the ferromagnetic alloy, and the ferromagnetic alloy thin film and the electrically insulating film are alternately sputtered or evaporated. It was attached by means to form a multilayer film, which was used as the core material.
Further, the same type of substrate is used as a backing plate to have a sandwich structure. These ferromagnetic alloy multilayer thin film heads are described in the following documents, for example. Shibatani et al. "Fabrication of magnetic alloy film by sputtering and its application to narrow track video head" IEICE Transactions 57C-9 [p325]
(Sho 49), Kawano et al. "Sendust video head for metal tape" Proceedings of the National Conference of the Television Society of Japan 8-3 [p197]
(Showa 56), Kuroe et al., "Sputter Amorphous Video Head," Proceedings of the IEICE General Conference 239 [p1-241] (Show 5
9), Saito et al. "Fe-Al-Si Alloy Sputtered Film Video Head" Proceedings of the Japan Society for Applied Magnetics Academic Conference 29PA-2 [p288]
(Sho 60).
このような磁気ヘッドの構成では、 コア主磁路は強磁性合金多層薄膜のみで構成され、そ
の断面幅は膜厚と同じとなり極めて狭い。また、生産技
術上、後ギャップ部の突き合わせ工程でずれを生じる
と、さらに狭く断続的となって磁束伝達効率が低下す
る。第4図はその様子を示したもので、図において、1
は基板、1′は当て基板、2は強磁性合金多層膜部、3
は後ギャップである。基板1、当て基板1′は非磁性材
料なので、後ギャップ部で膜のずれを生ずると、その分
だけ磁束伝達効率が低下する。In such a structure of the magnetic head, the core main magnetic path is composed of only the ferromagnetic alloy multilayer thin film, and the cross-sectional width thereof is the same as the film thickness, which is extremely narrow. Further, in terms of production technology, if a deviation occurs in the step of abutting the rear gap portion, it becomes narrower and intermittent, and the magnetic flux transmission efficiency decreases. Fig. 4 shows the situation. In the figure, 1
Is a substrate, 1'is a contact substrate, 2 is a ferromagnetic alloy multilayer film portion, 3
Is the back gap. Since the substrate 1 and the backing substrate 1'are non-magnetic materials, if the film shifts in the rear gap portion, the magnetic flux transmission efficiency is reduced accordingly.
強磁性合金多層薄膜と両基板は、異種材料であるた
め、磁気テープと摺動した時、摩耗特性の違いから偏摩
耗(摩耗差による段差)を生じる。一般に基板1,1′
には高硬度耐摩耗材料が使用されるため、第5図に示す
ように主磁路を構成する強磁性合金多層薄膜2には凹み
2Aを生じ、磁気テープ4との間隔が大きくなってスペー
ス損失を増大せしめると同時に、接触が不安定となる。Since the ferromagnetic alloy multilayer thin film and the two substrates are made of different materials, when they slide on the magnetic tape, uneven wear (step difference due to difference in wear) occurs due to difference in wear characteristics. Substrate 1,1 '
Since a high hardness wear-resistant material is used for the ferromagnetic alloy multilayer thin film 2 forming the main magnetic path as shown in FIG.
2A is generated, the space between the magnetic tape 4 and the magnetic tape 4 increases, and the space loss increases. At the same time, the contact becomes unstable.
また、この強磁性合金多層薄膜と薄膜付着用基板とは
異種材料であるため、厳密には熱膨張係数などの物理特
性は一致せず、スパッタリングや蒸着等の工程中での付
着強度が弱い。さらに機械加工、ギャップ成形溶着、熱
処理あるいはヘッド製造工程中でのハンドリングによ
り、薄膜にクラックや欠け等の損傷を与える場合が多
く、はなはだしくは薄膜の欠損、脱落を生じる。Further, since the ferromagnetic alloy multilayer thin film and the thin film deposition substrate are different materials, strictly speaking, the physical properties such as the coefficient of thermal expansion do not match, and the adhesion strength during the processes such as sputtering and vapor deposition is weak. Further, mechanical processing, gap forming welding, heat treatment, or handling during the head manufacturing process often causes damages such as cracks and chips in the thin film, which may cause the thin film to be lost or dropped.
という性能上と生産技術上の問題があった。There was a problem in terms of performance and production technology.
本発明は上述した従来の欠点、すなわち後ギャップ部の
ずれによる磁束伝達効率の低下、ヘッドの偏摩耗による
スペース損失の増大と接触の不安定および強磁性合金多
層膜の基板への付着強度の弱さなどを解決し、記録再生
特性、特に感度が向上しかつ生産性にすぐれた磁気ヘッ
ドを提供することを目的とする。The present invention has the above-mentioned conventional drawbacks, that is, a decrease in magnetic flux transmission efficiency due to a shift in the rear gap portion, an increase in space loss due to uneven wear of the head, unstable contact, and weak adhesion strength of the ferromagnetic alloy multilayer film to the substrate. It is an object of the present invention to provide a magnetic head having improved recording / reproducing characteristics, particularly sensitivity, and excellent productivity.
このような目的を達成するために、本発明の磁気ヘッド
は強磁性合金多層薄膜をコア材料とする磁気ヘッドにお
いて、基板を強磁性合金多層薄膜作成用強磁性合金母
材、もしくは強磁性合金母材と同一もしくはほぼ同じ摩
耗特性および熱膨張係数を有する強磁性合金により形成
したことを特徴とする。In order to achieve such an object, the magnetic head of the present invention is a magnetic head using a ferromagnetic alloy multilayer thin film as a core material, and the substrate is a ferromagnetic alloy base material for preparing a ferromagnetic alloy multilayer thin film or a ferromagnetic alloy base material. It is characterized by being formed of a ferromagnetic alloy having the same or substantially the same wear characteristics and thermal expansion coefficient as the material.
本発明によればコア主磁路は、強磁性合金多層薄膜とそ
の基板として用いる強磁性合金からなっているので、そ
の断面幅を大きくすることができる。また後ギャップ部
の突き合わせ工程でのずれがあっても、主磁路幅が広い
ので断続にならず、磁束伝達能率は低下しない。また強
磁性合金多層薄膜と両基板は、同一あるいは類似の材料
であるため、磁気テープと摺動した時、摩耗特性は同じ
となり偏摩耗を生じない。したがって、強磁性合金多層
薄膜には凹みを発生することはなく、スペース損失のな
いすなわちヘッドとテープの接触の良い状態で動作す
る。さらに熱膨張係数などの物理特性はほぼ一致し、ス
パッタリングや蒸着等の工程中での付着強度が強い。し
たがって、ヘッド製造工程中で損傷を受けることが少な
い。According to the present invention, the core main magnetic path is composed of the ferromagnetic alloy multilayer thin film and the ferromagnetic alloy used as the substrate thereof, so that the cross-sectional width can be increased. Further, even if there is a deviation in the abutting process of the rear gap portion, the main magnetic path width is wide, so that the magnetic flux transmission efficiency does not decrease because the main magnetic path width is not intermittent. Further, since the ferromagnetic alloy multilayer thin film and both substrates are made of the same or similar material, when they slide on the magnetic tape, they have the same wear characteristics and do not cause uneven wear. Therefore, the ferromagnetic alloy multi-layered thin film does not have any dents and operates in a state where there is no space loss, that is, the contact between the head and tape is good. Furthermore, the physical properties such as the coefficient of thermal expansion are almost the same, and the adhesion strength in the processes such as sputtering and vapor deposition is strong. Therefore, it is less likely to be damaged during the head manufacturing process.
以下に、本発明の実施例を図面により説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第1の実施例の斜視図を第1図に示す。強磁性合金多層
薄膜付着用基板11およびサンドウィッチ構造とするため
の当て基板11′は、基板11にスパッタリングあるいは蒸
着等により付着されてコア主磁路を構成する強磁性合金
多層薄膜12の母材(同一材料)、またはこれと組成が近
く熱膨張係数および摩耗特性がほぼ一致する類似の強磁
性合金、からなり、通常の磁気ヘッドと同様に、ギャッ
プ13、巻線窓14をもち、コア15の両側部に巻線16を施し
た構造である。この場合、トラック幅tは強磁性合金多
層薄膜12の膜厚と両基板11、11′の厚さを加えた寸法で
ある。このような磁気ヘッドコアは、例えば厚さ50μm
に切断研磨したセンダスト板あるいはセンダスト急冷薄
帯を基板11とし、その上に厚さ1ないし5μmのセンダ
ストと厚さ0.2μm程度のsio2を交互に繰返してスパッ
タリングまたは蒸着し、基板11と同じ当て基板11′によ
りサンドウィッチ構造にすることによって得られる。セ
ンダスト多層膜の層数はトラック幅に合わせて定める。
基板と多層膜における合金組成は同一であることが望ま
しいが、多少ずれても差支えない。基板および多層膜磁
性合金として、例えば非晶質Co-Zr-Nb合金を使用するこ
ともできる。A perspective view of the first embodiment is shown in FIG. The ferromagnetic alloy multilayer thin film deposition substrate 11 and the backing substrate 11 'for forming a sandwich structure are attached to the substrate 11 by sputtering, vapor deposition or the like to form the base material of the ferromagnetic alloy multilayer thin film 12 that constitutes the core main magnetic path ( The same material), or a similar ferromagnetic alloy having a similar composition and a similar thermal expansion coefficient and wear characteristics, and has a gap 13, a winding window 14 and a core 15 similar to a normal magnetic head. The structure is such that windings 16 are provided on both sides. In this case, the track width t is a dimension obtained by adding the film thickness of the ferromagnetic alloy multilayer thin film 12 and the thicknesses of both substrates 11 and 11 '. Such a magnetic head core has a thickness of, for example, 50 μm.
The sendust plate or sendust quenched ribbon that has been cut and polished as the substrate 11 is sputtered or vapor-deposited by alternately sending sendust having a thickness of 1 to 5 μm and sio 2 having a thickness of about 0.2 μm on the substrate 11, and applying the same as the substrate 11. It is obtained by forming a sandwich structure with the substrate 11 '. The number of layers of the sendust multilayer film is determined according to the track width.
It is desirable that the alloy compositions of the substrate and the multilayer film are the same, but there is no problem even if they are slightly different. As the substrate and the multilayer magnetic alloy, for example, an amorphous Co-Zr-Nb alloy can be used.
第2図に本発明の第2の実施例の斜視図を、第3図にそ
の上面図を示す。本実施例は高密度記録用ヘッドの場合
で、第1の実施例の両基板11、11′のギャップ近傍のみ
を両側から削り込んで凹部17を設け、トラック幅tを狭
くしたものである。この凹部にはガラス等を充填しても
よい。凹部17における基板11、11′の厚さは薄い程よ
い。FIG. 2 shows a perspective view of the second embodiment of the present invention, and FIG. 3 shows a top view thereof. This embodiment is a case of a high density recording head, in which only the vicinity of the gap of both substrates 11 and 11 'of the first embodiment is carved from both sides to form a concave portion 17 to narrow the track width t. The recess may be filled with glass or the like. The thinner the substrates 11, 11 'in the recess 17, the better.
次にこのヘッドの動作を説明する。巻線16に電流を流す
と、コア15に磁束が発生し、ギャップ13まで伝達され、
この先端部で洩れ磁界を生じて媒体を磁化(記録)す
る。また逆に媒体からの洩れ磁束をギャップ13で収集
し、コア15で伝達されて、巻線16が感応して(再生)電
圧が生じる。Next, the operation of this head will be described. When a current is passed through the winding 16, a magnetic flux is generated in the core 15 and transmitted to the gap 13,
A leakage magnetic field is generated at this tip to magnetize (record) the medium. On the contrary, the leakage magnetic flux from the medium is collected in the gap 13 and transmitted by the core 15, and the winding 16 senses (reproduce) voltage.
以上説明したように本発明のヘッド構成とすることによ
り、コア主磁路は、強磁性合金多層薄膜とその基板と
して用いる強磁性合金、からなり、その断面幅を大きく
することができる。また後ギャップ部の突き合わせ工程
でのずれがあっても、主磁路幅が広いので断続になら
ず、磁束伝達能率は低下しない。As described above, with the head configuration of the present invention, the core main magnetic path is composed of the ferromagnetic alloy multilayer thin film and the ferromagnetic alloy used as the substrate thereof, and its cross-sectional width can be increased. Further, even if there is a deviation in the abutting process of the rear gap portion, the main magnetic path width is wide, so that the magnetic flux transmission efficiency does not decrease because the main magnetic path width is not intermittent.
強磁性合金多層薄膜と両基板は、同一あるいは類似の
材料であるため、磁気テープと摺動した時、摩耗特性は
同じとなり偏摩耗を生じない。したがって、強磁性合金
多層薄膜には凹みを発生することはなく、スペース損失
のないすなわちヘッドとテープの接触の良い状態で動作
する。Since the ferromagnetic alloy multilayer thin film and both substrates are made of the same or similar material, when they slide on the magnetic tape, they have the same wear characteristics and do not cause uneven wear. Therefore, the ferromagnetic alloy multi-layered thin film does not have any dents and operates in a state where there is no space loss, that is, the contact between the head and tape is good.
また、この強磁性合金多層薄膜と強磁性合金多層薄膜
付着用基板とは、同一あるいは類似の材料であるため、
熱膨張係数などの物理特性はほぼ一致し、スパッタリン
グや蒸着等の工程中での付着強度が強い。したがって、
ヘッド製造工程中で損傷を受けることが少ない。Further, since the ferromagnetic alloy multilayer thin film and the ferromagnetic alloy multilayer thin film deposition substrate are the same or similar materials,
The physical properties such as the coefficient of thermal expansion are almost the same, and the adhesion strength is strong during the processes such as sputtering and vapor deposition. Therefore,
Less likely to be damaged during the head manufacturing process.
以上のような性能上および生産技術上における従来の薄
膜形ヘッドでの欠点を排除して、記録再生特性とくに感
度の向上と生産性の向上とを実現することができる。By eliminating the drawbacks of the conventional thin film type head in terms of performance and production technology as described above, it is possible to improve recording / reproducing characteristics, particularly sensitivity and productivity.
第1図は本発明の積層形ヘッドの一実施例を示す斜視
図、 第2図および第3図はそれぞれ第2の実施例(高密度記
録用)を示す斜視図および上面図、 第4図は従来の積層形ヘッドにおける後ギャップ部のず
れによる断続磁路の説明図。 第5図は従来の積層形ヘッドにおける偏摩耗によるスペ
ース損失増大を説明する断面図である。 1,11…基板、 1′,11′…当て基板、 2,12…強磁性合金多層薄膜、 3,13…ギャップ、 14…巻線窓、 15…コア、 16…巻線。FIG. 1 is a perspective view showing an embodiment of the laminated head of the present invention, and FIGS. 2 and 3 are perspective views and top views showing a second embodiment (for high density recording), respectively, and FIG. FIG. 4 is an explanatory diagram of an interrupted magnetic path due to a shift of a rear gap portion in a conventional laminated head. FIG. 5 is a cross-sectional view illustrating an increase in space loss due to uneven wear in a conventional laminated head. 1, 11 ... Substrate, 1 ', 11' ... Reliable substrate, 2, 12 ... Ferromagnetic alloy multilayer thin film, 3, 13 ... Gap, 14 ... Winding window, 15 ... Core, 16 ... Winding.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 白井 爲興 東京都世田谷区砧1丁目10番11号 日本放 送協会放送技術研究所内 (72)発明者 柴谷 弘道 東京都世田谷区砧1丁目10番11号 日本放 送協会放送技術研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shirai Aoki 1-10-11 Kinuta, Setagaya-ku, Tokyo Inside the Broadcasting Technology Laboratory, Japan Broadcasting Corporation (72) Inventor Hiromichi Shibata 1-10 Kinuta, Setagaya-ku, Tokyo No. 11 Inside the Japan Broadcasting Corporation Broadcasting Technology Laboratory
Claims (1)
ヘッドにおいて、基板を前記強磁性合金多層薄膜作成用
強磁性合金母材、もしくは前記強磁性合金母材と同一も
しくはほぼ同じ摩耗特性および熱膨張係数を有する強磁
性合金により形成したことを特徴とする磁気ヘッド。1. In a magnetic head using a ferromagnetic alloy multilayer thin film as a core material, the substrate has a ferromagnetic alloy base material for producing the ferromagnetic alloy multilayer thin film, or the same or substantially the same wear characteristics as the ferromagnetic alloy base material. A magnetic head formed of a ferromagnetic alloy having a coefficient of thermal expansion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19172486A JPH065568B2 (en) | 1986-08-18 | 1986-08-18 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19172486A JPH065568B2 (en) | 1986-08-18 | 1986-08-18 | Magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6348606A JPS6348606A (en) | 1988-03-01 |
| JPH065568B2 true JPH065568B2 (en) | 1994-01-19 |
Family
ID=16279431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19172486A Expired - Lifetime JPH065568B2 (en) | 1986-08-18 | 1986-08-18 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH065568B2 (en) |
-
1986
- 1986-08-18 JP JP19172486A patent/JPH065568B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6348606A (en) | 1988-03-01 |
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