JPH0657476U - Glass substrate rotation holding device - Google Patents

Abstract

(57) [Abstract] [PROBLEMS] To provide a rotation holding device capable of holding masks of different sizes while rotating without replacing parts. [Structure] The first rotary table 1 and the second rotary table 2 each have a radial arm 10 or 20 having a holding member 15 attached to the tip thereof. The holding members 15 are arranged to face each other with respect to the bolt 4, that is, the center of rotation. The length of the arm 10 or 20 is such that the holding member 15 is provided with respect to the four corners of the masks 11 to 14, that is, the four corners of the object to be rotated.
Are set to the corresponding dimensions. The first rotary table 1 and the second rotary table 2 are provided on the same rotary shaft.
The rotary table 1 can be moved in the axial direction with respect to the second rotary table and positioned at a predetermined position. The rotary table holding the mask to be processed is raised to a predetermined position to perform the predetermined processing.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a glass substrate rotation holding device, and more particularly to a glass substrate rotation holding device having an arm capable of holding glass substrates of plural sizes while rotating.

[0002]

[Prior art]

 It is known that a mask or reticle having a required pattern formed on a glass substrate is used when forming a thin film on a substrate such as a semiconductor, glass, or ceramic.

By the way, dust or particles adhere to the glass substrate (hereinafter referred to as a mask) during repeated use. If this dust or particles are left as they are, it becomes difficult to form a high quality thin film on the substrate. Therefore, after being used for a certain time or a certain number of times, cleaning is usually performed to remove these dusts or particles.

As an example of a cleaning device, a rotating device for mounting a mask, and a scrub head provided to face the surface of the mask mounted on the rotating device and cleaning the surface to remove dust or particles. Those having and are known. A brush or sponge-like cleaning part is provided on the surface of the scrub head facing the mask.

In this cleaning device, the mask is rotated by the rotating device, and the cleaning part of the scrub head is rotated in contact with the surface of the mask so that the entire surface of the mask can be cleaned uniformly. Has been done.

[0006]

[Problems to be Solved by the Invention] The above cleaning device has the following problems. The rotation device of the cleaning device is provided with a rotation holding device for holding the mask during rotation. By the way, masks have various shapes and sizes. For example, there are square masks having sides of 4.5 inches (about 114 mm), 5 inches (about 127 mm), 6 inches (152 mm), and 7 inches (about 180 mm), respectively.

Therefore, conventionally, a plurality of holding frames having different dimensions are prepared so that the masks of the respective sizes can be held, and the holding frames are replaced with appropriate holding frames according to the size of the mask to be cleaned. I was dealing with it. For this reason, every time the size of the mask to be cleaned changes, it is necessary to attach and detach the holding frame to and from the rotary drive shaft, which increases the number of processes and lowers work efficiency. There was a point.

An object of the present invention is to solve the above problems and provide a rotary holding device capable of holding a mask having a plurality of types of dimensions without replacing the holding frame of the holding device. is there.

[0009]

[Means for Solving the Problems]

 The present invention, which solves the above problems and achieves the object, is provided with a plurality of rotary bases having a common center of rotation and a preset distance different from those of other rotary bases. And holding members arranged to face each other with respect to the rotation center axis, and the other rotation table is moved in the extension direction of the rotation center with respect to one of the plurality of rotation tables and positioned at a predetermined position. The first feature is that it is configured to be possible.

Further, the present invention has a second feature in that a plurality of the holding members are provided in each of the rotary tables and are arranged to face each other with respect to the rotation center at different distances from each other. There is.

Further, according to the present invention, when the rotary table is rotated, one end thereof is biased outward by a centrifugal force, and the other end thereof is biased inward, so that an end of an object to be rotated placed on the rotary table is rotated. A third feature is that a fixing tool swingably provided at an end portion of the rotary table so as to be engaged is further provided.

[0012]

[Action]

 According to the present invention having the above characteristics, since the holding members are arranged to face each other at different distances from each other in the plurality of turntables, the holding members cause the objects to be rotated having different sizes on the respective turntables. Can be held.

In particular, according to the present invention having the second characteristic, since a plurality of sets of holding members having different arrangement intervals are provided to face each of the rotary tables, respectively, the number of different sizes can be increased. It can hold various kinds of objects to be rotated.

Further, according to the present invention having the third feature, while the rotating table is rotating, the fixing member is engaged with the object to be rotated by the centrifugal force, and the centrifugal force is applied while the rotation is stopped. It is released, and the engagement of the fixture with the object to be rotated is released.

[0015]

【Example】

 Hereinafter, the present invention will be described in detail with reference to the drawings. 1 is a plan view of a rotation holding device showing an embodiment of the present invention, and FIG. 2 is a partial sectional front view of the same. Since the rotary holding device has a symmetrical shape with respect to the rotation axis, a part of the rotary holding device is omitted in FIG. Further, in FIG. 2, the rotary shaft of the rotation holding device and its driving means are omitted.

In FIGS. 1 and 2, the first turntable 1 includes eight arms 10, and the second turntable 2 also includes eight arms 20 (a part thereof is not shown). . The first rotary table 1 is connected to a rotary shaft 3 by a bolt 4, and the second rotary table 2 is connected to a hollow rotary shaft 6 by a key 5. The set screw 7 is provided to fix the axial movement of the second rotary table 2 and the key 5.

The rotary shaft 3 is fitted into a hollow rotary shaft 6 and is set so as to be slidable in the axial direction with respect to the rotary shaft 6. The pin 9 inserted into the recess 1a of the first rotary table 1 and fixed by the bolt 8 is slidably inserted into the hole 2a of the second rotary table 2. The pin 9 restricts the mutual movement of the first and second turntables 1 and 2 in the rotation direction, and the relative positions of the rotation shafts 3 and 6 can be changed only in the axial direction.

A pair of stoppers or holding members 15a to 15d are provided at the tips of the arms 10 and 20, respectively. The lengths of the arms 10 and 20 are determined so that the distance between the bolt 4, that is, the rotation shaft 3 or 6 (that is, the rotation center) and the holding members 15a to 15d has the following relationship.

That is, in each of the adjacent arms 10 and 20, the distances between the holding members 15a to 15d fixed to the adjacent arms and the rotation center are different from each other, and the arms are symmetrical with respect to the rotation center. The holding members 15a to 15d fixed to the arms 10 and 20 have the same distance from the rotation center. Then, as understood from FIG. 1, all the arms 20 of the second rotary table 2 are made longer than all the arms 10 of the first rotary table 1.

Specifically, the holding member 15b provided at a position where the distance from the rotation center is the smallest is brought into contact with the four corners of a square mask 11 having a side of 4.5 inches so that the mask 11 is held. Hold. Further, the holding member 15a, which is provided next at a position where the distance from the center of rotation is short, comes into contact with the four corners of the square mask 12 having a side of 5 inches to hold the mask 12.

Further, the holding members 15c and 15d provided on the arm 20 of the second turntable 2 are brought into contact with the four corners of the square masks 13 and 14 having sides of 6 inches and 7 inches, respectively. Hold each.

An operation when the rotation holding device configured as described above is used by incorporating it in the mask cleaning device will be described.

First, when the second turntable 2 is used to wash the mask 13 or 14 having a large size, the mask 13 or 14 is placed on the arm 20 in the state shown in FIG. A drive source is connected to 6 and the arm 20 is rotated. In this state, the brush or sponge-like cleaning component 16 mounted on the scrub head is brought into contact with the surface of the mask 13 or 14.

Since the cleaning component 16 is also rotated around its axis 16a, the entire surface of the mask 13 is cleaned by the cleaning component 16. At the time of cleaning, it is preferable to spray cleaning water on both sides of the mask 13.

When the first rotary table 1 is used for cleaning the mask 11 or 12 having a small size, the mask 11 or 12 is operated as the mask 13 or 14 by operating the push-up means (not shown). Push the rotary shaft 3 up to the same level or higher and set it at the cleaning position.

The push-up means (not shown) can be configured by a cam or a link mechanism, and the cam or link mechanism may be automatically driven by a motor or an electromagnetic solenoid, or may be manually operated.

By the way, since the mask placed on the arm 10 or 20 is pressed downward by the cleaning component 16, usually, no pressing means from above is required. The following means can be provided in order to hold the arm on the arms 10 and 20 more securely.

FIG. 3 is a plan view of an essential part showing the mask pressing means, and FIG. 4 is a sectional view of the essential part. In the figure, a clamp 18 is swingably attached to a vertical member 10a of an arm 10 of the first rotary table 1 by a shaft 17. The clamp 18 has a tail portion 18a and a head portion 18b.

The clamp 18 is normally swung in the direction of the arrow 19 due to the imbalance of the weight of the tail portion 18 a and the head portion 18 b and the difference in the moment due to the position of the shaft 17, and the head portion 18 b retracts from the mask 11. ing. Then, when the turntable is driven to rotate, the tail portion 18a is swung up in the direction opposite to the arrow 19, that is, outward by the centrifugal force, and the mask 11 is held down by the head portion 18b. In this way, the mask 11 placed on the arm 10 can be maintained in a state of being reliably held by the arm 10 by the clamp 18 during rotation.

The clamp 18 is preferably attached to all the arms 10, but may be attached to at least two arms facing each other about the rotating shafts 3 and 6. Of course, the clamp 18 can be attached to the arm 20 as well.

In this embodiment, the first and second rotary bases 1 and 2 are connected by the pin 9 so as to rotate integrally. However, both the first and second rotary bases 1 and 2 are rotated. It is also possible to separately provide the driving means or selectively connect the driving source by the switching means using the clutch to rotate only the rotary table on which the mask to be cleaned is placed.

Further, the first rotary table 1 is not moved up and down with respect to the second rotary table 2, but conversely, the second rotary table 2 is moved up and down with respect to the first rotary table 1. Good.

[0033]

[Effect of device]

 As is apparent from the above description, according to the present invention, it is possible to hold and rotate a plurality of types of masks without replacing the turntable. Therefore, in the step of handling a plurality of masks having different dimensions, the step of replacing the turntable can be omitted, which can contribute to the improvement of efficiency.

Further, since the clamp can press the object to be rotated only while the rotating table is rotating, the clamp becomes an obstacle when the object to be mounted on or removed from the rotating table. Never. Therefore, it is easy to place the rotating object and automate the removal.

[Brief description of drawings]

FIG. 1 is a plan view of a rotation holding device showing an embodiment of the present invention.

FIG. 2 is a sectional view of a rotation holding device showing an embodiment of the present invention.

FIG. 3 is a plan view of an essential part showing a mounted state of a clamp.

FIG. 4 is a cross-sectional view of an essential part showing a mounted state of a clamp.

[Explanation of symbols]

1 ... 1st rotary base, 2 ... 2nd rotary base, 3 ... rotary shaft,
6 ... Hollow rotating shaft, 10, 20 ... Arm, 11-14 ...
Mask, 15 ... Holding member, 18 ... Clamp

Claims (6)

[Scope of utility model registration request] 1. A glass substrate rotation holding device for holding and rotating the glass substrate for performing a predetermined treatment on the glass substrate, wherein a plurality of rotation bases having a common rotation center are provided, and each rotation base is provided. A holding member arranged to face the rotation center axis at a predetermined distance different from that of the other rotary table, and the other rotary table is provided for one of the plurality of rotary tables. A glass substrate rotation holding device, characterized in that it can be moved in the extension direction of the rotation center to be positioned at a predetermined position. 2. A glass substrate rotation holding device for holding and rotating the glass substrate for performing a predetermined treatment on the glass substrate, comprising: a first rotary table having holding members facing each other at a predetermined distance with respect to a center of rotation; A second rotary table having holding members facing each other at a distance different from the planned distance with respect to the rotation center, wherein the first rotary table and the second rotary table are provided on the same rotary shaft, A glass substrate rotation holding device, characterized in that one of the first and second turntables is configured to move in the extension direction of the rotation center with respect to the other so that it can be positioned at a predetermined position. 3. The holding member is provided in a plurality of sets on each of the turntables, and is arranged so as to face each other with respect to the center of rotation at different distances from each other. The glass substrate rotation holding device described. 4. The holding member is a projecting member that is erected on a turntable so as to contact the four corners of an object to be rotated and hold the object to be rotated. The glass substrate rotation holding device according to any one of 1 to 3. 5. When rotating the turntable, one end thereof is biased outward by the centrifugal force and the other end thereof is biased inward so that the turntable is engaged with an end of a rotated object placed on the turntable. The glass substrate rotation holding device according to any one of claims 1 to 4, further comprising a fixture that is swingably provided at an end of each rotary table. 6. The rotary table according to claim 1, wherein each of the rotary bases comprises a plurality of sets of arms having different lengths, and the holding member is provided at a tip of the arms. The glass substrate rotation holding device described.