JPH0670558A - Drive controller for ultrasonic motor - Google Patents

Drive controller for ultrasonic motor

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Publication number
JPH0670558A
JPH0670558A JP4217992A JP21799292A JPH0670558A JP H0670558 A JPH0670558 A JP H0670558A JP 4217992 A JP4217992 A JP 4217992A JP 21799292 A JP21799292 A JP 21799292A JP H0670558 A JPH0670558 A JP H0670558A
Authority
JP
Japan
Prior art keywords
drive
ultrasonic motor
frequency
resonance frequency
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4217992A
Other languages
Japanese (ja)
Inventor
Daisuke Satani
大助 佐谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP4217992A priority Critical patent/JPH0670558A/en
Publication of JPH0670558A publication Critical patent/JPH0670558A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【目的】 超音波モータに温度検出器を設けずに温度変
化による回転数の変動を抑制する。 【構成】 超音波モータ1の共振周波数を検出する検出
手段3と、この検出手段3で検出された共振周波数に基
づいて駆動信号の周波数および電圧を設定する制御手段
4と、設定された周波数および電圧の駆動信号を超音波
モータ1に印加する駆動手段2とを備える。
(57) [Summary] [Purpose] To suppress fluctuations in the rotational speed due to temperature changes without providing a temperature detector in the ultrasonic motor. A detection means 3 for detecting a resonance frequency of an ultrasonic motor 1, a control means 4 for setting a frequency and a voltage of a drive signal based on the resonance frequency detected by the detection means 3, a set frequency and The driving means 2 applies a driving signal of voltage to the ultrasonic motor 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は超音波モータの駆動制御
装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drive control device for an ultrasonic motor.

【0002】[0002]

【従来技術とその問題点】温度変化による回転数の変動
を抑制するために、超音波モータの動作温度を検出して
駆動電圧の周波数を変化させる超音波モータの駆動制御
装置が知られている(例えば、実開平2−88482号
公報参照)。この駆動制御装置では、超音波モータの振
動子に温度検出器を設け、検出温度に基づいて駆動周波
数を制御している。
2. Description of the Related Art A drive control device for an ultrasonic motor is known in which the operating temperature of the ultrasonic motor is detected to change the frequency of the drive voltage in order to suppress fluctuations in the rotational speed due to temperature changes. (See, for example, Japanese Utility Model Laid-Open No. 2-88482). In this drive control device, a vibrator of an ultrasonic motor is provided with a temperature detector, and the drive frequency is controlled based on the detected temperature.

【0003】しかしながら、このような従来の駆動制御
装置では、超音波モータに温度検出器を設置しているの
で弾性体に不正振動などが発生して超音波モータの回転
数が変動するという問題がある。
However, in such a conventional drive control device, since the temperature detector is installed in the ultrasonic motor, there is a problem that the vibration frequency of the ultrasonic motor fluctuates due to occurrence of irregular vibration in the elastic body. is there.

【0004】本発明の目的は、超音波モータに温度検出
器を設けずに温度変化による回転数の変動を抑制するこ
とにある。
An object of the present invention is to suppress fluctuations in the number of revolutions due to temperature changes without providing a temperature detector on the ultrasonic motor.

【0005】[0005]

【課題を解決するための手段】一実施例の構成を示す図
1に対応づけて請求項1の発明を説明すると、請求項1
の発明は、超音波モータ1に駆動信号を印加して駆動す
る駆動手段2を備えた超音波モータ1の駆動制御装置に
適用され、超音波モータ1の共振周波数を検出する検出
手段3と、この検出手段3で検出された共振周波数に基
づいて駆動信号の周波数および電圧を設定する制御手段
4とを備え、これにより、上記目的を達成する。また、
一実施例の構成を示す図5に対応づけて請求項2の発明
を説明すると、超音波モータの駆動制御装置の制御回路
4は、種々の共振周波数における駆動信号の周波数およ
び電圧に対する回転数および駆動電流のデータを記憶す
る記憶手段4aを含み、検出手段3で検出された共振周
波数とデータとに基づいて所望の回転数または駆動電流
が得られる駆動信号の周波数および電圧を設定するよう
にしたものである。
The invention of claim 1 will be described with reference to FIG. 1 showing the configuration of an embodiment.
Is applied to a drive control device for an ultrasonic motor 1 including a drive unit 2 for applying a drive signal to the ultrasonic motor 1 to drive the ultrasonic motor 1, and a detecting unit 3 for detecting a resonance frequency of the ultrasonic motor 1. The control means 4 for setting the frequency and voltage of the drive signal based on the resonance frequency detected by the detection means 3 is provided, thereby achieving the above object. Also,
The invention of claim 2 will be described with reference to FIG. 5 showing the configuration of one embodiment. The control circuit 4 of the drive control device for the ultrasonic motor is configured so that the number of rotations with respect to the frequency and voltage of the drive signal at various resonance frequencies and A storage unit 4a for storing the data of the drive current is included, and the frequency and the voltage of the drive signal for obtaining the desired rotation speed or the drive current are set based on the resonance frequency and the data detected by the detection unit 3. It is a thing.

【0006】[0006]

【作用】予め超音波モータ1の温度を変化させて試験を
行い、種々の共振周波数における駆動信号の周波数およ
び電圧に対する回転数および駆動電流のデータを採取し
ておき、運転時に検出された共振周波数とデータとに基
づいて所望の回転数または駆動電流が得られる駆動信号
の周波数および電圧を設定し、その駆動信号を超音波モ
ータ1に印加して駆動する。これによって、超音波モー
タに温度検出器を設けずに温度変化による回転数変動を
抑制することができる。
Operation: The temperature of the ultrasonic motor 1 is changed and a test is conducted in advance, data of the rotation speed and the drive current with respect to the frequency and voltage of the drive signal at various resonance frequencies are collected, and the resonance frequency detected during operation is detected. The frequency and voltage of the drive signal that gives the desired rotation speed or drive current are set based on the data and the data, and the drive signal is applied to the ultrasonic motor 1 to drive it. As a result, it is possible to suppress the rotation speed fluctuation due to the temperature change without providing the ultrasonic motor with the temperature detector.

【0007】なお、本発明の構成を説明する上記課題を
解決するための手段および作用の項では、本発明を分り
やすくするために実施例の図を用いたが、これにより本
発明が実施例に限定されるものではない。
Incidentally, in the section of means and action for solving the above-mentioned problems for explaining the constitution of the present invention, the drawings of the embodiments are used in order to make the present invention easy to understand. It is not limited to.

【0008】[0008]

【実施例】図1は一実施例の構成を示す。この実施例で
は、回転型超音波モータを例に上げて説明する。回転型
超音波モータ1は、圧電体1aおよびこの圧電体1aの
励振によって進行性振動波を発生する不図示の弾性体か
ら成るステータと、このステータに加圧接触され、進行
性振動波によって回転駆動される不図示のロータとから
構成される。また、超音波モータ1の駆動制御装置は、
駆動信号を発生して圧電体1aに設けられた入力電極1
b,1cに印加する駆動回路2と、超音波モータ1の共
振周波数を検出する共振周波数計測回路3と、検出され
た共振周波数に基づいて超音波モータ1に印加する駆動
信号の電圧および周波数を設定し、駆動回路2へ制御信
号を出力する制御回路4とを備える。
FIG. 1 shows the structure of an embodiment. In this embodiment, a rotary ultrasonic motor will be described as an example. The rotary ultrasonic motor 1 is brought into pressure contact with the stator composed of a piezoelectric body 1a and an elastic body (not shown) that generates a progressive vibration wave by the excitation of the piezoelectric body 1a, and is rotated by the progressive vibration wave. It is composed of a driven rotor (not shown). Further, the drive control device for the ultrasonic motor 1 is
Input electrode 1 provided on piezoelectric body 1a by generating a drive signal
b, 1c, a drive circuit 2 applied to the ultrasonic motor 1, a resonance frequency measurement circuit 3 for detecting the resonance frequency of the ultrasonic motor 1, and a voltage and frequency of a drive signal applied to the ultrasonic motor 1 based on the detected resonance frequency. And a control circuit 4 for setting and outputting a control signal to the drive circuit 2.

【0009】駆動回路2は、図2に示すように、制御回
路4の制御信号に従って周波信号を発生する発振器2a
と、その周波信号の位相を変える移相器2bと、発振器
2aからの周波信号と移相器2bを介して得られた異な
る位相の周波信号とをそれぞれ増幅して駆動信号を出力
する増幅器2c,2dとから構成され、駆動信号を超音
波モータ1の入力電極1b,1cに印加する。
The drive circuit 2, as shown in FIG. 2, is an oscillator 2a which generates a frequency signal in accordance with a control signal from the control circuit 4.
And a phase shifter 2b that changes the phase of the frequency signal, and an amplifier 2c that amplifies the frequency signal from the oscillator 2a and the frequency signal having a different phase obtained through the phase shifter 2b to output a drive signal. , 2d, and applies a drive signal to the input electrodes 1b, 1c of the ultrasonic motor 1.

【0010】図3は共振周波数計測回路の構成を示す。
この共振周波数計測回路3は、圧電セラミック振動子の
振動状態を試験する定電圧測定回路として用いられる回
路であり、発振器3aとピークホールド回路3bとから
構成される。発振器3aの発振周波数をスキャンしなが
ら超音波モータ1のいずれかの電極に印加し、他の電極
の出力電圧をピークホールド回路3bへ取り込んでその
最大値を検出し、最大の出力電圧が得られる周波数を共
振周波数として制御回路4へ出力する。
FIG. 3 shows the configuration of the resonance frequency measuring circuit.
The resonance frequency measuring circuit 3 is a circuit used as a constant voltage measuring circuit for testing the vibration state of the piezoelectric ceramic vibrator, and includes an oscillator 3a and a peak hold circuit 3b. While scanning the oscillation frequency of the oscillator 3a, it is applied to one of the electrodes of the ultrasonic motor 1, and the output voltage of the other electrode is taken into the peak hold circuit 3b and its maximum value is detected to obtain the maximum output voltage. The frequency is output as the resonance frequency to the control circuit 4.

【0011】図4は共振周波数計測回路の他の実施例を
示す。この共振周波数計測回路3Aは、圧電セラミック
振動子の振動状態を試験する定電流測定回路として用い
られる回路であり、発振器3cとピークホールド回路3
dとから構成される。発振器3cの周波数をスキャンし
ながら超音波モータ1のいずれかの電極に印加し、超音
波モータ1に流れる駆動電流をピークホールド回路3d
へ取り込んでその最大値を検出し、最大の電流が流れる
周波数を共振周波数として制御回路4へ出力する。
FIG. 4 shows another embodiment of the resonance frequency measuring circuit. The resonance frequency measuring circuit 3A is a circuit used as a constant current measuring circuit for testing the vibration state of the piezoelectric ceramic vibrator, and includes an oscillator 3c and a peak hold circuit 3.
and d. The frequency of the oscillator 3c is scanned and applied to one of the electrodes of the ultrasonic motor 1, and the drive current flowing in the ultrasonic motor 1 is applied to the peak hold circuit 3d.
The maximum value is detected, and the frequency at which the maximum current flows is output as the resonance frequency to the control circuit 4.

【0012】なお、図3,4に示す共振周波数計測回路
3,3Aの発振器3a,3cは駆動回路2の発振器2a
と共通にしてもよい。また、駆動回路2の発振器2aに
よりいずれか一方の入力電極に周波信号を印加し、他の
入力電極の出力電圧をピークホールド回路3b,3dへ
取り込んで共振周波数を検出するようにしてもよい。
The oscillators 3a and 3c of the resonance frequency measuring circuits 3 and 3A shown in FIGS.
You may make it common with. Further, the oscillator 2a of the drive circuit 2 may apply a frequency signal to one of the input electrodes, and the output voltage of the other input electrode may be taken into the peak hold circuits 3b and 3d to detect the resonance frequency.

【0013】図5は制御回路4の構成を示す。制御回路
4は、図6に示す駆動周波数fvおよび駆動電圧Vに対
する回転数Nおよび駆動電流Iとの関係を記憶する記憶
回路4aと、この記憶回路4aの記憶内容を参照して共
振周波数計測回路3で検出された共振周波数に対応する
駆動周波数fvおよび駆動電圧Vを演算する演算回路4
bとを備え、駆動回路2へ駆動周波数fvと駆動電圧V
の制御信号を出力する。
FIG. 5 shows the configuration of the control circuit 4. The control circuit 4 stores the relationship between the drive frequency fv and the drive voltage V and the rotation speed N and the drive current I shown in FIG. 6, and a resonance frequency measuring circuit with reference to the stored contents of the storage circuit 4a. Calculation circuit 4 for calculating the drive frequency fv and the drive voltage V corresponding to the resonance frequency detected in 3.
b, and drive frequency fv and drive voltage V to drive circuit 2
The control signal of is output.

【0014】ここで、共振周波数fmと駆動周波数f
v、駆動電圧V、回転数Nおよび駆動電流Iとの関係に
ついて説明する。図7は温度を変化させたときの超音波
モータの弾性体の振動特性を示し、図8は超音波モータ
の駆動周波数fvに対する回転数Nの出力特性を示し、
図9は超音波モータの駆動電圧Vに対する回転数Nの出
力特性を示す。超音波モータはその温度が変化すると、
図7に示すように共振状態が変化し、共振周波数fmが
変化する。今、温度がT1からT2、T3の順に高くな
ると、共振周波数もfm(T1)、fm(T2)、fm
(T3)の順に高くなる。この結果、超音波モータの回
転数Nが変動するので、設定回転数N1を維持するため
には温度変化T1〜T3に応じて図8に示すように駆動
周波数fvをf1からf3に変化させるとともに、図9
に示すように駆動電圧VをV1からV3に変化させなけ
ればならない。
Here, the resonance frequency fm and the driving frequency f
The relationship among v, drive voltage V, rotation speed N, and drive current I will be described. FIG. 7 shows the vibration characteristics of the elastic body of the ultrasonic motor when the temperature is changed, and FIG. 8 shows the output characteristics of the rotation speed N with respect to the driving frequency fv of the ultrasonic motor.
FIG. 9 shows the output characteristic of the rotation speed N with respect to the drive voltage V of the ultrasonic motor. When the temperature of the ultrasonic motor changes,
As shown in FIG. 7, the resonance state changes and the resonance frequency fm changes. When the temperature increases from T1 to T2 and T3 in this order, the resonance frequencies are fm (T1), fm (T2) and fm.
It becomes higher in the order of (T3). As a result, the rotation speed N of the ultrasonic motor fluctuates, and in order to maintain the set rotation speed N1, the drive frequency fv is changed from f1 to f3 as shown in FIG. 8 in accordance with the temperature changes T1 to T3. , Fig. 9
The drive voltage V must be changed from V1 to V3 as shown in FIG.

【0015】そこで、予め超音波モータの温度を変化さ
せて試験を行い、図6に示すように、共振周波数fm
と、駆動周波数fvおよび駆動電圧Vに対する回転数N
=F1(f1,V)および駆動電流I=F2(fv,
V)のデータを求めておき、共振周波数計測回路3で計
測された共振周波数fmに対応する特性曲線を参照して
最適な駆動周波数fv(N1)および駆動電圧Vを決定
するようにすれば、温度変化による回転数変動を補償す
ることができ、予め設定した設定回転数N1で超音波モ
ータを安定に駆動することができる。
Therefore, the temperature of the ultrasonic motor was changed in advance for the test, and as shown in FIG.
And the rotation speed N with respect to the drive frequency fv and the drive voltage V
= F1 (f1, V) and drive current I = F2 (fv,
V) data is obtained and the optimum drive frequency fv (N1) and drive voltage V are determined by referring to the characteristic curve corresponding to the resonance frequency fm measured by the resonance frequency measurement circuit 3. Rotational speed fluctuations due to temperature changes can be compensated for, and the ultrasonic motor can be stably driven at a preset rotational speed N1.

【0016】次に全体の動作を説明する。制御回路4に
駆動命令信号および回転数N1の回転数信号が供給され
ると、制御回路4は共振周波数計測回路3に超音波モー
タ1の共振周波数fmを計測させる。制御回路4の演算
回路4bは、計測された共振周波数fmと記憶回路4a
に記憶されている図6に示す特性曲線とに基づいて、超
音波モータ1の駆動周波数fv(N1)および駆動電圧
Vを求め、それらの制御信号を駆動回路2へ出力する。
駆動回路2はその制御信号に基づいて駆動信号を生成
し、超音波モータ1の入力電極1b,1cに印加して駆
動する。
Next, the overall operation will be described. When the drive command signal and the rotation speed signal of the rotation speed N1 are supplied to the control circuit 4, the control circuit 4 causes the resonance frequency measurement circuit 3 to measure the resonance frequency fm of the ultrasonic motor 1. The arithmetic circuit 4b of the control circuit 4 uses the measured resonance frequency fm and the storage circuit 4a.
The drive frequency fv (N1) and the drive voltage V of the ultrasonic motor 1 are obtained based on the characteristic curve shown in FIG.
The drive circuit 2 generates a drive signal based on the control signal and applies it to the input electrodes 1b and 1c of the ultrasonic motor 1 to drive it.

【0017】このように、予め超音波モータの温度を変
化させて試験を行い、種々の共振周波数における駆動周
波数および駆動電圧に対する回転数および駆動電流のデ
ータを採取しておき、計測して得られた共振周波数とデ
ータとに基づいて所望の回転数または駆動電流が得られ
る駆動周波数および駆動電圧を設定するようにしたの
で、超音波モータに温度検出器を設けずに温度変化によ
る回転数変動を抑制することができ、予め設定した回転
数で超音波モータを安定に駆動することができる。
As described above, the temperature of the ultrasonic motor was changed in advance for the test, and the data of the rotation frequency and the drive current with respect to the drive frequency and the drive voltage at various resonance frequencies were sampled and obtained. Since the drive frequency and drive voltage at which the desired rotation speed or drive current is obtained are set based on the resonance frequency and data, the rotation speed fluctuation due to temperature changes can be achieved without providing a temperature detector in the ultrasonic motor. It can be suppressed, and the ultrasonic motor can be stably driven at a preset number of rotations.

【0018】なお、上記実施例では超音波モータの回転
数を制御量としたが、出力トルク、あるいは駆動信号と
検出電極の出力電圧との位相差を制御量としてもよい。
In the above embodiment, the number of revolutions of the ultrasonic motor is used as the controlled variable, but the output torque or the phase difference between the drive signal and the output voltage of the detection electrode may be used as the controlled variable.

【0019】また、上記実施例では計測した超音波モー
タの共振周波数に基づいて駆動周波数および駆動電圧を
設定したが、駆動電圧を一定にして検出共振周波数に基
づいて駆動周波数だけを設定するようにしてもよい。
In the above embodiment, the drive frequency and the drive voltage are set based on the measured resonance frequency of the ultrasonic motor. However, the drive voltage is kept constant and only the drive frequency is set based on the detected resonance frequency. May be.

【0020】以上の実施例の構成において、駆動回路2
が駆動手段を、共振周波数計測回路3,3Aが検出手段
を、制御回路4が制御手段を、記憶回路4aが記憶手段
をそれぞれ構成する。
In the configuration of the above embodiment, the drive circuit 2
Represents the driving means, the resonance frequency measuring circuits 3 and 3A constitute the detecting means, the control circuit 4 constitutes the controlling means, and the memory circuit 4a constitutes the memory means.

【0021】[0021]

【発明の効果】以上説明したように本発明によれば、超
音波モータの共振周波数を検出し、検出された共振周波
数に基づいて超音波モータに印加する駆動信号の周波数
および駆動電圧を設定するようにしたので、超音波モー
タに温度検出器を設けずに温度変化による回転数変動を
抑制することができ、予め設定した設定回転数で超音波
モータを安定に駆動することができる。
As described above, according to the present invention, the resonance frequency of the ultrasonic motor is detected, and the frequency and drive voltage of the drive signal applied to the ultrasonic motor are set based on the detected resonance frequency. Therefore, it is possible to suppress fluctuations in the rotation speed due to temperature changes without providing a temperature detector in the ultrasonic motor, and it is possible to stably drive the ultrasonic motor at a preset rotation speed.

【図面の簡単な説明】[Brief description of drawings]

【図1】一実施例の構成を示すブロック図。FIG. 1 is a block diagram showing the configuration of an embodiment.

【図2】駆動回路の構成を示すブロック図。FIG. 2 is a block diagram showing the configuration of a drive circuit.

【図3】共振周波数計測回路の構成を示すブロック図。FIG. 3 is a block diagram showing the configuration of a resonance frequency measuring circuit.

【図4】他の共振周波数計測回路の構成を示すブロック
図。
FIG. 4 is a block diagram showing the configuration of another resonance frequency measuring circuit.

【図5】制御回路の構成を示すブロック図。FIG. 5 is a block diagram showing the configuration of a control circuit.

【図6】超音波モータの駆動周波数に対する回転数およ
び駆動電流の関係を示す図。
FIG. 6 is a diagram showing the relationship between the rotation frequency and the drive current with respect to the drive frequency of the ultrasonic motor.

【図7】温度を変化させたときの超音波モータの弾性体
の振動特性を示す図。
FIG. 7 is a diagram showing vibration characteristics of an elastic body of the ultrasonic motor when the temperature is changed.

【図8】超音波モータの駆動周波数に対する回転数を示
す図。
FIG. 8 is a diagram showing the number of rotations with respect to the drive frequency of the ultrasonic motor.

【図9】超音波モータの駆動電圧に対する回転数を示す
図。
FIG. 9 is a diagram showing the number of rotations with respect to the drive voltage of the ultrasonic motor.

【符号の説明】[Explanation of symbols]

1 超音波モータ 1a 圧電体 1b,1c 入力電極 1d 検出電極 2 駆動回路 2a,3a,3c 発振器 2b 移相器 2c,2d 増幅器 3,3A 共振周波数計測回路 3b,3d ピークホールド回路 4 制御回路 4a 記憶回路 4b 演算回路 1 Ultrasonic motor 1a Piezoelectric body 1b, 1c Input electrode 1d Detection electrode 2 Drive circuit 2a, 3a, 3c Oscillator 2b Phase shifter 2c, 2d Amplifier 3,3A Resonance frequency measurement circuit 3b, 3d Peak hold circuit 4 Control circuit 4a Memory Circuit 4b Operation circuit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 超音波モータに駆動信号を印加して駆動
する駆動手段を備えた超音波モータの駆動制御装置にお
いて、 前記超音波モータの共振周波数を検出する検出手段と、 この検出手段で検出された共振周波数に基づいて前記駆
動信号の周波数および電圧を設定する制御手段とを備え
ることを特徴とする超音波モータの駆動制御装置。
1. A drive control device for an ultrasonic motor comprising drive means for applying a drive signal to an ultrasonic motor to drive the ultrasonic motor, wherein the detecting means detects a resonance frequency of the ultrasonic motor, and the detecting means detects the resonance frequency. And a control means for setting the frequency and voltage of the drive signal based on the generated resonance frequency.
【請求項2】 請求項1に記載の超音波モータの駆動制
御装置において、 前記制御手段は、種々の共振周波数における駆動信号の
周波数および電圧に対する回転数および駆動電流のデー
タを記憶する記憶手段を含み、前記検出手段で検出され
た共振周波数と前記データとに基づいて所望の回転数ま
たは駆動電流が得られる前記駆動信号の周波数および電
圧を設定することを特徴とする超音波モータの駆動制御
装置。
2. The drive control device for an ultrasonic motor according to claim 1, wherein the control means includes a storage means for storing data of a rotation speed and a drive current with respect to frequencies and voltages of drive signals at various resonance frequencies. A drive control device for an ultrasonic motor, comprising: setting the frequency and voltage of the drive signal that obtains a desired rotation speed or drive current based on the resonance frequency detected by the detection means and the data. .
JP4217992A 1992-08-17 1992-08-17 Drive controller for ultrasonic motor Pending JPH0670558A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4217992A JPH0670558A (en) 1992-08-17 1992-08-17 Drive controller for ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4217992A JPH0670558A (en) 1992-08-17 1992-08-17 Drive controller for ultrasonic motor

Publications (1)

Publication Number Publication Date
JPH0670558A true JPH0670558A (en) 1994-03-11

Family

ID=16712930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4217992A Pending JPH0670558A (en) 1992-08-17 1992-08-17 Drive controller for ultrasonic motor

Country Status (1)

Country Link
JP (1) JPH0670558A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010183819A (en) * 2009-02-09 2010-08-19 Panasonic Corp Driving device
CN115885467A (en) * 2020-08-21 2023-03-31 株式会社村田制作所 Drive control device and ultrasonic motor system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010183819A (en) * 2009-02-09 2010-08-19 Panasonic Corp Driving device
US8493006B2 (en) 2009-02-09 2013-07-23 Panasonic Corporation Drive unit
US9197142B2 (en) 2009-02-09 2015-11-24 Panasonic Intellectual Property Management Co., Ltd. Drive unit
CN115885467A (en) * 2020-08-21 2023-03-31 株式会社村田制作所 Drive control device and ultrasonic motor system

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