JPH06712U - Slicing equipment - Google Patents

Abstract

(57) [Abstract] [Purpose] To accurately detect the deflection of the inner peripheral edge of the annular blade to suppress the variation in displacement at the work cutting surface. A flexure amount sensor 10 for detecting a flexure amount when the annular blade 3 is cut is arranged at a position facing the front side or the back side of the abrasive grain bonded portion of the annular blade 3. The deflection amount detection sensor 10 can accurately measure the deflection amount of the annular blade 3 when cutting the work 7, and the displacement of the work cutting surface can be accurately obtained.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a slicing device that cuts a work into a certain thickness to form a silicon wafer for integrated circuits.

[0002]

[Prior art]

 Conventionally, in a slicing device, as shown in FIGS. 4 and 5, a dish-shaped disc 1 is integrally fixed to a main shaft 2, and an inner peripheral blade 5 made of a diamond is formed on the inner peripheral edge of a circular opening 4 provided at the center. A thin plate-shaped stainless steel annular blade 3 having the above is supported by the outer peripheral edge of the disk 1 by an annular ring 6 in a tensioned state. By rotating the main shaft 2, the annular blade 3 rotates at high speed in the direction of arrow r in FIG.

On the other hand, the work 7 made of a silicon ingot has its end portion inserted into the opening 4 of the annular blade 3 by a predetermined amount in the axial direction of the spindle 2, and then, as shown by an arrow x in FIG. It is designed to be fed in parallel along the plane of the annular blade 3. A carbon-made slice base 8 is adhered to the position where the work 7 is cut off so that the work 7 will not be chipped when the work 7 is cut off.

In the slicing device, the work 7 is cut to a constant thickness by the inner peripheral blade 5 of the annular blade 3. Immediately before being cut off, the sliced piece is supported by a suction device (not shown) and taken out to the outside of the annular blade 3.

By the way, the cutting resistance applied to the inner peripheral blade 5 of the annular blade 3 at the time of cutting is different because the sharpness is different between the front side (the side opposite to the main shaft 2) and the back side of the annular blade 3. It becomes a balance. In this case, the annular blade 3 may be largely bent in the plate thickness direction under the influence of the rotation speed of the main shaft 2, the feed speed of the work 7, and the like. The deflection of the annular blade 3 causes the slice pieces to warp, which causes deterioration of flatness.

Therefore, conventionally, as shown in FIG. 5, the deflection amount is detected on the front side of the annular blade 3 at a position distant from the inner peripheral blade 5 in the radial direction so as not to interfere with the movement of the work 7. The sensors 9a and 9b are arranged so that the rotation speed of the spindle 2 and the feed speed of the workpiece 7 can be controlled based on the detection signals from the deflection amount detection sensors 9a and 9b so that the deflection of the annular blade 3 is below the allowable limit. Was in control.

[0007]

[Problems to be solved by the device]

 However, in the conventional slicing device, since the deflection amount detection sensors 9a and 9b are arranged at positions distant from the cutting edge of the work 7, the sensors 9a and 9b are changed depending on the degree of deformation from the sensor detection position to the cutting edge. The displacement x of the workpiece cut surface calculated from the value detected in 9b sometimes deviated significantly from the actual displacement X of the workpiece cut surface. Specifically, the correlation rate K (K = x / X) varied from 1 to 20.

Further, since the annular blade 3 is made of a rolled material made of stainless steel, and its magnetic characteristics differ depending on the rolling direction, the detection signals from the sensors 9a and 9b are not detected during rotation of the annular blade 3. It fluctuates and a large amount of ripple is included. Therefore, it is necessary to prevent the malfunction of the equipment by installing a filter to remove this ripple component.In this case, however, the larger the amount of ripple component removed, the lower the sensitivity of the sensor and the amount of deflection. Could not be measured in detail. The present invention has been made in view of the above problems, and an object thereof is to provide a slicing device capable of suppressing the variation in displacement at a workpiece cutting surface by accurately detecting the deflection of the inner peripheral blade of the annular blade. .

[0009]

[Means for Solving the Problems]

 In order to achieve the above-mentioned object, the present invention provides a thin plate-shaped annular blade having an inner peripheral blade in the opening at a high speed while guiding an end face of a work into the opening of the annular blade. Then, in the slicing device that cuts the work to a constant thickness by the inner peripheral blade of the annular blade by relatively moving in parallel along the plane of the annular blade, the amount of deflection when the annular blade is cut is detected. The deflection amount detection sensor is arranged at a position facing the front side or the back side of the abrasive grain bonding portion forming the tip portion of the inner peripheral blade and within the range including the cutting position and its vicinity. According to a second aspect of the invention, the inner peripheral edge of the annular blade is made of conductive abrasive grains and a binder.

[0010]

[Action]

 In the invention according to claim 1, the deflection amount detection sensor is provided at a position facing the front side or the back side of the abrasive grain bonding portion forming the tip portion of the inner peripheral blade, and including the cutting position and the vicinity thereof. Therefore, the deflection of the edge of the inner peripheral blade of the annular blade during cutting of the work can be accurately measured, and the displacement of the work cutting surface can be accurately obtained. Further, according to the second aspect of the invention, since the inner peripheral edge composed of the conductive abrasive grains and the binder has stable magnetic characteristics, it is not necessary to provide a filter, and the inner peripheral edge of the annular blade with high sensitivity is provided. The amount of deflection is detected.

[0011]

【Example】

 Next, an embodiment of the present invention will be described with reference to FIGS. Although the configuration of this slicing device is almost the same as that of the conventional example, the deflection amount detection sensor 10 is, as shown in FIGS. 1 and 2, on the back side of the annular blade 3 and the work 7 moves to cause the annular blade 3 to move. It is provided at the position of first contact with the inner peripheral blade 5. As a result, the amount of deflection of the tip of the inner peripheral blade at the center of the workpiece cutting position can be detected.

Further, a thin plate made of stainless steel is used as the annular blade 3, and an abrasive grain made of diamond is fixed to the inner peripheral blade 5 with a binder such as nickel. Since diamond and nickel are both highly conductive materials, the amount of ripple in the detected magnetic amount is small. Therefore, it is not necessary to provide a filter as in the conventional case, and the amount of deflection of the inner peripheral blade can be detected with high sensitivity. Here, when the work 7 is moved in the direction of the arrow x in the drawing while rotating the spindle 2 to rotate the annular blade 3 in the direction of the arrow r in FIG. 2 at a high speed, the inner peripheral blade 5 moves to the outer peripheral surface of the work 7. Start sliding by sliding.

The sensor 10 detects the amount of deflection of the annular blade 3 on the back side of the tip position of the inner peripheral blade that directly contacts the work 7. As a result, the amount of deflection of the annular blade 3 can be detected, and the rotational speed of the main shaft 2 can be controlled to remove the deflection based on the actual value, so that the deflection of the annular blade 3 can be removed accurately and accurately. it can. As a result, warpage of the slice pieces 11 is prevented, and highly accurate flatness is obtained. Actually, the correlation rate K was 1 to 2, and the difference between the detected value and the cut surface shape of the work 7 was much smaller than that of the conventional 1 to 20. In the above-described embodiment, the sensor 10 is provided at the central portion of the cutting position of the workpiece 7, but the sensor 10 is instead provided on the front side or the back side of the tip of the inner peripheral blade that is displaced to the left and right from the cutting position. It may be arranged facing each other.

[0014]

[Effect of device]

 As is clear from the above description, according to the slicing device of the first aspect, the bending amount detection sensor detects the tip position of the inner peripheral blade of the annular blade when cutting the workpiece. The deflection amount can be accurately obtained, and the deflection adjustment control can be performed based on this value, and the slice accuracy can be improved. Further, according to the slicing device of the second aspect, since the inner peripheral edge of the annular blade is composed of conductive abrasive grains and a binder, it is possible to improve the sensitivity of the sensor and more accurately. Moreover, the amount of deflection of the annular blade can be detected.

[Brief description of drawings]

FIG. 1 is a plan sectional view of a slicing device according to an embodiment.

FIG. 2 is a front sectional view showing a cut state of the work of FIG.

FIG. 3 is a plan sectional view showing the workpiece during cutting in FIG.

FIG. 4 is a plan sectional view of a slicing device according to a conventional example.

5 is a front cross-sectional view showing a cut state of the work in FIG.

[Explanation of symbols]

3 ... Annular blade, 5 ... Inner peripheral blade, 7 ... Workpiece, 10 ... Deflection amount detection sensor.

Claims (2)

[Scope of utility model registration request] 1. A thin plate-shaped annular blade having an inner peripheral blade in its opening is rotated at a high speed, while an end face of a work is guided into the opening of said annular blade and is relatively parallel along the plane of the annular blade. In a slicing device that cuts a work to a constant thickness with an inner peripheral blade of an annular blade by moving, a deflection amount detection sensor that detects a deflection amount at the time of cutting the annular blade, a grinding blade that constitutes the inner peripheral blade tip portion. A slicing device, which is arranged at a position facing the front side or the back side of the grain bonding portion and within a range including a cutting position and the vicinity thereof. 2. The inner peripheral blade of the annular blade is composed of conductive abrasive grains and a binder.
The slicing device described.