JPH0681069A - Production of refractory metal material excellent in workability and sheet therefrom - Google Patents

Production of refractory metal material excellent in workability and sheet therefrom

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Publication number
JPH0681069A
JPH0681069A JP23330192A JP23330192A JPH0681069A JP H0681069 A JPH0681069 A JP H0681069A JP 23330192 A JP23330192 A JP 23330192A JP 23330192 A JP23330192 A JP 23330192A JP H0681069 A JPH0681069 A JP H0681069A
Authority
JP
Japan
Prior art keywords
thin plate
workability
annealing
temperature
purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23330192A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamada
廣志 山田
Moritaka Hida
守孝 飛田
Futoshi Ueki
太 植木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Steel Co Ltd
Original Assignee
Daido Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Steel Co Ltd filed Critical Daido Steel Co Ltd
Priority to JP23330192A priority Critical patent/JPH0681069A/en
Publication of JPH0681069A publication Critical patent/JPH0681069A/en
Pending legal-status Critical Current

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  • Heat Treatment Of Sheet Steel (AREA)

Abstract

(57)【要約】 【目的】 Mo,W,Ta,Nbなどの高融点金属の加
工性の高い材料を得て、その薄板を製造すること。 た
とえばCRTのカソードチューブなどの製造に用いる深
絞り可能な(エリクセン値が4mm以上の)Mo薄板を、
極端に高純度の材料を用いる必要なく、かつ焼鈍脆性に
悩まされることなく、製造できるようにする。 【構成】 純度スリーナイン以上のMo,W,Ta,N
bに、Reを重量で5%以下、好ましくは0.5〜3
%、より好ましくは1〜2%添加して薄板に圧延し、再
結晶温度以上の温度に加熱する焼鈍処理を施す。 Re
に加えてBを1%以下、好ましくは0.01〜0.5%
添加すると、さらに好成績が得られる。
(57) [Abstract] [Purpose] To obtain a material having high workability such as high melting point metal such as Mo, W, Ta, Nb, and to manufacture a thin plate thereof. For example, a Mo thin plate capable of deep drawing (Erichsen value of 4 mm or more) used for manufacturing cathode tubes of CRTs,
It enables production without the need to use extremely high-purity materials and without suffering from annealing brittleness. [Composition] Mo, W, Ta, N with a purity of three or more
In b, Re is 5% or less by weight, preferably 0.5 to 3
%, More preferably 1-2%, rolled into a thin plate, and annealed by heating to a temperature equal to or higher than the recrystallization temperature. Re
In addition to 1% or less of B, preferably 0.01 to 0.5%
If added, even better results are obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、加工性に優れた高融点
金属材、具体的には圧延や深絞り加工が可能なMo,
W,TaおよびNb材と、それらの薄板の製造方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a refractory metal material excellent in workability, specifically, Mo, which can be rolled or deep-drawn.
The present invention relates to W, Ta, and Nb materials and methods for manufacturing thin plates thereof.

【0002】[0002]

【従来の技術】Mo,W,Ta,Nbなどの高融点金属
は、その特性を利用した種々の用途が可能なはずである
が、製品への加工に困難が伴い、そのため制約が加えら
れることが少なくない。 たとえばCRTのカソード部
品とするMoチューブは、Mo薄板の深絞り加工によっ
て製造している。 ところが、Moは加工性のよくない
金属であるから、深絞り加工が可能なMo薄板を得るこ
とは容易でない。
2. Description of the Related Art Refractory metals such as Mo, W, Ta and Nb should be able to be used for various purposes by utilizing their characteristics, but it is difficult to process them into products, which imposes restrictions. There are many. For example, a Mo tube used as a cathode part of a CRT is manufactured by deep drawing a Mo thin plate. However, since Mo is a metal with poor workability, it is not easy to obtain a Mo thin plate capable of deep drawing.

【0003】発明者らの一人は、さきに、連続圧延であ
るが異方性の小さい薄材を与えることのできる「クロス
圧延」技術に着目し、これをMo薄板の製造に適用する
ことを企てて研究の結果、エレクトロンビーム溶解によ
って製造したファイブナイン以上、好ましくはシックス
ナイン以上の高純度Mo素材を用い、これをいったんロ
ール圧延して帯材としたものをクロス圧延するという手
順を踏むことにより、必要な深絞り性をもったMo薄板
が得られることを見出し、すでに開示した(特開平3−
291101号)。
One of the inventors of the present invention first noticed the "cross-rolling" technique, which is a continuous rolling but can give a thin material having small anisotropy, and applied it to the production of a Mo thin plate. As a result of the intentional research, a high-purity Mo material of five-nine or more, preferably six-nine or more produced by electron beam melting is used, and the material is roll-rolled once to be subjected to a cross-rolling process. According to the above, it was found that a Mo thin plate having a required deep drawability can be obtained, and it has already been disclosed (JP-A-3-
291101).

【0004】上記の方法は効果的であるが、ファイブナ
インないしシックスナインの純度をもつMoを得ること
が困難な場合もあるし、高純度品は当然に高価である。
また、深絞りを容易にするため焼鈍を行なうと、かえ
って焼鈍脆性のため加工性が損なわれることが多い。
Although the above method is effective, it may be difficult to obtain Mo having a purity of five nines or six nines, and a high purity product is naturally expensive.
Further, when annealing is performed to facilitate deep drawing, the workability is often impaired due to annealing brittleness.

【0005】この新しい問題を解決する方策を求めて研
究した出願人は、99.9%以上の純度を有するMo,
W,TaまたはNbに、0.2%以下のBを添加するこ
とにより、これら金属の加工性が向上することを見出し
て、これも提案した(特願平3−218639)。
[0005] The applicant who studied for a solution to this new problem found that Mo having a purity of 99.9% or more,
It was found that adding 0.2% or less of B to W, Ta or Nb improves the workability of these metals, and also proposed this (Japanese Patent Application No. 3-218639).

【0006】さらに開発を続けた結果、適量のReの添
加も上記の高融点金属の加工性の向上に有効であるこ
と、またReとBとをあわせて添加するといっそう効果
的であることを知った。
As a result of further development, it is known that the addition of an appropriate amount of Re is also effective for improving the workability of the above refractory metal, and that it is more effective to add Re and B together. It was

【0007】[0007]

【発明が解決しようとする課題】本発明の目的は、上記
した新しい知見を活用して、Moをはじめとする高融点
金属の薄板への圧延やその深絞りに関する永年の課題に
対して新しい解決策を提示し、それほど高純度でない高
融点金属を原料としても深絞り加工が可能な程度の高い
加工性をもった材料を提供すること、またそのような薄
板の製造方法を提供することにある。
The object of the present invention is to solve the long-standing problems concerning rolling and deep drawing of high melting point metals such as Mo into thin plates by utilizing the above new knowledge. It is to provide a material having a workability that is capable of deep drawing even when a refractory metal having a low purity is used as a raw material, and a method for manufacturing such a thin plate. .

【0008】[0008]

【課題を解決するための手段】本発明の加工性に優れた
高融点金属材は、基本的には、スリーナイン以上の純度
を有するMo,W,TaまたはNbに、重量で5%以
下、好ましくは0.5〜3%、より好ましくは1〜2%
のReを添加してなる。
The refractory metal material excellent in workability according to the present invention is basically 5% or less by weight, preferably 5% or less by weight of Mo, W, Ta or Nb having a purity of three-nine or higher. Is 0.5 to 3%, more preferably 1 to 2%
Of Re is added.

【0009】上記した基本的な合金組成に加えて、本発
明の加工性に優れた高融点金属材は、さらにB:1%以
下、好ましくは0.01〜0.5%を含有してもよい。
In addition to the above-mentioned basic alloy composition, the refractory metal material of the present invention excellent in workability further contains B: 1% or less, preferably 0.01 to 0.5%. Good.

【0010】本発明の加工性に優れた高融点金属薄板の
製造方法は、上記したスリーナイン以上の純度を有する
Mo,W,TaまたはNbに5%以下のReまたは5%
以下のReおよび1.0%以下のBを添加してなる高融
点金属材を薄板に圧延し、この薄板を再結晶温度以上の
温度に加熱する焼鈍処理を施すことからなる。 圧延に
より得る薄板の厚さは任意であるが、用途に応じて、通
常は50〜250μm程度にするのが適当であろう。
The method for producing a high-melting-point metal sheet excellent in workability according to the present invention is 5% or less Re or 5% of Mo, W, Ta or Nb having a purity of three or more as described above.
It consists of rolling a refractory metal material obtained by adding Re and 1.0% or less of B into a thin plate, and subjecting this thin plate to an annealing treatment of heating it to a temperature of a recrystallization temperature or higher. Although the thickness of the thin plate obtained by rolling is arbitrary, it is usually appropriate to set the thickness to about 50 to 250 μm depending on the application.

【0011】焼鈍は、500℃以上であって当然に融点
(Mo:2610℃、W:3370℃、Ta:2996
℃、Nb:2468℃)より低い温度に加熱すること2
分間〜1時間、の条件で実施する。 従って、後記する
ように、高温の焼鈍が可能である。
Annealing is performed at a temperature of 500 ° C. or higher and naturally has a melting point (Mo: 2610 ° C., W: 3370 ° C., Ta: 2996).
℃, Nb: 2468 ℃) heating to a lower temperature 2
It is carried out under the condition of 1 minute to 1 hour. Therefore, as described later, high temperature annealing is possible.

【0012】薄板への圧延に当って、Wは高い圧下率で
一挙に薄くすることができないから、10%程度の圧下
と焼鈍を繰り返して所望の厚さの薄板に到達するほかな
い。Mo,TaおよびNbは、このような制限なく圧延
することができる。
[0012] In rolling into a thin plate, W cannot be thinned all at once with a high reduction rate, and therefore reduction of about 10% and annealing must be repeated until a thin plate with a desired thickness is reached. Mo, Ta and Nb can be rolled without such restrictions.

【0013】[0013]

【作用】Mo,W,Ta,NbにReを添加すると、再
結晶温度(再結晶粒径が光学顕微鏡で測定可能な大きさ
になる焼鈍温度を意味する)が高くなることが観察され
た。 それに従って、焼鈍脆化開始温度が高温側へ移行
し、焼鈍脆性が抑えられる。 この効果は、Re0.5
%以上の添加で明瞭になり、2%程度までは添加量の増
大につれて高まる。 5%を超えると、加工性が低下す
るので避けなければならない。 一方、Mo等にBを添
加したときの影響は、さきの発明に関して述べたよう
に、Bが結晶粒を微細化して焼鈍脆性を抑えるととも
に、粒界に存在して粒界の強度を高め、その結果、深絞
り性をもたらすと考えられる。 ReとともにBを添加
することにより、BによるMo等の焼鈍脆性改善効果が
Re添加の効果とあわせ得られる。 その効果は、後記
するデータからみて、相乗的ということができる。 B
添加の効果は0.01%程度の添加で認められ、0.5
%内外まで増大し、1.0%を超えると、かえって低下
する。
It has been observed that when Re is added to Mo, W, Ta and Nb, the recrystallization temperature (which means the annealing temperature at which the recrystallized grain size becomes a size measurable by an optical microscope) increases. Accordingly, the annealing embrittlement start temperature shifts to the high temperature side, and the annealing embrittlement is suppressed. This effect is Re0.5
%, The content becomes clear, and the content increases up to about 2% as the amount of addition increases. If it exceeds 5%, the workability is deteriorated and it must be avoided. On the other hand, the effect of adding B to Mo or the like is that, as described above with respect to the invention, B refines the crystal grains to suppress annealing brittleness, and exists in the grain boundaries to increase the strength of the grain boundaries. As a result, it is considered that deep drawability is brought about. By adding B together with Re, the effect of B for improving the annealing brittleness of Mo and the like can be obtained together with the effect of Re addition. The effect can be said to be synergistic in view of the data described later. B
The effect of addition is recognized at the addition of about 0.01%, 0.5
%, It increases to inside and outside, and when it exceeds 1.0%, it decreases on the contrary.

【0014】焼鈍は、上記したように再結晶温度以上に
加熱して行なう。 常用の歪み取り焼鈍や軟化焼鈍、す
なわち再結晶温度以下に加熱する焼鈍では、焼鈍脆化は
克服できない。 一般に適当な温度は、おおよそ130
0℃である。
Annealing is performed by heating above the recrystallization temperature as described above. Annealing embrittlement cannot be overcome by conventional strain relief annealing and softening annealing, that is, annealing that is performed below the recrystallization temperature. Generally, a suitable temperature is approximately 130
It is 0 ° C.

【0015】[0015]

【実施例1】スリーナインの純度を保証された市販のM
oを用い、エレクトロンビーム溶解により溶解して、M
o単独(以下「M材」という)、Moに1.9%のRe
を添加したもの(「MR材」)、およびMoに1.9%
のReと0.05%のBを添加したもの(「MRB
材」)を調製した。
Example 1 Commercially available M with a guaranteed purity of three nines
o and melted by electron beam melting, M
o Single (hereinafter referred to as “M material”), Mo containing 1.9% Re
1.9% added to Mo (“MR material”) and Mo
With Re and 0.05% B ("MRB
Material ”) was prepared.

【0016】各材のインゴットから試験片をつくり、真
空中で、600℃,700℃,900℃,1100℃,
1300℃,または1500℃に2時間加熱する真空焼
鈍処理を施した。
A test piece was prepared from the ingot of each material, and was placed in vacuum at 600 ° C, 700 ° C, 900 ° C, 1100 ° C.
A vacuum annealing treatment of heating at 1300 ° C. or 1500 ° C. for 2 hours was performed.

【0017】試験片の表面を研磨し、10%シュウ酸水
溶液中の電解腐食により粒界腐食を行なって、組織を観
察した。 結晶粒径測定は線分法による。 結晶粒径と
焼鈍温度との関係は図1に示すとおりであって、Reの
添加による結晶粒粗大化抑制の効果が明らかである。
The surface of the test piece was polished, and intergranular corrosion was performed by electrolytic corrosion in a 10% oxalic acid aqueous solution to observe the structure. The crystal grain size is measured by the line segment method. The relationship between the crystal grain size and the annealing temperature is as shown in FIG. 1, and the effect of suppressing the crystal grain coarsening by the addition of Re is clear.

【0018】次に、微小硬さ計を用いてビッカース硬さ
を測定した(荷重500gf)。結果を図2に示す。
図中、矢印は再結晶粒径が光学顕微鏡により測定可能で
ある焼鈍温度を示す。 低い温度から硬さの低下が起っ
ていて、加工組織の回復とそれに続く再結晶化が急激な
軟化をひき起こしていることがわかる。
Next, the Vickers hardness was measured using a micro hardness meter (load: 500 gf). The results are shown in Figure 2.
In the figure, the arrow indicates the annealing temperature at which the recrystallized grain size can be measured by an optical microscope. It can be seen that the hardness decreases from a low temperature, and the recovery of the processed structure and the subsequent recrystallization cause a rapid softening.

【0019】引張試験結果を、図3および図4に示す。
引張強度と焼鈍温度との関係をあらわした図3は、焼
鈍温度の上昇に伴い引張強度が低下する曲線が、Reま
たはRe+Bの添加により高温側に移動していることを
示している。 伸びと焼鈍温度との関係をあらわした図
4は、伸びの相対的な低下がはじまる焼鈍温度が、Re
またはRe+Bの添加により高温側に移動すること、す
なわち焼鈍脆化の起る温度が高くなることを示すととも
に、Re+Bの添加が高い伸びをもたらし、材料の加工
性を高めることを示している。
The results of the tensile test are shown in FIGS. 3 and 4.
FIG. 3, which shows the relationship between the tensile strength and the annealing temperature, shows that the curve in which the tensile strength decreases as the annealing temperature rises moves to the high temperature side due to the addition of Re or Re + B. FIG. 4, which shows the relationship between the elongation and the annealing temperature, shows that the annealing temperature at which the relative decrease in the elongation begins is Re
Further, it is shown that addition of Re + B moves to a higher temperature side, that is, the temperature at which annealing embrittlement occurs becomes higher, and addition of Re + B causes higher elongation and improves workability of the material.

【0020】[0020]

【実施例2】純度99.9%以上のMoに対して、種々
の量のReを配合してエレクトロンビ−ムで溶解した。
Example 2 Various amounts of Re were added to Mo having a purity of 99.9% or more and dissolved in an electron beam.

【0021】得られたインゴットを熱間の圧延により厚
さ0.5mmの薄板にし、これを冷間圧延して厚さ15
0μmのシ−トにしたのち、真空中で1300℃に30
分間加熱する焼鈍を施した。
The obtained ingot was hot-rolled into a thin plate having a thickness of 0.5 mm, which was cold-rolled to a thickness of 15 mm.
After making a sheet of 0 μm, it is heated to 1300 ° C. in vacuum for 30 minutes.
Annealing was performed for heating for 1 minute.

【0022】焼鈍材の加工性をしらべるため、絞り試験
を行なった。 エリクセン値のRe添加量による変化
を、図5に示す。 この結果から、MoへのRe添加は
1〜2%が最適であることがわかる。
A drawing test was conducted to examine the workability of the annealed material. The change in Erichsen value with Re addition amount is shown in FIG. From this result, it is understood that the optimum addition amount of Re to Mo is 1 to 2%.

【0023】[0023]

【発明の効果】本発明によれば、純度がスリーナインの
Mo,W,Ta,Nbを素材として、高い加工性をもっ
た高融点金属材が得られる。 この材料は任意の厚さの
薄板に圧延できる加工性を示し、製造された薄板は十分
な深絞り性をもち、焼鈍脆性の心配がない。 スリーナ
イン程度の純度の高融点金属は、粉末焼結品が市販され
ていて入手容易であり、コストをかけてエレクトロンビ
ーム溶解を繰り返して極高純度にする必要がない。 従
って、加工性の高い薄板が、低いコストで提供できる。
According to the present invention, a refractory metal material having a high workability can be obtained using Mo, W, Ta, Nb having a purity of three nines as a raw material. This material exhibits workability that allows it to be rolled into a thin plate of any thickness, the manufactured thin plate has sufficient deep drawability, and there is no concern about annealing brittleness. A high-melting point metal having a purity of about three nines is easily available as a powder sintered product is commercially available, and it is not necessary to repeat the electron beam melting to obtain an extremely high purity at a high cost. Therefore, a thin plate having high workability can be provided at low cost.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の実施例のデータであって、M材およ
び、MR材の平均結晶粒径を、焼鈍温度との関係で示し
たグラフ。
FIG. 1 is a graph showing the data of the example of the present invention, showing the average crystal grain size of the M material and the MR material in relation to the annealing temperature.

【図2】 やはり本発明の実施例のデータであって、M
材、MR材およびMRB材のビッカース硬さを、焼鈍温
度との関係で示したグラフ。
FIG. 2 is also data of an embodiment of the present invention, in which M
The graph which showed the Vickers hardness of the material, MR material, and MRB material with respect to annealing temperature.

【図3】 同じく本発明の実施例のデータであって、M
材、MR材およびMRB材の引張強度を、焼鈍温度との
関係で示したグラフ。
FIG. 3 is also data of an example of the present invention, in which M
The graph which showed the tensile strength of the material, MR material, and MRB material with respect to annealing temperature.

【図4】 これも本発明の実施例のデータであって、M
材、MR材およびMRB材の伸びを、焼鈍温度との関係
で示したグラフ。
FIG. 4 is also data of an embodiment of the present invention, in which M
The graph which showed the elongation of the material, MR material, and MRB material with relation to annealing temperature.

【図5】 本発明の別の実施例のデータであって、Mo
にReを添加した材料のエリクセン値を、Re添加量と
の関係で示したグラフ。
FIG. 5 is data of another embodiment of the present invention, wherein Mo
The graph which showed the Erichsen value of the material which added Re to 2nd in relation with the Re addition amount.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 C22F 1/18 B G F ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Internal reference number FI technical display location C22F 1/18 B G F

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 スリーナイン以上の純度を有するMo,
W,TaまたはNbに、重量で5%以下のReを添加し
てなる加工性に優れた高融点金属材。
1. Mo having a purity of three-nine or more,
A refractory metal material having excellent workability, which is obtained by adding 5% or less by weight of Re to W, Ta or Nb.
【請求項2】 Reに加えてさらにB:1%以下を添加
した請求項1の高融点金属材。
2. The refractory metal material according to claim 1, further containing B: 1% or less in addition to Re.
【請求項3】 請求項1または2の高融点金属材を薄板
に圧延し、得られた薄板を再結晶温度以上の温度に加熱
して焼鈍処理を施すことからなる高融点金属薄板の製造
方法。
3. A method for producing a high-melting-point metal thin plate, which comprises rolling the high-melting-point metal material according to claim 1 or 2 into a thin plate, heating the obtained thin plate to a temperature equal to or higher than a recrystallization temperature, and performing annealing treatment. .
JP23330192A 1992-09-01 1992-09-01 Production of refractory metal material excellent in workability and sheet therefrom Pending JPH0681069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23330192A JPH0681069A (en) 1992-09-01 1992-09-01 Production of refractory metal material excellent in workability and sheet therefrom

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23330192A JPH0681069A (en) 1992-09-01 1992-09-01 Production of refractory metal material excellent in workability and sheet therefrom

Publications (1)

Publication Number Publication Date
JPH0681069A true JPH0681069A (en) 1994-03-22

Family

ID=16952972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23330192A Pending JPH0681069A (en) 1992-09-01 1992-09-01 Production of refractory metal material excellent in workability and sheet therefrom

Country Status (1)

Country Link
JP (1) JPH0681069A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008293690A (en) * 2007-05-22 2008-12-04 Kobe Steel Ltd Nb or Nb-based alloy sheet for producing superconducting wire and precursor for producing superconducting wire
JP2011132563A (en) * 2009-12-22 2011-07-07 Toshiba Corp Mo SPUTTERING TARGET AND MANUFACTURING METHOD THEREFOR
JP2021066950A (en) * 2019-10-24 2021-04-30 光洋應用材料科技股▲分▼有限公司 Molybdenum alloy target, manufacturing method thereof, and molybdenum alloy layer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008293690A (en) * 2007-05-22 2008-12-04 Kobe Steel Ltd Nb or Nb-based alloy sheet for producing superconducting wire and precursor for producing superconducting wire
JP2011132563A (en) * 2009-12-22 2011-07-07 Toshiba Corp Mo SPUTTERING TARGET AND MANUFACTURING METHOD THEREFOR
JP2021066950A (en) * 2019-10-24 2021-04-30 光洋應用材料科技股▲分▼有限公司 Molybdenum alloy target, manufacturing method thereof, and molybdenum alloy layer

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