JPH07101193B2 - Differential pressure leak tester with self-diagnosis function - Google Patents

Differential pressure leak tester with self-diagnosis function

Info

Publication number
JPH07101193B2
JPH07101193B2 JP40596990A JP40596990A JPH07101193B2 JP H07101193 B2 JPH07101193 B2 JP H07101193B2 JP 40596990 A JP40596990 A JP 40596990A JP 40596990 A JP40596990 A JP 40596990A JP H07101193 B2 JPH07101193 B2 JP H07101193B2
Authority
JP
Japan
Prior art keywords
solenoid valve
pressure
differential pressure
subject
air pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP40596990A
Other languages
Japanese (ja)
Other versions
JPH04221733A (en
Inventor
昭男 古瀬
彰 上条
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cosmo Instruments Co Ltd
Original Assignee
Cosmo Instruments Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cosmo Instruments Co Ltd filed Critical Cosmo Instruments Co Ltd
Priority to JP40596990A priority Critical patent/JPH07101193B2/en
Publication of JPH04221733A publication Critical patent/JPH04221733A/en
Publication of JPH07101193B2 publication Critical patent/JPH07101193B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は差圧式リークテスタに
自己診断機能を付加した自己診断機能付差圧式リークテ
スタに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a differential pressure leak tester with a self-diagnosis function, which is obtained by adding a self-diagnosis function to a differential pressure leak tester.

【0002】[0002]

【従来の技術】図3に従来の差圧式リークテスタの概略
の構造を示す。図中1は空圧源を示す。この空圧源1に
蓄えられた空気圧は圧力調整弁2によって一定圧力とな
るように取出されて第1電磁弁SV1に与える。第1電
磁弁SV1はA,B,Cの三つの接続口を有し、非通電
時は接続口A−B間が遮断、B−C間が連通され、通電
時は接続口A−B間が連通され、B−C間が遮断され
る。
2. Description of the Related Art FIG. 3 shows a schematic structure of a conventional differential pressure type leak tester. In the figure, 1 indicates an air pressure source. The air pressure stored in the air pressure source 1 is taken out by the pressure adjusting valve 2 so as to have a constant pressure and given to the first solenoid valve SV1. The first solenoid valve SV1 has three connection ports A, B, and C. When not energized, the connection ports A-B are cut off, B-C are communicated, and when energized, the connection ports A-B are connected. Are communicated with each other and B-C is disconnected.

【0003】接続口Cは大気に開放され、接続口Bに分
岐管3が接続される。分岐管3の一方の分岐口と、他方
の分岐口には、第2電磁弁SV2を通じて被検体4と、
第3電磁弁SV3を通じて内容積が被検体4と同等で洩
れのない基準器5が接続される。被検体4と基準器5に
連通する流路6及び7の間に差圧検出器8を接続し、差
圧検出器8の検出信号は増幅器9とAD変換器11を通
じて制御器12に入力され、制御器12で演算処理され
て警報器13に与えられる。
The connection port C is open to the atmosphere, and the branch pipe 3 is connected to the connection port B. One of the branch ports of the branch pipe 3 and the other branch port are connected to the subject 4 through the second solenoid valve SV2,
A reference device 5 having the same internal volume as the subject 4 and no leakage is connected through the third solenoid valve SV3. A differential pressure detector 8 is connected between the flow paths 6 and 7 communicating with the subject 4 and the reference device 5, and the detection signal of the differential pressure detector 8 is input to the controller 12 through the amplifier 9 and the AD converter 11. , And is arithmetically processed by the controller 12 and given to the alarm device 13.

【0004】つまり制御器12はマイクロコンピュータ
によって構成することができる。マイクロコンピュータ
は周知のように中央演算処理装置12Aと、プログラム
等を収納したROM12Bと、データを一時記憶するR
AM12Cと、入力ポート12D、出力ポート12Eに
よって構成される。差圧検出器8の検出信号は増幅器9
で増幅され、AD変換器11でディジタル信号に変換さ
れる。ディジタル信号に変換された差圧検出信号は入力
ポート12Dを通じて中央演算処理装置12Aに取込ま
れ、予め設定した値と比較され、設定値を越えたとき出
力ポート12Eから警報信号が出力され警報器13が起
動されて被検体4の不良を知らせる警報が発せられる。
That is, the controller 12 can be composed of a microcomputer. As is well known, the microcomputer includes a central processing unit 12A, a ROM 12B for storing programs and the like, and an R for temporarily storing data.
It is composed of an AM 12C, an input port 12D, and an output port 12E. The detection signal of the differential pressure detector 8 is the amplifier 9
Is amplified by the AD converter 11 and converted into a digital signal by the AD converter 11. The differential pressure detection signal converted into a digital signal is taken into the central processing unit 12A through the input port 12D, compared with a preset value, and when the preset value is exceeded, an alarm signal is output from the output port 12E and an alarm device is output. 13 is activated, and an alarm is issued to inform that the subject 4 is defective.

【0005】尚制御器12は差圧検出信号の比較判定を
行なうことの外に、電磁弁SV1、SV2、SV3を制
御する動作も実行する。つまり検査開始時に第1電磁弁
SV1を通電状態に制御すると共に、その時点から所定
時間後に第2電磁弁SV2及び第3電磁弁SV3を通電
状態に制御し、空気圧を被検体4及び基準器5に与え
る。
The controller 12 performs the operation of controlling the solenoid valves SV1, SV2, SV3 in addition to the comparison and determination of the differential pressure detection signals. That is, the first solenoid valve SV1 is controlled to be in the energized state at the start of the inspection, and the second solenoid valve SV2 and the third solenoid valve SV3 are controlled to be in the energized state after a predetermined time from that point, and the air pressure is controlled to the subject 4 and the reference device 5. Give to.

【0006】つまり被検体4に洩れが有するか否かを検
査する手順は次の如くして行われる。 初期状態では
第1電磁弁SV1及び第2電磁弁SV2、第3電磁弁S
V3は共に非通電状態とされる。第2電磁弁SV2と第
3電磁弁SV3は非通電時は開に制御されている。従っ
てこの状態では被検体4と基準器5は第1電磁弁SV1
の接続口Cを通じて大気に開放されている。 スター
ト信号により第1電磁弁SV1が通電される。この通電
により第1電磁弁SV1は接続口B−C間が遮断され、
接続口A−B間が連通されるから被検体4と基準器5に
空圧源1から空気圧が与えられる。 一定の加圧時間
(1〜2秒程度)後に第2電磁弁SV2と第3電磁弁S
V3に通電し、流路6と7を遮断する。 流路6及び
7を遮断した時点から一定時間経過後に差圧検出器8の
検出出力を電気的にゼロリセットし、そのゼロリセット
から所定時間以内に差圧値が規定値に達するか否かを制
御器12で監視する。
That is, the procedure for inspecting whether or not the subject 4 has a leak is performed as follows. In the initial state, the first solenoid valve SV1, the second solenoid valve SV2, and the third solenoid valve S
Both V3 are in a non-energized state. The second solenoid valve SV2 and the third solenoid valve SV3 are controlled to be open when not energized. Therefore, in this state, the subject 4 and the reference device 5 have the first solenoid valve SV1.
It is open to the atmosphere through the connection port C of. The start signal energizes the first solenoid valve SV1. Due to this energization, the first solenoid valve SV1 is disconnected between the connection ports B and C,
Since the connection ports A and B are communicated with each other, air pressure is applied from the pneumatic pressure source 1 to the subject 4 and the reference device 5. The second solenoid valve SV2 and the third solenoid valve S after a certain pressurizing time (about 1 to 2 seconds)
V3 is energized and the flow paths 6 and 7 are shut off. The detection output of the differential pressure detector 8 is electrically reset to zero after a lapse of a certain time from the time when the flow paths 6 and 7 are shut off, and whether or not the differential pressure value reaches a specified value within a predetermined time after the zero reset is performed. It is monitored by the controller 12.

【0007】所定時間の範囲内に差圧値が所定値に達し
ない場合、被検体4は「洩れなし」と判定される。また
所定時間の範囲内に差圧値が所定値に達したとき被検体
4は「洩れ有り」と判定され、警報器13が起動され
る。 検査終了時点で第1電磁弁SV1、第2電磁弁
SV2、第3電磁弁SV3の通電が解除され、初期状態
に戻される。
When the differential pressure value does not reach the predetermined value within the predetermined time range, the subject 4 is judged as "no leakage". Further, when the differential pressure value reaches a predetermined value within the range of the predetermined time, the subject 4 is determined to have "leakage", and the alarm device 13 is activated. At the end of the inspection, the first solenoid valve SV1, the second solenoid valve SV2, and the third solenoid valve SV3 are de-energized and returned to the initial state.

【0008】[0008]

【発明が解決しようとする課題】上述した差圧式リーク
テスタにおいて、例えば第1電磁弁SV1が不良とな
り、通電したもにかかわらず接続口A−B間が連通しな
い状態のまま検査を行なったとすると、制御器は差圧の
発生を検出しないため被検体4は洩れのない良品と判定
する欠点がある。
In the differential pressure type leak tester described above, for example, if the first solenoid valve SV1 becomes defective, and the inspection is performed while the connection ports A and B are not connected to each other despite being energized, Since the controller does not detect the generation of the differential pressure, there is a drawback in that the subject 4 is judged as a non-defective non-defective product.

【0009】また差圧検出器8が不良となり、差圧が与
えられているにもかかわらず、その差圧に対応した電気
信号を出力しない場合も「洩れなし」とする誤った判定
を下す欠点がある。更に制御器12及び警報器13が不
良となり、差圧検出器8から規定値以上に達する差圧信
号が与えられているにもかかわらず、不動作状態を続け
ると全ての被検体は「洩れなし」と判定される。
Further, even if the differential pressure detector 8 becomes defective and the differential pressure is applied, even if the electric signal corresponding to the differential pressure is not output, an erroneous determination of "no leak" is made. There is. Further, even if the controller 12 and the alarm device 13 become defective and the differential pressure signal from the differential pressure detector 8 reaches the specified value or more, even if the inoperative state is continued, all the test objects will show “no leakage”. Is determined.

【0010】従ってこれらの不都合が発生しないように
従来は定期的に各部の動作を個別にチェックしている。
然し乍ら被検体4は流れ作業により多量に検査するもの
であるから検査中に上述したようなリークテスタの不良
が発生した場合には、その不良が発生した時点から以後
に検査して良品と判定した被検体に洩れのある不良品が
混入することになり、検査の信頼性を著しく低下させ
る。
Therefore, in order to prevent these inconveniences, conventionally, the operation of each unit is individually checked on a regular basis.
However, since the specimen 4 is inspected in a large amount by the flow work, if the above-mentioned defect of the leak tester occurs during the inspection, the inspection is performed after the defect occurs and the inspection is judged to be a good product. Defective products with leakage will be mixed into the sample, and the reliability of the test will be significantly reduced.

【0011】この発明は被検体の各1個毎にリークテス
タが正常か否かを自動的に自己診断し、リークテスタが
不良になった場合は直ちにその状態を警報できるように
した自己診断機能付差圧式リークテスタを提供するもの
である。
According to the present invention, a self-diagnosis function is provided for automatically making a self-diagnosis of whether or not a leak tester is normal for each one of the test objects, and when the leak tester becomes defective, the state can be immediately alarmed. A pressure leak tester is provided.

【0012】[0012]

【課題を解決するための手段】この発明では一定の圧力
値に調整された空圧源の圧力を取出す第1電磁弁と、こ
の第1電磁弁によって取出される空気圧を2分岐する分
岐管と、この分岐管で分岐された二つの流路に設けられ
2電磁弁及び第3電磁弁と、この第2電磁弁及び第
3電磁弁を通じて取出される空気圧が与えられる被検体
及び洩れのない基準器と、被検体に与えられた空気圧と
基準器に与えられた圧力の変化を検出する差圧検出器
と、この差圧検出器の検出出力が所定値以上に達したこ
とを検出し警報を出力する警報器とによって構成される
差圧式リークテスタにおいて、検査の開始時に第2電磁
と第3電磁弁の何れか一方を閉じた状態で第1電磁弁
を開く制御を行なう制御手段と、この制御手段により第
2電磁弁と第3電磁弁の何れか一方が閉に制御されてい
る状態で警報器が作動するか否かを判定する判定手段と
を設け、この判定手段が警報動作を検出することにより
差圧式リークテスタが正常であると判定するように構成
したものである。
According to the present invention, there is provided a first solenoid valve for taking out the pressure of an air pressure source adjusted to a constant pressure value, and a branch pipe for bifurcating the air pressure taken out by the first solenoid valve. a second solenoid valve and the third solenoid valve provided in the two flow paths which are branched in the branch pipe, the subject and leakage of air pressure is provided to be withdrawn through the second solenoid valve and the third solenoid valve There is no reference unit, a differential pressure detector that detects changes in the air pressure applied to the subject and the pressure applied to the reference unit, and that the detection output of this differential pressure detector has reached a predetermined value or more. In a differential pressure type leak tester constituted by an alarm device for outputting an alarm, a control means for performing control to open the first electromagnetic valve with either one of the second electromagnetic valve and the third electromagnetic valve closed at the start of inspection. , the second electromagnetic valve and the third solenoid by the control means Determined that either one provided with determining means for determining whether the alarm device is activated while being controlled in a closed, are normal differential pressure leak tester by the determination means detects the alarm operation of the It is configured to do.

【0013】このように検査開始時のわずかな時間、第
2電磁弁と第3電磁弁の何れか一方を閉に制御している
状態で第1電磁弁を開に制御したとき警報器が作動すれ
ばリークテスタが正常であると判定することができる。
つまり第2電磁弁と第3電磁弁の何れか一方を閉じてい
る状態で第1電磁弁を開に制御すると第1電磁弁が正常
に動作していれば被検体又は基準器だけに空気が与えら
れる。
As described above, when the first solenoid valve is controlled to be open in a state in which one of the second solenoid valve and the third solenoid valve is controlled to be closed for a short time at the start of the inspection, the alarm device is activated. Then, it is possible to determine that the leak tester is normal.
In other words, if the first solenoid valve is controlled to open while either the second solenoid valve or the third solenoid valve is closed, the air will only flow to the subject or the reference device if the first solenoid valve is operating normally. Given.

【0014】よってこの状態で差圧検出器が正常で、然
も制御器及び警報器が正常であれば警報器が作動する。
従ってこの警報器が作動しなければ3者の中の何れかが
不良になっていると判断することができる。
Therefore, in this state, if the differential pressure detector is normal and the controller and alarm are normal, the alarm is activated.
Therefore, if this alarm does not operate, it can be determined that any one of the three is defective.

【0015】[0015]

【実施例】図1はこの発明の一実施例を示す。図1にお
いて図3と対応する部分には同一符号を付して示す。こ
の発明においては検査の開始時点で第2電磁弁SV2
第3電磁弁SV3の何れか一方を閉の状態に制御して第
1電磁弁SV1を開に制御する手段と、この状態で警報
器13が作動するか否かを判定する判定手段を設ける。
FIG. 1 shows an embodiment of the present invention. In FIG. 1, portions corresponding to those in FIG. 3 are designated by the same reference numerals. According to the present invention, the second solenoid valve SV2 and
A means for controlling one of the third solenoid valves SV3 to be in a closed state to control the first solenoid valve SV1 to be open and a determination means for determining whether or not the alarm device 13 operates in this state are provided.

【0016】検査開始時点で第2電磁弁SV2又は第3
電磁弁SV3の何れか一方を閉に制御し、この状態で第
1電磁弁SV1を開に制御する手段は制御器12によっ
て構成することができる。つまり、制御器12を構成す
るマイクロコンピュータのROM12Bに収納したプロ
グラムに、検査開始のタイミングで例えば第2電磁弁S
V2をわずかな時間、閉に制御するステップと、警報器
13に起動信号が出力されるか否かを判定するステップ
とを付加する。
At the start of the inspection, the second solenoid valve SV2 or the third solenoid valve SV2
The controller 12 may be configured to control either one of the solenoid valves SV3 to be closed and to control the first solenoid valve SV1 to be open in this state. That is, the program stored in the ROM 12B of the microcomputer that constitutes the controller 12 includes, for example, the second solenoid valve S at the timing of starting the inspection.
A step of controlling V2 to be closed for a short time and a step of determining whether or not an activation signal is output to the alarm device 13 are added.

【0017】警報器13に対して起動信号が発信されな
い場合は別に設けた警報器14に起動信号を発信し、こ
の警報器14の起動によって差圧式リークテスタの異常
を表示させる。図2はこの発明の他の実施例を示す。こ
の実施例では被検体4及び基準器5の容積が大きい場合
の差圧式リークテスタにこの発明を適用した場合を示
す。
When the activation signal is not transmitted to the alarm device 13, the activation signal is transmitted to the alarm device 14 provided separately, and the activation of the alarm device 14 causes the abnormality of the differential pressure type leak tester to be displayed. FIG. 2 shows another embodiment of the present invention. In this embodiment, the case where the present invention is applied to a differential pressure type leak tester when the volumes of the subject 4 and the reference device 5 are large is shown.

【0018】つまりこの実施例では第2電磁弁SV2と
被検体4との間に第4電磁弁SV4を配置すると共に、
第3電磁弁SV3と基準器5との間に第5電磁弁SV5
を配置する。これら第4電磁弁SV4と第5電磁弁SV
5はそれぞれ三方弁を用い三方弁の接続口Cを第1電磁
弁SV1の一つの接続口Bに接続する。第1電磁弁SV
1の他方の接続口Aは調整弁2の出力側に接続し、調整
弁2と分岐管3との間に直接接続する。
That is, in this embodiment, the fourth solenoid valve SV4 is arranged between the second solenoid valve SV2 and the subject 4, and
A fifth solenoid valve SV5 is provided between the third solenoid valve SV3 and the reference unit 5.
To place. These fourth solenoid valve SV4 and fifth solenoid valve SV
5 is a three-way valve, and connects the connection port C of the three-way valve to one connection port B of the first solenoid valve SV1. First solenoid valve SV
The other connection port A of 1 is connected to the output side of the regulating valve 2 and is directly connected between the regulating valve 2 and the branch pipe 3.

【0019】ここで第1電磁弁SV1を通る流路15乃
至17は一般にバイパスと呼ばれ他の流路に用いるパイ
プの径より太い径のパイプを用いる。検査の開始時には
第1電磁弁SV1を接続口A−B間を連通させ流路1
5,16,17を通じて被検体4と基準器5に空気圧を
与える。このようにして太い径の流路を用いて被検体4
と基準器5に短時間に多量の空気を流し込み被検体4と
基準器5の内部の圧力を高める。
Here, the flow passages 15 to 17 passing through the first solenoid valve SV1 are generally called bypasses and use pipes having a diameter larger than that of pipes used for other flow passages. At the start of the inspection, the first solenoid valve SV1 is made to communicate between the connection ports A and B and the flow path 1
Air pressure is applied to the subject 4 and the reference device 5 through 5, 16 and 17. In this way, the subject 4
Then, a large amount of air is poured into the reference device 5 in a short time to increase the pressure inside the subject 4 and the reference device 5.

【0020】被検体4と基準器5の内圧が所定の圧力に
高まった時点で第4電磁弁SV4、第5電磁弁SV5を
接続口A−B間が通電する状態に切替る。このとき第2
電磁弁SV2と第3電磁弁SV3は開のままの状態にな
っているからこの状態では第2電磁弁SV2と第3電磁
弁SV3を通じて被検体4と基準器5に空気圧が送り込
まれる。
When the internal pressures of the subject 4 and the reference device 5 increase to a predetermined pressure, the fourth solenoid valve SV4 and the fifth solenoid valve SV5 are switched to a state in which the connection ports A and B are energized. At this time the second
Since the solenoid valve SV2 and the third solenoid valve SV3 are left open, air pressure is sent to the subject 4 and the reference device 5 through the second solenoid valve SV2 and the third solenoid valve SV3 in this state.

【0021】被検体4と基準器5に所定の空気圧が蓄積
されたタイミングで第2電磁弁SV2とSV3を閉じ、
この状態で差圧が発生するか否かを監視する。差圧の発
生が無い場合は被検体4は洩れのない良品と判定する。
ここでこの発明においてはバイパスを通じて空気圧を被
検体4、基準器5に送り込んでいる状態から第2電磁弁
SV2と第3電磁弁SV3を通じて空気を送り込む状態
に切替る際に、例えば第2電磁弁SV2をわずかな時
間、閉に切替え、被検体4に送り込む空気を一時遮断す
る。
The second solenoid valves SV2 and SV3 are closed at the timing when a predetermined air pressure is accumulated in the subject 4 and the reference device 5,
In this state, it is monitored whether a differential pressure is generated. When no differential pressure is generated, the subject 4 is determined to be a non-defective non-defective product.
Here, in the present invention, for example, when the air pressure is sent to the subject 4 and the reference device 5 through the bypass to the state where the air is sent through the second solenoid valve SV2 and the third solenoid valve SV3, for example, the second solenoid valve The SV2 is switched to the closed state for a short time to temporarily shut off the air sent to the subject 4.

【0022】この遮断によって差圧が発生するから、差
圧検出器8が正常であれば差圧信号を出力する。一方制
御器12が正常に動作していれば警報器13に起動信号
を出力する。よって警報器13に対して起動信号が出力
されたことを制御器12自身が検出することによって検
査装置は正常に動作していると判定し、検査を続ける。
A differential pressure is generated by this interruption, so that a differential pressure signal is output if the differential pressure detector 8 is normal. On the other hand, if the controller 12 is operating normally, a start signal is output to the alarm device 13. Therefore, when the controller 12 itself detects that the activation signal is output to the alarm device 13, it is determined that the inspection device is operating normally, and the inspection is continued.

【0023】検査終了時点では第4電磁弁SV4と第5
電磁弁SV5及び第1電磁弁SV1は接続口B−C間を
連通する状態に切替られる。従って被検体4と基準器5
に蓄積された空気はバイパスを通じて大気に放出され
る。つまり短時間に大気に放出することができる。また
この実施例のようにバイパスを用いることにより、特に
検査終了時に被検体4及び基準器5から出力される排気
が差圧検出器8を含む部分を通過しない。よって被検体
4に水、油等を含む場合でも水、油等が差圧検出器8に
流入することがないから被検体4が洗浄工程直後の工程
のものでも検査することができる。
At the end of the inspection, the fourth solenoid valve SV4 and the fifth solenoid valve SV4
The solenoid valve SV5 and the first solenoid valve SV1 are switched to a state in which the connection ports BC are communicated with each other. Therefore, the subject 4 and the reference device 5
The air accumulated in is discharged to the atmosphere through the bypass. That is, it can be released to the atmosphere in a short time. Further, by using the bypass as in this embodiment, the exhaust gas output from the subject 4 and the reference device 5 does not pass through the portion including the differential pressure detector 8 especially at the end of the inspection. Therefore, even when the subject 4 contains water, oil, etc., water, oil, etc. do not flow into the differential pressure detector 8, so that the subject 4 can be inspected even after the cleaning process.

【0024】[0024]

【発明の効果】以上説明したように、この発明によれば
第1電磁弁SV1及び第2電磁弁SV2が動作不能にな
った状態、差圧検出器8が差圧を検出しない状態、警報
器13が動作しない状態を全て検出することができ、信
頼性の高いリークテスタを提供することができる。
As described above, according to the present invention, the first solenoid valve SV1 and the second solenoid valve SV2 are inoperable, the differential pressure detector 8 does not detect the differential pressure, and the alarm device is provided. It is possible to detect all the states in which 13 does not operate, and it is possible to provide a highly reliable leak tester.

【0025】然も自己診断を行なう時間は、第2電磁弁
SV2をわずかな時間0.5秒程度閉に制御するだけで
済むから、製品の検査時間が長くなってしまう程のこと
ではない。
The self-diagnosis time is not so long as the product inspection time becomes long because the second solenoid valve SV2 is controlled to be closed for a short time of about 0.5 seconds.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例を示す系統図。FIG. 1 is a system diagram showing an embodiment of the present invention.

【図2】この発明の変形実施例を示す系統図。FIG. 2 is a system diagram showing a modified embodiment of the present invention.

【図3】従来の技術を説明するための系統図。FIG. 3 is a system diagram for explaining a conventional technique.

【符号の説明】[Explanation of symbols]

1 空圧源 2 圧力調整弁 3 分岐管 4 被検体 5 基準器 6,7 流路 8 差圧検出器 9 増幅器 11 AD変換器 12 制御器 13 被検体用の警報器 14 検査装置用の警報器 15,16,17 バイパス SV1 第1電磁弁 SV2 第2電磁弁 SV3 第3電磁弁 SV4 第4電磁弁 SV5 第5電磁弁 DESCRIPTION OF SYMBOLS 1 Air pressure source 2 Pressure control valve 3 Branch pipe 4 Test object 5 Reference device 6,7 Flow path 8 Differential pressure detector 9 Amplifier 11 AD converter 12 Controller 13 Test device alarm device 14 Test device alarm device 15,16,17 Bypass SV1 1st solenoid valve SV2 2nd solenoid valve SV3 3rd solenoid valve SV4 4th solenoid valve SV5 5th solenoid valve

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 一定の圧力値に調整された空圧源の圧力
を取出す第1電磁弁と、この第1電磁弁によって取出さ
れる空気圧を2分岐する分岐管と、この分岐管で分岐さ
れた二つの流路に設けられた第2電磁弁及び第3電磁弁
と、この第2電磁弁及び第3電磁弁を通じて取出される
空気圧が与えられる被検体及び被検体と同等の内容積を
持ち洩れのない基準器と、被検体に与えられた空気圧と
基準器に与えられた圧力の変化を検出する差圧検出器
と、この差圧検出器の検出出力が所定値以上に達したこ
とを検出し警報を出力をする警報器とを具備して構成さ
れる差圧式リークテスタにおいて、 検査の開始前に上記第2電磁弁と第3電磁弁の何れか一
を閉に制御した状態で上記第1電磁弁を開に制御する
制御手段と、この制御手段により第2電磁弁と第3電磁
弁の何れか一方が閉に制御されている状態で上記警報器
が作動するか否かを判定する判定手段とを設け、この判
定手段が警報器の警報動作を検出することにより上記差
圧式リークテスタが正常に動作すると判定するように構
成した自己診断機能付差圧式リークテスタ。
1. A first electromagnetic valve for taking out the pressure of an air pressure source adjusted to a constant pressure value, a branch pipe for bifurcating the air pressure taken out by the first electromagnetic valve, and a branch pipe for branching by this branch pipe. The second solenoid valve and the third solenoid valve provided in the two flow paths, the test subject to which the air pressure taken out through the second solenoid valve and the third solenoid valve is applied, and the internal volume equivalent to the test subject. A leak-free reference device, a differential pressure detector that detects changes in the air pressure applied to the subject and the pressure applied to the reference device, and that the detection output of this differential pressure detector has exceeded a specified value. In a differential pressure type leak tester configured to include an alarm device that detects and outputs an alarm, one of the second solenoid valve and the third solenoid valve is provided before the start of inspection.
And control means for controlling the first electromagnetic valve while the control to close to open towards the second solenoid valve and the third solenoid by the control means
The differential pressure type leak tester is provided with judging means for judging whether or not the alarm device is activated in the state where one of the valves is controlled to be closed, and the judging means detects the alarm operation of the alarm device. A differential pressure type leak tester with a self-diagnosis function that is configured to determine that the normal operation is performed.
【請求項2】 一定の圧力値に調整された空圧源の圧力
を取出す第1電磁弁と、上記空圧源の圧力を2分岐する
分岐管と、この分岐管で2分された二つの流路に設けら
れた第2電磁弁及び第3電磁弁と、この第2電磁弁及び
第3電磁弁を通じて上記空圧源の圧力が各一つの接続口
に与えられる第4電磁弁及び第5電磁弁と、この第4電
磁弁及び第5電磁弁を通じて上記空圧源の圧力が与えら
れる被検体及び基準器と、上記第1電磁弁を通じて上記
第4電磁弁と第5電磁弁の各一つの接続口に上記空圧源
の圧力を与えるバイパスと、上記第2電磁弁と第4電磁
弁との接続点及び第3電磁弁と第5電磁弁との接続点の
間に接続した差圧検出器とを具備し、検査の開始時に上
記第1電磁弁からバイパス及び第4電磁弁を通じて被検
体に圧力を与えると共に、上記第1電磁弁からバイパス
及び第5電磁弁を通じて基準器に圧力を与え、この状態
から第1電磁弁を閉じてバイパスを閉じ、上記第2電磁
弁及び第3電磁弁を通じて被検体及び基準器に空気圧を
与え、その後第2電磁弁及び第3電磁弁を閉じて上記差
圧検出器から差圧検出信号が出力されるか否かによって
被検体の洩れの有無を検査するように構成した差圧式リ
ークテスタにおいて、 上記被検体及び基準器にバイパスから空気圧を与えてい
る状態から上記第2電磁弁及び第3電磁弁を通じて被検
体及び基準器に空気圧を与える状態に切替た状態で上記
第2電磁弁と第3電磁弁の何れか一方を短時間閉に制御
し、上記差圧検出器に強制的に差圧を与えて自己診断す
るように構成した自己診断機能付差圧式リークテスタ。
2. A first electromagnetic valve for taking out the pressure of an air pressure source adjusted to a constant pressure value, a branch pipe for branching the pressure of the air pressure source into two, and two branch pipes divided by this branch pipe. A second solenoid valve and a third solenoid valve provided in the flow path, and a fourth solenoid valve and a fifth solenoid valve through which the pressure of the pneumatic pressure source is applied to each one connection port through the second solenoid valve and the third solenoid valve. A solenoid valve, a subject and a reference device to which the pressure of the air pressure source is applied through the fourth solenoid valve and the fifth solenoid valve, and one of the fourth solenoid valve and the fifth solenoid valve through the first solenoid valve. A differential pressure connected between a bypass for applying the pressure of the air pressure source to one connection port, and a connection point between the second solenoid valve and the fourth solenoid valve and a connection point between the third solenoid valve and the fifth solenoid valve. A detector is provided, and when a pressure is applied to the subject through the bypass and the fourth solenoid valve from the first solenoid valve at the start of the inspection. In both cases, pressure is applied to the reference device from the first solenoid valve through the bypass and the fifth solenoid valve, and from this state, the first solenoid valve is closed to close the bypass, and the subject and the subject are passed through the second solenoid valve and the third solenoid valve. Air pressure is applied to the reference device, then the second solenoid valve and the third solenoid valve are closed, and the presence or absence of leakage of the subject is inspected depending on whether or not the differential pressure detection signal is output from the differential pressure detector. In the differential pressure type leak tester described above, the state in which the air pressure is applied to the subject and the reference device from the bypass is switched to the state in which the air pressure is applied to the subject and the reference device through the second solenoid valve and the third solenoid valve. A differential pressure type leak tester with a self-diagnosis function, which is configured to control either one of the second solenoid valve and the third solenoid valve to be closed for a short time and forcibly apply a differential pressure to the differential pressure detector for self-diagnosis.
JP40596990A 1990-12-25 1990-12-25 Differential pressure leak tester with self-diagnosis function Expired - Lifetime JPH07101193B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40596990A JPH07101193B2 (en) 1990-12-25 1990-12-25 Differential pressure leak tester with self-diagnosis function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40596990A JPH07101193B2 (en) 1990-12-25 1990-12-25 Differential pressure leak tester with self-diagnosis function

Publications (2)

Publication Number Publication Date
JPH04221733A JPH04221733A (en) 1992-08-12
JPH07101193B2 true JPH07101193B2 (en) 1995-11-01

Family

ID=18515597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40596990A Expired - Lifetime JPH07101193B2 (en) 1990-12-25 1990-12-25 Differential pressure leak tester with self-diagnosis function

Country Status (1)

Country Link
JP (1) JPH07101193B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2246684A1 (en) 2006-01-13 2010-11-03 Cosmo Instruments Co., Ltd Method for detecting fault in leakage inspector, leakage inspector

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005091042A (en) 2003-09-12 2005-04-07 Olympus Corp Leak tester
JP5318005B2 (en) 2010-03-10 2013-10-16 株式会社Sokudo Substrate processing apparatus, stocker apparatus, and substrate container transport method
EP2756279B1 (en) * 2011-09-13 2018-11-14 Koninklijke Philips N.V. Pressure based gas leak testing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2246684A1 (en) 2006-01-13 2010-11-03 Cosmo Instruments Co., Ltd Method for detecting fault in leakage inspector, leakage inspector

Also Published As

Publication number Publication date
JPH04221733A (en) 1992-08-12

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