JPH07121817A - Method of manufacturing magnetic head - Google Patents

Abstract

(57) [Summary] [Object] To realize a manufacturing method for stably melting glass in a winding groove portion when forming a gap in a laminated magnetic head composed of a soft magnetic alloy thin film and an insulating film. [Structure] In a magnetic head in which a soft magnetic alloy thin film 1 is sandwiched by a non-magnetic substrate 2 and a winding groove 4 and a gap material 3 are formed, the gap faces are butted together, and a glass rod 5 is melted by heat treatment to form a core half. In the step of joining the bodies, as shown in FIG. 1 (b), the atmosphere during the heat treatment is an atmosphere containing oxygen up to the deformation point of the glass, and thereafter, it is in an inert gas or oxygen is added to the inert gas. A method of manufacturing a magnetic head in which the atmosphere contains 0.1 to 1%.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a VTR (Video tape r
The present invention relates to a method of manufacturing a magnetic head used for ecorder), DAT (dynamic address translation) and the like.

[0002]

2. Description of the Related Art In recent years, with the trend of magnetic recording technology demanding characteristics in a high frequency region such as a video head, a magnetic head and a recording medium capable of sufficiently supporting a recording wavelength of submicron have been demanded. Under such circumstances, a magnetic head is a recording medium with a high coercive force (Hc) (for example, metal,
In order to perform sufficient writing in the Ba-Fe tape), the saturation magnetic flux density (B
A magnetic head of a laminated type having a main magnetic path formed of a soft magnetic alloy thin film having a high s) (for example, sendust, an amorphous material) has been developed, and some have been put into practical use for S-VHS, commercial D- VT
It is installed for R and so on.

A conventional method of manufacturing a magnetic head will be described below with reference to the drawings. FIG. 3 is a process diagram showing a method of manufacturing a laminated magnetic head, and FIG. 3 (a) shows a configuration in which a soft magnetic alloy thin film 13 is sandwiched between non-magnetic substrates 14, and a pair of core halves to be a magnetic head is formed. Winding groove on at least one side
15 is formed, the gap surface 16 is mirror-polished, and then a glass film is formed as a gap material (not shown) by a predetermined thickness (corresponding to the gap length) by a sputtering method or the like. Further, FIG. 3 (b) shows a state at the time of forming a gap. After a pair of core halves are abutted against each other, pressure is applied by a jig (not shown in the figure) to place the glass rod 17 in the winding groove 18. It was done. In this state, as shown in FIG. 3C, heat treatment is performed in a nitrogen atmosphere to perform gap bonding and, at the same time, melt the glass rod 17. The heat-treated under the above-mentioned condition is (0.2
(μm) Since the glass melting surface is composed of a ceramic and a metal film, uneven melting occurs. As a result,
As shown in (d), the glass 19 is shaped like a fan and melted.

[0004]

However, in the above-described method of manufacturing the laminated head, the glass melted in the winding groove is unevenly melted. Therefore, when the head chip is used, there is no glass and the strength is insufficient. There was also a problem that the space of the winding could not be secured due to the dango shape. The present invention solves such conventional problems,
It is an object of the present invention to provide a highly reliable method of manufacturing a magnetic head.

[0005]

Means for Solving the Problems In order to achieve the above object, the present invention provides an atmosphere in a furnace during melting of glass (during gap formation) that contains oxygen below the sag point of glass (in air).
After that, an oxide film is formed on the surface of the substrate by placing it in an inert gas or by treating the atmosphere with 0.1 to 1% oxygen and the other in an inert gas to improve the wettability of the glass. It is what makes me.

[0006]

Therefore, according to the present invention, the wettability of the glass is improved by setting the conditions for forming the gap to the above-mentioned atmosphere, and the winding groove can be molded in a good condition. A magnetic head with excellent strength can be obtained.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 (a) shows a state of the magnetic head of the present invention when a gap is formed, in which a core half composed of a soft magnetic alloy thin film 1 and a non-magnetic substrate 2 is butted against each other via a gap member 3. It is a thing. The pair of core halves are heat-treated while being pressed by a jig to melt and bond the glass rod 5 arranged in the winding groove 4. As shown in FIG. 1 (b), the heat treatment conditions at this time were set to the yield point (At) of the glass.
(Point) is treated in an atmosphere containing oxygen (for example, in the air), and then an inert gas (nitrogen) atmosphere is obtained. Although the temperature is kept constant at the sag point, this is for facilitating replacement of the atmosphere in the tubular furnace, and is not necessary in a belt furnace which separates the atmosphere by temperature. Under the above conditions, a good wettability of the glass 6 can be obtained as shown in FIG. 1 (c). Further, the condition of the treatment temperature in the atmosphere changes depending on the temperature rising rate of the glass and the furnace, and similar results were obtained even if the temperature was kept constant between 200 ° C and the yield point.

Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 2 (a) shows a state when the gap of the magnetic head is formed. The soft magnetic alloy thin film 7 is shown in FIG.
And the core halves composed of the non-magnetic substrate 8 are butted against each other via the gap material 9. The pair of core halves are heat-treated while being pressed by a jig to melt and bond the glass rods 11 arranged in the winding grooves. The heat treatment conditions at this time are
As shown in FIG. 2 (b), by setting the atmosphere containing 0.1 to 1% of oxygen in the inert gas, a good wettability of the glass 12 was obtained as shown in FIG. 2 (c). The amount of oxygen varies depending on the type of glass, but low-melting glass with a working temperature of around 500 ° C has poor wettability in an atmosphere of 0.1% or less,
If it exceeds 1%, the reaction with the substrate or the soft magnetic film and bubbles are problems.

[0009]

As described above, according to the present invention, as a condition for melting glass, the glass is kept in the atmosphere up to the sag point of the glass, and thereafter, the glass is treated in an inert gas atmosphere, or oxygen is added to the inert gas in an amount of 0.1 to 0.1%. By treating in an atmosphere containing 1%, the wettability of glass is improved, and the reaction with the soft magnetic alloy thin film is suppressed, so that a magnetic head with high yield and high reliability can be obtained. Have.

[Brief description of drawings]

FIG. 1 is a diagram showing an external shape at the time of forming a gap, conditions for forming the gap, a perspective view of a head chip, and the like in a first embodiment of the present invention.

FIG. 2 is a diagram showing an external shape at the time of forming a gap, conditions at the time of forming a gap, a perspective view of a head chip, and the like in a second embodiment of the present invention.

FIG. 3 is a diagram showing an appearance shape of a conventional magnetic head before forming a gap, an appearance shape when forming a gap, conditions when forming a gap, a perspective view of a head chip, and the like.

[Explanation of symbols]

1, 7, 13 ... Soft magnetic alloy thin film, 2, 7, 15 ... Non-magnetic substrate, 3, 9 ... Gap material, 4, 10, 15, 18 ... Winding groove, 5, 11, 17 ... Glass rod, 6 , 12, 19… Glass.

Claims (2)

[Claims] 1. In a method of manufacturing a laminated magnetic head having a main magnetic path formed of a soft magnetic alloy thin film and sandwiching both sides with a non-magnetic substrate, a glass in which a winding groove is subjected to a heat treatment condition when a gap is formed. A method of manufacturing a magnetic head, characterized in that an atmosphere containing oxygen is set to a temperature equal to or lower than the sag point of (1), and then the glass is melted by substituting an inert gas to raise the temperature. 2. In a method of manufacturing a laminated magnetic head having a main magnetic path made of a soft magnetic alloy thin film and sandwiching both sides with a non-magnetic substrate, the atmosphere during heat treatment for forming a gap is set to an inert gas. A method of manufacturing a magnetic head, characterized in that the glass is melted by raising the temperature in a state of containing 0.1 to 1% of oxygen.