JPH0713076Y2 - Disk centering device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a disk centering device used for surface inspection of a disk such as a magnetic disk or cutting work.

[Conventional technology]

When a magnetic disk, optical disk, glass disk (disk master) is rotated to inspect or cut the surface of the disk, a device for accurately aligning the center of the disk with the center of the spindle, that is, a centering device is used. .

FIG. 5 shows a conventional disc centering device. This centering device includes a centering table 11 attached to a spindle.
A mounting surface 12 for horizontally mounting the disk 13 is formed on the upper end of the disk, and an air suction nozzle port 14 for adsorbing the disk 13 is provided on the mounting surface 12, and the inner diameter of the disk is provided at the center of the mounting surface 12. A hub head 15 for centering is attached to the center of the centering table 11.

In the above structure, the center hole of the disk 13 is fitted into the hub head 15 so that the disk 13 is placed on the mounting surface 12, and the suction nozzle port
The disk 13 is adsorbed and fixed to the mounting surface 12 by 14.

[Problems to be solved by the device]

In the centering device for inspecting and processing magnetic disks, optical disks, etc. as described above, the diameter of the disk mounting surface 12 of the centering table 11 must be a dimension removed from the signal recording surface of the disk 13. Disk 13 as shown in Fig. 1
Is limited to the vicinity of the center hole of the disk, and it is necessary to reduce the disk diameter by several steps. As described above, when the mounting surface 12 has a small width with respect to the outer diameter of the disk 13 and the suction force from the suction nozzle port 14 is small, the disk 13 may swing during rotation. However, in order to eliminate such whirling, when the suction force by the suction nozzle port 14 is increased, the lower surface of the disc 13 is not supported at the suction nozzle port 14, so that the disc 13 as shown by the chain line in FIG. The phenomenon occurs that the warp occurs at the suction nozzle port 14.

The above problem can be solved by increasing the width of the mounting surface 12, but the size of the entire width of the mounting surface 12 is limited by the diameter of the smallest disc to be used, It cannot be set to a width dimension sufficient for supporting the disc.

Further, the effective width of the mounting surface 12 can be increased by reducing the width of the suction nozzle port 14, but this has the drawback that the suction force is reduced and the whirling of the disk easily occurs.

The present invention has been made in view of the above problems, and an object thereof is to provide a disc centering device capable of reliably fixing a disc by increasing the effective supporting area of the disc without reducing the suction force. There is.

[Means for Solving the Problems]

In order to solve the above problems, the present invention relates to a disk centering device for centering a disk by adsorbing the vicinity of the center hole of the disk to the mounting surface, and the upper end surface of the centering table is used as the disk mounting surface. On the upper end surface of the centering table, a suction nozzle port closed with a plug material is formed, the plug material is formed of a hard porous material, and the upper surface of the plug material is flush with the upper end surface of the centering table. In this structure, a part of the disk mounting surface of the centering table is formed so as to continuously surround both sides of the suction nozzle opening in an annular shape.

Further, in the centering device having the above structure, an air chamber is provided between the air suction passage and the suction nozzle port of the centering table to connect all the suction nozzle ports.

[Action]

According to the above structure, when the air at the suction nozzle port is sucked while the disc is placed on the mounting surface, suction force acts on the top surface of the plug material through the hole inside the plug material, and the disc is placed on the mounting surface. Adsorb. In this case, since the disc is supported by the placement surface of the centering table and the upper surface of the plug member, even if the suction force of the suction nozzle port is increased, the warp of the disc is prevented by the support of the plug member.

Further, since the disk mounting surface of the centering table surrounds both sides of the suction nozzle opening in an annular shape, the disk can be stably received by the disk mounting surface capable of high-precision processing by simultaneous processing, and thus the area is small. The disc can be accurately supported even on the mounting surface. Further, when the suction nozzle ports are communicated with the air chamber, the internal pressure of all the suction nozzle ports can be made the same, and a uniform suction force can be applied to the upper surface of the plug material.

〔Example〕

1 to 3 show a disk centering device according to an embodiment of the present invention.

The centering table 1 has a disk mounting surface 2 formed at the upper end, and a bolt hole 9 used at the time of fixing the disk mounting surface 2 at the lower end to the air spindle.
Are formed. A hub head 5 that fits into the center hole 3a of the disk 3 is attached to the center of the disk mounting surface 2, and an air suction nozzle port 4 is formed on the mounting surface 2 around the hub head 5. .

The suction nozzle port 4 is composed of a plurality of circular holes as shown in FIG. 2, and is arranged at a predetermined interval on the same circle with respect to the center axis of the centering table 1.

At the bottom of this suction nozzle port 4, all suction nozzle ports 4
An annular air chamber 6 that communicates with the air chamber 6 is formed, and an air suction passage 7 that communicates with the lower surface of the centering table 1 communicates with the air chamber 6. This air suction passage 7 is
When the centering stand 1 is attached to the spindle, it communicates with an air suction source provided on the air spindle.

Each of the suction nozzle ports 4 is provided with a plug member 8 for closing the nozzle opening. The plug member 8 is made of a porous material through which air can freely pass, and for example, a porous sintered body is used.

The upper surface of the plug member 8 is formed on the same surface as the disk mounting surface 2. The upper surface of the plug member 8 and the mounting surface 2 are formed by first attaching the plug member 8 to the suction nozzle port 4 (in such a state that the upper end of the plug member 8 slightly projects from the mounting surface 2). Next, the upper surface of the centering stand 1 is ground and driven to finish, and the upper surface of the disk mounting surface 2 and the upper surface of the plug member 8 are finished in the same plane.

The fixing of the plug member 8 to the suction nozzle port 4 is performed by bonding the outer peripheral surface of the plug member 8 and the nozzle port 4 with an adhesive or by pressing the plug member 8 into the nozzle port 4 and the like. In case of press-fitting, be careful not to block the hole inside the plug member 8.

Further, as shown in FIGS. 1 and 2, each suction nozzle port 4 is annularly arranged at the center of the disc mounting surface 2 of the centering table 1, and the inner circumference of the disc mounting surface 2 is arranged. The portion and the outer peripheral portion are annular portions 2a and 2b that continuously surround both sides of each suction nozzle port 4 in the circumferential direction.

The centering device of this embodiment has the above-mentioned structure, and its operation will be described below.

The center hole 3a of the disk 3 is fitted onto the outer periphery of the hub head 5 to mount the disk 3 on the mounting surface 2. Then, when the air suction passage 7 is made to have a negative pressure, suction force is generated on the upper surface of the plug member 8 through the inner hole of the plug member 8, and the lower surface of the disk 3 is attracted to the mounting surface 2.

In this case, since each suction nozzle port 4 is connected by the air chamber 6, the lower part of each suction nozzle port 4 is in a uniform negative pressure state, and a uniform suction force acts on the upper surface of each plug member 8. To do.

The disk 3 thus attracted is uniformly supported by the mounting surface 2 and the upper surface of the plug member 8 which is flush with the mounting surface 2. Therefore, even if the suction force is increased, the warp of the disk 3 is prevented by the support of the plug member 8, and the disk 3 is securely fixed to the centering table 1.

Further, since the annular portions 2a and 2b of the mounting surface 2 formed with high precision on the centering table 1 at the same time receive the disk 3, even if the mounting surface 2 having a diameter smaller than the disk diameter of the disk 3 is used. Can be stably received without rattling, and can be supported horizontally with high accuracy.

Although the suction nozzle port is formed of a plurality of holes in the above embodiment, the suction nozzle port 4'may be formed in an annular shape as shown in FIG. In this case, the suction nozzle port 4'also functions as an air chamber, and the inside of the suction nozzle port 4'is closed with an annular plug member 8 '.

Further, also in the embodiment shown in FIG. 4, the centering table 1
On the upper end surface of the disk, annular disk mounting surfaces 2'and 2'are formed so as to surround both sides of the suction nozzle port 4 '.

[Effect of device]

As described above, according to this invention, the suction nozzle port is closed with the plug material made of the porous material, and the upper surface of the plug material and the disk mounting surface are flush with each other, so that the disk can be received even at the suction nozzle opening part. Therefore, even if the suction force is increased and the disc is strongly fixed to the mounting surface, the disc is not deformed.

Also, the disk mounting surface of the centering table surrounds both sides of the suction nozzle opening in an annular shape to receive the disk, so that the disk can be formed with high precision by simultaneous processing. You can

Therefore, when the centering device of the present invention is used, even if the diameter of the disc mounting surface is significantly smaller than the disc diameter, the disc can be stably and firmly supported without being deformed, and the centering can be performed with high accuracy. You can put it out.

Further, if all the suction nozzle ports are communicated with the air chamber, a uniform suction force can be exerted on all the upper surfaces of the plug material, and the disc and the centering table can be securely fixed.

[Brief description of drawings]

1 is a vertical sectional side view of the embodiment, FIG. 2 is a plan view of the same,
FIG. 3 is a vertical cross-sectional side view showing the main part of the same, FIG. 4 is a cross-sectional plan view showing another embodiment, and FIG. 5 is a vertical cross-sectional side view showing the conventional structure. 1, 1 '... Centering table, 2 ... Disc mounting surface, 3 ...
Disk 4, 4 '... Suction nozzle port, 5 ... Hub head, 6 ... Air chamber, 7 ... Air suction passage, 8,
8 '... Plug material.

Claims (2)

[Scope of utility model registration request] 1. A disk centering device for centering a disk by adsorbing the vicinity of the center hole of the disk onto a mounting surface, wherein the upper end surface of the centering table is the disk mounting surface and the upper end surface of the centering table is Forming a suction nozzle port closed with a plug material, forming the plug material with a hard porous material, and forming the upper surface of the plug material with the upper end surface of the centering table flush with the centering table. 2. A disc centering device, wherein a part of the disc mounting surface is formed so as to continuously surround both sides of the suction nozzle opening in an annular shape. 2. A disk centering device according to claim 1, wherein an air chamber is provided between the air suction passage and the suction nozzle port of the centering table so as to communicate all the suction nozzle ports. .