JPH071790Y2 - Automatic cap for diffuser - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a semiconductor manufacturing apparatus, and more particularly to a cap for automatically opening and closing a reaction tube used in a diffusion apparatus.

[Conventional technology]

FIG. 3 is an explanatory diagram showing an example of a conventional diffusion device using an automatic cap, 1 is a reaction tube made of quartz, 2 is a cap (quartz plate) for automatically opening and closing the open end of the reaction tube 1, and 4 is A furnace body, 5 is a heater for overheating the reaction tube 1, 6 is a gas introduction port for introducing gas into the reaction tube 1 from a gas system, 7
Is an exhaust port provided on the wall of the reaction tube 1 near the open end, 8
Is an exhaust pipe installed in the scavenger 9 and connected to this exhaust port, and 10 is a clean bench.

In this conventional example, during the reaction process, HCl is introduced into the reaction tube 1 from the gas introduction port 6 of the reaction tube 1 by the gas system.
Gas is introduced, and this HCl gas flows in the reaction tube 1 toward the open end side and is exhausted from the exhaust port 7 through the exhaust pipe 8.

[Problems to be solved by the invention]

However, in the above-mentioned conventional example, there is a small gap between the open end of the reaction tube 1 and the cap 2, and a part of the HCl gas leaks from the gap, and the inside of the scavenger 9 and the clean bench 10 are exposed. Also, the peripheral equipment is corroded and rust emerges. As a result, dust must be generated, the device must be broken down, and maintenance must be performed frequently.
l The gas leaked and the air was sucked into the reaction tube 1, which was one of the reasons why a clean product film could not be formed.

[Means for solving problems]

In order to solve the above problems, the automatic cap of the present invention inserts an O-ring 3 between the open end of the reaction tube 1 and the cap 2 that automatically opens and closes the open end as shown in FIG. The outer periphery of the cap 2 is sandwiched and fixed by a cap holder 13 and a pressing flange 14, and an outer ring 15 that holds the O-ring 3 and prevents direct contact between the cap 2 and the reaction tube 1 is held by the pressing flange 14. And a cap 2, and a cushion for preventing direct contact between the cap 2 and the cap holder 13 is inserted between them.

[Action]

In the automatic cap of the present invention, since the open end of the reaction tube 1 and the cap 2 are sealed with the O-ring 3, the gas is introduced into the reaction tube 1 from the gas system through the gas introduction port 6 of the reaction tube 1. The HCl gas flows toward the open end side of the reaction tube 1 and is exhausted through the exhaust pipe 8 only from the exhaust port 7 provided on the pipe wall.

As a result, the inside of the scavenger 9, the clean bench 10 and the peripheral equipment are prevented from being corroded and rust is eliminated,
Generation of dust and failure of the device can be avoided, maintenance is facilitated, and the life of the device can be extended.

Further, since there is no gap between the open end of the reaction tube 1 and the cap 2, there is no possibility of sucking air into the reaction tube 1, so that a clean product film can be obtained. Furthermore, the outer periphery of the cap 2 has a cap holder 13 and a pressing flange.
An outer ring 15 that holds the O-ring 3 and fixes the cap 2 and the reaction tube 1 is inserted between the pressing flange 14 and the cap 2 by sandwiching and fixing the O-ring 3 with the cap 14. Since the cushion 16 for preventing direct contact between the cap 2 and the cap holder 13 is inserted between the two, the O-ring 3 is held and its function, that is, the generation of dust and the breakdown of the device are avoided, and the maintenance is facilitated. That is, the life of the apparatus can be extended and a clean product film can be obtained for a long time, and the cap 2 and the reaction tube 1 can be prevented from being damaged.

〔Example〕

 An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an explanatory view showing an example of a diffusion device using the automatic cap of the present invention.

In this embodiment, an O-ring 3 is inserted between the open end of a quartz reaction tube 1 and a cap (quartz plate) 2, and a water cooling jacket 11 is provided on the outer periphery of the open end of the reaction tube 1. .

In this embodiment, since the O-ring 3 seals between the open end of the reaction tube 1 and the cap 2, the HCl introduced from the gas system into the reaction tube 1 via the gas introduction port 6 of the reaction tube 1. The gas flows toward the open end side of the reaction tube 1 and is exhausted through the exhaust pipe 8 only from the exhaust port 7 provided in the pipe wall.

As a result, the inside of the scavenger 9, the clean bench 10 and the peripheral equipment are prevented from being corroded and rust is eliminated,
Generation of dust and failure of the device can be avoided, maintenance is facilitated, and the life of the device can be extended.

Further, since there is no gap between the open end of the reaction tube 1 and the cap 2, there is no possibility of sucking air into the reaction tube 1, so that a clean product film can be obtained.

Furthermore, since the open end of the reaction tube 1 can be water-cooled by flowing water into the water-cooling jacket 11, there is no risk that the O-ring 3 will deteriorate due to heat and lose its sealing function.

FIG. 2 is a detailed sectional view of the automatic door of the present invention.

Further, it is preferable that the cap 2 has a hollow structure as shown in FIG. 2 and the quartz wool 12 is filled in the cap 2 because radiant heat can be prevented. 13 is a stainless steel cap (quartz plate) holder, and 14 is a holding flange, and the outer circumference of the cap 2 is sandwiched and fixed by these both 13, 14.

Reference numeral 15 denotes a Teflon outer ring inserted between the pressing flange 14 and the cap 2, which serves to hold the O-ring 3 and prevent damage caused by direct contact between the cap 2 and the reaction tube 1.

16 is a cushion made of Teflon inserted between the cap 2 and the cap holder 13, and the cap 2 and the cap holder
It prevents the cap 13 from coming into direct contact and prevents the cap 2 from being damaged.

17 is a support shaft that supports the center of the cap holder 13, 18
Is a spherical bearing, 19 is a retaining washer, 20 is a cap screw, 21
Is a bearing holder, which holds the spherical bearing 18 and is fixed to the arm 22. Reference numeral 23 is a spring guide, 24 is a spring, and 25 is a bearing retainer.

Reference numeral 26 is a shaft, 27 is an arm mounting portion for transmitting the rotational torque of the shaft 26 to the arm 22, and 28 is a key.

When the arm 22 is rotated around the shaft 26, the cap 2 can be opened and closed depending on the rotation direction.

The support shaft 17 supporting the central portion of the cap holder 13 is supported by the spherical bearing 18, and the spring receiving portion, the spring guide 23, and the spring 24 of the bearing holder 21 that holds the spherical bearing 18 fixed to the arm 22 are supported. Since the O-ring 3 is fitted, the contact between the O-ring 3 and the surface of the reaction tube 1 is relaxed and improved, and the shock when the cap 2 is closed is absorbed by the O-ring 3, but the spring 24 also absorbs the shock. The impact can be further reduced.

Further, when the arm 22 rotates in the closing direction, the rotational torque is converted into the thrust force that crushes the O-ring 3 by the spherical bearing 18 and the support shaft 17. By selecting this rotational torque and the diameter of the shaft 26 matching it, the O-ring 3 will be crushed enough to prevent leakage of HCl gas and suction of air.

[Effect of device]

As described above, according to the present invention, since the open end of the reaction tube 1 and the cap 2 are sealed by the O-ring 3, the HCl
No gas leaks, scavenger 9, clean bench 10
In addition, the peripheral devices are not corroded, the generation of dust due to the corrosion and the device failure can be prevented, the maintenance becomes easy, and the life of the device can be extended.

Further, since the space between the open end of the reaction tube 1 and the cap 2 is sealed by the O-ring 3, there is no possibility of sucking air into the reaction tube 1, so that a clean product film can be obtained. Furthermore, the outer periphery of the cap 2 is a cap holder 13
The O-ring 3
An outer ring 15 for holding the cap 2 and the direct contact between the cap 2 and the reaction tube 1 is inserted between the pressing flange 14 and the cap 2 to prevent direct contact between the cap 2 and the cap holder 13. Since the 16 is inserted between the two, the O-ring 3 is held to function therefor, that is, the generation of dust and the failure of the device are avoided, the maintenance is facilitated, the life of the device is extended, and the cleanliness is maintained. The production film can be sufficiently obtained for a long period of time, and the cap 2 and the reaction tube 1 can be prevented from being damaged.

[Brief description of drawings]

FIG. 1 is an explanatory view showing an example of a diffusion device using the automatic cap of the present invention, FIG. 2 is a cross-sectional view for explaining the automatic door of the present invention in detail, and FIG. 3 is an example of a diffusion device using a conventional automatic cap. It is an explanatory view shown. 1 ... Reaction tube, 2 ... Cap, 3 ... O-ring, 13 ...
… Cap holder, 14 …… Pressing flange, 15 …… Outer ring, 16 …… Cushion.

Claims (1)

[Scope of utility model registration request] 1. An O-ring is inserted between an open end of a reaction tube and a cap that automatically opens and closes the open end, and the outer circumference of the cap is fixed by being sandwiched between a cap holder and a holding flange. An outer ring for holding the O-ring and preventing direct contact between the cap and the reaction tube is inserted between the pressing flange and the cap, and a cushion for preventing direct contact between the cap and the cap holder is provided between them. Automatic cap for diffuser that is inserted.