JPH07179Y2 - Biaxial rotation introduction machine - Google Patents

Description

[Detailed Description of the Invention] [Industrial field of application] The present invention relates to a twin-screw rotation introduction machine for attaching to a vacuum chamber or the like to rotate a sample or the like in the chamber.

[Conventional technology]

Generally, a rotation introducing machine is used to rotate the sample in the vacuum chamber.However, most of the conventionally used machines rotate only one axis. However, it was not possible to rotate simultaneously or selectively under different conditions. Therefore, recently, the need for a multi-axis type rotary introduction machine has increased, but the mechanism becomes complicated and expensive, and the apparatus becomes large,
It had the drawback of being difficult to operate.

[Problems to be solved by the invention]

The present invention has been proposed in view of the above conventional circumstances,
The mechanism is simple and easy to handle, and it can be designed inexpensively and compactly. The purpose is to propose a two-axis rotary introduction machine that is extremely convenient for practical use.

[Means for solving problems]

SUMMARY OF THE INVENTION In order to solve the above problems, the present invention supports a center shaft and an inner cylinder, which allow relative rotation inside an outer cylinder, in a concentric manner so that the tips of the inner cylinder project in steps, and the rear end of the center axis is supported. Is connected to the rotary shaft of the shaft rotation knob having an axis inclined with respect to the axis of the central axis through the curved bellows for the shaft, and the curved pipe surrounding the curved bellows for the shaft is connected to the rear end of the inner cylinder. Then, an intermediate tube that supports the outer circumference of the end of the bent tube relative to it is provided, and the rear end of the outer tube and the intermediate tube are connected via a curved bellows for the tube, and the outer circumference of the intermediate tube is relatively rotatable. It is characterized in that the cylinder rotation knob supported on the outer cylinder is rotatably supported on the flange at the rear end of the outer cylinder around the central axis of the outer cylinder to form a biaxial rotation introducing machine.

[Action]

Since the biaxial rotation introducing machine of the present invention is configured as described above, when the shaft rotation knob is rotated, the rotation of the rotation shaft of the shaft rotation knob is transmitted to the central shaft through the shaft rotation bellows.
The central shaft is rotated according to the rotation of the shaft rotation knob. Also, when the tube rotation knob is rotated, the intermediate tube moves eccentrically, so that the curved tube supported by the intermediate tube rotates eccentrically in the intermediate tube, and the inner tube connected to the curved tube moves to the tube rotation knob. It will be rotated according to the rotation.

At this time, if the shaft rotation knob is locked so as not to rotate and the cylinder rotation knob is rotated, both the center shaft and the inner cylinder are rotated.

〔Example〕

Hereinafter, the present invention will be specifically described with reference to the embodiments shown in the drawings.

FIG. 1 is a sectional view of a biaxial rotation introducing machine showing an embodiment of the present invention, and FIG. 2 is a plan view thereof.

In the figure, reference numeral 1 denotes an outer cylinder having a predetermined length, and a center shaft 2 and an inner cylinder 3 are mounted inside the outer cylinder so that their tips project in steps, and the center shaft 2 and the inner cylinder 3 are The bearings 5 and 6 are supported concentrically by locking rings 4 so as to allow relative rotation with each other.

Reference numeral 7 is a shaft rotation knob, and the shaft center 9 of the rotation shaft 8 is inclined at a predetermined angle with respect to the shaft center 10 of the central shaft 2, and the rear end of the central shaft 2 and the rotary shaft 8 are curved bellows 11 for shafts. Are connected via.

Reference numeral 12 is a bent pipe connected to the rear end of the inner cylinder 3, and is bent in a smooth curve as shown so as to surround the bent bellows 11 for the shaft with a margin.

Reference numeral 13 is an intermediate cylinder that supports the outer circumference of the end of the bent tube 12 via a bearing 14 so as to be rotatable relative to each other.
13 is connected via a curved bellows 16 for a cylinder.

Reference numeral 17 denotes a cylinder rotation knob that supports the outer circumference of the intermediate cylinder 13 via a bearing 18 so as to be relatively rotatable, and is centered by a bearing 21 via a ring 20 on a flange 19 connected to a mounting seat 15 at the rear end of the outer cylinder 1. It is rotatably supported around the axis 10 of the shaft 2.

Reference numeral 22 is a protective cylinder coupled to the cylindrical rotation knob 17, and the shaft rotation knob 7 can be locked to the protective cylinder 22 by tightening a screw 23. Further, the ring 20 and the cylinder rotation knob 17 are fixed by tightening with a bolt 24, and the cylinder rotation knob 17 can be locked to the flange 19 via the ring 20 by tightening the screw 25. . Further, 26 is a screw for fixing the shaft rotating knob 7 to the rotating shaft 8, and 27 is a position adjusting screw. The brim 28 that supports the middle of the rotary shaft 8 is fixed to the intermediate cylinder 13 by bolts.

A scale indicating the amount of rotation is attached to the outer circumference of the shaft rotation knob 7, the cylinder rotation knob 17, or the ring 20, but they are omitted in the drawing.

According to the biaxial rotation introducing machine having the above structure, when the screw 23 is loosened and the shaft rotation knob 7 is rotated, the rotation of the rotation shaft 8 is transmitted to the central shaft 2 via the curved bellows 11 for the central shaft. 2 is rotated according to the rotation of the shaft rotation knob 7. However, at this time, the inner cylinder 3 remains stationary.

Next, when the cylinder rotation knob 17 is rotated while the screw 23 is loosened, the intermediate cylinder 13 is attached to the mounting seat 15 by the curved bellows 16 for the cylinder.
Since it is connected to the curved pipe 12, the rotation of the curved pipe 12 supported by the intermediate cylinder 13 is eccentrically rotated in the intermediate cylinder 13 because it revolves by eccentric movement. The cylinder 3 is rotated according to the rotation of the cylinder rotation knob 17. Although the screw 25 is loosened when rotating the tubular rotation knob 17, the central shaft 2 is rotated when the tubular rotation knob 17 is rotated while the screw 23 is tightened and the shaft rotation knob 17 is locked to the protective cylinder 22. And the inner cylinder 3 will be rotated together. If neither the shaft rotation knob 7 nor the cylinder rotation knob 17 is to be rotated, the screws 23 and 25 may be tightened and locked.

The present invention is not limited to the structure of the illustrated embodiment, and the structure of each part, the sealing method and the like can be appropriately modified in design.

[Effect of device]

As described in detail above, according to the biaxial rotation introducing machine of the present invention, the central shaft and the inner cylinder can be rotated independently or simultaneously by an arbitrary angle. In addition, even if the axis of the rotary shaft of the shaft rotation knob is inclined with respect to the axis of the central axis,
By using the curved bellows, the rotation of the rotary shaft can be smoothly and reliably transmitted to the central shaft.

Further, since the inner cylinder is rotated by the eccentric movement of the intermediate cylinder that supports the curved pipe, even if the axes of the rotation centers of the cylinder rotation knob and the shaft rotation knob are tilted, the concentric center axis is simple. And the inner cylinder can be rotated, handling is very easy, and the entire device can be made compact.
It can be manufactured at low cost. Further, since the central shaft and the inner cylinder are concentric, it is easy to keep airtight. It is possible to provide a biaxial rotation introducing machine which has many advantages and is extremely effective in practice as an apparatus for introducing rotation into a vacuum chamber.

[Brief description of drawings]

FIG. 1 is a sectional view of a biaxial rotation introducing machine showing an embodiment of the present invention, and FIG. 2 is a plan view thereof. 1 ... Outer cylinder, 2 ... Center axis, 3 ... Inner cylinder, 4 ... Stop ring, 5
... Bearing, 6 ... Bearing, 7 ... Shaft rotation knob, 8 ... Rotation shaft, 9 ...
Shaft center, 10 ... Shaft center, 11 ... Curved bellows for shaft, 12 ... Curved pipe,
13 ... Intermediate cylinder, 14 ... Bearing, 15 ... Mounting seat, 16 ... Curved bellows for cylinder, 17 ... Cylinder rotation knob, 18 ... Bearing, 19 ... Flange, 20 ...
Ring, 21 ... Bearing, 22 ... Protective cylinder, 23 ... Screw, 24 ... Bolt, 25 ... Screw, 26 ... Screw, 27 ... Position adjusting screw, 28 ... Collar.

Claims (1)

[Scope of utility model registration request] 1. A center shaft and an inner cylinder which allow relative rotation inside an outer cylinder are concentrically supported so that their tips project in steps, and the rear end of the center axis is supported by a curved bellows. The curved pipe surrounding the above-mentioned curved bellows for the shaft is connected to the rear end of the inner cylinder while being connected to the rotary shaft of the shaft rotation knob having the shaft center inclined with respect to the center of the central shaft, and the end of the curved pipe is connected. An intermediate cylinder that supports the outer circumference so as to be relatively rotatable is provided, and the rear end of the outer cylinder and the intermediate cylinder are connected via a curved bellows for the cylinder, and a cylinder rotation knob that supports the outer circumference of the intermediate cylinder is relatively rotatable. A biaxial rotation introducing machine characterized in that it is rotatably supported around the central axis of the flange at the rear end of the outer cylinder.