JPH0721572Y2 - 赤外線加熱単結晶製造装置 - Google Patents

赤外線加熱単結晶製造装置

Info

Publication number
JPH0721572Y2
JPH0721572Y2 JP1989111572U JP11157289U JPH0721572Y2 JP H0721572 Y2 JPH0721572 Y2 JP H0721572Y2 JP 1989111572 U JP1989111572 U JP 1989111572U JP 11157289 U JP11157289 U JP 11157289U JP H0721572 Y2 JPH0721572 Y2 JP H0721572Y2
Authority
JP
Japan
Prior art keywords
single crystal
bearing
infrared
infrared heating
crystal manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989111572U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350053U (cs
Inventor
誠一 高須
博 西村
Original Assignee
ニチデン機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ニチデン機械株式会社 filed Critical ニチデン機械株式会社
Priority to JP1989111572U priority Critical patent/JPH0721572Y2/ja
Publication of JPH0350053U publication Critical patent/JPH0350053U/ja
Application granted granted Critical
Publication of JPH0721572Y2 publication Critical patent/JPH0721572Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1989111572U 1989-09-22 1989-09-22 赤外線加熱単結晶製造装置 Expired - Lifetime JPH0721572Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989111572U JPH0721572Y2 (ja) 1989-09-22 1989-09-22 赤外線加熱単結晶製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989111572U JPH0721572Y2 (ja) 1989-09-22 1989-09-22 赤外線加熱単結晶製造装置

Publications (2)

Publication Number Publication Date
JPH0350053U JPH0350053U (cs) 1991-05-15
JPH0721572Y2 true JPH0721572Y2 (ja) 1995-05-17

Family

ID=31660042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989111572U Expired - Lifetime JPH0721572Y2 (ja) 1989-09-22 1989-09-22 赤外線加熱単結晶製造装置

Country Status (1)

Country Link
JP (1) JPH0721572Y2 (cs)

Also Published As

Publication number Publication date
JPH0350053U (cs) 1991-05-15

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