JPH0724724A - Non-contact detection method for wire position - Google Patents

Non-contact detection method for wire position

Info

Publication number
JPH0724724A
JPH0724724A JP5087993A JP8799393A JPH0724724A JP H0724724 A JPH0724724 A JP H0724724A JP 5087993 A JP5087993 A JP 5087993A JP 8799393 A JP8799393 A JP 8799393A JP H0724724 A JPH0724724 A JP H0724724A
Authority
JP
Japan
Prior art keywords
wire
reel
magnetic
traverse
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5087993A
Other languages
Japanese (ja)
Inventor
Hisayoshi Komi
尚義 小見
Kazumi Arakawa
和三 荒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippei Toyama Corp
Original Assignee
Nippei Toyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippei Toyama Corp filed Critical Nippei Toyama Corp
Priority to JP5087993A priority Critical patent/JPH0724724A/en
Publication of JPH0724724A publication Critical patent/JPH0724724A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0061Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of devices for guiding or feeding saw wires
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00Accessories specially designed for sawing machines or sawing devices
    • B23D59/001Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
    • B23D59/002Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade for the position of the saw blade

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

(57)【要約】 【目的】 リールに対するワイヤの巻き掛け位置の変位
を非接触状態で検出できるようにする。 【構成】 ワイヤソー装置のトラバース制御において、
リールの近くの位置でワイヤを2つの磁気センサの間を
非接触状態で走行させるとともに、ワイヤに電流を流し
ておき、ワイヤの電流による磁界を各磁気センサとして
のコイルなどで検出し、両磁気センサの出力差からワイ
ヤの位置を検出する。
(57) [Abstract] [Purpose] It is possible to detect the displacement of the wire winding position on the reel in a non-contact state. [Configuration] In traverse control of the wire saw device,
While running the wire in a non-contact state between the two magnetic sensors at a position near the reel, a current is passed through the wire, and the magnetic field due to the current of the wire is detected by a coil as each magnetic sensor. The position of the wire is detected from the output difference of the sensor.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ワイヤソー装置におい
て、ワイヤの位置を磁気センサにより非接触状態で検出
する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for detecting the position of a wire in a wire saw device by a magnetic sensor in a non-contact state.

【0002】[0002]

【従来の技術】ワイヤソー装置において、リールに対す
るワイヤの送り出し位置または巻取り位置にトラバース
装置が付設されている。トラバース装置は、整列巻きの
リールからワイヤを送り出すとき、またはリールに対し
てワイヤを整列巻きとして巻き取るとき、リールに対す
るワイヤの巻き掛け位置の変化に応じて、案内ローラを
変位方向に変位量と同調させて移動させる。このトラバ
ース制御では、ワイヤの位置検出が不可欠となる。従来
のワイヤ位置検出手段は、接触式のローラ等として構成
されているため、この接触部分が磨耗し、定期的に交換
する必要がある。このように接触式のワイヤ位置検出手
段によると、磨耗のためにその寿命に限界があること、
また回転式のローラなどの場合に、ローラ自体の慣性が
検出動作の誤差や動作遅れなどの原因となること、など
の欠点がある。
2. Description of the Related Art In a wire saw device, a traverse device is attached at a wire feeding position or winding position with respect to a reel. The traverse device moves the guide roller in the displacement direction according to the change in the winding position of the wire on the reel when feeding the wire from the reel of the aligned winding or winding the wire as the aligned winding on the reel. Move in sync. In this traverse control, wire position detection is indispensable. Since the conventional wire position detecting means is configured as a contact type roller or the like, this contact portion is worn and needs to be replaced periodically. Thus, according to the contact-type wire position detecting means, its life is limited due to wear,
Further, in the case of a rotary roller or the like, there is a defect that the inertia of the roller itself causes an error in the detection operation or an operation delay.

【0003】[0003]

【発明の目的】したがって、本発明の目的は、ワイヤソ
ー装置において、リールに対するワイヤの巻き掛け位置
の変位を非接触状態で検出できるようにし、従来技術の
欠点を解決することである。
SUMMARY OF THE INVENTION Therefore, it is an object of the present invention to allow a wire saw device to detect a displacement of a winding position of a wire with respect to a reel in a non-contact state, and solve a drawback of the prior art.

【0004】[0004]

【発明の解決手段】上記目的のもとに、本発明は、ワイ
ヤソー装置のトラバース制御において、リールの近くの
位置でワイヤを2つの磁気センサの間で非接触状態とし
て走行させるとともに、ワイヤに電流を流しておき、ワ
イヤの電流による磁界を各磁気センサで検出し、両磁気
センサの出力差からワイヤの位置を検出している。ここ
で、磁気センサは、コイルまたは磁気センサ素子例えば
ホール素子、磁気抵抗効果素子などによって構成され
る。
According to the present invention, in traverse control of a wire saw device, the present invention causes a wire to run in a non-contact state between two magnetic sensors at a position near a reel, and to cause a current to flow to the wire. The magnetic field due to the current of the wire is detected by each magnetic sensor, and the position of the wire is detected from the output difference of both magnetic sensors. Here, the magnetic sensor is composed of a coil or a magnetic sensor element such as a Hall element or a magnetoresistive effect element.

【0005】[0005]

【実施例】図1は、ワイヤソー装置1のトラバース装置
2を示している。トラバース装置2は、ワイヤ3の送り
出し側および巻き取り側の双方に設けられるが、上記実
施例は、一例として、送り出し側のトラバース装置2の
みを示し、巻き取り側のトラバース装置を省略してい
る。導電材料製のワイヤ3は、リール4に対して整列巻
きの状態で巻き付けられており、リール4から引き出さ
れた後、2つの磁気センサ5a、5bの間を非接触状態
で通り、および複数例えば3つの案内ローラ6に接しな
がらワイヤソー装置1に供給される。
FIG. 1 shows a traverse device 2 of a wire saw device 1. The traverse device 2 is provided on both the feeding side and the winding side of the wire 3, but the above embodiment shows only the feeding side traverse device 2 as an example, and the winding side traverse device is omitted. . The wire 3 made of a conductive material is wound around the reel 4 in an aligned winding state, and after being pulled out from the reel 4, the wire 3 passes between the two magnetic sensors 5a and 5b in a non-contact state, and a plurality of, for example, It is supplied to the wire saw device 1 while being in contact with the three guide rollers 6.

【0006】ここで、上記2つの磁気センサ5a、5b
および案内ローラ6は、いずれもトラバーステーブル7
の上に取り付けられており、リール4の軸方向と平行な
送りねじシャフト8、送りねじナット9、送りねじシャ
フト8の軸受け12、トラバースモータ10、ベルト・
プーリ11などによって、リール4の軸方向つまりトラ
バース方向に駆動できるようになっている。
Here, the above-mentioned two magnetic sensors 5a and 5b.
The guide roller 6 and the guide roller 6 are both the traverse table 7
Mounted on top of the reel 4 and parallel to the axial direction of the reel 4, a feed screw shaft 8, a feed screw nut 9, a bearing 12 of the feed screw shaft 8, a traverse motor 10, a belt.
The pulley 11 or the like can drive the reel 4 in the axial direction, that is, the traverse direction.

【0007】そして、上記トラバースモータ10は、ト
ラバース制御器13およびドライバー14によって駆動
されるようになっている。上記トラバース制御器13
は、上記磁気センサ5a、5bに接続されており、両者
の磁気センサ5a、5bの出力の差をとり、その大小関
係に応じてトラバースモータ10の回転方向を指定し、
またその差の絶対値に応じた回転量をドライバー14に
指令値として出力する。
The traverse motor 10 is driven by a traverse controller 13 and a driver 14. The traverse controller 13
Is connected to the magnetic sensors 5a and 5b, takes the difference between the outputs of the two magnetic sensors 5a and 5b, and specifies the rotation direction of the traverse motor 10 according to the magnitude relationship between them.
The rotation amount corresponding to the absolute value of the difference is output to the driver 14 as a command value.

【0008】次に図2は、磁気センサ5a、5bをコイ
ル51によって構成する例である。これらのコイル51
の中心線は、ともにワイヤ3に流れる電流による磁界の
接線方向に向けられており、それぞれワイヤ3を挟んで
等距離に配置されている。そして、このワイヤ3には、
磁界発生用の交流電源15が接続される。通常、この交
流電源15は、送り出し側のリール4の支持台16と、
ワイヤソー装置1の近くのワイヤ3または巻き取り側の
リール4の支持台16との間に接続される。したがっ
て、交流電源15からの交流電流は、支持台16、支持
台16の軸受け17などを介して導電材料製のワイヤ3
を流れる。このとき、軸受け17は、交流回路に対して
コンデンサとして作用し、交流的に導通状態となる。
Next, FIG. 2 shows an example in which the magnetic sensors 5a and 5b are constituted by a coil 51. These coils 51
The center lines of both are oriented in the tangential direction of the magnetic field due to the current flowing through the wire 3, and are arranged at equal distances with the wire 3 interposed therebetween. And on this wire 3,
An AC power supply 15 for generating a magnetic field is connected. Normally, this AC power source 15 is provided with a support base 16 for the reel 4 on the delivery side,
It is connected between the wire 3 near the wire saw device 1 or the support 16 of the reel 4 on the winding side. Therefore, the alternating current from the alternating-current power supply 15 passes through the support 16 and the bearing 17 of the support 16 and the like, and the wire 3 made of a conductive material
Flowing through. At this time, the bearing 17 acts as a capacitor with respect to the AC circuit and is in an AC conductive state.

【0009】ワイヤソー装置1の切断動作中に、送り出
し側のリール4のワイヤ3は、整列巻き状態のリール4
からワイヤソー装置1に送り出され、また切断動作後の
ワイヤ3は、巻き取り側のリール4に対して整列巻きの
状態で巻き取られていく。この切断動作中に、交流電源
15によって、ワイヤ3に交流電流が流されている。し
たがって、ワイヤ3に流されている交流電流は、交番磁
界を発生し、それを磁気センサ5a、5bとしてのコイ
ル51に作用させている。したがって、コイル51には
電磁誘導によって、交流電流が発生する。しかも、この
交流電流の大きさは、交流磁界の強さすなわちワイヤ3
からそれぞれのコイル51までの距離に反比例して発生
する。したがって、この交流電流の大きさによって、ワ
イヤ3からそれぞれのコイル51までの距離が間接的に
測定できることになる。
During the cutting operation of the wire saw device 1, the wires 3 of the reel 4 on the delivery side are aligned and wound.
The wire 3 sent out from the wire saw device 1 to the wire saw device 1 and wound after the cutting operation is wound around the reel 4 on the winding side in an aligned winding state. During this cutting operation, an alternating current is being applied to the wire 3 by the alternating current power supply 15. Therefore, the alternating current flowing through the wire 3 generates an alternating magnetic field, which acts on the coil 51 as the magnetic sensors 5a and 5b. Therefore, an alternating current is generated in the coil 51 by electromagnetic induction. Moreover, the magnitude of this alternating current depends on the strength of the alternating magnetic field, that is, the wire 3
Occurs in inverse proportion to the distance from to each coil 51. Therefore, the distance from the wire 3 to each coil 51 can be indirectly measured by the magnitude of this alternating current.

【0010】そこで、これらのコイル51の出力は、そ
れぞれトラバース制御器13の入力となる。トラバース
制御器13は、2つのコイル51の出力の間で出力の差
をとることによって、それぞれの検出位置での磁界の強
さの差すなわち各コイル51からワイヤ3までの距離の
差をとることにより、ワイヤ3の位置を検出し、その大
小結果に応じて、トラバースモータ10の回転方向を指
定し、同時にその差に比例する出力でトラバースモータ
10の回転量の指令信号を発生し、ドライバー14を駆
動して、トラバースモータ10を回転させる。
Therefore, the outputs of these coils 51 become the inputs of the traverse controller 13, respectively. The traverse controller 13 obtains the difference in the strength of the magnetic field at each detection position, that is, the difference in the distance from each coil 51 to the wire 3, by obtaining the difference in output between the outputs of the two coils 51. Thus, the position of the wire 3 is detected, the rotation direction of the traverse motor 10 is designated according to the magnitude result, and at the same time, a command signal of the rotation amount of the traverse motor 10 is generated with an output proportional to the difference, and the driver 14 Is driven to rotate the traverse motor 10.

【0011】したがって、トラバースモータ10は、指
定された指令内容に応じて、送りねじシャフト8を駆動
し、送りねじナット9によってトラバーステーブル7を
所定の方向に移動させ、案内ローラ6の位置をワイヤ3
の接触位置の変化に応じて同じ方向に同じ量だけ移動さ
せる。このようにして、リール4の近くで、ワイヤ3
は、リール4の軸方向と常に直交する状態となる。な
お、切断動作中に、ワイヤ3が切れると、ワイヤ3に交
流電流が流れなくなるため、磁気センサ5a、5bの出
力がなくなる。これによって、ワイヤ3の断線が検出で
きる。
Therefore, the traverse motor 10 drives the feed screw shaft 8 in accordance with the specified instruction content, moves the traverse table 7 in a predetermined direction by the feed screw nut 9, and moves the guide roller 6 to the wire position. Three
The same amount is moved in the same direction according to the change of the contact position of. Thus, near the reel 4, the wire 3
Is always orthogonal to the axial direction of the reel 4. If the wire 3 is cut during the cutting operation, the AC current stops flowing through the wire 3 and the outputs of the magnetic sensors 5a and 5b are lost. Thereby, the disconnection of the wire 3 can be detected.

【0012】[0012]

【他の実施例】上記実施例は、磁気センサとして、コイ
ル51を用いているが、磁界の検出は上記コイルに限ら
ず例えばホール素子や磁気抵抗効果素子などを用いて構
成することもできる。磁気抵抗効果素子は、通常、ブリ
ッジ回路として組み込まれ、両者の抵抗値のアンバラン
ス状態からワイヤ3と磁気抵抗効果素子との間の距離を
間接的に測定することになる。
Other Embodiments In the above embodiment, the coil 51 is used as the magnetic sensor. However, the magnetic field detection is not limited to the above coil, and a Hall element or a magnetoresistive effect element may be used. The magnetoresistive effect element is usually incorporated as a bridge circuit, and the distance between the wire 3 and the magnetoresistive effect element is indirectly measured from the unbalanced state of the resistance values of both.

【0013】[0013]

【発明の効果】本発明では、リールの近くでワイヤの位
置が非接触式の磁気センサによって検出できるため、従
来の欠点すなわち接触式ローラのときの接触部分の磨耗
や接触時の慣性回転などの影響がなくなり、消耗品の減
少、装置のランニングコストの低下などの効果があるこ
と、またワイヤに流れる電流が交流であれば、軸受けな
どのような電気的非接触部分でも交流的な通電状態が得
られ、電流が安定化すること、またワイヤが断線する
と、磁界が発生せず、それによって磁気センサの出力が
なくなるため、ワイヤの断線なども検出できることなど
の特有の効果が得られる。
According to the present invention, since the position of the wire near the reel can be detected by a non-contact type magnetic sensor, the conventional drawbacks such as abrasion of the contact portion in the case of a contact type roller and inertial rotation at the time of contact are caused. The effects are eliminated, the consumables are reduced, the running cost of the device is reduced, and if the current flowing in the wire is AC, the AC current-carrying state is maintained even in the electrically non-contact part such as the bearing. It is possible to obtain a unique effect that the current is stabilized, and when the wire is broken, a magnetic field is not generated and the output of the magnetic sensor is lost, so that the wire break can be detected.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明によるトラバース装置の平面図である。FIG. 1 is a plan view of a traverse device according to the present invention.

【図2】磁気検出用コイルの配置状態の側面図である。FIG. 2 is a side view of an arrangement state of magnetic detection coils.

【符号の説明】[Explanation of symbols]

1 ワイヤソー装置 2 トラバース装置 3 ワイヤ 4 リール 5a 磁気センサ 5b 磁気センサ 6 案内ローラ 10 トラバースモータ 13 トラバース制御器 15 交流電源 51 コイル 1 Wire Saw Device 2 Traverse Device 3 Wire 4 Reel 5a Magnetic Sensor 5b Magnetic Sensor 6 Guide Roller 10 Traverse Motor 13 Traverse Controller 15 AC Power Supply 51 Coil

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 ワイヤソー装置において、リールに対す
るワイヤの巻き掛け位置の変位に応じて案内ローラを変
位方向に変位量と同調させて移動させるトラバース制御
において、リールの近くの位置でワイヤを2つの磁気セ
ンサの間で非接触状態として走行させるとともに、ワイ
ヤに電流を流しておき、ワイヤの電流による磁界を各磁
気センサで検出し、両磁気センサの出力差からワイヤの
位置を検出することを特徴とするワイヤ位置の非接触検
出方法。
1. In a wire saw device, in a traverse control in which a guide roller is moved in a displacement direction in synchronization with a displacement amount in accordance with a displacement of a winding position of the wire with respect to a reel, the wire is moved to a position close to the reel by two magnetic wires. While running as a non-contact state between the sensors, current is passed through the wire, the magnetic field due to the current of the wire is detected by each magnetic sensor, and the position of the wire is detected from the output difference of both magnetic sensors. Non-contact method for detecting wire position.
【請求項2】 各磁気センサをコイルによって構成し、
ワイヤに交流電流を流すことを特徴とする請求項1記載
のワイヤ位置の非接触検出方法。
2. Each magnetic sensor is constituted by a coil,
The method for detecting non-contact of a wire position according to claim 1, wherein an alternating current is passed through the wire.
【請求項3】 両磁気センサを磁気センサ素子により構
成することを特徴とする請求項1記載のワイヤ位置の非
接触検出方法。
3. The method for non-contact detection of a wire position according to claim 1, wherein both magnetic sensors are composed of magnetic sensor elements.
JP5087993A 1993-03-23 1993-03-23 Non-contact detection method for wire position Pending JPH0724724A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5087993A JPH0724724A (en) 1993-03-23 1993-03-23 Non-contact detection method for wire position

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5087993A JPH0724724A (en) 1993-03-23 1993-03-23 Non-contact detection method for wire position

Publications (1)

Publication Number Publication Date
JPH0724724A true JPH0724724A (en) 1995-01-27

Family

ID=13930335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5087993A Pending JPH0724724A (en) 1993-03-23 1993-03-23 Non-contact detection method for wire position

Country Status (1)

Country Link
JP (1) JPH0724724A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10032963A1 (en) * 2000-07-06 2002-01-24 Fraunhofer Ges Forschung Separation of thinner surfaces of semiconductor and ceramic substrates uses saw with electromagnetic forces to control separation thickness
EP2228186A3 (en) * 2009-03-13 2011-03-16 SCHOTT Solar AG Wire saw device
JP2023012778A (en) * 2021-07-14 2023-01-26 トーヨーエイテック株式会社 Traverse device of wire saw

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10032963A1 (en) * 2000-07-06 2002-01-24 Fraunhofer Ges Forschung Separation of thinner surfaces of semiconductor and ceramic substrates uses saw with electromagnetic forces to control separation thickness
DE10032963C2 (en) * 2000-07-06 2002-05-02 Fraunhofer Ges Forschung Method and arrangement for separating thin surface areas from substrates
EP2228186A3 (en) * 2009-03-13 2011-03-16 SCHOTT Solar AG Wire saw device
JP2023012778A (en) * 2021-07-14 2023-01-26 トーヨーエイテック株式会社 Traverse device of wire saw

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