JPH0724727A - Polished piece setting jig and setting method - Google Patents

Abstract

PURPOSE:To provide a polished piece setting jig and a setting method to perform efficient work for setting polished pieces on a carrier. CONSTITUTION:Storage holes which are patterned corresponding to holding holes 95 in a polishing carrier 93 are formed in the storage plane 21 of the mainframe 11 of a setting jig 10 to previously hold polished pieces. In the state that the pieces in the storage holes 22 are sucked by reducing pressure in a tube 43 connected to a coupler 42, engagement and alignment between a protrusion 24 and a pin 25 and between a center opening 98 and an engagement hole 99 are made to place the polished pieces on the carrier 93 and transfer the polished pieces into the holding holes 95 in groups. In this way, simple and reliable work for setting the polished pieces on the carrier can be done and, because the work can be done outside a polishing device, the operating efficiency of the device is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for setting a piece to be polished and a method for setting it, and can be used for polishing a crystal piece for oscillation of a crystal oscillator or polishing a gap portion of a micro magnetic head.

[0002]

2. Description of the Related Art Conventionally, crystal oscillators have been widely used for generating timing signals and clock signals in computer systems and other electronic devices.
A crystal oscillator generates a vibration of a natural frequency according to its shape and thickness by applying a voltage to a thin crystal piece, and in order to obtain the desired frequency, the crystal piece The shape and thickness must be accurate. Usually, a crystal piece is processed into a small piece with a predetermined shape (for example, a circular thin plate with a diameter of about 6 to 8 mm and a thickness of about 0.1 mm).
The thickness is adjusted by polishing the surface so that the thickness will be the specified size (0.05 to 0.2 mm). As surface polishing, in consideration of finishing accuracy and work efficiency, double-sided lapping and polishing of many pieces by a polishing device using a planetary gear type carrier is generally used.

In FIGS. 6 and 7, five holding jigs (carriers) 93 are arranged between the outer gear 91 and the inner gear 92 of the polishing device 90, and each carrier 93 has a thin circular gear shape. The thickness is set to be thinner than the target processing thickness of the crystal piece 94. The outer peripheral gear shape of the carrier 93 is meshed with the outer gear 91 and the inner gear 92. Therefore, when the outer gear 91 and the inner gear 92 rotate relative to each other, the carrier 93
6 revolves around as shown by the solid line arrow in FIG. 6 while revolving as shown by the dotted line arrow in FIG. 6 to perform a so-called planetary gear type operation.

A large number of holding holes 95 penetrating the front and back are formed in the middle of the carrier 93, and a crystal piece 94 is held in each of them. These carriers 93 and crystal pieces
94 is sandwiched between a lower polishing surface 96 and an upper polishing surface 97. When the planetary gear-type operation described above is performed in this state, the crystal piece 94 housed in the carrier 93 will move to the lower polishing surface.
Both surfaces are polished by frictional sliding between 96 and the upper polishing surface 97. This polishing thickness is the lower polishing surface 96 and the upper polishing surface.
Set by adjusting the spacing between 97.

On the other hand, in a magnetic head of a magnetic tape recording device, a magnetic head of a floppy disk device or a fixed disk device, it is necessary to form minute and uniform intervals in the gap portion with high precision, and the gap portion is divided in half. The head pieces in the state are arranged on a flat polishing surface, and the surface corresponding to the gap is polished flat. Particularly, in recent years, the density of the magnetic head has been reduced to smaller pieces, and such ultra-small head pieces are also polished by the polishing apparatus using a carrier as described above.
The magnetic head piece is often adhered to the carrier with hot wax in order to improve the holding position accuracy.

[0006]

By the way, in the planetary gear type polishing apparatus 90 as described above, it is necessary to set one crystal piece 94 in each of the plurality of holding holes 95 of the carrier 93. These setting operations are complicated and time-consuming, and have been a cause of hindering the improvement of efficiency in polishing.

That is, since the crystal pieces 94 are extremely lightweight, it is easy for the two pieces to overlap each other. Also, the crystal piece 94 is fragile and easily chipped or cracked,
Careful consideration is required for its handling. Therefore, the conventional work of setting the crystal piece 94 on the carrier 93 is carefully carried out exclusively by humans, and there is a problem that it is difficult to improve work efficiency. Further, in such a manual setting work, there is a problem that it is difficult to secure the worker's skill. On the other hand, automatic handling by a machine is also being considered, but in order to deal with the above-mentioned problems of overlapping and cracking, it is inevitable that the mechanism and control become complicated and the processing time becomes long, and the merit of mechanization is obtained. There is a problem that you can not.

Further, it is difficult to move the crystal piece 94 in the carrier 93 with the crystal piece 94 set therein, whether manually or mechanically. Therefore, the setting work of the crystal piece 94 on the carrier 93 is performed on the lower polishing surface 96 of the polishing device 90. Will be done above. Therefore, it is necessary to stop the polishing device 90 during the work of setting the crystal piece 94, and a long period of time is required for such a setup, which causes a problem that the operating rate of the polishing device 90 is reduced.

The above problems are not limited to the crystal piece,
The same applies to the micro magnetic headpiece. In any case, due to the difficulty of handling each piece to be polished, the conventional setting work cannot be improved. An object of the present invention is to provide a piece-to-be-polished jig and a method for setting the piece-to-be-polished that can be efficiently set on a carrier.

[0010]

According to the present invention, a set jig for holding a piece to be polished in a pattern corresponding to a polishing carrier is used, and the operation of setting the piece to be polished is performed outside the polishing apparatus. Improve efficiency,
In the set jig, the pieces to be polished are stacked on a carrier in a state where they are adsorbed under reduced pressure, so that the pieces to be polished can be reliably delivered. Specifically, the setting jig of the present invention includes a flat accommodation surface formed on one surface of the main body, a large number of accommodation holes formed in the accommodation surface in an arrangement corresponding to the holding holes of the carrier, Positioning means engageable with the carrier in a state where the carrier is arranged along the accommodation surface and each accommodation hole is aligned with each holding hole, and the positioning means is formed on a surface other than the accommodation surface of the main body and connected to an external pipe. It is characterized by comprising a possible connection port and a communication passage communicating from the bottom surface of each accommodation hole to the connection port.

Further, the positioning means is formed in a flat circular shape in the central portion of the accommodating surface so as to fit into the central opening of the carrier, and at least one convex portion is formed in the peripheral portion of the accommodating surface. And a pin that can be fitted into a positioning hole in the peripheral portion of the. Further, the guide member has a guide member for covering the accommodating surface of the main body, and the guide member has an engaging portion for engaging with the positioning means and a large number of guide holes communicating with the accommodating holes. The holes are characterized in that the accommodation surface side openings are aligned with the openings of the respective accommodation holes and are continuously expanded toward the opposite opening side.

On the other hand, the setting method of the present invention is to set the piece to be polished by using the above-mentioned setting jig, and the receiving surface of the piece to be polished set jig is upwardly set in each receiving hole. Store the pieces to be polished,
Depressurize from the pipe connected to the connection port to adsorb the piece to be polished in each accommodation hole, contact the upper surface of the carrier with the accommodation surface downward with the adsorption state, and engage the positioning means with the carrier The accommodation holes and the holding holes are aligned with each other, the reduced pressure is released, and the workpiece to be polished in the accommodation holes is dropped into the holding holes of the carrier. The pieces to be polished are stored in advance in a plurality of pieces to be polished set jigs, and these set jigs are stored so that the receiving surface faces upward. It is characterized in that a vacuum pipe is connected to perform vacuum adsorption.

[0013]

[Operation] In the present invention as described above, since the piece to be polished is set in the setting jig outside the polishing apparatus in advance, it is possible to avoid a decrease in the operating rate due to the setting work on the polishing apparatus. In addition, since it is set outside the polishing device, the degree to which the setting work time affects the polishing work is reduced, and it is possible to adopt a high-performance automated machine that considers cracks and overlaps at a relatively low speed. Become. At this time, by using the guide member, it becomes possible to surely and easily store the piece to be polished in the setting jig.

On the other hand, when transferring the piece to be polished from the set jig to the carrier, vacuum adsorption is performed to prevent the piece to be polished from scattering when the set jig is turned downward. Then, it can be set in the holding hole of the carrier by dropping it from the accommodation hole when the reduced pressure is released. At this time, the accommodating hole of the set jig has a pattern corresponding to the holding hole of the carrier, and the positional relationship between the set jig and the carrier is uniquely determined by the positioning means. The piece is surely fed into the holding hole of the carrier, so that a simple operation can provide a reliable result. Therefore, in the present invention, in addition to the setting work outside the polishing apparatus by using the setting jig, the piece to be polished can be delivered from the setting jig to the carrier easily and surely. Is achieved.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. 1 to 3 show a piece-to-be-polished jig 10 constructed according to the present invention. The set jig 10 is for holding a large number of the above-described existing crystal pieces 94 in a batch on the polishing carrier 93.
(See Figures 7 and 8). For this, the set jig 10
Is a main body 11 for accommodating the crystal pieces 94 together, and this main body 11
A guide member 12 for accommodating the crystal piece 94 and a holder member for supporting the main body 11 accommodating the crystal piece 94.
It has 13 and.

The main body 11 includes a flat columnar or disk-shaped base 20 and a cover 30 for covering the back side of the base 20.
L-shaped bent pipe connected to the center of this cover 30
40 and.

The base 20 has a flat receiving surface 21 on the front surface side, and a large number of receiving holes 22 are arranged in the receiving surface 21. As shown in FIG. 3, the accommodating holes 22 are concentrically arranged in triplicate, and the accommodating holes 22 are evenly arranged in the circumferential direction.
The arrangement pattern of the accommodation holes 22 is the holding holes 95 of the carrier 93.
It corresponds exactly to the arrangement pattern of.

Each of the accommodation holes 22 is formed as a cylindrical recess, and its diameter and depth are slightly larger than the outer shape of the above-described crystal piece 94, so that the accommodation hole 22 can be easily accommodated and escaped. Each of the accommodation holes 22 is formed with a through hole 23 that penetrates from the center of the bottom surface to the back surface side.

A disk-shaped member is fitted in the center of the receiving surface 21, and a positioning projection 24 protruding from the receiving surface 21 is formed by this member. A step slightly protruding from the accommodation surface 21 is formed in the peripheral portion of the accommodation surface 22, and a positioning pin 25 is planted at one position in the circumferential direction. Convex
The outer shape of 24 is slightly larger than the inner diameter of the central opening 98 of the carrier 93 so that it can be fitted, and the pin 25 can be inserted and fitted into a single engagement hole 99 formed in the peripheral portion of the carrier 93. (See Fig. 6).

The projections 24 and the pins 25 constitute a positioning means, and the projections 24 and the pins 25 are both carrier.
By engaging with the carrier 93, the carrier 93 and the accommodation surface 21 are superposed in a predetermined relative positional relationship. In this superposed state, all the accommodation holes 21 described above are precisely communicated with the corresponding holding holes 95 of the carrier 93 (see FIG. 6).

The cover 30 is a bottomed tubular member having a side wall portion 31 on the periphery thereof, is fixed to the back surface of the base 20 at a predetermined interval by a plurality of screws 32, and the tip edge of the side wall portion 31 is a base. It is engaged with and connected to a peripheral step on the back surface of 20 in an airtight state, and these form an airtight chamber 33 on the back surface side of the base 20. The airtight chamber 32 is connected to all the accommodation holes 22 by a through hole 23 formed in the base 20, and a pipe is formed by a through hole 34 formed in the center of the cover 30.
It is communicated within 40.

The pipe 40 has an L-shaped bent conduit 41 communicating with the through hole 34 of the cover 30 inside, and a radial end of the base 20 is connected to an external vacuum device. A coupler 42 serving as a connection port capable of airtightly connecting the tube 43 (see FIG. 6) is attached. The coupler 42 is communicated with the airtight chamber 32 through the pipe 40 and the through hole 34, and is further communicated with all the accommodation holes 22 through the through hole 23, and by connecting the tube 43 to the coupler 42 to reduce the pressure,
Suction is performed from the accommodation holes 22, and the crystal pieces 94 can be sucked by each.

The guide member 12 is a disk-shaped member that can be brought into close contact with the accommodation surface 21, and has a guide hole 52 corresponding to the accommodation hole 22 and
Recesses 54 corresponding to the protrusions 24 and engaging holes 55 corresponding to the pins 25
It has and. The concave portion 54 and the engaging hole 55 engage with the convex portion 24 and the pin 25 to accommodate the guide member 12 on the receiving surface.
It is positioned at 21 predetermined positions.

The guide hole 52 is communicated with the corresponding accommodation hole 22 in a state where the guide member 12 is at a predetermined position with respect to the accommodation surface 21. The opening size and shape of the guide hole 52 on the accommodation surface 21 side match the opening of the accommodation hole 22, but the diameter is increased toward the opening on the opposite side, and the crystal piece 94 fed from the opening on the opposite side. Is configured to be easily and reliably guided into the accommodation hole 22.

The holder member 13 is formed by attaching a plate-shaped base material to the bottom surface of a bottomed tubular member having a side wall portion 61 on the periphery, and a cutout portion 62 is provided in a part of the side wall portion 61. Has been.
When the pipe 40 is housed in the cutout portion 62, the upper edge of the side wall portion 61 is engaged with the stepped portion at the peripheral edge of the cover, thereby
The housing 11 can be stably supported with the housing 21 facing upward. It should be noted that the main body 11 has four pins 26 planted on the rear side edge of the base 20, and an engaging hole 63 corresponding to each pin 26 is formed on the upper surface of the side wall portion 61. By doing so, the main body 11 is always supported in a predetermined posture with respect to the holder member 13.

In the setting jig 10 as described above, first, the main body 11 is supported by the holder member 13, the guide member 12 is mounted on the upward accommodation surface 21, and the crystal pieces 94 are inserted into the respective guide holes 52. It is accommodated in each accommodation hole 22. When accommodating such a crystal piece 94, the following charging device 70 is used.

Referring to FIG. 4, a loading device 70 includes an existing parts feeder 73 such as a vibration type on a table 72 on the upper surface of a base 71.
And a moving mechanism capable of moving along the above-mentioned holder member 13 and a rail bridged so as to connect the holder member 13 and moving up and down.
The moving mechanism 74 supports a suction mechanism 75 capable of sucking the crystal pieces 94 one by one and releasing the suction by vacuum suction. A control device 76 using an existing personal computer or the like is connected to the charging device 70, and the control device 76 causes the charging device 70 to perform the following operation. The main body 11 and the guide member 12 are attached to the holder member 13.

First, the suction mechanism 75 is moved to a position above the exit end of the parts feeder 73 by the moving mechanism 74 and then lowered to suck one crystal piece 94 sent to the exit end. Next, the suction mechanism 75 is attached to the holder member 13 by the main body 11
The guide member 12 supported via the guide member 12 is moved to a position above a predetermined guide hole 52, and the guide member 52 is lowered. Then, the adsorption of the crystal piece 94 is released at the opening position of the guide hole 52.

The released crystal piece 94 falls into the guide hole 52, is guided in the guide hole 52, and is accommodated in the accommodation hole 22 of the main body 11. By repeating the same operation, one crystal piece 94 is sequentially inserted into each accommodation hole 22. When the crystal pieces 94 are accommodated in all the accommodation holes 11, the operation is stopped, so by removing the main body 11 from the holder member 13 and removing the guide member 12, the crystal pieces 94 are accommodated in the respective accommodation holes 22. Take out the main body 11.

The main body 11 containing the crystal piece 94 in this way is stored in the following storage device 80 until it is set in the carrier 93. In FIG. 5, the storage device 80
Is equipped with a box 82 having a door 81 that can be opened and closed.
A plurality of shelf boards 83 are supported inside 82. Each shelf 83
Has a notch 84 formed from the front edge, and the main body 11 has a notch 84.
With the pipe 40 inserted in the
It is supposed to be stably supported by. It is desirable that the door 81 can be maintained in a closed state by a magnetic catch or the like. Further, the shelf plate 83 may be provided with an engaging hole or the like into which the pin 26 on the rear side of the main body 11 can be fitted so as to make the supporting posture uniform.

The main body 11 in which the crystal piece 94 has been charged by the charging device 70 as described above and stored in the storage device 80 is used to set the crystal piece 94 on the carrier 93 in the following procedure. First, in a state where the main body 11 is placed with the accommodation surface 21 facing upward in the input device 70 or the storage device 80,
The tube 43 is connected to the coupler 42 at the tip of the pipe 40 exposed below the holder member 13 or the shelf plate 83, and vacuum suction is performed from this tube 43 to hold the crystal piece 94 in each accommodation hole 22 in a sucked state.

Next, the main body 11 is lifted, and the housing surface 21 is faced downward to face the upper surface of the carrier 93 on the polishing device 90 (see FIG. 7). In this state, each crystal piece 94
It is adsorbed on 11, and does not fall off from the accommodation hole 22 even if it faces downward. Then, the main body 11 is brought close to the carrier 93, the accommodating surface 21 is overlapped with the upper surface of the carrier 93, and the convex portion 24 is fitted in the central opening 98 of the carrier 93 by searching while shifting in the horizontal direction, and the pin 25 is held by the carrier 93. The accommodating surface 21 is accurately positioned on the upper surface of the carrier 93 by fitting into the engaging hole 99 of.

By this positioning, each accommodation hole 22 of the main body 11
Is accurately aligned with the holding hole 95 of the carrier 93, and when the tube 43 is removed from the coupler 42 in this state to release the vacuum suction, the suction of the crystal piece 94 in each accommodation hole 22 is released, and the dropped crystal is dropped. The piece 94 is held in each holding hole 95. In this case, lightly tap the body 11 with your hand to
Care should be taken to ensure that no crystal piece 94 remains inside. If necessary, the crystal piece 94 may be pushed out from the accommodation hole 22 by utilizing the reaction pressure when the tube 43 is removed.

As a result, all the crystal pieces 94 housed in the main body 11 are sent to the carrier 93, and the work of setting the crystal pieces 94 in all the holding holes 95 can be performed at once. Therefore, according to the present embodiment as described above, in the setting work of the crystal piece 94 to the carrier 93, the main body 11 previously accommodating the crystal piece 94 is brought into the polishing device 90 and overlapped with the carrier 93. It can be done in a very short time by the simple work of dropping it.

Therefore, it is not necessary to stop the polishing device 90 for a long time as in the conventional case, and the operating efficiency of the polishing device 90 can be improved. In addition, a complicated work of manually picking the crystal piece 94 and setting the crystal piece 94 on the carrier 93 is not required, and the working efficiency can be improved and the skill of the worker can be eased. Furthermore, since handling by unfamiliar human beings can be eliminated, damage such as cracking or chipping of the crystal piece 94 can be avoided, and product quality can be improved.

Then, the main body 11 of the setting jig 10 of this embodiment
Since the crystal pieces 94 are respectively accommodated in the accommodating holes 22 corresponding to the holding holes 95 of the carrier 93, the crystal pieces 94 can be collectively transferred to the respective holding holes 95 in a state of being stacked on the carrier 93. It can be simple and fast. Especially the body
The holding surface 21 of 11 is provided with positioning means by the convex portion 24 and the pin 25, and by fitting these into the carrier 93, the accommodation hole 22 and the holding hole 95 can be reliably and easily made to correspond to each other. These positioning means are arranged such that the central convex portion 24 aligns the basic center position and the pin 25 determines the circumferential direction. Therefore, the positioning operation can be performed easily and reliably.

Further, each accommodation hole 22 has a communication hole 23 and an airtight chamber 33.
Since the vacuum suction can be performed through the pipe 40, if the crystal pieces 94 accommodated in the respective accommodation holes 22 are adsorbed, the crystal is kept even when the holding surface 21 faces downward when the main body 11 is stacked on the carrier 93. The piece 94 does not fall out carelessly. This vacuum suction is performed by connecting the tube 43 to the pipe 40 coupler.
Since the connection and disconnection is made by connecting and disconnecting with 42, it is not necessary to separately provide an on-off valve or the like, and the mechanism can be simplified.

On the other hand, since the guide member 12 mountable to the main body 11 is provided, the operation for accommodating the crystal piece 94 in the accommodating hole 22 can be performed easily and reliably. Particularly, in the guide member 12, the concave portion 54 and the engaging hole 55 are engaged with the convex portion 24 and the pin 25 of the main body 11 so that the guide hole 52 and the accommodating hole 22 are accurately aligned, and the guide hole 52 is formed. Since it has a tapered shape, it is possible to easily and surely feed the inserted crystal piece 94 into the accommodation hole 22.

Furthermore, in this embodiment, the crystal unit 94 is automatically accommodated in the main body 11 by the charging device 70, so that the workability can be further improved. In particular, by the loading device 70, it is possible to completely eliminate the work such as manually picking the crystal piece 94, and it is possible to reduce human work mistakes and the like, and it is possible to reliably prevent the crystal piece 94 from being damaged during handling. .

A holder member capable of stably supporting the main body 11
Since the holder member 13 is configured to hold the main body 11 in a predetermined posture by engaging the pin 26 of the main body 11 with the engagement hole 63, the insertion device 70 and other automation devices are used. Even when accurate positioning of the accommodation hole 22 is required as in the case, it is possible to surely deal with it. In this holder member 13, the pipe 40 of the main body 11 is exposed from the notch 62, so that the tube 43 can be easily connected to the coupler 42 while being supported by the holder member 13.

Further, in the present embodiment, since a plurality of main bodies 11 accommodating the crystal pieces 94 are stored by the storage device 80, the crystal pieces are required to be set in the carrier 93 by the polishing device 90 each time. The main body 11 accommodating 94 can be supplied. As a result, the setting of the crystal piece 94 on the main body 11 can be a completely different process from the setting work on the carrier 93 and the polishing work on the polishing device 90, and the work distribution and the like can be freely set for each. Can be set to, and work efficiency can be further improved.

Further, in the storage device 80, the box body 82 with the door 81 can prevent dust and the scattering of the crystal piece 94, and the pipes 40 are exposed by the notches 84. Coupler 42 even when housed in 80
The tube 43 can be easily connected to the.

The present invention is not limited to the above-mentioned embodiment, and the following modifications and the like are also included in the present invention. The respective material qualities and detailed shapes of the main body 11, the guide member 12, and the holder member 13 are not limited to those of the embodiment.
As these materials, a synthetic resin material, a light alloy, or the like may be used. For example, a lightweight polyacetal resin having high shape accuracy and abrasion resistance is preferable.

In the main body 11, the shape of the accommodation surface 21 and the arrangement pattern of the accommodation holes 22 may be selected according to the carrier 93 to be used, and should be appropriately selected for implementation. The shape of the accommodation hole 22 should be selected according to the shape and size of the crystal piece 94 to be handled. Furthermore, when applied to a piece to be polished other than the crystal piece 94, it is desirable to determine the shape and size of the accommodation hole 22 according to the shape and size thereof.

In the main body 11, the structure for performing vacuum adsorption in each accommodation hole 22 forms an airtight chamber 33 by the cover 30 on the back surface of the base 20 as in the above-mentioned embodiment, and the pipe 40 is installed in this airtight chamber 33. The structure is not limited to the connection. For example, when the base 20 is molded, a conduit communicating with each accommodation hole 22 and communicating with each other may be integrally formed inside, and the pipe 40 may be omitted and the coupler 42 may be directly connected to the side surface of the hermetic chamber 33. However, these structures may be appropriately selected for implementation.

In the main body 11, the positioning means for the carrier 93 is not limited to the convex portion 24 and the pin 25 as in the above embodiment. For example, the protrusion 24 may be asymmetrical and the pin 25 may be omitted, or the two pins 25 may be arranged at both ends in the diametrical direction to omit the protrusion 24. Any structure can be used.

In the guide member 12, the positioning means with respect to the main body 11 is not limited to the recess 54 and the engagement hole 55, but the main body 11 can be positioned.
It may be changed as appropriate according to the positioning means for the carrier 93 adopted in FIG. Further, instead of diverting the positioning means for the carrier 93, another positioning means may be formed between the carrier 93 and the main body 11. However, the structure can be simplified if it is applied as in the above-mentioned embodiment.

In the guide member 12, it is desirable that the guide hole 52 has a shape and a size that at least the opening on the main body 11 side is the same as or slightly smaller than the accommodation hole 22. However, the shape and the size of the opening on the opposite side may be at least wider than the side of the main body 11, and may be set arbitrarily for implementation. Furthermore, the guide member 12 may be omitted as appropriate when, for example, the accuracy of the position at which the crystal piece 94 is charged by the charging device 70 is high. However, it is desirable to use the guide member 12 when the positional accuracy is not high or when the manual operation is performed.

In the holder member 13, the structure for supporting the main body 11 is not limited to the cylindrical side wall portion 61 as in the above embodiment, but may be a columnar portion arranged in the circumferential direction. Also,
The positioning with respect to the main body 11 is not limited to the structure in which the pin 26 is engaged with the engagement hole 63, and the convex portion provided on the side wall portion and the concave portion provided on the main body 11 may be fitted together. Furthermore, holder member
13 may be omitted as appropriate when accurate positioning is not required for inserting the crystal piece 94, such as the inserting device 70.

In the charging device 70, the parts feeder 73, the moving mechanism 74, the suction mechanism 75, and the like may appropriately use existing mechanisms as long as they can realize the above-described operation. For example, as a means for moving the suction mechanism 75, various existing three-dimensional robot arms can be used.

In the storage device 80, the material, shape, and size of the door 81 and the box body 82 are arbitrary, and the number of shelves 83 may be appropriately selected. For example, if the door 81 is made transparent, the internal state can be visually recognized even in the closed state, and the shelf plate 83 is not limited to the one through which the pipe 40 portion is inserted by the notch 84, and the holder member 13 is placed and the main body 11 is mounted. It may be supported.

[0052]

As described above, according to the present invention,
By stacking the set jig containing the pieces to be polished on the carrier in advance, it becomes possible to collectively hold the pieces to be polished on the carrier in a batch, ensuring reliable and easy work and improving work efficiency. Can be improved.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing an embodiment of the present invention.

FIG. 2 is a sectional view showing a main body of the embodiment.

FIG. 3 is a plan view showing an accommodation surface of the embodiment.

FIG. 4 is a perspective view showing a charging device used in the embodiment.

FIG. 5 is a perspective view showing a storage device used in the embodiment.

FIG. 6 is a perspective view showing an operating state in the embodiment.

FIG. 7 is a perspective view schematically showing an existing polishing apparatus.

FIG. 8 is a sectional view showing a polishing state of the existing polishing apparatus.

[Explanation of symbols]

 10 Set jig for the piece to be polished 11 Main body 12 Guide member 13 Holder member 21 Receiving surface 22 Receiving hole 23 Through hole 24 Convex part as positioning means 25 Pin as positioning means 33 Airtight chamber 42 Coupler as connection port 43 Vacuum suction Tube 90 Polishing device 93 Carrier 94 Crystal piece to be polished 95 Holding hole 98 Center opening 99 Engagement hole

Claims (5)

[Claims] 1. A piece-to-be-polished jig for setting pieces to be polished in a large number of holding holes arranged in a polishing carrier, the flat piece containing surface formed on one surface of a main body, A large number of accommodation holes formed in the accommodation surface in an arrangement corresponding to the holding holes of the carrier, and the carriers can be engaged with the accommodation surface by aligning the carriers with the accommodation holes aligned with the respective holding holes. A positioning means, a connection port formed on a surface other than the accommodation surface of the main body and connectable to an external pipe, and a communication path communicating from the bottom surface of each accommodation hole to the connection port. A piece set jig to be polished. 2. The piece to be polished set jig according to claim 1, wherein the positioning means has a convex portion formed in a circular plane shape in a central portion of the accommodation surface and capable of being fitted into a central opening of the carrier. A jig for setting a piece to be polished, comprising at least one pin formed in a peripheral portion of the accommodation surface and capable of being fitted into a positioning hole in a peripheral portion of the carrier. 3. The jig for setting a piece to be polished according to claim 1 or 2, further comprising a guide member for covering an accommodating surface of the main body, the guide member engaging with the positioning means. And a large number of guide holes communicating with the respective accommodation holes, the accommodation surface side openings of the respective guide holes being aligned with the openings of the respective accommodation holes, and continuously expanding toward the opposite side opening side. A piece-to-be-polished jig to be polished. 4. A polishing piece setting method for setting a polishing piece on a polishing carrier by using the polishing piece setting jig according to claim 1. The to-be-polished piece is housed in the respective accommodation holes with the accommodation surface of the to-be-polished piece set jig facing upward, and the pipe connected to the connection port is depressurized to adsorb the to-be-polished pieces in the respective accommodation holes. , In the suctioned state with the accommodation surface facing downward and in contact with the upper surface of the carrier, the positioning means is engaged with the carrier to align the positions of the accommodation holes and the holding holes, and release the decompression. A method of setting a piece to be polished, characterized in that the piece to be polished in the accommodation hole is dropped into each holding hole of the carrier. 5. The method of setting a piece to be polished according to claim 4, wherein the pieces to be polished are respectively housed in advance in a plurality of piece-to-be-polished piece set jigs, and the set jigs have an accommodation surface facing upward. A method for setting a piece to be polished, which is stored, and a vacuum pipe is connected to a connection port of each jig as needed to perform vacuum suction.