JPH0725679Y2 - ガラス基板検査用フレキシブル載置台 - Google Patents

ガラス基板検査用フレキシブル載置台

Info

Publication number
JPH0725679Y2
JPH0725679Y2 JP1989074561U JP7456189U JPH0725679Y2 JP H0725679 Y2 JPH0725679 Y2 JP H0725679Y2 JP 1989074561 U JP1989074561 U JP 1989074561U JP 7456189 U JP7456189 U JP 7456189U JP H0725679 Y2 JPH0725679 Y2 JP H0725679Y2
Authority
JP
Japan
Prior art keywords
reference frame
glass substrate
mounting table
size
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989074561U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314454U (fr
Inventor
勉 中台
信行 飯塚
勉 本郷
Original Assignee
日立電子エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立電子エンジニアリング株式会社 filed Critical 日立電子エンジニアリング株式会社
Priority to JP1989074561U priority Critical patent/JPH0725679Y2/ja
Publication of JPH0314454U publication Critical patent/JPH0314454U/ja
Application granted granted Critical
Publication of JPH0725679Y2 publication Critical patent/JPH0725679Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1989074561U 1989-06-26 1989-06-26 ガラス基板検査用フレキシブル載置台 Expired - Lifetime JPH0725679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989074561U JPH0725679Y2 (ja) 1989-06-26 1989-06-26 ガラス基板検査用フレキシブル載置台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989074561U JPH0725679Y2 (ja) 1989-06-26 1989-06-26 ガラス基板検査用フレキシブル載置台

Publications (2)

Publication Number Publication Date
JPH0314454U JPH0314454U (fr) 1991-02-14
JPH0725679Y2 true JPH0725679Y2 (ja) 1995-06-07

Family

ID=31614357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989074561U Expired - Lifetime JPH0725679Y2 (ja) 1989-06-26 1989-06-26 ガラス基板検査用フレキシブル載置台

Country Status (1)

Country Link
JP (1) JPH0725679Y2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001081903A1 (fr) * 2000-04-26 2001-11-01 Olympus Optical Co., Ltd. Mecanisme de support
JP2008103355A (ja) * 2007-12-27 2008-05-01 Seiko Epson Corp 表示器用照明装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001081903A1 (fr) * 2000-04-26 2001-11-01 Olympus Optical Co., Ltd. Mecanisme de support
JP2008103355A (ja) * 2007-12-27 2008-05-01 Seiko Epson Corp 表示器用照明装置

Also Published As

Publication number Publication date
JPH0314454U (fr) 1991-02-14

Similar Documents

Publication Publication Date Title
JP4842422B2 (ja) シート材料の検査方法
CN212845071U (zh) 键帽检测装置和键帽检测设备
JP2004061577A (ja) 露光装置のマスク板固定方法およびマスク板支持装置
JP2004078108A (ja) 露光装置のマスク板固定治具
CN111133299A (zh) 透明或半透明薄膜的表面异物检测仪
JPH08137091A (ja) マスク外観検査装置
JPH0314454U (fr)
JPH0961319A (ja) 吸引式試料台
JP2007084333A (ja) 板材の自立補助機構及び欠陥検査装置
JP2002341345A (ja) 平面表示装置の製造方法、及びこのためのバックライトの検査方法
JP2948353B2 (ja) ガラス板の表面欠陥検査方法および検査装置
JP2002162315A (ja) レンズ製品の検査方法及び装置
JP2004281907A (ja) 大型基板ホルダ
JP2023161100A (ja) 光学測定機構
KR100239699B1 (ko) 반도체 웨이퍼 검사장치
JP2001007186A (ja) 異なるサイズの接触面を有するアダプターと、これを用いた異物検査装置
JP2661266B2 (ja) フレキシブルプリント配線板と透明基板の回路位置合せ装置およびその使用方法
JP2008076079A (ja) 基板検査装置
CN212873185U (zh) 一种光桌检查台
JPH0656762U (ja) 基板外観検査装置
JPH05223521A (ja) 位置読取り可能なマクロ検査装置
CN215968448U (zh) 一种组装用治具
CN223260031U (zh) 一种避免颜色不均的周边曝光机
JP2001007188A (ja) 吸着載置テーブル及びこれを用いた異物検査装置
JP3404810B2 (ja) 陰極線管のファンネルの位置決め装置