JPH07257724A - Piezoelectric driving type conveying device - Google Patents

Piezoelectric driving type conveying device

Info

Publication number
JPH07257724A
JPH07257724A JP8519094A JP8519094A JPH07257724A JP H07257724 A JPH07257724 A JP H07257724A JP 8519094 A JP8519094 A JP 8519094A JP 8519094 A JP8519094 A JP 8519094A JP H07257724 A JPH07257724 A JP H07257724A
Authority
JP
Japan
Prior art keywords
connecting member
length
ratio
laminated
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8519094A
Other languages
Japanese (ja)
Other versions
JP2903079B2 (en
Inventor
Hidena Okahara
秀銘 岡原
Kiyoshi Tomioka
清 富岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RION DENSHI KK
Original Assignee
RION DENSHI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RION DENSHI KK filed Critical RION DENSHI KK
Priority to JP8519094A priority Critical patent/JP2903079B2/en
Publication of JPH07257724A publication Critical patent/JPH07257724A/en
Application granted granted Critical
Publication of JP2903079B2 publication Critical patent/JP2903079B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To convey a part to be conveyed at a high speed by arranging a section with high flexural rigidity and a section with low flexural rigidity in a joint member serving as a constitutional part, of a piezoelectrically driving type conveying device and greatly expanding a ratio of flexural rigidity between both sections. CONSTITUTION:In a piezoelectrically driving type conveying device using a shaker body 20 in which a piezoelectric element 21 is adhered on an elastic plate 22, one end of the shaker body 20 is fixed on a base platform 23, while the other end is fixed in one end of a lamination joint member 27 in which two or more of joint members 24 having different length are laminated, and in the lamination joint member 27, the other end of the longest joint member 24 is fixed in a conveying body 25. In this process, the elastic plate 22, in which the ratio of the length to the width is 1 to 0.2-0.5 while the ratio of the length to the thickness is 1 to 0.04-0.08, and the piezoelectric element 21, in which the ratio of the length to the width is 1 to 0.3-0.7 while the ratio of the length to the thickness is l to 0.015-0.06, are used. The ratio of the length, the width, and the thickness of other joint members 24 to the length of the longest joint member 24 are individually set to be 0.5-0.85, 0.3-0.6, and 0.01-0.04 to 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は電気部品或いは機械部品
等の各種部品を振動により搬送させる圧電駆動型搬送装
置に係るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric drive type transfer device for transferring various parts such as electric parts or mechanical parts by vibration.

【0002】[0002]

【従来の技術】圧電素子を駆動源とする従来の圧電駆動
型搬送装置は実開昭52−61087号,実開昭57−
46517号,特開昭62−4118号,特開昭62−
4119号等によって既に公知化されており、その構成
及び搬送原理を図2を用いて説明すると以下のようであ
る。
2. Description of the Related Art A conventional piezoelectric drive type conveying device using a piezoelectric element as a drive source is disclosed in Japanese Utility Model Publication Nos. 52-61087 and 57-57.
46517, JP-A-62-4118, JP-A-62-
It has been already known to the public by No. 4119 and the like, and its configuration and transport principle will be described below with reference to FIG.

【0003】即ち圧電素子21を弾性板22の両面に貼
着したいわゆるバイモルフでなる加振体20を二以上用
いる構成と当該加振体20の一端を基台23に傾斜立設
させて固定する構成と前記加振体20の他端を連結部材
24を介して搬送体25に固定する構成からなるもので
ある。しかるにかかる構成でなる圧電駆動型搬送装置の
各圧電素子21に交流電圧を印加する。
That is, a structure using two or more vibrating bodies 20 made of so-called bimorphs in which piezoelectric elements 21 are attached to both surfaces of an elastic plate 22, and one end of the vibrating body 20 is obliquely erected and fixed to a base 23. The constitution is such that the other end of the vibrating body 20 is fixed to the carrier 25 via a connecting member 24. An alternating voltage is applied to each piezoelectric element 21 of the piezoelectric drive type transporting device having the above configuration.

【0004】前記交流電圧の印加によって圧電素子21
は正に半サイクルで伸長し、負の半サイクルで収縮する
繰り返し運動を行うことから、圧電素子21を貼着した
バイモルフでなる加振体20において、それぞれの圧電
素子21に印加する電圧を半サイクルずつずらせば、そ
の片持ち型バイモルフ構造によって前記伸縮運動は撓み
運動に変換され、弾性板22の下端と基台23との連結
部を支点とする矢印方向の振動となって搬送体25を振
動させ、その結果、搬送体上に載置される部品26に一
方向の駆動力を付与するのである。
By applying the AC voltage, the piezoelectric element 21
Performs a repetitive motion of positively extending in half a cycle and contracting in a negative half cycle. Therefore, in the vibration body 20 made of a bimorph to which the piezoelectric element 21 is attached, the voltage applied to each piezoelectric element 21 is reduced by half. When the cycles are shifted, the expansion / contraction motion is converted into a flexion motion by the cantilever type bimorph structure, and the carrier 25 is vibrated in the direction of the arrow with the connecting portion between the lower end of the elastic plate 22 and the base 23 as a fulcrum. The components are oscillated, and as a result, a unidirectional driving force is applied to the component 26 placed on the carrier.

【0005】[0005]

【従来技術の問題点】連結部材24には以下の条件の具
備が求められる。即ち搬送体25に載置又は投入される
搬送部品26は多種多様に亘るものであり、従ってその
重量も大きく変動する。かかる点を考慮して前記連結部
材24の曲げ剛性は、少なくとも搬送体25に載置又は
投入される搬送部品26の最大荷重を支えるに足る大き
さであると同時に当該搬送部品26に搬送駆動力を付加
するに足る大きさであることが要求される。
2. Description of the Related Art The connecting member 24 is required to satisfy the following conditions. That is, there are a wide variety of carrier parts 26 placed or put on the carrier 25, and therefore the weight thereof also varies greatly. In consideration of this point, the bending rigidity of the connecting member 24 is at least large enough to support the maximum load of the transport component 26 placed on or input to the transport body 25, and at the same time, the transport driving force of the transport component 26 is applied. Is required to be added.

【0006】ところで前記搬送部品26の最大荷重を支
えるに足るものとするには、連結部材24の曲げ剛性は
ある大きさ以上でなければならない。でなければ連結部
材24は搬送部品26を含む搬送体25からの荷重に耐
えかねて搬送体25と共に下方に沈下し、搬送部品26
の搬送速度を著しく低下させるからである。
By the way, in order to support the maximum load of the carrying part 26, the bending rigidity of the connecting member 24 must be a certain magnitude or more. Otherwise, the connecting member 24 cannot bear the load from the carrier 25 including the carrier part 26 and sinks downward together with the carrier 25,
This is because the transport speed of is significantly reduced.

【0007】一方連結部材24の曲げ剛性を連結部材2
4の全面に亘って、前記搬送部品26の最大荷重を支え
るに足る大きさとすれば、加振体20の励振によって生
じる振動エネルギーの多くは連結部材24に吸収され、
その結果、搬送部品26を高速搬送させるに足る大きさ
の振動エネルギーは搬送体25に伝達されない。このこ
とから搬送部品26を高速搬送させるには、加振体20
の励振によって生じた振動エネルギーを損失少なくして
搬送体25に伝達させることが必要であり、この必要性
は連部材24の曲げ剛性を前記最大荷重を支えるに足る
曲げ剛性以下とすことによって達成される。
On the other hand, the bending rigidity of the connecting member 24 is adjusted to the connecting member 2
If the size is large enough to support the maximum load of the conveying component 26 over the entire surface of 4, the vibration energy generated by the excitation of the vibrating body 20 is mostly absorbed by the connecting member 24.
As a result, vibration energy that is large enough to transport the transport component 26 at high speed is not transmitted to the transport body 25. Therefore, in order to transport the transport component 26 at high speed, the vibrator 20
It is necessary to reduce the loss of the vibration energy generated by the vibration of the carrier to be transmitted to the carrier 25. This need is achieved by making the bending rigidity of the connecting member 24 not more than the bending rigidity sufficient to support the maximum load. To be done.

【0008】連結部材24の曲げ剛性について前記条件
及び必要性を満たすには一の連結部材24において曲げ
剛性の高い部所と低い部所を設けること、即ち曲げ剛性
の比に差異を設けることが求められる。従来、この二律
背反的な条件及び必要性を満たさせるため、連結部材の
一部に切欠き、スリットを設ける等の手段を採ってき
た。しかし、かかる手段では一の連結部材24におい
て、曲げ剛性の高い部材と低い部所を設けることは可能
であってもこの両者の曲げ剛性の比を大きくするには限
界があり、従って搬送部品の高速搬送化には限界がある
という問題点があた。
In order to satisfy the above conditions and needs regarding the bending rigidity of the connecting member 24, it is necessary to provide a portion having a high bending rigidity and a portion having a low bending rigidity in one connecting member 24, that is, to provide a difference in the bending rigidity ratio. Desired. Conventionally, in order to satisfy the trade-off between these two contradictory conditions and needs, a means such as a notch or a slit is provided in a part of the connecting member. However, even if it is possible to provide a member having a high bending rigidity and a portion having a low bending rigidity in the one connecting member 24 by such means, there is a limit in increasing the ratio of the bending rigidity of the two members, and therefore, there is a limit in the conveying parts. There is a problem that there is a limit to high speed transportation.

【0009】[0009]

【本発明が解決しようとする課題】本発明は前記従来の
圧電駆動型搬送装置が有していた問題点を解決した新規
な圧電駆動型搬送措置を提供せんとするものである。即
ち具体的には圧電駆動型搬送装置の構成部品である連結
部材に、曲げ剛性の高い部所と低い部材を設けることは
もとより、この両部所の曲げ剛性の比を従来より大幅に
拡大させて搬送部品の高速搬送化を可能ならしめる圧電
駆動型搬送装置を提供せんとするものである。
SUMMARY OF THE INVENTION The present invention is to provide a novel piezoelectric drive type transportation device which solves the problems of the conventional piezoelectric drive type transportation device. That is, specifically, not only the connecting member, which is a component of the piezoelectric drive type transport device, is provided with a member having a high bending rigidity and a member having a low bending rigidity, but also the bending rigidity ratio between these two parts is greatly expanded as compared with the conventional one. It is intended to provide a piezoelectric drive type transfer device which enables high speed transfer of transfer parts.

【0010】[0010]

【課題を解決するための手段】以下、図1を用いて課題
解決のための手段を説明する。本発明は前記課題解決の
ため弾性板22の片面又は両面に圧電素子21を貼着し
た、いわゆるユニモルフ又はバイモルフでなる加振体2
0を用いた圧電駆動型搬送装置において、前記加振体2
0の一端を基台23に固定する構成と前記加振体20の
他端を長さの異なる二以上の連結部材24を積層させた
積層連結部材27の一端に固定する構成と、前記積層連
結部材27のうち、最長の連結部材24の他端を搬送部
品26を載置する搬送体25に固定する構成からなるも
のである。
[Means for Solving the Problems] Means for solving the problems will be described below with reference to FIG. In order to solve the above-mentioned problems, the present invention provides a vibrating body 2 which is a so-called unimorph or bimorph in which a piezoelectric element 21 is attached to one surface or both surfaces of an elastic plate 22.
In the piezoelectric drive type transfer device using 0, the vibrating body 2
A structure in which one end of 0 is fixed to the base 23, the other end of the vibrating body 20 is fixed to one end of a laminated connecting member 27 in which two or more connecting members 24 having different lengths are laminated, and the laminated connection. Of the members 27, the other end of the longest connecting member 24 is fixed to the carrier 25 on which the carrier component 26 is placed.

【0011】本発明に用いられる弾性板22は高弾性及
び導電性を具有するSUS304等のステンレス鋼,ば
ね鋼等の中から適宜のものが選定される。ここで前記弾
性板22に導電性の具有を不可欠の条件としたのは、弾
性板22に貼着される圧電素子21への交流電圧の印加
を可能ならしめるためである。
The elastic plate 22 used in the present invention is appropriately selected from stainless steel such as SUS304 having high elasticity and conductivity, spring steel and the like. The reason why the elastic plate 22 is required to have conductivity is that it is possible to apply an AC voltage to the piezoelectric element 21 attached to the elastic plate 22.

【0012】弾性板22に貼着される圧電素子21は高
い圧電性を具有するチタン酸ジルコン酸鉛等の適宜の圧
電素子21の中から選定される。しかして前記圧電素子
21にはその両面に銀焼付け、真空蒸着等の適宜の手段
により電極が形成され、前記電極に直流電圧を印加して
分極処理を施したものが用いられる。
The piezoelectric element 21 attached to the elastic plate 22 is selected from suitable piezoelectric elements 21 such as lead zirconate titanate having a high piezoelectric property. Therefore, the piezoelectric element 21 has electrodes formed on both sides thereof by an appropriate means such as silver baking, vacuum deposition or the like, and a direct current voltage is applied to the electrodes for polarization treatment.

【0013】弾性板22への圧電素子21の貼着は、弾
性板22の片面のみに圧電素子21を貼着するユニモル
フ又は両面に圧電素子21を貼着するバイモルフのいず
れでもよい。そのいずれであっても圧電素子21に交流
電圧を印加することによって加振体20から励振が生じ
るからである。
The piezoelectric element 21 may be attached to the elastic plate 22 by either unimorph in which the piezoelectric element 21 is attached to only one side of the elastic plate 22 or bimorph in which the piezoelectric element 21 is attached on both sides. This is because in any of these cases, excitation is generated from the vibrating body 20 by applying an AC voltage to the piezoelectric element 21.

【0014】前記構成でなる加振体20の一端は基台2
3にねじ止め、スポット溶接等の適宜の手段によって固
定される。しかしてその固定部所は搬送体25上に搬送
部品26を載置したとき、搬送部品26が一方向のみに
搬送する部所である。他端は端面を揃えた積層連結部材
27の一端にねじ止め、スポット溶接等の適宜の手段に
よって固定される。
One end of the vibrating body 20 having the above-mentioned structure is provided with the base 2.
It is fixed to 3 by suitable means such as screwing or spot welding. However, the fixed portion is a portion where the transport component 26 transports in only one direction when the transport component 26 is placed on the transport body 25. The other end is fixed to one end of the laminated connecting member 27 whose end faces are aligned by screwing, spot welding or other suitable means.

【0015】連結部材は前記したように搬送部品26を
含む搬送体25からの荷重を支えるに足る曲げ剛性(以
下、前者の曲げ剛性という)と加振体20から生じる励
振を撓み運動に変換し、搬送体25に振動振幅を生じさ
せるに十分な曲げ剛性(以下、後者の曲げ剛性という)
を具有することが求められる。しかして前記両曲げ剛性
は大きく異なる。即ち前者の曲げ剛性は少なくとも搬送
部品26を含む搬送体25からの最大荷重を支えるに足
る大きさ以上の曲げ剛性でなければならない。これに対
し後者の曲げ剛性は、前者の曲げ剛性と同程度であって
は搬送部品26を高速搬送させ得ないことから、前者の
曲げ剛性より相当程度小さくしなければならない。即ち
前者の曲げ剛性と同程度の曲げ剛性であっては加振体の
励振による振動エネルギーはその殆どを連結部材に吸収
され、搬送部品26を高速搬送させるに十分な振動振幅
を搬送体25に付与し得ないからである。
As described above, the connecting member converts the bending rigidity (hereinafter referred to as the former bending rigidity) sufficient to support the load from the carrier 25 including the carrier part 26 and the excitation generated from the vibrating body 20 into a bending motion. , Sufficient flexural rigidity to generate vibration amplitude in the carrier 25 (hereinafter referred to as the latter flexural rigidity)
It is required to have Therefore, the two bending stiffnesses are very different. That is, the flexural rigidity of the former must be at least a flexural rigidity sufficient to support the maximum load from the carrier 25 including the carrier parts 26. On the other hand, the bending rigidity of the latter cannot be conveyed at high speed if the bending rigidity of the former is the same, and therefore the bending rigidity of the former must be made considerably smaller. That is, if the bending rigidity is similar to the former bending rigidity, most of the vibration energy due to the excitation of the vibrating body is absorbed by the connecting member, and the carrier 25 has a vibration amplitude sufficient to carry the carrying component 26 at high speed. This is because it cannot be given.

【0016】本発明では連結部材に求められる前者の曲
げ剛性と後者の曲げ剛性を一の連結部材において、具有
させるべく長さの異なる連結部材24を二以上積層して
構成するものである。連結部材をかかる構成とすること
によって積層された部所の連結部材で前者の曲げ剛性を
確保し、積層されない部所の連結部材で後者の曲げ剛性
を確保するものである。連結部材をかかる構成とするこ
と、即ち積層連結部材27とすることによって一の積層
連結部材27において曲げ剛性の高い部所と低い部所を
設けることが可能となり、これを受けて前者の曲げ剛性
と後者の曲げ剛性の比を求められる曲げ剛性の比とする
ことができる。
In the present invention, the former bending rigidity and the latter bending rigidity required for the connecting member are formed in one connecting member by laminating two or more connecting members 24 having different lengths. With such a configuration of the connecting member, the former bending rigidity is ensured by the connecting members at the laminated portions, and the latter bending rigidity is ensured by the connecting members at the portions not laminated. With such a structure of the connecting member, that is, by using the laminated connecting member 27, it is possible to provide a portion having a high bending rigidity and a portion having a low bending rigidity in one laminated connecting member 27. And the latter bending rigidity ratio can be used as the required bending rigidity ratio.

【0017】積層連結部材27が前記求められる曲げ剛
性の比を具有し、かつ搬送部品26を一方向のみに搬送
させ得るものである限り、積層連結部材27を構成する
それぞれの連結部材24の材質,幅及び厚さは必ずしも
同一とする必要はない。
As long as the laminated connecting member 27 has the required bending rigidity ratio and can convey the conveying component 26 in only one direction, the material of each connecting member 24 constituting the laminated connecting member 27. , Width and thickness do not necessarily have to be the same.

【0018】積層連結部材27を構成するそれぞれの連
結部材24の他端のうち、最長の連結部材の他端は搬送
体に固定される。
Of the other ends of the connecting members 24 constituting the laminated connecting member 27, the other end of the longest connecting member is fixed to the carrier.

【0019】[0019]

【作用】固体変位材料の一つである圧電素子21に外部
から交流電圧を印加すると印加電圧の正の半サイクルで
伸長し、負の半サイクルで収縮する伸縮運動を惹起し、
加振体20の励振をもたらす。ここで加振体20,積層
連結部材27及び搬送体25を含めた全体の固有振動周
波数と同一の周波数でなる交流電圧を印加すれば、いわ
ゆる共振現象により加振体20からもたらされる変位は
きわめて大きいものとなる。
When an AC voltage is applied to the piezoelectric element 21, which is one of the solid displacement materials, from outside, it expands and contracts in a positive half cycle of the applied voltage, and contracts in a negative half cycle.
The excitation of the vibrating body 20 is brought about. If an AC voltage having the same natural vibration frequency as that of the whole of the vibrating body 20, the laminated connecting member 27 and the carrier 25 is applied, the displacement caused by the vibrating body 20 due to a so-called resonance phenomenon is extremely large. It will be big.

【0020】本発明に係る圧電駆動型搬送装置における
加振体20は、その一端を基台23に固定しているた
め、いわゆる片持ち構造である。しかるにかかる加振体
20の片持ち構造によって前記加振体20の励振は撓み
運動に変換され、積層連結部材27を介して搬送体25
に斜め上下方向の振動振幅を発生させる。この振動振幅
は搬送体25上に載置される搬送部品26の搬送を可能
ならしめる駆動力となるものであり、搬送部品26の搬
送速度は前記振動振幅に比例する。
The vibrating body 20 in the piezoelectric drive type conveying apparatus according to the present invention has a so-called cantilever structure because one end thereof is fixed to the base 23. Due to the cantilever structure of the vibrating body 20, the excitation of the vibrating body 20 is converted into a bending motion, and the carrier 25 is transferred via the laminated connecting member 27.
The vibration amplitude in the obliquely vertical direction is generated. This vibration amplitude serves as a driving force that enables the conveyance of the conveyance component 26 placed on the conveyance body 25, and the conveyance speed of the conveyance component 26 is proportional to the vibration amplitude.

【0021】次に本発明の具体的実施例を示す。弾性板
22として長さ1に対し幅0.2〜0.5,厚さ0.0
4〜0.08の比でなるものを、圧電素子21として長
さ1に対し幅0.3〜0.7,厚さ0.015〜0.0
6の比でなるチタン酸ジルコン酸鉛を、積層連結部材2
7として二層の連結部材でなり、長さは最長の連結部材
24の長さ1に対し最長でない連結部材24の長さは
0.5〜0.85,幅は最長の連結部材の長さ1に対し
0.3〜0.6,厚さは積層するそれぞれの連結部材2
4とも最長の連結部材24の長さ1に対し0.01〜
0.04の比でなるものを用いた場合、搬送開始最低電
圧は40V,駆動電圧100V(周波数125HZ)の
下での高速搬送可能な搬送部品26の最大重量は15K
g、最大搬送速度は50mm/secであった。
Next, specific examples of the present invention will be shown. The elastic plate 22 has a length of 1 to a width of 0.2 to 0.5 and a thickness of 0.0.
A piezoelectric element 21 having a ratio of 4 to 0.08 has a length of 1 and a width of 0.3 to 0.7 and a thickness of 0.015 to 0.0.
The lead zirconate titanate having a ratio of 6 is used to form the laminated connecting member 2
7 is a double-layered connecting member, and the length of the longest connecting member 24 is 0.5 to 0.85 and the width is the longest connecting member 24. 0.3 to 0.6 for 1 and the thickness of each connecting member 2 to be laminated
4 is 0.01 to 1 for the length 1 of the longest connecting member 24.
When the one having the ratio of 0.04 is used, the minimum voltage for starting the transfer is 40V, and the maximum weight of the transfer component 26 capable of high-speed transfer under the drive voltage of 100V (frequency 125HZ) is 15K.
g, the maximum transport speed was 50 mm / sec.

【0022】[0022]

【本発明の効果】本発明の第一の効果は連結部材24の
材質,厚さ及び積層数を適宜に選定し得ることから一の
積層連結部材27において曲げ剛性の高い部所と低い部
所を設けることができ、しかも当該曲げ剛性の比を従来
の連結部材のそれよりも格段に大きくすることができ
る。この効果を受けて搬送物品26の高速搬送が可能に
なった。この効果は裏返せば加振体20から生じる振動
エネルギーの利用効率を一段と高めたことに他ならな
い。
The first effect of the present invention is that the material, thickness and number of layers of the connecting member 24 can be appropriately selected, so that one laminated connecting member 27 has high bending rigidity and low bending rigidity. Can be provided, and moreover, the bending rigidity ratio can be made significantly larger than that of the conventional connecting member. Due to this effect, the conveyed article 26 can be conveyed at high speed. This effect is nothing more than the fact that the utilization efficiency of the vibration energy generated from the vibrating body 20 is further improved.

【0023】本発明の第二の効果は、搬送体25に載置
又は投入される搬送部品26の重量変化によっても搬送
部品26の搬送速度の変動はきわめて小さいことであ
る。その対比として従来の圧電駆動型搬送装置における
搬送部品26の重量変化に伴なう搬送部品26の搬送速
度の変動1に対し、本発明に係る圧電駆動型搬送装置に
おける同一条件下での搬送部品26の搬送速度の変動は
0.3〜0.4と大きく減少しており、加えて高速搬送
を可能ならしめる搬送体25に載置又は投入し得る搬送
部品26の重量が従来の圧電駆動型搬送装置のそれに比
し35%程度大きくし得たことである。即ちこの効果は
重量物の高速搬送を可能ならしめる範囲の拡大に他なら
ない。
The second effect of the present invention is that the variation of the transport speed of the transport component 26 is extremely small even if the weight of the transport component 26 placed or loaded on the transport member 25 changes. In contrast, in contrast to the variation 1 of the transport speed of the transport component 26 due to the weight change of the transport component 26 in the conventional piezoelectric drive transport device, the transport component under the same condition in the piezoelectric drive transport device according to the present invention. The fluctuation of the transport speed of the carrier 26 is greatly reduced to 0.3 to 0.4, and in addition, the weight of the carrier component 26 that can be placed on or put in the carrier 25 that enables high speed transportation is the conventional piezoelectric drive type. It is possible to make the size about 35% larger than that of the carrier. That is, this effect is nothing but the expansion of the range that enables high-speed transportation of heavy objects.

【図面の簡単な説明】[Brief description of drawings]

【図1】は本発明に係る圧電駆動型搬送装置の側面図で
ある。
FIG. 1 is a side view of a piezoelectric drive type transfer device according to the present invention.

【図2】は従来の圧電駆動型搬送装置の側面図である。FIG. 2 is a side view of a conventional piezoelectric drive type transport device.

【符号の説明】[Explanation of symbols]

20.加振体 21.圧電素子 22.弾性板 23.基台 24.連結部材 25.搬送体 26.搬送部品 27.積層連結部材 20. Exciter 21. Piezoelectric element 22. Elastic plate 23. Base 24. Connecting member 25. Carrier 26. Transport parts 27. Laminated connection member

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】弾性板の片面又は両面に圧電素子を貼着し
たユニモルフ又はバイモルフでなる加振体を用いた圧電
駆動型搬送装置において、前記加振体の一端を基台に固
定する構成と前記加振体の他端を長さの異なる二以上の
連結部材を積層させた積層連結部材の一端に固定する構
成と前記積層連結部材のうち、最長の連結部材の他端を
搬送体に固定する構成からなる圧電駆動型搬送装置。
1. A piezoelectric drive type conveyance device using a vibrating body made of unimorph or bimorph in which a piezoelectric element is adhered to one or both sides of an elastic plate, wherein one end of the vibrating body is fixed to a base. A structure in which the other end of the vibrating body is fixed to one end of a laminated connecting member in which two or more connecting members having different lengths are laminated, and the other end of the longest connecting member among the laminated connecting members is fixed to the carrier. A piezoelectric drive type transport device having the above-mentioned configuration.
【請求項2】弾性板の片面又は両面に圧電素子を貼着し
たユニモルフ又はバイモルフでなる加振体を用いた圧電
駆動型搬送装置において、弾性板22として長さ1に対
し幅0.2〜0.5,厚さ0.04〜0.08の比でな
るものを,圧電素子21として長さ1に対し幅0.3〜
0.7,厚さ0.015〜0.06の比でなるチタン酸
ジルコン酸鉛を,積層連結部材27として二層の連結部
材24でなり,長さは最長の連結部材24の長さ1に対
し最長でない連結部材24の長さは0.5〜0.85,
幅は最長の連結部材の長さ1に対し0.3〜0.6,厚
さは積層するそれぞれの連結部材24とも最長の連結部
材24の長さ1に対し0.01〜0.04の比で構成さ
れる圧電駆動型搬送装置。
2. A piezoelectric drive type conveying device using a vibrating body made of unimorph or bimorph in which a piezoelectric element is attached to one surface or both surfaces of an elastic plate. A piezoelectric element 21 having a ratio of 0.5 and a thickness of 0.04 to 0.08 has a length of 1 to a width of 0.3 to
The lead zirconate titanate having a ratio of 0.7 and a thickness of 0.015 to 0.06 is a two-layer connecting member 24 as the laminated connecting member 27, and the length of the longest connecting member 24 is 1 In contrast, the length of the connecting member 24 that is not the longest is 0.5 to 0.85.
The width is 0.3 to 0.6 with respect to the length 1 of the longest connecting member, and the thickness is 0.01 to 0.04 with respect to the length 1 of the longest connecting member 24 for each of the connecting members 24 to be laminated. Piezoelectric drive type transport device composed of a ratio.
JP8519094A 1994-03-18 1994-03-18 Piezoelectric drive type transfer device Expired - Lifetime JP2903079B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8519094A JP2903079B2 (en) 1994-03-18 1994-03-18 Piezoelectric drive type transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8519094A JP2903079B2 (en) 1994-03-18 1994-03-18 Piezoelectric drive type transfer device

Publications (2)

Publication Number Publication Date
JPH07257724A true JPH07257724A (en) 1995-10-09
JP2903079B2 JP2903079B2 (en) 1999-06-07

Family

ID=13851742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8519094A Expired - Lifetime JP2903079B2 (en) 1994-03-18 1994-03-18 Piezoelectric drive type transfer device

Country Status (1)

Country Link
JP (1) JP2903079B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101244236B1 (en) * 2005-12-19 2013-03-25 신포니아 테크놀로지 가부시끼가이샤 Parts Supply Apparatus
US20150273525A1 (en) * 2014-04-01 2015-10-01 Stratec Biomedical Ag Shaker
JP2019085259A (en) * 2017-11-09 2019-06-06 有限会社メカノトランスフォーマ Conveyance device, conveyance method, and actuator unit
JP2019085260A (en) * 2017-11-09 2019-06-06 有限会社メカノトランスフォーマ Transport apparatus, transport method, and actuator unit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101244236B1 (en) * 2005-12-19 2013-03-25 신포니아 테크놀로지 가부시끼가이샤 Parts Supply Apparatus
US20150273525A1 (en) * 2014-04-01 2015-10-01 Stratec Biomedical Ag Shaker
US9956590B2 (en) * 2014-04-01 2018-05-01 Stratec Biomedical Ag Shaker
JP2019085259A (en) * 2017-11-09 2019-06-06 有限会社メカノトランスフォーマ Conveyance device, conveyance method, and actuator unit
JP2019085260A (en) * 2017-11-09 2019-06-06 有限会社メカノトランスフォーマ Transport apparatus, transport method, and actuator unit

Also Published As

Publication number Publication date
JP2903079B2 (en) 1999-06-07

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