JPH0726829B2 - Object measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Object of the invention [Industrial field of application] The present invention relates to an object measuring device, and more particularly, to the convergence of light generated by a light projecting device and then reflected by an object to be measured. The present invention relates to an object measuring device that measures the time when an image of a light reflection point is added on each optical sensor of an optical sensor device and calculates the position of the light reflection point from the measurement result.

[Prior Art] Conventionally, as this kind of object measuring device, each light of a light receiving device, that is, an optical sensor device, which is operated in accordance with convergence of light generated by a light projecting device and then reflected by an object to be measured. A counting circuit is provided in common for the sensors, and the counting contents given from the counting circuit when the light reflected by the object to be measured is imaged on each optical sensor is paired for each optical sensor. It has been proposed to calculate the position of the light reflection point on the object to be measured by storing it in a memory device consisting of a register connected to No. 1 (Tanaka et al. "Prototype of high-speed three-dimensional object measuring device" IEICE). Technical Research Report Institute of Electronics, Information and Communication Engineers PRU-87-41 October 1, 1987).

[Problems to be Solved] However, in this type of object measuring device, the number of photosensors is increased (for example, 100 × 100) because the registers of the storage device are connected to each photosensor in a one-to-one correspondence. However, if the number of registers is increased to 10,000, there is a drawback that the number of registers is correspondingly increased to 10,000, for example, and there is a drawback that the mounting area is increased and a mounting cost is increased.

Therefore, in order to solve these drawbacks, the present invention divides a plurality of optical sensors belonging to the optical sensor device into at least one group parallel to the scanning direction of the measurement region by the light projecting device, and On the other hand, by connecting the random access memory on a one-to-one basis and storing the light receiving results of the plurality of optical sensors belonging to the optical sensor device, the mounting area of the storage device and the mounting area of the storage device can be increased without increasing the time required for measuring the object. The object of the present invention is to provide an object measuring device with reduced mounting cost.

(2) Configuration of the Invention [Means for Solving the Problem] The means for solving the problem provided by the present invention is “(a) a light projecting device for generating light for scanning an area to be measured, and (b) The light generated by the light projecting device is reflected by the object to be measured arranged in the measurement area, and the reflected light obtained is converged to form an image of a light reflection point on the object to be measured. An image forming device, and (c) the image forming device is operated by the image of the reflection point formed by the image forming device, and is arranged so as to form at least one group along the scanning direction of the measured region by the light projecting device. A first photosensor device comprising a plurality of photosensors provided, and (d) a second photosensor device which is operated by the light generated by the light projecting device to scan the region to be measured, e) Pair with the second optical sensor device And a reset circuit is connected to the reset circuit, and the counter circuit counts the number of clock pulses applied to the input circuit after being reset by the scanning reference signal generated by the light detection of the second photosensor device. f) Counting content of the counting circuit, which is provided in a one-to-one correspondence with each group of the photosensors belonging to the first photosensor device, when the photosensors belonging to the first photosensor device are operated. At least one random access memory for receiving and storing (b) receiving stored contents from the random access memory, calculating a scanning angle of a reflection point by the light projecting device, and then calculating the reflection angle from the calculated scanning angle. And a data processing device that calculates the position of the object measurement device.

[Operation] The object measuring device according to the present invention operates by the image of the reflection point formed by converging the light generated by the light projecting device and reflected by the measured object in the measured region by the imaging device. Since the storage device arranged one-to-one with respect to the plurality of photosensors belonging to the first photosensor device formed by the random access memory, does not increase the time required for measuring the object, This serves to reduce the mounting area and mounting cost of the storage device.

[Examples] Next, the present invention will be specifically described with reference to the accompanying drawings.

FIG. 1 is a perspective view showing an embodiment of an object measuring device according to the present invention.

2 and 3 are enlarged partial perspective views showing a part of the embodiment of FIG. 1 in an enlarged manner.

FIG. 4 is an enlarged partial circuit diagram showing an enlarged part of the embodiment shown in FIG.

First, regarding one embodiment of the object measuring apparatus according to the present invention,
The configuration will be described in detail. Reference numeral 10 denotes a light projecting device of the object measuring device according to the present invention, which generates light for scanning the measured region, and generates slit light which is one-dimensionally linearly expanded slit light. The device 12 and a direction in which the slit light travels in a direction orthogonal to its extension direction (hereinafter, referred to as "traveling direction") are temporally fixed at a constant rate (that is, a constant angular velocity 2).
It includes a scanning device 14 that scans the measured region while changing it with ω.

The slit light generating device 12 makes an appropriate light source 121 such as a gas laser light source, a semiconductor laser light source, a light emitting diode light source, or a tungsten lamp light source, and the beam light generated by the light source 121 into one-dimensional or linear slit light. It includes a suitable means such as a cylindrical lens 122.

When the light source 121 is a gas laser light source, the generated laser light is beam light, so the cylindrical lens 12
You can just give it to 2. On the other hand, when the light source 121 is a semiconductor laser light source, since the generated laser light is two-dimensionally diffused, that is, the light is converted into a beam light using an appropriate means such as a spherical lens (not shown). After converging, it may be given to the cylindrical lens 122. Further, when the light source 121 is a light emitting diode light source or a tungsten lamp light source, the generated light is not a beam light, so if it is converted into a beam light by an appropriate means, then it is given to the cylindrical lens 122. Good.

The scanning device 14 is, for example, a rotary mirror device including a mirror 141 for reflecting the slit light and a rotary drive device 142 for rotating the mirror 141 at a constant angle ε about a rotation axis parallel to the extension direction of the slit light. It is configured. The scanning device 14 also has a table (not shown) for mounting the slit light generating device 12, if desired.
And a rotation driving device (not shown) for rotating the table at a constant angular velocity 2ω. Reference numeral 20 denotes an object to be measured arranged in a measured area of the object measuring device according to the present invention, and the slit light provided by the light projecting device 10 is emitted. Reference numeral 30 denotes a light receiving device of the object measuring device according to the present invention, which converges the slit light reflected by the measured object 20 , that is, the reflected slit light, to form an image of the measured object 20 , that is, an image of the reflection point P of the slit light. Image forming device for forming an image
31, an image pickup device 32 for picking up an image of the measured object 20 formed by the image forming device 31, that is, an image of the reflection point P of the slit light, and the vicinity of the scanning device 14 included in the light projecting device 10. And a scanning detection device 33 for detecting that the measurement area is being scanned by the slit light.

The imaging device 31 allows for a measured region, that is, a scanning region by slit light, and is formed by a converging lens that converges the reflected slit light.

The image pickup device 32 is appropriately arranged in a matrix for picking up an image of the object 20 to be measured formed by converging the reflected slit light by the image forming device 31, that is, an image of the reflection point P of the slit light. A plurality of optical sensors, such as phototransistors (this case will be mainly described below, but is not intended to be limited thereto) 321 ₁₁ , 321 ₁₂ , ..., 321
₁ n; 321 ₂₁ , 321 ₂₂ , ..., 321 ₂ n; ...; 321 m ₁ , 321 m ₂ , ..., 321 mn comprising a first optical sensor device 321 and a first optical sensor device 3
Phototransistor 321 _11, 321 ₁₂ belonging to _{21, ..., 321 1 n;} 32
1 ₂₁ , 321 ₂₂ , ..., 321 ₂ n; ...; 321 m ₁ , 321m ₂ , ..., 321 mn The plurality of comparison amplification circuits 322 ₁₁ , 322 ₁₂ , ... 322 ₁ n; 322 ₂₁ , 322 ₂₂ , ..., 322 ₂ n; ...; 322
m _1, 322 m _2, ..., a 322Mn, a plurality of comparator amplifier circuit 322 _11, 32
2 ₁₂ , ..., 322 ₁ n; 322 ₂₁ , 322 ₂₂ , ..., 322 ₂ n; 322m ₁ , 322m ₂ , ..., 3
At least one storage device 324 ₁ , 324 ₂ , ..., 324 m connected to the output end of each row of 22 mn in a one-to-one relationship,
A counting circuit 325 having an output terminal connected to the input terminals of the storage devices 324 ₁ , 324 ₂ , ..., 324 m, and a clock for generating a clock pulse CLP having a constant cycle, the output terminal being connected to the input terminal of the counting circuit 325. The pulse generation circuit 326 and the plurality of storage devices 324 ₁ and 32
4 ₂ , ..., 324m each control end has one output end
It includes a decoder circuit 327 which is connected to the pair 1 and generates a designation signal CE.

The storage devices 324 ₁ , 324 ₂ , ..., 324 m all have the same configuration, so the storage device 324 i will be described here (i = 1, 2, ..., M) for convenience. That is, the storage device 324i has a logical sum circuit ORi whose input terminals are connected to the output terminals of the plurality of comparison amplification circuits 322i ₁ , 322i ₂ , ..., 322in in a one-to-one relationship, and an output terminal of the logical sum circuit ORi. A write pulse generating circuit WIPi having an input terminal connected thereto; a random access memory RAMi having a trigger terminal connected to the output terminal of the write pulse generating circuit WIPi and an input terminal connected to the output terminal of the counting circuit 325; , 322in of the comparator / amplifier circuit 322i ₁ , 322i ₂ , ..., 322in, the input end is connected to the output end, and the output end is connected to the address input end of the random access memory RAMi.

The scanning detection device 33 is an optical sensor for detecting slit light that is opposed to the mirror 141 and reflected by the mirror 141, such as a phototransistor (this case will be described below, but is not intended to be limited to this) 331. And a comparison amplifier circuit 322 arranged between the output end of the phototransistor 331 and the reset end of the counting circuit 325 of the image pickup device 32. Reference numeral 40 denotes a data processing device of the object measuring device 10 according to the present invention, which is a storage device 324 ₁ , 324 ₂ , ..., 324 m in the light receiving device 30.
That is, a read signal SEL for selecting and designating memory addresses in the random access memories RAM ₁ , RAM ₂ , ..., RAMm one by one is generated to generate the memory devices 324 ₁ , 324 ₂ ,. Read signal generation circuit 41 for giving to 327
When the storage device 324 _first output terminal and in the light receiving device 30 of the read signal generating circuit 41, 324 _2, ..., are connected to the output terminal of 324m, the storage device 324 _1, 324 _2, ..., 324m ( Specifically, from the storage address of the random access memory RAM ₁ , RAM ₂ , ..., RAMm), the storage content held therein, that is, the image formation data IM
A storage device 42 for receiving and storing G according to the content of the read signal SEL, and imaging data IMG stored in the storage device 42.
From the contents of the above, the reflection point P of the slit light on the measured object 20
And an arithmetic circuit 43 for calculating the position of The data processing device 40 is further connected to an arithmetic circuit 43 as desired, and another storage device for storing the arithmetic result, that is, the position of the reflection point P of the slit light on the measured object 20 .
44 and a display device 45 such as a cathode ray tube connected to another storage device 44 and visually displaying the stored contents.
And a recording device 46 such as a floppy disk which is connected to another storage device 44 for recording the stored contents.

Next, regarding one embodiment of the object measuring device according to the present invention,
The operation will be described in detail.

In order to keep the following explanation concise and fully understood,
First, we introduce a three-dimensional coordinate system.

That is, the center of the imaging device 31 is the origin O, the Z axis is set so as to pass through the imaging device 31, that is, the origin O, and be parallel to the extension direction of the slit light, that is, the rotation axis M of the mirror 141. The X axis is set on the line segment OM connecting O and the rotation axis M of the mirror 141, that is, the base line (its length is a) and orthogonal to the Z axis, and the imaging device 31
That is, the Y axis is taken so as to pass through the origin O and be orthogonal to the X axis and the Z axis. Further, the angle between the slit light and the X axis, that is, the scanning angle is α, and the measured object that reflects the slit light is measured.
The point on 20 or the reflection point P is set as coordinates (X, Y, Z). In addition, the reflected slit light passing through the origin O becomes Y in the XY plane.
The angle formed with the axis is βx, and the angle formed with the Y axis on the YZ plane is βz. The reflected slit light reflected at the reflection point P (X, Y, Z) and passing through the center of the image forming device 31, that is, the origin O, is an imaging surface separated from the image forming device 31 by a distance f, that is, phototransistors 321 ₁₁ , 321. ₁₂ , ..., 321 ₁ n; 321 ₂₁ , 321
_{22, ..., 321 2 n;} ...; 321m 1, 321m 2, ..., a point which is imaged on 321Mn (i.e. the image of the reflection point P) coordinates Q (X, Y, Z) to. Let the projection points of the reflection point P (X, Y, Z) on the X, Y, Z axes be R (X, 0,0), S (0, Y, 0), T (0,0, Z), respectively. To do.

At this time, as is clear from FIG. 1, the relationship of OM = OR + RM holds, so that a = Y tanβx + Y cotα holds, and this can be rearranged to obtain the relationship of Y = a [tanβx + cotα] ⁻¹ . Since tan βx = xf ⁻¹ , it can be expressed as Y = af [x + f cotα] ⁻¹ (1).

Since the relation of OR = OS tan βx is established, the relation of X = Y tan βx can be obtained. Since tan βx = xf ⁻¹ , it can be expressed as X = ax [x + f cotα] ⁻¹ (2).

Similarly, since the relationship of OT = OS tan βz holds, the relationship of Z = Y tan βz can be obtained. Since tan βz = zf ⁻¹ , it can be expressed as Y = az [x + f cotα] ⁻¹ (3).

In addition, the scanning angle α is a = 2ω + α ₀ depending on the angle between the line segment connecting the scanning detection device 33 and the mirror 141 on the XY plane and the X axis, that is, the reference scanning angle αo, the constant angular velocity ω of the mirror 141, and the time t. It can be expressed as (4).

Here time t, from the time or reference time slit light reflected is detected by the scanning detector 33 by the mirror 141 (e.g. "O"), the phototransistor 321 _11,
321 ₁₂ , ..., 321 ₁ n; 321 ₂₁ , 321 ₂₂ , ..., 321 ₂ n; ...; 321 m ₁ , 321
The reflected slit light is imaged by the imaging device 3 for each column of m ₂ , ..., 321 mn.
It is the time required by the time when the image is formed by 1.

Upon measurement of the measurement subject 20, the storage device 324 ₁ included in the first light receiving device 30, 324 _2, ... ,, 324m hence random access memory RAM _1, RAM _2, ..., the memory content of Ramm, suitable means ( It is removed by a not-shown) to have a specific value (for example, “O”).

Slit light is generated by the slit light emitting device 12 of the light projecting device 10 . That is, the light beam generated by the light source 121 is converted into slit light by the cylindrical lens 122. The slit light is applied to the mirror 141 of the scanning device 14. At this time, since the mirror 141 is rotated at a constant angular velocity ω by the rotation driving device 142, the slit light is reflected by the mirror.
After being reflected by 141, it is sent out toward the measured region so that it is scanned at a constant rotation speed, that is, at a constant rotation angular velocity 2ω.

Here, when the slit light reflected by the mirror 14 of the scanning device 14 is detected, the phototransistor 331 of the scanning detection device 33 is made conductive and generates a current I corresponding to the light amount of the slit light. The current I is amplified as desired by a comparison and amplification circuit 332 attached to the phototransistor 331 and compared with a reference value, and then given to the counting circuit 325 of the image pickup device 32 as a scanning reference signal SI.

The counting circuit 325 uses the scanning reference signal SI given from the comparison amplification circuit 332 of the scanning detection device 33 as a reset signal,
When the scanning reference signal SI is given, the counting contents are reset and the counting start time is adjusted, and then the counting of the number of clock pulses CLP given from the clock pulse generating circuit 326 is started again. The counting content of the counting circuit 325 has a minimum value (for example, "0") when it is reset by the reset signal, that is, the scanning reference signal SI, and is incremented by 1 each time the clock pulse CLP arrives.
The counting contents of the counting circuit 325 are stored in the storage devices 324 ₁ and 32, respectively.
4 ₂ , ..., 324m and random access memory RAM ₁ , RAM ₂ ,
…, It is given to the input end of RAMm.

The slit light linearly irradiates the measured object 20 in the measured region. At this time, since the traveling direction of the slit light is changed by the scanning device 14 at a constant angular velocity 2ω, the area of the measured object 20 irradiated with the slit light moves accordingly. Therefore, the position of the reflection point P (X, Y, Z) of the slit light by the measured object 20 is
Is changing.

The slit light reflected by the measured object 20 , that is, the reflected slit light is converged by the image forming device 31 of the light receiving device 30 , and the image pickup surface of the image pickup device 32, that is, the phototransistor 321.
₁₁ , 321 ₁₂ , ..., 321 ₁ n; 321 ₂₁ , 321 ₂₂ , ..., 321 ₂ n; ...; 321 m ₁ , 32
An image is formed on 1 m ₂ , ..., 321 mn. The image forming position Q (x, y, z) of the reflected slit light is determined by scanning the measured region with the slit light, and the phototransistors 321 ₁₁ , 321 ₁₂ , ..., 321 ₁ n; 321
₂₁ , 321 ₂₂ , ..., 321 ₂ n; ...; 321 m ₁ , 321m ₂ , ..., 321 mn are moving in the column direction. When the reflected slit light is imaged, the phototransistors 321 ₁₁ , 321 ₁₂ , ..., 321 ₁ n; 321 ₂₁ , 32
1 ₂₂ , ..., 321 ₂ n; ...; 321 m ₁ , 321 m ₂ , ..., 321 mn are respectively conducted, and currents I ₁₁ , I ₁₂ , ..., I ₁ corresponding to the light quantity of the reflected slit light imaged are formed. n; I ₂₁ , I ₂₂ , ..., I ₂ n; ...; Im ₁ , Im ₂ , ..., Imn
To occur. Current I ₁₁ , I ₁₂ , ..., I ₁ n; I ₂₁ , I ₂₂ , ..., I ₂ n; ...; I
m ₁ , Im ₂ , ..., Imn are the comparison and amplification circuits 322 ₁₁ , 322 ₁₂ ,, respectively.
..., 322 ₁ n; 322 ₂₁ , 322 ₂₂ , ..., 322 ₂ n; ...; 322 m ₁ , 322m ₂ , 322mn
After being compared with the amplified and the reference value as desired by the trigger signal _{SI 11, SI 12, ...,} SI 1 n; SI 21, SI 22, ..., SI 2
n; ...; SIm ₁ , SIm ₂ , ..., SImn as storage devices 324 ₁ , 3
24 ₂ , ..., given to 324 m.

The storage devices 324 ₁ , 324 ₂ , ..., 324 m are provided with trigger signals SI ₁₁ , SI ₁₂ ,
, SI ₁ n; SI ₂₁ , SI ₂₂ , ..., SI ₂ n; ...; SIm ₁ , SIm ₂ , ..., SImn, the substantially same operation is performed. Therefore, for convenience, the storage device 324i will be described here (i
= 1,2, ..., m). In the memory device 324i, the trigger signals SIi ₁ , SIi
Each time ₂ , ..., SIin becomes high level, the OR circuit ORi outputs a high level signal and supplies it to the write pulse generation circuit WIPi. The write pulse generation circuit WIPi generates a pulse of a predetermined width with a delay of a predetermined time from the arrival of the high level signal every time a high level signal is given from the logic circuit ORi,
It is given as a trigger signal to the trigger end of the random access memory RAMi. At this time, the encoder circuit ENCi generates a predetermined address signal in response to the arrival of the trigger signals SIi ₁ , SIi ₂ , ..., SIin and supplies it to the address input terminal of the random access memory RAMi.
Is the storage address corresponding to the trigger signals SIi ₁ , SIi ₂ , ..., SIin and by extension the phototransistors 321i ₁ , 321i ₂ ,.
The counting content CON given from the counting circuit 325 is stored and held. At this time, the storage contents of the storage devices 324 ₁ , 324 ₂ , ..., 324m, and finally the random access memories RAM ₁ , RAM ₂ , ..., RAMm are stored in the phototransistors 321 ₁₁ , 321 ₁₂ , ..., 321 ₁ n; 321 ₂₁ , 321
₂₂ ,…, 321 ₂ n;…; 321 m ₁ , 321m ₂ ,…, 321 mn corresponding to time t
₁₁ , t ₁₂ , ..., t ₁ n; t ₂₁ , t ₂₂ , ..., t ₂ n; ...; tm ₁ , tm ₂ , ..., tmn.

The data processing device 40 receives the read signal from the read signal generation circuit 41.
The SEL is generated, and the decoder circuit 327 and the storage devices 324 ₁ , 324 ₂ , ..., 324 m in the light receiving device 30 and by extension the random access memory R
It is given to AM ₁ , RAM ₂ , ..., RAMm. Read signal SEL provided to the decoder circuit 327, designating signal CE and to the storage device 324 _1, 324 ₂ in the decoder circuit 237, ..., 324m and thus a random access memory RAM _1, RAM _2, ..., it is given in RAMm , memory device 324 ₁ according to the content, 324 _2, ..., 324m and thus a random access memory RAM _1, RAM _2, ..., it is specified Ramm. The storage device _{324 1, 324 2, ...,} 324m and thus a random access memory RAM _1, RAM _2, ..., read signal SEL given directly to RAMm a random access memory RAM ₁ in accordance with the contents, RAM ₂ , ..., The storage address in RAMm is specified. Storage device 324 according to designation of read signal SEL
_1, 324 _2, ..., 324m and hence random access memory RAM _1, R
AM _2, ..., RAMm, the stored contents that is, the time t _11, t _12, ...,
t ₁ n; t ₂₁ ,, t ₂₂ , ..., t ₂ n; ...; tm ₁ , tm ₂ , ..., tmn are imaged data IM
The data is sequentially output as G to the storage device 42 of the data processing device 40 .

The storage device 42 stores the image formation data IM supplied from the light receiving device 30.
G, that is, memory contents t ₁₁ , t ₁₂ , ..., t ₁ n; t ₂₁ , t ₂₂ , ..., t ₂ n; ...;
Stores and holds tm ₁ , tm ₂ , ..., tmn. The imaging data IMG stored in the storage device 42 is given to the arithmetic circuit 43,
Therefore, it is used for calculating the position (X, Y, Z) of the reflection point P of the slit light on the measured object 20 .

That arithmetic circuit 43, phototransistor 321 _11, 321 _12,
…, 321 ₁ n; 321 ₂₁ , 321 ₂₂ ,…, 321 ₂ n;…; 321 m ₁ , 321m ₂ ,…, 32
For 1 mn, α ₁₁ = 2ωt ₁₁ + α ₀ α ₁₂ = 2ωt ₁₂ + α ₀ ··· α ₁ n = 2ωt ₁ n + α ₀ α ₂₁ = 2ωt ₂₁ + α ₀ α ₂₂ = 2ωt ₂₂ + α ₀ · · · alpha as _{2 n = 2ωt 2 n + α} 0 · · · αm 1 = 2ωtm 1 + α 0 αm 2 = 2ωtm 2 + α 0 · · · αmn = 2ωtmn + α 0, and calculates the scan angle alpha. This scan α, that is, α ₁₁ , α ₁₂ , ..., α ₁ n; α ₂₁ , α ₂₂ , ..., α ₂ n; ...; αm ₁ , αm
By substituting ₂ , ..., .alpha.mn into the above equations (1) to (3), the phototransistors 321 ₁₁ , 321 ₁₂ , ..., 321 ₁ n; 321 ₂₁ , 32
1 ₂₂ , ..., 321 ₂ n; ...; 321 m ₁ , 321m ₂ , ..., 321 mn is the position (X, Y, Z) of the reflection point P, that is, the reflection point P ₁₁ , P ₁₂ , ..., P ₁ n;
P ₂₁ , P ₂₂ , ..., P ₂ n; ...; Pm ₁ , Pm ₂ , ..., Pmn position (X ₁₁ , Y ₁₁ , Z
₁₁ ) (X ₁₂ , Y ₁₂ , Z ₁₂ ),…, (X ₁ n, Y ₁ n, Z ₁ n) (X ₂₁ , Y ₂₁ ,
_{Z 21), (X 22,} Y 22, Z 22), ..., (X 2 n, Y 2 n, Z 2 n); ...;
(Xm ₁ , Ym ₁ , Zm ₁ ), (Xm ₂ , Ym ₂ , Zm ₂ ),…, (Xmn, Ymn, Zm
n) is calculated.

The calculation result of the calculation circuit 43, that is, the calculation result of the position (X, Y, Z) of the reflection point P of the slit light in the measured object 20 is given to another storage device 44 and stored and held. The contents stored in the storage device 44 are displayed visually on the display device 45 and recorded by the recording device 46, if desired.

In the above description, the measurement region is scanned in parallel along the row direction of the photosensors belonging to the first photosensor device 32, but the present invention is not limited to this, and the first photosensor device is not limited to this.
This also covers the case where the measurement area is scanned in parallel along the column direction of the photosensors belonging to the photosensor device. Whether to scan the measured region along the row direction or the column direction of the photosensors belonging to the first optical sensor device 32 is determined in relation to the scanning direction of the measured region by the light projecting device. However, since the configuration and operation in the case of scanning along the column direction are almost clear from the above description of scanning along the row direction, detailed description thereof will be omitted.

Further, in the above description, the case where the imaging device 32 is formed by a plurality of photosensors arranged in a matrix has been mainly described, but the present invention is not limited to this, and a desired shape (for example, a curved shape). ), The case where a plurality of optical sensors are arranged to form an image pickup device is also included.

Further, although the light projecting device 10 generates slit light, the present invention is not limited to this, and for example, when it is desired to secure the intensity of light generated by the light projecting device, the light projecting device 10 projects light. It also includes the case where the device produces a beam of light. In this case, the optical sensors of the image pickup device may be arranged in one row.

Furthermore, in the above description, the memory device 324i is the write pulse generation circuit.
Although described as having a WIPi, the invention is not so limited and encoder circuit EN
OR circuit within the period when the address signal is given to the address input terminal of random access memory RAMi via Ci
When the signal output from ORi becomes high level, it can be used as it is as a trigger signal of random access memory RAMi. Therefore, write pulse generating circuit WIPi is removed and the output end of OR circuit ORi is changed to random access memory RAMi. May be directly connected to the trigger end of (i = 1,2, ...,
m).

In addition, although the image pickup device 32 includes the decoder circuit 327, the present invention is not limited to this, and the decoder circuit 327 may be removed and the storage devices 324 ₁ , 324 ₂ ,. Access memories RAM ₁ , RAM ₂ , ..., RAMm and the storage device 42 of the data processing device 40 may be formed in common by a single storage device.

(3) Effects of the Invention As is clear from the above, the object measuring device according to the present invention comprises: (a) a light projecting device for generating light for scanning the measurement region; and (b) generation by the light projecting device. An imaging device that converges the reflected light obtained by the reflected light being reflected by the measured object arranged in the measured region to form an image of the reflection point of the light on the measured object; c) A plurality of lights which are operated by the image of the reflection points formed by the image forming device and which are arranged so as to form at least one group along the scanning direction of the measured region by the light projecting device. A first optical sensor device including a sensor; (d) a second optical sensor device which is operated by the light generated by the light projecting device to scan the measured region; and (e) the second optical sensor device. Reset for optical sensor device And a counting circuit for counting the number of clock pulses applied to the input end after being reset by the scanning reference signal generated by the light detection of the second photosensor device, and (f) the One photosensor device is provided for each group of photosensors belonging to one photosensor device, and when the photosensors belonging to the first photosensor device are operated, the count content of the counting circuit is input. At least one random access memory to be stored; (g) receiving stored contents from the random access memory, calculating a scanning angle of a reflection point by the light projecting device, and then determining a position of the reflection point from the calculated scanning angle. Since it is provided with a data processing device for calculating, (i) it is possible to reduce the mounting area of the storage device without increasing the time required for measuring the object. In addition, (ii) it has an effect of reducing the mounting cost of the storage device without increasing the time required for measuring the object.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of an object measuring apparatus according to the present invention, and FIGS. 2 and 3 are enlarged partial circuit diagrams showing an enlarged part of the embodiment shown in FIG. 1, and FIG. FIG. 3 is an enlarged partial circuit diagram showing an enlarged part of the embodiment shown in FIG. 10 …… Projector 12 …… Slit light generator 121 …… Light source 122 …… Cylindrical lens 14 …… Scanning device 141 …… Mirror 142 …… Rotation drive device 20 …… Measured object 30 …… Light receiving device 31 …… Image forming device 32 Imaging device 321 _{11 to} 321mn Photo transistor 322 _{11 to} 322mn Comparison amplification circuit 324 _{1 to} 324m Storage device 325 Count circuit 326 Clock pulse generation circuit 327 Decoder Circuit 33 …… Scan detection device 331 …… Phototransistor 332 …… Comparison amplification circuit 40 …… Data processing device 41 …… Read signal generation circuit 42 …… Storage device 43 …… Arithmetic circuit 44 …… Storage device 45 …… Display Device 46 …… Recording device ENCi …… Encoder circuit ORi …… OR circuit RAMi …… Random access memory WIPi …… Write pulse generation circuit

Claims (9)

[Claims] 1. (a) A light projecting device for generating light for scanning a measurement region, and (b) Light generated by the light projecting device is reflected by a measurement object arranged in the measurement region. An imaging device for converging the reflected light obtained by the above to form an image of the reflection point of the light on the object to be measured; and (c) an image of the reflection point formed by the imaging device. A first optical sensor device which is made to operate and is arranged so as to form at least one group along a scanning direction of a measured region by the light projecting device; and (d) the projecting device. A second optical sensor device which is operated by light generated for scanning the measurement area by the optical device; and (e) a reset end is connected to the second optical sensor device, and By the light detection of the optical sensor device 2 A counting circuit for counting the number of clock pulses applied to the input terminal after being reset by the generated scanning reference signal, and (f) 1: 1 for each group of photosensors belonging to the first photosensor device And (g) the random access memory, which is attached to the first optical sensor device and which stores and stores the count content of the counting circuit when the photosensor belonging to the first photosensor device is operated. And a data processing device for calculating the scanning angle of the reflection point by the light projecting device and calculating the position of the reflection point from the calculated scanning angle. . 2. The object measuring device according to claim 1, wherein the light generated by the light projecting device is a light beam. 3. The object measuring device according to claim 1, wherein the light generated by the light projecting device is slit light. 4. A light projecting device includes a slit light generating device for generating slit light, and a scanning device for scanning the measured region by changing the traveling direction of the slit light at a constant speed. The object measuring device according to claim (3). 5. A scanning device comprising a mirror for reflecting the slit light generated by the slit light generating device and a rotating device for rotating the mirror. The object measuring device according to the item (4). 6. A slit light generator is formed by a gas laser light source and a cylindrical lens for generating slit light from the laser light generated by the gas laser light source. The object measuring device according to item (4) or (5). 7. A slit light generating device, a semiconductor laser light source, a spherical lens for converging laser light generated by the semiconductor laser light source to generate beam light, and slit light from the light beam. The object measuring device according to claim (4) or (5), characterized in that it is formed by a cylindrical lens for 8. The first and second photosensor devices are formed of phototransistors, and the photosensor device according to any one of claims (1) to (7). Object measuring device. 9. (h) An input terminal is provided for each output group of a plurality of photosensors provided in a one-to-one correspondence with each group of photosensors belonging to the first photosensor device. 1 to
And at least one logic circuit whose output end is connected to the trigger end of the random access memory, and (i) one to one for each group of photosensors belonging to the first photosensor device. At least one encoder circuit attached to the output terminals of a plurality of photosensors belonging to the corresponding group, and the output terminal thereof connected to the address input terminal of the random access memory The object measuring device according to any one of claims (1) to (8).