JPH073328B2 - Object measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Object of the invention [Industrial field of application] The present invention relates to an object measuring device, and more particularly, to the convergence of light generated by a light projecting device and then reflected by an object to be measured. The present invention relates to an object measuring device that measures the time when an image of a light reflection point is formed on each optical sensor of an optical sensor device and calculates the position of the light reflection point from the measurement result.

[Prior Art] Conventionally, as an object measuring device of this type, for each optical sensor of an optical sensor device that is operated in accordance with the convergence of light that is generated by a light projecting device and then reflected by an object to be measured. A "single" counting circuit is provided in common, and when the light reflected by the object to be measured is imaged on each optical sensor, the count content of the "single" counting circuit is set for each optical sensor. It was proposed that the position of the light reflection point of the object to be measured be stored in the storage device attached to the storage device and calculated from the stored contents of the storage device (Tanaka et al. "Prototype of high-speed three-dimensional object measurement device").
IEICE Technical Report Japan Institute of Electronics, Information and Communication Engineers PRU-87-41 October 1, 1987).

[Problems to be Solved] However, in the conventional object measuring device, since the "single" counting circuit is used, (i) the counting speed of the counting circuit is increased to increase the time resolution to be measured. In order to measure the position of the light reversal point in the object with high accuracy, there is a drawback that the number of bits of the counting circuit and the storage device attached to each optical sensor must be increased, and (ii) the blind spot If the distance between the light projecting device and the optical sensor is reduced to reduce the number, that is, the base line length, there is a drawback that the resolution is deteriorated unless the number of bits of the counting circuit and the storage device is increased.

Therefore, in order to eliminate these drawbacks, the present invention achieves highly accurate object measurement while avoiding an increase in the number of bits of the counting circuit and the storage device, and reduces blind spots while avoiding a decrease in resolution. The object of the present invention is to provide an object measuring device.

(2) Configuration of the Invention [Means for Solving Problems] Means for solving the problems provided by the present invention are described in “(a)
A light projecting device for generating light for scanning the measurement region, and (b) reflection obtained by reflecting the light generated by the light projecting device by a measurement object arranged in the measurement region. An image forming device for converging light to form an image of a light reflection point on the object to be measured; and (c) a plurality of columns that are operated by the image of the reflection point formed by the image forming device. Alternatively, a first photosensor device including a plurality of photosensors arranged in rows, and (d) a second photosensor device which is operated by the light generated by the light projecting device to scan the measured region. And (e) a scanning signal generated by light detection of the second photosensor device, which is provided for each column or row of photosensors belonging to the first photosensor device. The first optical sensor device A plurality of delay circuits for delaying the columns or rows of the photosensors belonging to the first photosensor device, respectively, and (f) being arranged for the columns or the rows of the photosensors belonging to the first photosensor device, respectively. Reset terminals are respectively connected to the delay circuits, and a plurality of counting circuits for counting the number of clock pulses applied to the input terminals after resetting, (g) light belonging to the first photosensor device A plurality of storage devices that are attached to the sensors in a one-to-one relationship and that store the count content input from the counting circuit when the photosensors belonging to the first photosensor device are operated; h) a data processing device that receives the stored contents of the storage device, calculates the scanning angle of the reflection point by the light projecting device, and calculates the device of the reflection point from the calculated scanning angle. It is an object measuring device characterized by that.

Further, another means for solving the problems provided by the present invention is, “(a) a light projecting device for generating light for scanning a measured region, and (b) light generated by the light projecting device. An imaging device that converges the reflected light obtained by being reflected by the object to be measured arranged in the area to be measured to form an image of a reflection point of light on the object to be measured; A first optical sensor device, which is operated by an image of a reflection point formed by an image device and comprises a plurality of optical sensors arranged in a plurality of columns or rows, and (d) the light projecting device A second photosensor device that is operated by light generated to scan the measurement area at, and (e) a plurality of columns or rows of photosensors belonging to the first photosensor device that are close to each other. For columns or rows Common is disposed in said second optical sensor device of the first scan signal generated by the light sensing
A plurality of delay circuits for delaying the columns or rows of the photosensors belonging to the photosensor device of (1), and (f) the columns or rows of the photosensors belonging to the first photosensor device being close to each other. A plurality of counting circuits arranged in common for a plurality of columns or rows and having reset terminals respectively connected to the delay circuits and for counting the number of clock pulses applied to the input terminals after resetting. (G) One-to-one is attached to the photosensors belonging to the first photosensor device, and is input from the counting circuit when the photosensors belonging to the first photosensor device are operated. A plurality of storage devices for storing the counted contents, and (h) receiving the storage contents of the storage device, calculating the scanning angle of the reflection point by the light projecting device, and calculating the scanning angle. It is an object measuring device ", characterized in comprising a data processing unit for calculating a device of the reflection point.

[Operation] The object measuring device according to the present invention is operated by the image of the reflection point formed by converging the light generated by the light projecting device and reflected by the measured object by the imaging device. One optical sensor device is formed by dividing a plurality of optical sensors into a plurality of columns or rows and arranging the plurality of optical sensors by a plurality of delay circuits respectively provided for the plurality of columns or rows of the optical sensors. The counting start times of a plurality of counting devices corresponding to the plurality of delay circuits on a one-to-one basis are respectively adjusted, and by extension, the number of bits of the storage device attached to the counting device and its plurality of optical sensors is increased one-to-one. This has the effect of achieving high-accuracy object measurement without doing so, and also has the effect of reducing blind spots while avoiding a reduction in resolution.

An object measuring device according to the present invention is a first optical sensor which is operated by an image of a reflection point formed by focusing light generated by a light projecting device and reflected by an object to be measured by an imaging device. The device is formed by dividing and arranging a plurality of optical sensors into a plurality of columns or rows, and is commonly arranged for a plurality of columns or rows close to each other among the plurality of columns or rows of the optical sensors. To each of the plurality of delay circuits by the generated plurality of delay circuits
The counting start times of a plurality of corresponding counting devices are adjusted respectively, and by extension, high-accuracy object measurement is possible without enlarging the number of bits of the counting device and the storage device attached to the plurality of optical sensors on a one-to-one basis. To achieve
It also has the function of reducing the blind spots while avoiding resolution, and at the same time, the function of reducing the total number of delay circuits and counting circuits.

[Examples] Next, the present invention will be specifically described with reference to the accompanying drawings.

FIG. 1 is a perspective view showing an embodiment of an object measuring device according to the present invention.

FIG. 2 is an enlarged partial perspective view showing an enlarged part of the embodiment shown in FIG.

FIG. 3 is an enlarged circuit diagram showing an enlarged part of the embodiment shown in FIG.

First, regarding one embodiment of the object measuring apparatus according to the present invention,
The configuration will be described in detail. Reference numeral 10 denotes a light projecting device of the object measuring device according to the present invention, which generates light for scanning the measured region, and generates slit light which is one-dimensionally linearly expanded slit light. It includes a device 12 and a scanning device 14 for scanning the measurement area while changing the traveling direction of the slit light in a direction orthogonal to its extension direction at a constant rate (that is, at a constant angular velocity 2ω). is doing.

The slit light generating device 12 makes an appropriate light source 121 such as a gas laser light source, a semiconductor laser light source, a light emitting diode light source, or a tungsten lamp light source, and the beam light generated by the light source 121 into one-dimensional or linear slit light. It includes a cylindrical lens 122.

When the light source 121 is a gas laser light source, the generated laser light is beam light, so the cylindrical lens 12
You can just give it to 2. On the other hand, when the light source 121 is a semiconductor laser light source, the generated laser light is two-dimensionally diffused, that is, the light is diffused in a two-dimensional form, and therefore, after being converged into a light beam using a spherical lens (not shown). , It may be given to the cylindrical lens 122. Also light source 121
When the light source is a light emitting diode light source, a tungsten lamp light source, or the like, the light generated by the light source is not a light beam.

The scanning device 14 is, for example, a rotary mirror device including a mirror 141 for reflecting the slit light and a rotary drive device 142 for rotating the mirror 141 at a constant angular velocity ω about a rotation axis parallel to the extension direction of the slit light. It is configured. The scanning device 14 also has a table (not shown) for mounting the slit light generating device 12, if desired.
And a rotation driving device (not shown) for rotating the table at a constant angular velocity 2ω. Reference numeral 20 denotes an object to be measured arranged in a measured area of the object measuring device according to the present invention, and the slit light provided by the light projecting device 10 is emitted. Reference numeral 30 denotes a light receiving device of the object measuring device according to the present invention, which converges the slit light reflected by the measured object 20 , that is, the reflected slit light, to form an image of the measured object 20 , that is, an image of the reflection point P of the slit light. Image forming device for forming an image
31, an image pickup device 32 for picking up an image of the measured object 20 formed by the image forming device 31, that is, an image of the reflection point P of the slit light, and the vicinity of the scanning device 14 included in the light projecting device 10. And a scanning detection device 33 for detecting that the measurement area is being scanned by the slit light.

The imaging device 31 allows for a measured region, that is, a scanning region by slit light, and is formed by a converging lens that converges the reflected slit light.

The imaging device 32 is appropriately divided into, for example, a plurality of columns in order to capture the image of the object 20 to be measured formed by converging the reflected slit light by the imaging device 31, that is, the image of the reflection point P of the slit light. A plurality of photosensors, such as phototransistors (hereinafter mainly described in this case) 32, which are arranged (for example, arranged in a matrix).
1 ₁₁ , 321 ₁₂ , ・_{・ ・} , 321 _1n ； 32 ₂₁ , _{・ ・ ・} , 321 _{22 ・ ・ ・} , 32
_{1 2n; ...; 321 m1,} 321 m2, ..., the first and the optical sensor device consisting of 321 _mn, more phototransistor 321 ₁₁ belonging to the first optical sensor _{device, 321 12, ..., 321 1n} ; 321 21 ,,, 32
1 ₂₂ , ..., 32 _{1 2n} ; ...; 321 _m1 , 321 _m2 , ..., 321 _mn output terminals of the plurality of comparison and amplification circuits 322 ₁₁ , 322 ₁₂ , ..., 322 _1n ; 322 ₂₁ , 322 ₂₂ , ・ ・ ・, 322
_2n ; ...; 322 _m1 , 322 _m2 , ..., 322 _mn, and a plurality of comparison and amplification circuits 322 ₁₁ , 322 ₁₂ , ..., 322 _1n ; 322 ₂₁ , 322 ₂₂ ,.
_{2n; ...; 322 m1, 322} m2, ..., comparator amplifier circuit 322 _11, 322 ₁₂ relative to the trigger end trigger single is connected to respective one-to-one to the output terminal of the 322 _mn, ..., 322 _1n 322 ₂₁ , 32
2 ₂₂ , ..., 322 _2n ; ...; 322 _m1 , 322 _m2 , ..., 322 _mn A plurality of memories for storing and holding the contents of the input signal given to the input end when the trigger signal is given Device 32
3 ₁₁ , 323 ₁₂ ,…, 323 _1n ; 323 ₂₁ , 323 ₂₂ ,…, 323 _2n ;
...; 323 _m1 , 323 _m2 , ..., 323 _mn, and a plurality of storage devices 32
3 ₁₁ , 323 ₁₂ ,…, 323 _1n ; 323 ₂₁ , 323 ₂₂ ,…, 323 _2n ;
_{...; 323 m1, 323 m2,} ..., 323 mn counting a plurality of output terminals to the input end is connected to a one-to-one each column as a group each of circuits 324 _1, 324 _2, ..., and 324 _n, Multiple counting circuits 32
4 _1, 324 _2, ..., 324 _n plurality of delay output relative to the reset terminal is connected to respective one-to-one circuit 325 _1, 325 _2,
, 325 _n , a plurality of counting circuits 324 ₁ , 324 ₂ , ..., 324 _n having output terminals connected to the input terminals and generating a clock pulse of a constant cycle, and a plurality of clock pulse generating circuits 326. Storage devices 323 ₁₁ , 323 ₁₂ , ..., 323 _1n ; 323 ₂₁ , 32
3 ₂₂ , ..., 323 _2n ; ...; 323 _m1 , 323 _m2 , ..., 323 _mn are connected to the output ends in a one-to-one correspondence (illustrated as a single line as appropriate) ) Decoder circuit 32
It includes 7 and. Here, the imaging device 32 is the first
Phototransistors of the optical sensor device of 321 ₁₁ , 321 ₁₂ , ・ ・ ・, 32
_{1 1n; 321 21, ...,} 321 22, ..., 321 2n; ...; 321 m1, 32
Multiple counting circuits 32 corresponding to multiple rows of 1 _m2 , ..., 321 _mn
4 ₁ , 324 ₂ , ..., 324 _n and a plurality of delay circuits 325 ₁ , 325 ₂ , ...,
325 _n is included because the minimum time from when the second photosensor device detects light to when the first photosensor device detects reflected slit light is Phototransistors 321 ₁₁ , 321 ₁₂ , ・_{・ ・} , 321 _1n ； 321 ₂₁ , _{・ ・ ・} , 32
_{1 22, ..., 321 2n;} ...; 321 m1, 321 m2, ..., since different for each one of the 321 _mn, counting circuit 324 ₁ for each row of the first optical sensor device, 324 _2, ..., 324 _The counting circuits 324 ₁ , 324 ₂ , ..., 324 _n are not operated while the counting start times of _n are made different so that there is no possibility of detecting reflected slit light, and each counting circuit 324 ₁ , 324 ₂ ,. , 324 _n to shorten the operating time.

The scanning detection device 33 is a second optical sensor device which is opposed to the mirror 141 and includes an optical sensor for detecting slit light reflected by the mirror 141, for example, an optical transistor (which will be described below) 331. When,
The output terminal of the phototransistor 331 and the delay circuit 325 of the imaging device 32
₁ , 325 ₂ , ..., 325 _n , and a comparison amplifier circuit 332 arranged between the input terminals. Reference numeral 40 denotes a data processing device of the object measuring device according to the present invention, which includes a plurality of storage devices 323 ₁₁ , 323 ₁₂ , in the light receiving device 30 .
…, 323 _1n ; 323 ₂₁ , 323 ₂₂ , _{・ ・ ・} , 323 _2n ;…; 323 _m1 , 323
A read signal generation circuit 41 for generating a read signal SEL for selecting and designating storage devices one by one from among _m2 , ..., 323 _{mn and supplying} the read signal SEL to the decoder circuit 327 in the light receiving device 30.
And storage devices 323 ₁₁ , 323 ₁₂ , ..., 323 _1n ; 323 ₂₁ , 323 ₂₂ , in the output end of the read signal generation circuit 41 and the light receiving device 30 .
..., 323 _2n ; ...; 323 _m1 , 323 _m2 , ..., 323 _mn are connected to the output terminals of the storage devices 323 ₁₁ , 323 ₁₂ , ..., 32
3 _1n ; 323 ₂₁ , 323 ₂₂ , ..., 323 _2n ; ...; 323 _m1 , 323 _m2 ,
From the contents of the image formation data IMG stored in the storage device 42, a storage device 42 for receiving and storing the stored contents, that is, the image formation data IMG stored therein from the 323 _mn in accordance with the contents of the read signal SEL. The calculation circuit 43 calculates the position of the reflection point P of the slit light on the measured object 20 . The data processing device 40 further includes an arithmetic circuit 43 if desired.
Connected to the other storage device 44 for storing the calculation result, that is, the position of the reflection point P of the slit light in the measured object 20, and the other storage device 44 so that the stored contents can be visually confirmed. It includes a display device 45 such as a cathode ray tube for displaying on a display, and a storage device 46 such as a floppy disk connected to another storage device 44 for storing the stored contents.

Next, regarding one embodiment of the object measuring device according to the present invention,
The operation will be described in detail.

In order to keep the following explanation concise and fully understood,
First, we introduce a three-dimensional coordinate system.

That is, the center of the imaging device 31 is the origin O, the Z axis is set so as to pass through the imaging device 31, that is, the origin O, and is parallel to the rotation axis of the mirror 141.
141 is on a line segment OM connecting to the rotary bearing M, that is, a base line (its length is a), and the X axis is taken so as to be orthogonal to the Z axis, and it passes through the imaging device 31, that is, the origin O and X The Y axis is taken so as to be orthogonal to the axis and the Z axis. Further, the angle formed by the slit light and the X axis, that is, the scanning angle is α, and the point on the measured object that reflects the slit light, that is, the reflection point P is the coordinate (X, Y, Z). In addition, the angle of the reflected slit light passing through the origin O with the Y axis on the XY plane is β _x, and the angle with the Y axis on the YZ plane is β _z . Reflection point P (X, Y,
Z), the center of the imaging device 31, ie the origin O
The reflected slit light that has passed through the imaging device 31 is separated from the imaging device 31 by a distance f, that is, the imaging surface, that is, the phototransistors 321 ₁₁ and 321.
_{12, ..., 321 1n; 321} 21, 321 22, ..., 321 2n; ...; 32
Let the coordinates of the point Q (that is, the image of the reflection point P) Q imaged on 1 _m1 , 321 _m2 , ..., 321 _{mn be} (x, y, z). Reflection point P
The projection points of (X, Y, Z) on the X, Y, Z axes are R, S, T, respectively.
And the position of the rotation axis of the mirror 141 on the X axis is M.

At this time, as is clear from FIG. 1, the relationship of OM = OR + RM holds, so that a = Ytanβ _x + Ycotα holds, and this can be rearranged to obtain the relationship of Y = a [tanβ _x + cotα] ⁻¹ . Here, since tan β _x = Xf ⁻¹ , it can be expressed as Y = af [x + fcotα] ⁻¹ (1).

Further, since the relation of OR = OStanβ _x is established, the relation of X = Ytanβ _x can be obtained. Since tan β _x = xf ⁻¹ , it can be expressed as X = ax [x + fcotα] ⁻¹ (2).

The relation of OT = OStanβ _z is satisfied likewise be obtained relation Z = Ytanβ _z. Since tan β _z = z ⁻¹ , it can be expressed as Z = az [x + fconα] ⁻¹ (3).

In addition, the scanning angle α depends on the angle formed by the line segment connecting the scanning detection device 33 and the mirror 141 on the XY plane and the X axis, that is, the reference scanning angle α _O , the constant angular velocity ω of the mirror 141, and the times t, t ^* . It can be expressed as α = 2ω (t + t ^* ) + α _O (4).

Here, the time ^* is from the time when the slit light reflected by the mirror 141 is detected by the scanning detection device 33, that is, the reference time (for example, “0”), to the phototransistors 321 ₁₁ and 321.
_{12, ..., 321 1n; 321} 21, 321 22, ..., 321 2n; ...; 32
The minimum time required until the time when the reflected slit light is imaged by the imaging device 31 for each column of 1 _m1 , 321 _m2 , ..., 321 _mn , and the phototransistors 321 ₁₁ , 321 ₁₂ ,. 32
_{1 1n; 321 21, 321 22} , ..., 321 2n; ...; 321 m1, 321 m2,
Of the reflection points in the measured region imaged for each column of 321 _mn , the one corresponding to the one closest to the imaging device 31, that is, the origin O (that is, the "reference reflection point"), Transistors 321 ₁₁ , 321 ₁₂ ,…, 321 _1n ； 321 ₂₁ , 32
1 ₂₂ , ^{・ ・ ・} , 321 _2n ； ^{・ ・ ・} ； 321 _m1 , 321 _m2 , ^{・ ・ ・} , 321 _mn Delay circuit 325 ₁ , 325 ₂ ,…, 325 _n delay time t ^* ₁ , t ^* ₂ ,
…, T ^* _n . The time t, phototransistor _{321 11, 321 12, ...,} 321 1n; 321 21, 321 22, ..., 32
1 _2n ; ...; 321 _m1 , 321 _m2 , ..., 321 _mn The time corresponding to the distance between the reflection point of the reflection slit light and the reference reflection point imaged for each row of 321 _mn , and the reflection slit It is said to be "0" when the light is reflected at the reference reflection point.

When measuring the measured object, first, a plurality of storage devices 323 ₁₁ , 323 ₁₂ , ..., 323 _1n ; 323 ₂₁ , 323 included in the light receiving device 30.
_{22, ..., 323 2n; ...} ; 323 m1, 323 m2, ..., the stored contents of 323 _mn is removed.

The slit light is generated by the slit light generator 12 of the light projecting device 10 . That is, the light beam generated by the light source 121 is converted into slit light by the cylindrical lens 122.
The slit light is applied to the mirror 141 of the scanning device 14. At this time, since the mirror 141 is rotated at a constant angular velocity ω by the rotation driving device 142, the slit light is reflected by the mirror.
After being reflected by 141, it is sent so as to scan toward the measured region at a constant rotation speed, that is, at a constant rotation angular velocity 2ω.

The slit light linearly irradiates the measured object 20 in the measured region. At this time, since the traveling direction of the slit light is changed by the scanning device 14 at a constant angular velocity 2ω, the area of the measured object 20 irradiated with the slit light moves accordingly. Therefore, the measured object
The position of the reflection point P (X, Y, Z) of the slit light by 20 changes.

The slit light reflected by the measured object 20 , that is, the reflected slit light is converged by the image forming device 31 of the light receiving device 30 , and the image pickup surface of the image pickup device 32, that is, the plurality of phototransistors 321 ₁₁ , 321 ₁₂ , ..., 321 _1n ; 321, ₂₁ , 321, ₂₂ ... 32
_{1 2n; ...; 321 m1,} 321 m2, ..., are imaged on 321 _mn. Reflected slit light imaging position Q (x, y, z) has a plurality of phototransistor 321 _11, 321 ₁₂ in accordance with the scanning of the measurement area by the slit _{light, ..., 321 1n; 321 21} , 321 22, ... 321
_2n ; ...; 321 _m1 , 321 _m2 , ..., 321 _mn , for example, are gradually moving in the column direction. When the reflected slit light is imaged,
Phototransistors 321 ₁₁ , 321 ₁₂ ,…, 321 _1n ； 321 ₂₁ , 321
₂₂ , ..., 32 1 _2n ; ...; 321 _m1 , 321 _m2 , ..., 321 _mn are respectively conducted, and currents I ₁₁ , I ₁₂ , ..., I _1n according to the light amount of the imaged reflected slit light are formed. I ₂₁ , I ₂₂ , ..., I _2n , ...;
Generates I _m1 , I _m2 , ..., I _mn . Current I ₁₁ , I ₁₂ , ...,
I _1n ; I ₂₁ , I ₂₂ , ..., I _2n , ...; I _m1 , I _m2 , ..., I _mn are
Phototransistors 321 ₁₁ , 321 ₁₂ ,…, 321 _1n ； 321
₂₁ , 321, _{22 22} ,…, 32 1 _2n ;…; 321 _m1 , 321 _m2 ,…, 321 _mn
The comparison and amplification circuits 322 ₁₁ and 32 attached one-to-one with respect to
32 ₁₂ , ..., 322 _1n ; 322 ₂₁ , 322 ₂₂ , ..., 322 _2n ; ...; 32
After being amplified by 2 _m1 , 322 _m2 , ..., 322 _mn as desired and compared with a reference value, the trigger signals SI ₁₁ , SI ₁₂ ,
…, SI _1n ; SI ₂₁ , SI ₂₂ ,…, SI _2n ,…; SI _m1 , SI _m2 ,
…, SI _mn as storage devices 323 ₁₁ , 323 ₁₂ ,…, 32, respectively
3 _1n ; 323 ₂₁ , 323 ₂₂ , ..., 323 _2n ; ...; 323 _m1 , 323 _m2 ,
…, Given to 323 _mn .

Here, when the slit light reflected by the mirror 141 of the scanning device 14 is irradiated, the phototransistor 331 of the scanning detection device 33 becomes conductive and generates a current I corresponding to the light amount of the slit light. The current I is amplified as desired by a comparison and amplification circuit 332 attached to the phototransistor 331 and compared with a reference value, and then, as a scanning reference signal S1, delay circuits 325 ₁ , 325 ₂ , ... Given to 325 _n .

The delay circuits 325 ₁ , 325 ₂ , ..., 325 _n respectively scan the scanning reference signal S1 according to the scanning of the measurement region by the slit light, that is, the constant angular velocity 2ω, and delay times t ^* ₁ , t ^* ₂ , ..., t ^* _n. only allowed delay, the reset signal SR _1, SR _2, ..., counted as SR _n circuits 324 _1, 324 _2, ..., are given to 324 _n. Counting circuit 32
4 ₁ , 324 ₂ , ..., 324 _n are reset signals SR ₁ , SR ₂ ,.
_{When n} is given, the counting content at that time is reset and the counting start time is adjusted, and then the counting of the number of clock pulses CLP given from the clock pulse generating circuit 326 is started again. Counting circuit 324 _1, 324 _2, ..., counting the contents of 324 _n, the reset signal SR _1, SR _2, ..., are the minimum value (e.g. "0") when reset by SR _n, a clock pulse It is incremented by 1 each time a CLP arrives and is incremented until it reaches the maximum value (for example, "255").

The counting contents of the counting circuits 324 ₁ , 324 ₂ , ..., 324 _n are stored in the memory devices 323 ₁₁ , 323 ₁₂ , ..., 323 _1n ; 323 ₂₁ , 323 ₂₂ , respectively.
..., 323 _2n ; ...; 323 _m1 , 323 _m2 , ..., 323 _mn . Storage devices 323 ₁₁ , 323 ₁₂ , ..., 323 _1n ; 32
3 ₂₁ , 323 ₂₂ ,…, 323 _2n ;…; 323 _m1 , 323 _m2 ,…, 323 _mn
Are trigger signals SI ₁₁ , SI ₁₂ , ..., SI _1n ; SI ₂₁ , SI ₂₂ ,
_{..., SI 2n; ...; SI} m1, SI m2, ..., the counter circuit 324 _1, 324 ₂ when the SI _mn is given, ..., and stores the count contents given from 324 _n holds. Storage device 323 at this time
₁₁ , 323 ₁₂ ,…, 323 _1n ; 323 ₂₁ , 323 ₂₂ ,…, 323 _2n ;
… ； 323 _m1 , 323 _m2 ,…, 323 _mn memory contents, t ₁₁ ,
t ₁₂ ,…, t _1n ; t ₂₁ , t ₂₂ ,…, t _2n ;…; t _m1 , t _m2 ,
…, T _mn .

The data processing device 40 receives the read signal from the read signal generation circuit 14.
SEL is generated and given to the decoder circuit 327 in the light receiving device 30 . The decoder circuit 327 decodes the read signal SEL, that is, decodes the read signal SEL, and then uses a plurality of storage devices as read select signals.
323 ₁₁ , 323 ₁₂ , ..., 323 _1n ; 323 ₂₁ , 323 ₂₂ , ..., 323 _2n ;
...; 323 _m1 , 323 _m2 , ..., 323 _mn . Accordingly, a plurality of storage devices 323 ₁₁ , 323 ₁₂ , ..., 323 _1n ; 323 ₂₁ ,
323 ₂₂ ,…, 323 _2n ;…; 323 _m1 , 323 _m2 ,…, 323 _mn is
The stored contents t ₁₁ , t ₁₂ , ..., t _1n ; t ₂₁ , t ₂₂ , ..., t _2n ;
...; t _m1 , t _m2 , ..., t _mn are sequentially output as the imaging data IMG to the storage device 42 of the data processing device 40 .

The storage device 42 stores the image formation data IM supplied from the light receiving device 30.
G, that is, stored contents t ₁₁ , t ₁₂ , ..., t _1n ; t ₂₁ , t ₂₂ ,.
t _2n ; ...; t _m1 , t _m2 , ..., t _mn are stored and retained. The image formation data IMG stored in the storage device 42 is the delay circuits 325 ₁ , 325 ₂ , ..., Stored in the storage device 42 prior to measuring the object.
With the delay time t ₁ ^* , t ₂ ^* , ..., t _n ^{* of} 325 _n , the arithmetic circuit 4
3 and is used there for calculating the position (X, Y, Z) of the reflection point P of the slit light in the measured object 20 .

That arithmetic circuit 43, phototransistor 321 _11, 321 _{12,
..., 321 1n; 321 21,} 321 22, ..., 321 2n; ...; 321 m1, 321
_{For m2} , ..., 321 _mn , according to the above equation (4), As described above, the scanning angle α is calculated. This scanning angle α, that is, α
₁₁ , α ₁₂ ,…, α _1n ; α ₂₁ , α ₂₂ ,…, α _2n ,…;
alpha _m1, alpha _{m @ 2,} ..., by the alpha _mn substituted into the (1) to (3), the phototransistor 321 _11, 321 _12, ..., 321
_1n ； 321 ₂₁ ， 321 ₂₂ ， _{・ ・ ・} ， 321 _2n ； …… ； 321 _m1 , 321 _m2 ,
The position (X, Y, Z) of the reflection point P corresponding to 321 _mn , that is, the reflection points P ₁₁ , P ₁₂ , ..., P _1n ; P ₂₁ , P ₂₂ , ..., P _2n ;
Positions of _m1 , P _m2 , ..., P _mn (X ₁₁ , Y ₁₁ , Z ₁₁ ), (X ₁₂ , Y
₁₂ , Z ₁₂ ), ..., (X _1n , Y _1n , Z _1n ); (X ₂₁ , Y ₂₁ ,
Z ₂₁ ), (X ₂₂ , Y ₂₂ , Z ₂₂ ), ..., (X _2n , Y _2n , Z _2n );
…; (X _m1 , Y _m1 , Z _m1 ), (X _m2 , Y _m2 , Z _m2 ),…, (X
_mn , Y _mn , Z _mn ) is calculated.

The calculation result of the calculation circuit 43, that is, the calculation result of the position (X, Y, Z) of the reflection point P of the slit light on the measured object 20 is given to another storage device 44 to be stored and held. The contents stored in the storage device 44 are displayed visually on the display device 45 and stored on the storage device 46, if desired. Thus, in the present invention, the phototransistor 321 ₁₁ of the first optical sensor _{device, 321 12, ..., 321 1n} ; 321 21, 321 22, ..., 3
21 _2n ； ・_{・ ・} ； 321 _m1 , 321 _m2 ,…, 321 _mn Multiple delay circuits 325 ₁ , 325 ₂ ,…, respectively arranged for multiple rows
325 _n allows the plurality of delay circuits 325 ₁ , 325 ₂ , ..., 325 _n
A plurality of counting devices 324 ₁ , 324 ₂ , ...
Since 4 _n count start time is adjusted respectively, phototransistor _{321 11, 321 12, ...,} 321 1n; 321 21, 321 22,
…, 321 _2n ； …… ； 321 _m1 , 321 _m2 ,…, 321 _mn Counting device 32 only while there is a possibility of detecting reflected slit light for each row
4 _1, 324 _2, ..., it is possible to operate the 324 _n, as a result counting device 324 _1, 324 _2, ..., is to increase the time resolution by increasing the count rate without enlarging the number of bits of 324 _n it can. That is, in the present invention, (i) counter 324 _1, 32
4 _2, ..., 324 _n of the number of bits and the first photosensor device more attached to the storage device in one-to-one to the light sensor belonging to _{323 11, 323 12, ...,} 323 1n; 323 21, 323 22 ,,, 32
3 _2n・_・・_・・_・ ； 323 _m1 , 323 _m2 ,…, 323 _mn High-precision object measurement can be achieved without increasing the number of bits, and (ii) It is possible to reduce blind spots while avoiding deterioration of resolution.

In the above description, the delay circuit and the counting circuit are provided for the respective rows of the photosensors belonging to the first photosensor device, but the present invention is not limited to this, and the first photosensor device is not limited to this. A case in which a delay circuit and a counting circuit are commonly provided for a plurality of columns (for example, an odd-numbered column and an even-numbered column which are adjacent to each other) of the columns of the photosensors belonging to the photosensor device Also includes.
As a result, the present invention can reduce the total number of delay circuits and counting circuits. By the way, since the specific configuration and operation in this case are almost obvious from the above, detailed description thereof will be omitted.

Further, in the above description, the case where the imaging device 32 is formed by a plurality of photosensors arranged in a matrix has been mainly described, but the present invention is not limited to this, and a desired shape (for example, a curved shape). ), The case where a plurality of optical sensors are arranged to form an image pickup device is also included.

Further, although the light projecting device 10 generates slit light, the present invention is not limited to this, and for example, when it is desired to secure the intensity of light generated by the light projecting device, the light projecting device 10 projects light. It also includes the case where the device produces a beam of light. In this case, the optical sensors of the image pickup device may be arranged in one row.

In addition, the case where the imaging devices 32 are arranged in a matrix and the delay circuit and the counting circuit are provided for each column has been described, but the present invention is not limited to this, and the imaging device is This is also included when the delay circuits and the counting circuits are arranged in a matrix and arranged in each row. Whether the delay circuit and the counting circuit are arranged in the column or the row is determined in relation to the scanning direction of the measured region by the light projecting device. Since it is almost obvious, its detailed description is omitted.

(3) Effects of the Invention As is clear from the above, the object measuring device according to the present invention comprises: (a) a light projecting device for generating light for scanning the measurement region; and (b) generation by the light projecting device. An imaging device that converges the reflected light obtained by the reflected light being reflected by the measured object arranged in the measured region to form an image of the reflection point of the light on the measured object; (c) a first photosensor device that is operated by the image of the reflection point formed by the image forming device, and includes a plurality of photosensors that are arranged in a plurality of columns or rows. ) A second photosensor device that is operated by the generated light for scanning the measurement area by the light projecting device; and (e) a column or row of photosensors belonging to the first photosensor device. Are installed respectively, and A plurality of delay circuits for delaying the scanning signal generated by the light detection of the second optical sensor device corresponding to each column or row of the optical sensor belonging to the first optical sensor device; The number of clock pulses applied to the input terminal after resetting is arranged for each column or row of the optical sensor belonging to one optical sensor device and the reset terminal is connected to each of the delay circuits. A plurality of counting circuits for counting, (g) when the photosensors belonging to the first photosensor device are operated in a one-to-one correspondence with the photosensors belonging to the first photosensor device, A plurality of storage devices for storing the count content input from the counting circuit, and (h) receiving the storage contents of the storage device, calculating the scanning angle of the reflection point by the light projecting device, and And a data processing device for calculating the position of the reflection point from the emitted scanning angle. (I) The number of bits of the counting device and the one-to-one correspondence with the plurality of photosensors belonging to the first photosensor device. This has the effect of achieving high-precision object measurement without increasing the number of bits of the storage device attached in (2), and (ii) the effect of reducing blind spots while avoiding a decrease in resolution.

Another object measuring apparatus according to the present invention is: (a) a light projecting device for generating light for scanning the measurement area; and (b) light generated by the light projecting apparatus is arranged in the measurement area. An imaging device that converges the reflected light obtained by being reflected by the measured object and forms an image of a reflection point of the light on the object, and (c) forms an image by the imaging device. A first optical sensor device, which is operated by the image of the reflection point and is divided into a plurality of columns or rows and arranged, and (d) an area to be measured by the light projecting device. A second photosensor device that is operated by the light generated for scanning, and (e) for a plurality of columns or rows of photosensors belonging to the first photosensor device that are close to each other Are arranged in common Cage, the second optical sensor device the first scan signal generated by the light detection
A plurality of delay circuits for delaying the columns or rows of the photosensors belonging to the photosensor device of (1), and (f) the columns or rows of the photosensors belonging to the first photosensor device being close to each other. A plurality of counting circuits arranged in common for a plurality of columns or rows and having reset terminals respectively connected to the delay circuits and for counting the number of clock pulses applied to the input terminals after resetting. (G) One-to-one is attached to the photosensors belonging to the first photosensor device, and is input from the counting circuit when the photosensors belonging to the first photosensor device are operated. A plurality of storage devices for storing the counted contents, and (h) receiving the storage contents of the storage device, calculating the scanning angle of the reflection point by the light projecting device, and calculating the scanning angle. Since a data processing device for calculating the position of the reflection point, has the effect of reducing the total number of (i) above in addition to the effects of and (ii) (iii) delay circuits and counting circuits.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the object measuring apparatus according to the present invention, FIG. 2 is an enlarged partial perspective view showing a part of the embodiment of FIG. 1 in an enlarged manner, and FIG. It is an expanded partial circuit diagram which expands and shows a part of example. 10 …… Projector 12 …… Slit light generator 121 …… Light source 122 …… Cylindrical lens 14 …… Scanning device 141 …… Mirror 142 …… Rotation drive device 20 …… Measured object 30 …… Light receiving device 31 …… Image forming device 32 Imaging device 321 _{11 to} 321 _mn Photo transistor 322 _{11 to} 322 _mn Comparator / amplifier circuit 323 _{11 to} 323 _mn Storage device 324 _{11 to} 324 _mn Counting circuit 325 _{11 to} 325 _mn Delay circuit 326 Clock pulse generation circuit 327 Decoder circuit 33 Scanning detector 331 Phototransistor 332 Comparison amplifier circuit 40 Data processing device 41 Read signal generation circuit 42 Storage device 43 …… Computing circuit 44 …… Storage device 45 …… Display device 46 …… Storage device

Claims (16)

[Claims] 1. (a) A light projecting device for generating light for scanning a measurement region, and (b) Light generated by the light projecting device is reflected by a measurement object arranged in the measurement region. An imaging device for converging the reflected light obtained by the above to form an image of the reflection point of the light on the object to be measured; and (c) an image of the reflection point formed by the imaging device. A first optical sensor device which is activated and comprises a plurality of optical sensors arranged in a plurality of columns or rows, and (d) generated for scanning the measured region by the light projecting device. A second optical sensor device which is operated by the light, and (e) is provided for each of the columns or rows of the optical sensors belonging to the first optical sensor device. In front of the scanning signal generated by light detection A plurality of delay circuits for delaying the columns or rows of the photosensors belonging to the first photosensor device, respectively, and (f) the columns or rows of the photosensors belonging to the first photosensor device. A plurality of counting circuits, each of which is provided with a reset terminal connected to the delay circuit, and which counts the number of clock pulses applied to the input terminal after resetting, and (g) the first counting circuit. A plurality of storages, which are provided one-to-one with respect to the photosensors belonging to the photosensor device, and which store the counting contents input from the counting circuit when the photosensors belonging to the first photosensor device are operated. And (h) data processing for receiving the stored contents of the storage device, calculating the scanning angle of the reflection point by the light projecting device, and calculating the position of the reflection point from the calculated scanning angle. Object measuring apparatus characterized by comprising a location. 2. The object measuring device according to claim 1, wherein the light generated by the light projecting device is a light beam. 3. The object measuring device according to claim 1, wherein the light generated by the light projecting device is slit light. 4. A light projecting device includes a slit light generating device for generating slit light, and a scanning device for scanning the measured region by changing the traveling direction of the slit light at a constant speed. The object measuring device according to claim (3). 5. A scanning device comprising a mirror for reflecting the slit light generated by the slit light generating device and a rotating device for rotating the mirror. The object measuring device according to the item (4). 6. A slit light generator is formed by a gas laser light source and a cylindrical lens for generating slit light from the laser light generated by the gas laser light source. The object measuring device according to item (4) or (5). 7. A slit light generation device, a semiconductor laser light source, a spherical lens for converging laser light generated by the semiconductor laser light source to generate beam light, and slit light from the light beam. The object measuring device according to claim (4) or (5), characterized in that it is formed by a cylindrical lens for 8. The first and second photosensor devices are formed of phototransistors, and the photosensor device according to any one of claims (1) to (7). Object measuring device. 9. (a) A light projecting device for generating light for scanning a measurement region, and (b) Light generated by the light projecting device is reflected by a measurement object arranged in the measurement region. An imaging device for converging the reflected light obtained by the above to form an image of the reflection point of the light on the object to be measured; and (c) an image of the reflection point formed by the imaging device. A first photosensor device comprising a plurality of photosensors which are operated and are arranged in a plurality of columns or rows, and (d) generated for scanning the measured region by the light projecting device. A second photosensor device that is operated by light; and (e) a plurality of columns or rows of photosensors belonging to the first photosensor device that are close to each other and are commonly arranged. And the second optical sensor The scanning signal generated by the light detection of the device is used as the first signal.
A plurality of delay circuits for delaying the columns or rows of the photosensors belonging to the photosensor device of (1), and (f) the columns or rows of the photosensors belonging to the first photosensor device being close to each other. A plurality of counting circuits arranged in common for a plurality of columns or rows and having reset terminals respectively connected to the delay circuits and for counting the number of clock pulses applied to the input terminals after resetting. (G) One-to-one is attached to the photosensors belonging to the first photosensor device, and is input from the counting circuit when the photosensors belonging to the first photosensor device are operated. A plurality of storage devices for storing the counted contents, and (h) receiving the storage contents of the storage device, calculating the scanning angle of the reflection point by the light projecting device, and calculating the scanning angle. Object measuring apparatus characterized by comprising a data processing device for calculating the position of the reflection point. 10. The object measuring device according to claim 9, wherein the light generated by the light projecting device is a light beam. 11. The light generated by the light projecting device is slit light, as claimed in claim 9.
Item measuring device according to the item. 12. A light projecting device includes a slit light generating device for generating slit light, and a scanning device for scanning a measurement region by changing a traveling direction of the slit light at a constant speed. The object measuring device according to claim (11), characterized in that: 13. A scanning device comprising a mirror for reflecting the slit light generated by the slit light generating device and a rotating device for rotating the mirror. The object measuring device according to the item (12). 14. A slit light generator is formed by a gas laser light source and a cylindrical lens for generating slit light from the laser light generated by the gas laser light source. The object measuring device according to item (12) or (13). 15. A slit light generating device, a semiconductor laser light source, and a spherical lens for converging laser light generated by the semiconductor laser light source to generate beam light.
The object measuring device according to claim (12) or (13), characterized by being formed by a cylindrical lens for generating slit light from the light beam. 16. The first and second photosensor devices are formed of phototransistors, and the photosensor device according to any one of claims (9) to (15). Object measuring device.