JPH07282957A - Connecting method for connecting terminal of ceramic heater element - Google Patents
Connecting method for connecting terminal of ceramic heater elementInfo
- Publication number
- JPH07282957A JPH07282957A JP9382794A JP9382794A JPH07282957A JP H07282957 A JPH07282957 A JP H07282957A JP 9382794 A JP9382794 A JP 9382794A JP 9382794 A JP9382794 A JP 9382794A JP H07282957 A JPH07282957 A JP H07282957A
- Authority
- JP
- Japan
- Prior art keywords
- lead wire
- electrode
- brazing material
- ceramic
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims description 12
- 238000010438 heat treatment Methods 0.000 claims abstract description 22
- 238000005219 brazing Methods 0.000 claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 13
- 239000011261 inert gas Substances 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 239000000945 filler Substances 0.000 description 6
- 238000005304 joining Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、セラミックス発熱体と
金属接続端子の接続方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for connecting a ceramic heating element and a metal connecting terminal.
【0002】[0002]
【従来の技術】従来、例えば炭化珪素のようなセラミッ
クス発熱体と金属端子の接合手段としては、溶接やろう
接あるいは圧接等が知られている。ところで、特開平4
−141978号公報には、セラミック基体に溶射によ
って付着形成されたアルミニウムあるいはアルミニウム
合金からなる電極表面に載置されるリード端子を加熱し
ながら振動を加えることにより、リード端子が金属層を
介して電極と接合するリード端子接続構造が開示されて
いる。しかし、上記接合においては、セラミックヒータ
の通電中セラミック基体とリード端子との熱膨張差によ
って、リード端子の接合部が開いたり、破壊したりする
ようなおそれがあり、その結果接合部における信頼性に
問題がある。また、特開平4−306581号公報に
は、セラミックス発熱体の接合端面を粗化処理した後金
属ターミナルを仮接着し、ついで仮接着した金属ターミ
ナルの上部から接合端面に金属溶射を施して平均膜厚1
00〜300μmの溶射層を形成することを特徴とする
接合方法が示されている。しかしながら、この接合手段
ではセラミックス発熱体の端面を予め粗化処理をしなけ
ればならない煩雑さがあり、量産には不向きである。2. Description of the Related Art Conventionally, welding, brazing, pressure welding or the like has been known as a means for joining a ceramic heating element such as silicon carbide and a metal terminal. By the way, JP-A-4
In JP-A-141978, by applying vibration while heating a lead terminal mounted on the surface of an electrode made of aluminum or an aluminum alloy adhered to a ceramic substrate by thermal spraying, the lead terminal is intercalated via a metal layer. A lead terminal connection structure for joining with is disclosed. However, in the above-mentioned joining, there is a possibility that the joint portion of the lead terminal may be opened or broken due to the difference in thermal expansion between the ceramic base and the lead terminal while the ceramic heater is energized, and as a result, the reliability of the joint portion I have a problem. Further, in Japanese Unexamined Patent Publication No. 4-306581, after roughening the joint end surface of the ceramic heating element, a metal terminal is temporarily bonded, and then the joint end surface is sprayed with metal from the upper portion of the temporarily bonded metal terminal to obtain an average film. Thickness 1
A joining method is shown which is characterized by forming a sprayed layer having a thickness of 00 to 300 μm. However, with this joining means, the end face of the ceramic heating element must be roughened in advance, which is not suitable for mass production.
【0003】[0003]
【発明が解決しようとする課題】本発明は、上記問題点
に鑑みてなされたものであり、加熱時の加昇による種々
の課題を回避し短時間に接合でき、且つ信頼性の高いセ
ラミックス発熱体の接続端子の接続方法を提供しようと
するものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and it is possible to avoid various problems due to temperature rising during heating and to perform bonding in a short time, and to generate highly reliable ceramic heat. It is intended to provide a method for connecting body connection terminals.
【0004】[0004]
【課題を解決するための手段】本発明は、セラミックス
基体の端面に金属層を付着して成る電極を有するセラミ
ックス発熱体において、リード線を挿着したろう材を電
極に載置し、ついでそのろう材にチップを重着した後、
該チップを不活性ガス中で加熱後振動を加えることを特
徴とするセラミックス発熱体の接続端子の接続方法であ
る。According to the present invention, in a ceramic heating element having an electrode in which a metal layer is attached to an end face of a ceramic substrate, a brazing material having lead wires inserted therein is placed on the electrode, After stacking the chips on the brazing material,
A method for connecting a connecting terminal of a ceramic heating element, characterized in that the chip is heated in an inert gas and then vibrated.
【0005】[0005]
【作用】上記接続方法によれば、一般にろう材中には微
量の酸素が含まれており、そのためろう材中の酸素を主
とした酸化膜により電極との接合を妨げていた。According to the above connection method, a trace amount of oxygen is generally contained in the brazing filler metal, so that the oxide film mainly containing oxygen in the brazing filler metal hinders the joining with the electrode.
【0006】しかしながら本発明によれば、不活性ガス
雰囲気中で加熱後加振することで、酸化膜を破壊するこ
とができ、その結果電極とリード線を強固に接合でき
る。However, according to the present invention, the oxide film can be destroyed by heating and then vibrating in an inert gas atmosphere, and as a result, the electrode and the lead wire can be firmly bonded.
【0007】また、変位計を有しているので、ろう材が
確実に溶融していることを検知することができるととも
に、ろう材中のリード線の加熱加昇によるリード線の侵
食を防止でき、さらに短時間に電極とリード線を接合す
ることができる。Further, since it has a displacement gauge, it can detect that the brazing material is surely melted and can prevent the corrosion of the lead wire due to the heating and heating of the lead wire in the brazing material. The electrode and the lead wire can be joined in a shorter time.
【0008】以下、本発明の一実施例について図面を参
照しながら詳細に説明する。図1はリード線接続方法を
示す概略図であり、セラミックス基体1表面に金属層2
で付着されたセラミックスヒータの端面に、リード線4
を挿着したろう材3を前記セラミックス基体1と同一ま
たは熱膨張率が概ね等しいチップ5を重着した後、加振
器Aおよびガス不透過性円筒6に内挿されたヒータCに
囲繞されたこてBから成る加振加熱器Dにより、該加振
加熱器Dからの熱はチップ5を伝播してろう材3を溶融
させるとともに、該ろう材の溶融量をレーザまたは超音
波変位計Eにより検知し加熱温度の加昇を防止した後加
振することにより、リード線4はセラミックスヒータと
チップ5に挟着され接合強度の大なるリード線接続端子
構造体が得られる。なお、セラミックス基体の形状とし
てはパネル状またはハニカム状あるいは円筒状が挙げら
れ、また金属層としてはアルミニウム、ニッケル等を挙
げることができる。An embodiment of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a schematic diagram showing a lead wire connecting method, in which a metal layer 2 is formed on the surface of a ceramic substrate 1.
On the end face of the ceramic heater attached by
After brazing the brazing filler metal 3 with the chip 5 having the same or substantially the same thermal expansion coefficient as the ceramic substrate 1, the brazing filler metal 3 is surrounded by the vibrator A and the heater C inserted in the gas impermeable cylinder 6. With the vibration heater D composed of the trowel B, the heat from the vibration heater D propagates through the tip 5 to melt the brazing filler metal 3, and the melting amount of the brazing filler metal is measured by a laser or ultrasonic displacement meter E. The lead wire 4 is sandwiched between the ceramics heater and the chip 5 to obtain a lead wire connection terminal structure having a high bonding strength by being detected by the above method and then vibrating after the heating temperature is prevented from rising. The shape of the ceramic substrate may be a panel shape, a honeycomb shape, or a cylindrical shape, and the metal layer may be aluminum, nickel, or the like.
【0009】[0009]
【発明の効果】以上説明したように、本発明のセラミッ
クス発熱体の接続端子の接続方法によれば、不活性ガス
雰囲気中で加熱後加振することで、ろう材表面の酸化膜
を破壊することができるものであるから、電極とリード
線を強固に接合できる。また、変位計を有しているの
で、ろう材が確実に溶融していることを検知することが
できるとともに、ろう材中のリード線の加熱加昇による
リード線の侵食を防止でき、さらに短時間に電極とリー
ド線を接合することができるとともに量産に好適な接合
方法である。As described above, according to the method for connecting the connecting terminals of the ceramic heating element of the present invention, the oxide film on the surface of the brazing material is destroyed by heating and then vibrating in an inert gas atmosphere. Therefore, the electrode and the lead wire can be firmly bonded to each other. In addition, since it has a displacement gauge, it can detect that the brazing material has melted reliably, and can prevent erosion of the lead wire due to heating and heating of the lead wire in the brazing material. This is a bonding method suitable for mass production, which can bond the electrode and the lead wire in time.
【図1】本発明のリード線端子接続方法を示す概略図FIG. 1 is a schematic view showing a lead wire terminal connecting method of the present invention.
1 セラミックス基体 2 金属層 3 ろう材 4 リード線 5 チップ 6 円筒 A 加振器 B こて C ヒータ D 加振加熱器 E 変位計 1 Ceramics Base 2 Metal Layer 3 Brazing Material 4 Lead Wire 5 Chip 6 Cylinder A Vibrator B Iron C Heater D Vibratory Heater E Displacement Meter
Claims (2)
または塗布して成る電極を有するセラミックス発熱体に
おいて、リード線端子を挿着したろう材を前記電極に載
置し、ついでろう材にセラミックス基体と同一または熱
膨張率が概ね等しいチップを重着した後、不活性ガス中
で該チップを加熱した後振動を加えることを特徴とする
セラミックス発熱体の接続端子の接続方法。1. In a ceramic heating element having an electrode formed by spraying or coating a metal layer on an end surface of a ceramic substrate, a brazing material having lead wire terminals inserted therein is placed on the electrode, and then the ceramic substrate is placed on the brazing material. A method for connecting a connection terminal of a ceramic heating element, comprising: stacking chips having the same or substantially the same coefficient of thermal expansion as that of Example 1, and heating the chips in an inert gas, and then applying vibration.
用チップまでの距離をレーザ変位計または超音波変位計
にて測定することを特徴とする請求項1記載のセラミッ
クス発熱体の接続端子の接続方法。2. The connecting terminal of the ceramic heating element according to claim 1, wherein the distance from the electrode surface to the heavy wear tip due to melting of the brazing material is measured by a laser displacement meter or an ultrasonic displacement meter. How to connect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9382794A JPH07282957A (en) | 1994-04-06 | 1994-04-06 | Connecting method for connecting terminal of ceramic heater element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9382794A JPH07282957A (en) | 1994-04-06 | 1994-04-06 | Connecting method for connecting terminal of ceramic heater element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07282957A true JPH07282957A (en) | 1995-10-27 |
Family
ID=14093233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9382794A Pending JPH07282957A (en) | 1994-04-06 | 1994-04-06 | Connecting method for connecting terminal of ceramic heater element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07282957A (en) |
-
1994
- 1994-04-06 JP JP9382794A patent/JPH07282957A/en active Pending
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