JPH07294358A - 圧力感知装置及びその製造方法 - Google Patents

圧力感知装置及びその製造方法

Info

Publication number: JPH07294358A
Authority: JP; Japan
Prior art keywords: housing; pressure; cavity; diaphragm; sensing device
Prior art date: 1994-04-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP8894795A

Other languages

English (en)

Japanese (ja)

Inventor

Michael F Mattes

エフマッテスマイケル

Lawrence B Reimer

ビーライマーローレンス

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SSI Technologies LLC

Original Assignee

SSI Technologies LLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-04-15

Filing date

1995-04-14

Publication date

1995-11-10

1995-04-14 Application filed by SSI Technologies LLC filed Critical SSI Technologies LLC

1995-11-10 Publication of JPH07294358A publication Critical patent/JPH07294358A/ja

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title claims description 9
230000003321 amplification Effects 0.000 claims abstract description 3
238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 3
238000007789 sealing Methods 0.000 claims abstract description 3
239000007788 liquid Substances 0.000 claims description 21
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
229910052710 silicon Inorganic materials 0.000 claims description 13
239000010703 silicon Substances 0.000 claims description 13
230000007246 mechanism Effects 0.000 claims description 12
238000000034 method Methods 0.000 claims description 10
239000012530 fluid Substances 0.000 claims description 5
239000000853 adhesive Substances 0.000 claims description 2
230000001070 adhesive effect Effects 0.000 claims description 2
230000008878 coupling Effects 0.000 claims description 2
238000010168 coupling process Methods 0.000 claims description 2
238000005859 coupling reaction Methods 0.000 claims description 2
238000000465 moulding Methods 0.000 claims description 2
229920001296 polysiloxane Polymers 0.000 claims description 2
230000000717 retained effect Effects 0.000 claims description 2
238000004026 adhesive bonding Methods 0.000 claims 1
230000003068 static effect Effects 0.000 claims 1
229920002457 flexible plastic Polymers 0.000 abstract description 2
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
239000000463 material Substances 0.000 description 9
238000009434 installation Methods 0.000 description 7
230000008569 process Effects 0.000 description 7
229910001220 stainless steel Inorganic materials 0.000 description 5
239000010935 stainless steel Substances 0.000 description 5
230000003750 conditioning effect Effects 0.000 description 4
230000035882 stress Effects 0.000 description 3
230000005540 biological transmission Effects 0.000 description 2
238000010586 diagram Methods 0.000 description 2
239000012535 impurity Substances 0.000 description 2
229910000831 Steel Inorganic materials 0.000 description 1
230000032683 aging Effects 0.000 description 1
238000005452 bending Methods 0.000 description 1
238000009530 blood pressure measurement Methods 0.000 description 1
239000003518 caustics Substances 0.000 description 1
230000008859 change Effects 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
238000000576 coating method Methods 0.000 description 1
230000000295 complement effect Effects 0.000 description 1
238000010276 construction Methods 0.000 description 1
230000008602 contraction Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005538 encapsulation Methods 0.000 description 1
238000009957 hemming Methods 0.000 description 1
238000002347 injection Methods 0.000 description 1
239000007924 injection Substances 0.000 description 1
238000005259 measurement Methods 0.000 description 1
230000009972 noncorrosive effect Effects 0.000 description 1
239000003921 oil Substances 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
229920003023 plastic Polymers 0.000 description 1
230000006903 response to temperature Effects 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1
239000007787 solid Substances 0.000 description 1
239000010959 steel Substances 0.000 description 1
238000003466 welding Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
- G01L19/143—Two part housings
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0069—Electrical connection means from the sensor to its support
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Measuring Fluid Pressure (AREA)

JP8894795A 1994-04-15 1995-04-14 圧力感知装置及びその製造方法 Pending JPH07294358A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US22830594A	1994-04-15	1994-04-15
US08/228305		1994-04-15

Publications (1)

Publication Number	Publication Date
JPH07294358A true JPH07294358A (ja)	1995-11-10

Family

ID=22856622

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP8894795A Pending JPH07294358A (ja)	1994-04-15	1995-04-14	圧力感知装置及びその製造方法

Country Status (3)

Country	Link
EP (1)	EP0677727A3 (fr)
JP (1)	JPH07294358A (fr)
CA (1)	CA2145696A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2002037074A1 (fr) *	2000-11-01	2002-05-10	Robert Bosch Gmbh	Module de capteur de pression
JP2011237254A (ja) *	2010-05-10	2011-11-24	Hitachi Automotive Systems Ltd	温度検出機能付き圧力検出装置
CN112113699A (zh) *	2019-06-21	2020-12-22	霍尼韦尔国际公司	微模制流体压力传感器壳体

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19605795A1 (de) *	1996-02-16	1997-08-21	Duerrwaechter E Dr Doduco	Anordnung aus einer elektrischen Leiterplatte und einem elektrischen Druckaufnehmer
DE19637763A1 (de) *	1996-09-16	1998-03-19	Trw Fahrzeugelektrik	Drucksensoreinheit, insbesondere für die Kraftfahrzeugtechnik
DE19723615A1 (de) *	1997-06-05	1998-12-10	Trw Automotive Electron & Comp	Drucksensoreinheit, insbesondere für die Kraftfahrzeugtechnik
DE19753874A1 (de) *	1997-12-05	1999-06-17	Bosch Gmbh Robert	Kraftsensor
US6089106A (en) *	1998-09-04	2000-07-18	Breed Automotive Technology, Inc.	Force sensor assembly
JP3509627B2 (ja) *	1999-05-25	2004-03-22	株式会社デンソー	圧力検出装置
US7866964B2 (en)	2005-05-20	2011-01-11	Emerson Climate Technologies, Inc.	Sensor for hermetic machine
US8262372B2 (en)	2007-05-10	2012-09-11	Emerson Climate Technologies, Inc.	Compressor hermetic terminal
US8939734B2 (en)	2007-08-28	2015-01-27	Emerson Climate Technologies, Inc.	Molded plug for a compressor
WO2010036244A1 (fr) *	2008-09-24	2010-04-01	Halliburton Energy Services, Inc.	Électronique de fond de puits avec milieu de transfert de pression
US8939735B2 (en)	2009-03-27	2015-01-27	Emerson Climate Technologies, Inc.	Compressor plug assembly
US9480177B2 (en)	2012-07-27	2016-10-25	Emerson Climate Technologies, Inc.	Compressor protection module
US10620071B2 (en)	2016-06-29	2020-04-14	Danfoss A/S	Pressure sensor and method for manufacturing a pressure sensor
CN109540353A (zh) *	2018-11-14	2019-03-29	李世超	一种压力传感器的生产工艺
US12095192B2 (en)	2019-12-12	2024-09-17	Vitesco Technologies USA, LLC	Compressible conductive elastomer for electrical connection of orthogonal substrates
CN113390703A (zh) *	2020-03-13	2021-09-14	致茂电子(苏州)有限公司	自适应性调整施力角度的压力产生装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1456265A (en) *	1973-02-16	1976-11-24	Amp Inc	Electrical connector
US4907983A (en) *	1986-05-13	1990-03-13	Microwave Development Laboratories	Electrical connector
US5029478A (en) *	1990-07-19	1991-07-09	Honeywell Inc.	Fluid isolated self-compensating absolute pressure sensor transducer
JPH05149814A (ja) *	1991-11-29	1993-06-15	Fuji Electric Co Ltd	二重ダイヤフラム式半導体圧力センサ
US5331857A (en) *	1992-08-21	1994-07-26	General Automotive Specialty Co., Inc.	Pressure transducer
DE4410455C1 (de) *	1994-03-25	1995-06-29	Framatome Connectors Int	Wasserdichte Kontaktstiftdurchführung durch gegossene Kunststoffteile, insbesondere von Steckergehäusen
DE9406625U1 (de) *	1994-04-20	1994-07-21	Alcatel Sel Aktiengesellschaft, 70435 Stuttgart	Drucksensor

1995
- 1995-03-28 CA CA 2145696 patent/CA2145696A1/fr not_active Abandoned
- 1995-04-12 EP EP95400831A patent/EP0677727A3/fr not_active Withdrawn
- 1995-04-14 JP JP8894795A patent/JPH07294358A/ja active Pending

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2002037074A1 (fr) *	2000-11-01	2002-05-10	Robert Bosch Gmbh	Module de capteur de pression
US6805010B2 (en)	2000-11-01	2004-10-19	Robert Bosch Gmbh	Pressure sensor module
JP2011237254A (ja) *	2010-05-10	2011-11-24	Hitachi Automotive Systems Ltd	温度検出機能付き圧力検出装置
CN112113699A (zh) *	2019-06-21	2020-12-22	霍尼韦尔国际公司	微模制流体压力传感器壳体
US11630011B2 (en)	2019-06-21	2023-04-18	Honeywell International Inc.	Micro-molded fluid pressure sensor housing

Also Published As

Publication number	Publication date
CA2145696A1 (fr)	1995-10-16
EP0677727A3 (fr)	1996-08-07
EP0677727A2 (fr)	1995-10-18

Publication	Publication Date	Title
JPH07294358A (ja)	1995-11-10	圧力感知装置及びその製造方法
US4942383A (en)	1990-07-17	Low cost wet-to-wet pressure sensor package
US6076409A (en)	2000-06-20	Media compatible packages for pressure sensing devices
US5684253A (en)	1997-11-04	Differential pressure sensor with stress reducing pressure balancing means
US4656454A (en)	1987-04-07	Piezoresistive pressure transducer with elastomeric seals
US6311561B1 (en)	2001-11-06	Media compatible pressure sensor
US5184107A (en)	1993-02-02	Piezoresistive pressure transducer with a conductive elastomeric seal
KR101766144B1 (ko)	2017-08-08	온도센서 일체형 압력센서
US10466125B2 (en)	2019-11-05	Pressure sensor sub assembly and fabrication
KR20060086329A (ko)	2006-07-31	밀폐형 압력 감지 장치
US5741975A (en)	1998-04-21	Media isolated differential pressure sensor and fluid injection method
CA1252646A (fr)	1989-04-18	Transducteur de mesure
EP0497534B1 (fr)	1996-07-31	Capteur de pression piézorésistif avec un scellement conductif élastomérique
JP2003287472A (ja)	2003-10-10	圧力センサ
JPS6117925A (ja)	1986-01-25	圧力センサ
JPH0665974B2 (ja)	1994-08-24	圧力センサユニツトの製造方法
JP4118729B2 (ja)	2008-07-16	圧力センサ
CN115144124B (zh)	2024-09-13	传感器和阀组件
JPS60209133A (ja)	1985-10-21	圧力変換器
JP2984420B2 (ja)	1999-11-29	差圧センサ
JP3081179B2 (ja)	2000-08-28	圧力センサとその製造方法
JP3991787B2 (ja)	2007-10-17	圧力センサ
JP3333703B2 (ja)	2002-10-15	圧力センサ及び圧力センサの製造方法
JPH0820326B2 (ja)	1996-03-04	半導体式圧力センサ
JPH0654270B2 (ja)	1994-07-20	圧力測定器