JPH0730657Y2 - Ozone generator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a discharge body for generating ozone.

[Conventional technology]

Ozone is obtained by discharging in dry air, has a strong oxidizing power, and is used for deodorization, sterilization, bleaching, etc.

As such an ozone generator, for example, Japanese Patent Publication Sho
As shown in Japanese Patent Laid-Open No. 55-37483, the one in which a dielectric made of alumina ceramics is sandwiched to perform discharge has been used. Further, as disclosed in Japanese Patent Laid-Open No. 59-44797, a planar induction electrode is formed inside a dielectric made of ceramics, and a linear discharge electrode is formed on the surface. A device in which a high-frequency voltage is applied to generate a creeping discharge has also been used.

Further, as shown in the sectional view of FIG.
Attach the piezoelectric element 44 on one side of the
In some cases, an induction electrode 42 and a discharge electrode 43 are formed so as to sandwich the piezoelectric element 44 and a piezoelectric element 44, and an AC voltage is applied between the two electrodes (JP-A-62-201638 and 63-190702). reference).

[Problems of the prior art] However, in the conventional ozone generating discharge body as described above,
Water and dust adhered to the discharge surface, and good discharge could not be maintained. For example, at the time of discharge, a kind of nitrate produced by nitrogen and moisture contained in the air adheres,
Since this nitrate adsorbs water in the air and deliquesces to generate conductivity, the electrode characteristics are unstable. Therefore, there are inconveniences such that the discharge cannot be performed at the start of the intermittent operation, or even if the discharge is possible, it takes a considerable time to reach a predetermined ozone concentration. Furthermore, the above-mentioned deposits roughened the discharge surface, resulting in poor durability.

Further, the ozone-generating discharge body provided with the piezoelectric element shown in FIG. 6 is not basically for removing adhered substances,
Since the purpose is to generate an electric field of a certain specific frequency or to prevent the temperature from rising during discharge, the structure is such that the same AC voltage is applied to the ceramic plate 41 and the piezoelectric element 44. Therefore, in order to vibrate the piezoelectric element 44 to remove the deposits, only the voltage of the resonance frequency of the piezoelectric element 44 can be applied, and when the ozone generation amount is adjusted, there is a disadvantage that the piezoelectric element 44 does not vibrate. Was there.

[Means for Solving the Problems]

In view of the above, the present invention applies an insulator to a discharge body in which an induction electrode and a discharge electrode are formed through a dielectric so as to cover the induction electrode, and a drive electrode unique to the insulator. A piezoelectric vibrating element having the same is provided, and a discharge body for ozone generation is configured so as to remove / prevent foreign matter from adhering to the discharge surface due to vibration of the piezoelectric vibrating element.

[Action]

According to the present invention, since the applied voltage for ozone generation and the applied voltage for the piezoelectric element are different, a voltage of the resonance frequency is applied to the piezoelectric element to vibrate, while the applied voltage for ozone generation is increased. It is possible to freely adjust the voltage frequency and the like.

〔Example〕

 An embodiment of the present invention will be described below with reference to the drawings.

As shown in FIG. 1 (a), a perspective view seen from the upper surface side, FIG. 1 (b) a perspective view seen from the lower surface side, and FIG.
This ozone generating discharge body Z is provided with a discharge electrode 3 and a protective layer 4 covering it on the upper surface of a disk-shaped ceramic plate 1 serving as a dielectric, and an induction electrode 2 and an insulating layer 7 covering it on the lower surface. The piezoelectric element electrode 8 and the piezoelectric element 9 are provided on the insulating layer 7. Further, lead wires 5 and 6 are attached to the discharge electrode 3 and the induction electrode 2, respectively, and piezoelectric element lead wires 10 and 11 are attached to the lower surfaces of the piezoelectric element electrode 8 and the piezoelectric element 9, respectively.

As shown in FIG. 2, the ozone generating discharge body Z is one in which an AC voltage is applied between the induction electrode 2 and the discharge electrode 3 by a power source 12 to cause a creeping discharge on the discharge electrode 3 side to generate ozone. Is. Further, by applying an AC voltage having the same frequency as the resonance frequency of the piezoelectric element 9 to the piezoelectric element 9 provided on the lower surface of the salamic body 1 from another power source 13, the piezoelectric element 9 and the ceramic body 1 are vibrated. It is possible to prevent and remove foreign matter from adhering to the discharge surface. Furthermore, since the ozone generating discharge body has the ceramic body 1 and the piezoelectric element 9 in a disk shape, it can be uniformly vibrated.

Next, a method of manufacturing the ozone generating discharge body Z will be described. First, the discharge electrode 3 is formed on the upper surface of the unfired ceramic plate 1, and the induction electrode 2 is formed on the lower surface thereof by applying a paste such as tungsten or molybdenum. Next, a protective layer 4 made of ceramics so as to cover the discharge electrode 3
Is formed by printing, spraying, CVD method, PVD method or the like so as to cover the induction electrode 2, respectively, and a paste such as tungsten or molybdenum is applied to the insulating layer 7 to form a piezoelectric layer. The element electrode 8 is formed, and the whole is baked and integrated. Finally, the piezoelectric element 9 may be fixed to the piezoelectric element electrode 8 by bonding, soldering, or the like, and the lead wires 5 and 6 and the piezoelectric element lead wires 10 and 11 may be soldered to predetermined positions. .

Further, as another embodiment, the ozone generating discharge body Z'shown in FIGS. 3 (a) to (c) and FIG. 4 can be used.
As shown in FIG. 3 (a), this is provided with an induction electrode 22 and a dielectric layer 23 made of ceramics covering the induction electrode 22 on the upper surface of a rectangular plate-shaped ceramic plate 21, and as shown in FIG. 3 (b). In addition, a discharge electrode 24 and a protective layer 25 made of ceramics covering the discharge electrode 24 are provided on the dielectric layer 23. Also,
As shown in FIG. 3 (c), a piezoelectric element 29 is fixed to the lower surface of the ceramic plate 21 via a piezoelectric element electrode 28, and a discharge electrode is formed.
24, the lead electrode 26, 27 is attached to the induction electrode 22, respectively,
Piezoelectric element lead wires 30 and 31 are attached to the lower surfaces of the piezoelectric element electrode 28 and the piezoelectric element 29, respectively.

That is, in the above embodiment, the discharge electrodes are formed on the upper and lower surfaces of the dielectric layer 23.
24 and an induction electrode 22, a ceramic plate 21 is provided as an insulator covering the induction electrode 22, and the piezoelectric element is provided on the ceramic plate 21.
It has a structure in which 29 are arranged.

As shown in FIG. 4, this ozone generating discharge body Z'can generate a creeping discharge by applying an AC voltage between the induction electrode 22 and the discharge electrode 24 by the power source 21 to generate ozone. In addition, from another power source 13 to the piezoelectric element 29,
By applying an AC power supply having the same frequency as the resonance frequency, the piezoelectric element 29 and the ceramic plate 21 can be vibrated to remove the deposit.

The method of manufacturing the ozone generating discharge body Z'is basically the same as that of the above-mentioned embodiment, and the induction electrode 22, the discharge electrode 24 and the piezoelectric element electrode 28 are all coated with a paste such as tungsten or molybdenum. The dielectric layer 23 and the protective layer 25 are formed by printing or spraying a ceramic paste.

Further, in the above embodiments, the two lead wires for discharge and the two lead wires for the piezoelectric element are separately provided, but it is also possible to use one of them. . For example, as shown in FIG. 5 as a modified example of the one shown in FIG. 2, the piezoelectric element 9 is directly fixed on the induction electrode 2 so that the induction electrode 2 and the piezoelectric element electrode 8 are used as a whole. Can have three lead wires.

In the above embodiment, various ceramics such as alumina, mullite and forsterite can be used as the ceramics forming the ceramic plates 1 and 21, the dielectric layers 23, the protective layers 4 and 25, and the insulating layer 7. In addition, the protective layer 4,
25 is not limited to one made of ceramics, but the discharge electrode 3,
The surface of 24 may be coated with an oxidation resistant metal. Further, the piezoelectric elements 9 and 29 are BaTiO ₃ based or Pb (Zr, Ti) O ₃
A piezoelectric ceramic such as a system is used.

Here, the ozone generating discharge body Z'shown in FIGS. 3 (a) to 3 (c) and FIG. 4 was prototyped and used. The ceramic plate 21 is made of alumina ceramics having an A1 ₂ O ₃ content of 92% and the balance of SiO ₂ , MgO, CaO, etc., and has a size of 10 mm ×
We prepared 3 types of 40mm, thickness 0.38mm, 0.5mm, 0.75mm. The induction electrode 22 and the discharge electrode 24 are made of tungsten, the dielectric layer 23 has a thickness of 72 μm, and the protective layer 25 has a thickness.
Each of them has a thickness of 25 μm and is made of the same alumina ceramics as the ceramic plate 21. Furthermore, as the piezoelectric element 29, BaTiO ₃
The size was set to 7 mm x 20 mm x 0.15 mm using ceramics.

The resonance frequencies for vibrating the ceramic plates 21 having the three types of thickness were measured, and the results are shown in Table 1.

As a usage test, a discharge plate for ozone generation with a ceramic plate thickness of 0.5 mm was used.
An AC voltage of 5 kHz was applied. At the same time, as a comparative example, a usage test was conducted under exactly the same conditions for those not provided with a piezoelectric element. As a result, the ozone generation amount (concentration) in the initial state and after one month was as shown in Table 2, and in the present invention, since the deposits were removed, the generation amount was not reduced.

[Effect of the Invention] As described above, according to the present invention, the piezoelectric element is provided with the piezoelectric element on the surface opposite to the discharge electrode of the ozone generating discharge body, and the means for applying the voltage only to the piezoelectric element is provided. It is possible to prevent foreign matter such as water and dust from adhering by removing the toner by vibrating, and to prevent a decrease in ozone generation amount even after long-term use. Further, since the voltage for ozone generation can be separately applied while vibrating the piezoelectric element, it is possible to provide a high-performance ozone generation discharger having a feature that the amount of ozone generation can be adjusted according to the conditions.

[Brief description of drawings]

1 (a) and 1 (b) are perspective views showing an embodiment of the ozone generating discharge body of the present invention. FIG. 2 is a sectional view taken along line XX in FIG. 3 (a), (b) and (c) are perspective views showing manufacturing steps of another embodiment of the present invention. FIG. 4 is a sectional view taken along the line YY in FIG. 3 (b). FIG. 5 is a sectional view showing still another embodiment of the present invention. FIG. 6 is a cross-sectional view showing a discharge body for ozone generation provided with a conventional piezoelectric element. 1,21,41 …… Ceramic plate 2,22,42 …… Conductive electrode 3,24,43 …… Discharge electrode 4,25 …… Protective layer 9,29,44 …… Piezoelectric element

Claims (1)

[Scope of utility model registration request] 1. A piezoelectric vibration device, wherein an insulator is applied to a discharge body having an induction electrode and a discharge electrode via a dielectric so as to cover the induction electrode, and the insulator has a unique drive electrode. A discharge body for ozone generation, characterized in that an element is provided, and foreign matter is prevented from adhering to the discharge surface by vibration of the piezoelectric vibrating element.