JPH07320265A - Magnetic recording medium manufacturing apparatus and manufacturing method - Google Patents

Abstract

(57) [Summary] [Purpose] It is an object to provide a magnetic recording medium having excellent magnetic properties such as coercive force. An apparatus for manufacturing a metal thin film type magnetic recording medium by depositing a magnetic material on a support, comprising: a running support; a flying source from which magnetic particles fly toward the support; It comprises an adhesion-preventing member provided between the flying source and the support, and a nozzle provided behind the adhesion-preventing member for irradiating an oxidizing gas when magnetic particles are deposited. An apparatus for manufacturing a magnetic recording medium, wherein the nozzle opening of the nozzle is set in the same direction as the direction of the minimum incident angle θ ₁ of magnetic particles flying toward the body.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus and method.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIG. In FIG. 2, 31 is a cooling can roll,
32a is a supply side roll of the polyethylene terephthalate (PET) film 33, 32b is a winding side roll of the PET film 33, 34 is a shield plate, 35 is a crucible, 36 is a magnetic metal, 37 is a vacuum container, 38 is an electron gun. . Then, after evacuating the inside of the vacuum container 37 to have a predetermined vacuum degree, the electron gun 38 is operated to operate the magnetic metal 3 in the crucible 35.
6 is evaporated, and the magnetic metal 3 is applied to the PET film 33.
A magnetic recording medium is manufactured by depositing (evaporating) the vaporized particles of No. 6.

When manufacturing a metal thin film type magnetic recording medium by such an oblique vapor deposition apparatus, it has been attempted to supply oxygen to the vapor deposition portion of the magnetic particles to improve the magnetic characteristics. That is, PET film 3
It was proposed (Japanese Patent Publication No. 61-56563) to supply oxygen in the opposite direction (180 °) to the traveling direction of No. 3. And, this one had some features.

[0005]

DISCLOSURE OF THE INVENTION However, since the above proposal was not satisfactory, as a result of further intensive investigations, the effect of improving the magnetic characteristics was significantly changed depending on the irradiation position and irradiation angle of oxygen gas. It came to be found. That is, as proposed in Japanese Patent Publication No. 61-56563, oxygen gas is not supplied in a direction parallel to the deposition surface of the magnetic thin film, but is irradiated along the magnetic particles flying at the minimum incident angle θ _1. It has been found that the magnetic properties are significantly improved in the case of

The present invention has been achieved based on such knowledge, and an object of the present invention is to provide a magnetic recording medium excellent in magnetic characteristics such as coercive force. An object of the present invention is an apparatus for manufacturing a metal thin film type magnetic recording medium by depositing a magnetic material on a support, and a running support and flying particles in which magnetic particles fly toward the support. A source, an anti-adhesive member provided between the flying source and the support, and a nozzle provided behind the anti-adhesive member for irradiating an oxidizing gas when magnetic particles are deposited. And a magnetic recording medium manufacturing apparatus characterized in that the nozzle opening of the nozzle is set in the same direction as the direction of the minimum incident angle θ ₁ of the magnetic particles flying toward the support. It

A method of manufacturing a metal thin film type magnetic recording medium by depositing a magnetic material on a running support, which comprises depositing magnetic particles flying toward the support and depositing them. A gas irradiation step of irradiating an oxidizing gas along the flight path of the magnetic particles flying at the lowest incident angle θ ₁ toward the support, and in the vicinity of the point at which the magnetic particles fly at the lowest incident angle θ _1. And a magnetic recording medium manufacturing method.

It is preferable that the nozzle opening of the nozzle is as close as possible to the tip of the deposition-inhibitory member. That is, it is preferable that the oxidizing gas is irradiated to the position immediately after the deposition of the magnetic particles is completed. Further, it is preferable that the nozzle is set so that the angle θ _{2 of the} nozzle opening is 40 ° to 70 °.

Then, -10 ° ≤θ ₁ -θ ₂ ≤ + 10 °
Is preferred. Also, the spraying amount of oxidizing gas is
5 to 500 cc / min, although there are some differences depending on the type of magnetic material, the thickness of the magnetic film, the width of the deposited film, etc.
It is preferably about 5 to 100 cc / min. Less than,
A specific example is given and demonstrated.

[0010]

【Example】

[Embodiment 1] FIG. 1 is a schematic view of an apparatus for manufacturing a magnetic recording medium according to the present invention. In the figure, 1 is a cooling can roll,
2a is a non-magnetic support (for example, polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate, olefin resin such as polypropylene,
Supply side roll of polymer material 3 such as cellulose type resin and vinyl chloride type resin, 2b is roll on the winding side of the support 3, 4 is a shielding plate, 5 is an oxygen gas introducing pipe, 6 is a crucible,
7 is a magnetic alloy contained in the crucible 6 (for example, F
In addition to metals such as e, Co, and Ni, Co-Ni alloys and Co
-Pt alloy, Co-Ni-Pt alloy, Fe-Co alloy,
Fe-Ni alloy, Fe-Co-Ni alloy, Fe-Co-
B alloy, Co-Ni-Fe-B alloy, Co-Cr alloy,
Or those containing a metal such as Al),
Reference numeral 8 is an electron gun, and 9 is a vacuum container.

The present invention is characterized by the position and inclination of the oxygen gas introduction pipe (nozzle) 5 and other points are well known, and therefore detailed description thereof will be omitted. That is, the greatest feature of the present invention is the nozzle 5
Is on the back side of the shield plate 4 (upper side in the figure), and the nozzle opening 5a of the nozzle 5 is as close as possible to the tip of the shield plate 4 (the position where oxygen gas irradiation is immediately after the deposition of the magnetic film). And the angle in the direction of the nozzle opening 5a is set to θ ₂ (the same angle as the minimum incident angle θ ₁ of the flying magnetic particles).

The production of a metal thin film type magnetic recording medium using the magnetic recording medium producing apparatus constructed as described above will now be described. First, the inside of the vacuum container 9 is 10 ^-4 ~
The gas is evacuated to a vacuum degree of about 10 ⁻⁶ Torr, for example, 2 × 10 ⁻⁵ Torr. Then, the support (a PET film having a thickness of 10 μm) 3 is unwound from the supply side roll 2a, is attached to the cooling can roll 1, and is wound around the winding side roll 2b. In this state, an electron beam is emitted from the electron gun 8 as shown by the arrow, and C in the crucible 6 is emitted.
The o-Ni (80:20) magnetic alloy 7 is irradiated with the particles, and the particles of the Co-Ni magnetic alloy 7 evaporate, and are attached to the cooling can roll 1 at a minimum incident angle θ ₁ of 55 °. It flies and adheres to the existing support 3 and deposits 1500 Å thickness.

When forming this magnetic thin film, θ₂Is 5
Oxygen gas from the nozzle opening 5a of the nozzle 5 set to 5 °
(Purity of 99.99%) is 60cc in the deposited portion of the magnetic alloy.
The magnetic thin film is forcibly oxidized.
Sent. As can be seen from FIG. 1, the nozzle of the nozzle 5
The oxygen gas emitted from the mouth 5a has a minimum incident angle θ.₁(55
Along the magnetic alloy particles flying at an angle of
One, this minimum incident angle θ ₁Magnetic alloy particles flying in
Is irradiated close to.

Thus, the magnetic thin film is formed, and
After being subjected to an oxidation treatment and wound on the winding side roll 2b, the winding side roll 2b is taken out, and the average particle size is 20
nm of carbon black and a binder resin composed of a vinyl chloride resin and a urethane prepolymer dispersed therein is applied to the support 3 on the side opposite to the magnetic layer by a direct gravure method to obtain a dry thickness. Is 0.
A back coat layer of 5 μm is provided.

Fluorine perfluoropolyether (grade: FOMBLIN ZDIAC carboxyl group modified, manufactured by Nippon Montedison Co., Ltd.) was diluted to 0.1% in a fluorine inert liquid (Fluorinert, FC-84, manufactured by Sumitomo 3M Limited). -Apply the dispersed coating material on the magnetic surface by a die coating method so that the thickness after drying is about 20Å, and dry at 70 ° C.

After that, a magnetic tape is slit into a predetermined width. [Example 2] In Example 1, the oxygen gas irradiation amount was set to 40.
The same procedure was performed except that the cc / min was used. [Example 3] In Example 1, the oxygen gas irradiation amount was set to 80.
The same procedure was performed except that the cc / min was used.

[Embodiment 4] In Embodiment 1, the shielding plate 4 is so arranged that the minimum incident angle θ ₁ of the flying magnetic particles is 40 °.
Was set, and the nozzle 5 was set so that the irradiation angle θ _{2 of the} oxygen gas irradiated from the nozzle opening 5a was 40 °, and the other operations were performed in the same manner. [Example 5] In Example 1, the shield plate 4 is set so that the minimum incident angle θ ₁ of the flying magnetic particles is 70 °.
Also, the irradiation angle θ of the oxygen gas irradiated from the nozzle port 5a
Nozzle 5 was set so that ₂ became 70 °, and other operations were performed in the same manner.

[Comparative Example 1] In Example 1, the shielding plate 4 was so arranged that the minimum incident angle θ ₁ of the flying magnetic particles was 55 °.
Was set, and the nozzle 5 was set so that the irradiation angle θ _{2 of the} oxygen gas irradiated from the nozzle port 5a was 70 °, and other operations were performed in the same manner. [Characteristics] The magnetic characteristics (coercive force, saturation magnetic flux density), durability and corrosion resistance of the magnetic tapes obtained in the above examples were examined, and the results are shown in Table 1.

Table-1 Coercive force (Oe) Saturation magnetic flux density (G) Durability (dB) Corrosion resistance (%) Example 1 1350 5600 -0.3 2 Example 2 1260 5900 -0.5 4 Example 3 1280 5050 -0.2 2 Example 4 1190 5700 -0.3 2 Example 5 1270 5100 -0.2 3 Comparative Example 1 960 4300 -1.0 7 Comparative Example 2 1180 5300 -0.2 9 Comparative Example 3 460 8800-16 * Comparative example 2 is as in the technique proposed in Japanese Patent Publication No. 61-56563 * Comparative example 3 is when oxygen gas is not blown * Durability is reproduction output after 3 hours of still reproduction * Displayed as a decrease in saturation magnetic flux density after being left for 30 days at a temperature of 60 ° C. and a humidity of 90% RH. It can be seen that the magnetic characteristics and the like are significantly changed depending on the irradiation condition, and furthermore, it can be understood that the magnetic recording medium excellent in electromagnetic conversion characteristics can be obtained by irradiation as in the present invention.

[0020]

According to the present invention, a high-performance magnetic recording medium excellent in electromagnetic conversion characteristics can be easily obtained.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 2 is a schematic explanatory diagram of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Cooling Can Roll 2a Supply Side Roll 2b Winding Side Roll 3 Non-Magnetic Support 4 Shielding Plate 5 Oxygen Gas Introducing Pipe (Nozzle) 5a Nozzle Port 6 Crucible 7 Magnetic Alloy 8 Electron Gun

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Shigemi Wakabayashi Inventor Shigemi Wakabayashi 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao Co., Ltd.Institute of Information Science (72) Inventor Akira Shiga 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao Company Information Science Laboratory

Claims (4)

[Claims] 1. A magnetic thin film is deposited on a support to form a thin metal film.
An apparatus for manufacturing a film-type magnetic recording medium
The support and the magnetic particles flying toward the support
The source and the protection provided between the source and the support.
The depositing member and a stack of magnetic particles provided behind the depositing member.
Equipped with a nozzle for irradiating an oxidizing gas during stacking
The minimum amount of magnetic particles flying toward the support.
Angle of incidence θ ₁The nozzle mouth of the nozzle is in the same direction as
Of a magnetic recording medium characterized by
Manufacturing equipment. 2. The nozzle opening of the nozzle is located as close as possible to the tip of the deposition-inhibitory member.
Magnetic recording medium manufacturing apparatus. 3. The nozzle opening angle θ ₂ of the nozzle is 40 ° to 7
The apparatus for manufacturing a magnetic recording medium according to claim 1 or 2, wherein the nozzle is set to be 0 °. 4. A method for producing a metal thin film type magnetic recording medium by depositing a magnetic material on a running support, comprising: a deposition step in which magnetic particles fly toward the support and deposit the magnetic particles. A gas irradiation step of irradiating an oxidizing gas along the flight path of the magnetic particles flying at the lowest incident angle θ ₁ toward the support, and in the vicinity of the point at which the magnetic particles fly at the lowest incident angle θ _1. A method of manufacturing a magnetic recording medium, comprising: