JPH0733144Y2 - 圧力検出装置 - Google Patents

圧力検出装置

Info

Publication number: JPH0733144Y2
Authority: JP; Japan
Prior art keywords: pressure; thin portion; sensitive; light; semiconductor substrate
Prior art date: 1989-10-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP12189989U

Other languages

English (en)

Japanese (ja)

Other versions

JPH0360044U (2

Inventor

公夫藤川

親男原田

Original Assignee

コーリン電子株式会社

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-10-18

Filing date

1989-10-18

Publication date

1995-07-31

1989-10-18 Application filed by コーリン電子株式会社 filed Critical コーリン電子株式会社

1989-10-18 Priority to JP12189989U priority Critical patent/JPH0733144Y2/ja

1991-06-13 Publication of JPH0360044U publication Critical patent/JPH0360044U/ja

1995-07-31 Application granted granted Critical

1995-07-31 Publication of JPH0733144Y2 publication Critical patent/JPH0733144Y2/ja

2004-10-18 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 claims description 21
239000000758 substrate Substances 0.000 claims description 14
238000001514 detection method Methods 0.000 claims description 12
239000000463 material Substances 0.000 claims description 6
230000001678 irradiating effect Effects 0.000 claims description 5
NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
230000035945 sensitivity Effects 0.000 description 4
210000001367 artery Anatomy 0.000 description 3
239000000969 carrier Substances 0.000 description 3
238000006243 chemical reaction Methods 0.000 description 3
238000010586 diagram Methods 0.000 description 3
239000012535 impurity Substances 0.000 description 2
239000013078 crystal Substances 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
230000002349 favourable effect Effects 0.000 description 1
238000011835 investigation Methods 0.000 description 1
229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
230000010355 oscillation Effects 0.000 description 1

Landscapes

Measuring Fluid Pressure (AREA)

JP12189989U 1989-10-18 1989-10-18 圧力検出装置 Expired - Fee Related JPH0733144Y2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP12189989U JPH0733144Y2 (ja)	1989-10-18	1989-10-18	圧力検出装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP12189989U JPH0733144Y2 (ja)	1989-10-18	1989-10-18	圧力検出装置

Publications (2)

Publication Number	Publication Date
JPH0360044U JPH0360044U (2)	1991-06-13
JPH0733144Y2 true JPH0733144Y2 (ja)	1995-07-31

Family

ID=31669921

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP12189989U Expired - Fee Related JPH0733144Y2 (ja)	1989-10-18	1989-10-18	圧力検出装置

Country Status (1)

Country	Link
JP (1)	JPH0733144Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4822418B2 (ja) *	2006-01-11	2011-11-24	株式会社エピア	太陽電池付き屋根材

1989
- 1989-10-18 JP JP12189989U patent/JPH0733144Y2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JPH0360044U (2)	1991-06-13

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Legal Events

Date	Code	Title	Description
2003-07-31	LAPS	Cancellation because of no payment of annual fees