JPH0735383Y2 - 薄膜気相成長装置 - Google Patents
薄膜気相成長装置Info
- Publication number
- JPH0735383Y2 JPH0735383Y2 JP11076289U JP11076289U JPH0735383Y2 JP H0735383 Y2 JPH0735383 Y2 JP H0735383Y2 JP 11076289 U JP11076289 U JP 11076289U JP 11076289 U JP11076289 U JP 11076289U JP H0735383 Y2 JPH0735383 Y2 JP H0735383Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- susceptor
- heater
- temperature
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11076289U JPH0735383Y2 (ja) | 1989-09-21 | 1989-09-21 | 薄膜気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11076289U JPH0735383Y2 (ja) | 1989-09-21 | 1989-09-21 | 薄膜気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0350325U JPH0350325U (th) | 1991-05-16 |
| JPH0735383Y2 true JPH0735383Y2 (ja) | 1995-08-09 |
Family
ID=31659281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11076289U Expired - Fee Related JPH0735383Y2 (ja) | 1989-09-21 | 1989-09-21 | 薄膜気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735383Y2 (th) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5009727B2 (ja) * | 2007-09-04 | 2012-08-22 | ヤック株式会社 | 給油キャップホルダー |
| JP2013093460A (ja) * | 2011-10-26 | 2013-05-16 | Ulvac Japan Ltd | 成膜装置 |
| JP5833429B2 (ja) * | 2011-12-20 | 2015-12-16 | スタンレー電気株式会社 | 半導体製造装置 |
-
1989
- 1989-09-21 JP JP11076289U patent/JPH0735383Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0350325U (th) | 1991-05-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |