JPH0736954B2 - Substrate heating device - Google Patents
Substrate heating deviceInfo
- Publication number
- JPH0736954B2 JPH0736954B2 JP29181386A JP29181386A JPH0736954B2 JP H0736954 B2 JPH0736954 B2 JP H0736954B2 JP 29181386 A JP29181386 A JP 29181386A JP 29181386 A JP29181386 A JP 29181386A JP H0736954 B2 JPH0736954 B2 JP H0736954B2
- Authority
- JP
- Japan
- Prior art keywords
- heating
- heating element
- heat
- substrate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Furnace Details (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、熱容量が部分的に異なる基板上の温度分布を
制御する加熱装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating device for controlling a temperature distribution on a substrate having partially different heat capacities.
従来の技術 家電製品に代表される様に、プリント基板(以下「P
板」と略記する。)上への電子部品の高密度化実装の技
術動向において、リフロー炉を用いた素子の半田付工法
が採用されつつある。ここでは、このリフロー炉による
半田付工法を例に本加熱方法について説明する。リフロ
ー工法は、これまでの溶融ハンダ槽に、素子の載ったP
板をディップするフロー工法と異なり、半田の微細粒子
とペーストとから成るクリーム状半田をP板の所定位置
に塗布した後に素子を置き、赤外線により加熱溶融させ
て半田付けするというものである。Conventional technology Printed circuit boards (hereinafter referred to as “P
It is abbreviated as “board”. ) In the technology trend of high-density mounting of electronic components on the top, the soldering method of elements using a reflow furnace is being adopted. Here, the main heating method will be described by taking the soldering method using the reflow furnace as an example. In the reflow method, the element is placed in the conventional molten solder bath.
Unlike the flow method of dipping a plate, cream-like solder composed of fine solder particles and paste is applied to a predetermined position of a P plate, and then an element is placed and heated and melted by infrared rays to be soldered.
一般的なリフロー炉を第3図に示す。一定速度vで移動
するコンベア1上で、素子を載せたP板2は、一定の熱
量を発生し続ける発熱体3により加熱される。炉の前半
部Aは予熱部で、通常150℃前後にP板を暖める。次い
でB部で約250℃の温度を発生させ半田付を行い、その
後ファン送風等で冷却して取り出される。第4図には、
従来の発熱体の構成を例示する。4は断熱材,5は反射
板,6はヒーティングケーブルである。ヒーティングケー
ブル6から発生した熱は、輻射板7を介してP板2へ、
主として輻射熱の形で与えられる。反射板5は輻射板7
側へ熱を効率的に流す一方で、余分な箇所への熱流を抑
制するために設けられている。A general reflow furnace is shown in FIG. On the conveyor 1 which moves at a constant speed v, the P plate 2 on which the elements are placed is heated by the heating element 3 which continues to generate a constant amount of heat. The first half A of the furnace is the preheating part, which usually heats the P plate around 150 ° C. Next, at the portion B, a temperature of about 250 ° C. is generated and soldering is performed, and then the product is cooled by fan blowing or the like and taken out. In Figure 4,
The structure of the conventional heating element is illustrated. 4 is a heat insulating material, 5 is a reflector, and 6 is a heating cable. The heat generated from the heating cable 6 is transferred to the P plate 2 via the radiation plate 7,
It is given mainly in the form of radiant heat. The reflection plate 5 is the radiation plate 7
It is provided in order to efficiently flow the heat to the side while suppressing the heat flow to the extra portion.
発明が解決しようとする問題点 しかるに、実際問題として、P板上の素子間の熱容量の
差や、その配置の不均一性から、P板上には温度分布が
生じ、場合によっては素子の温度が上がり切らないため
に半田付ができない箇所ができる。また反対に素子の中
には、樹脂モールド部品の様に、半田付けのために温度
を上げ過ぎると溶融,変形をしたり、熱破壊をきたす部
品も存在する。この様に同一のP板の中で加熱を要する
素子と、加熱を好まない素子とが混在しており、これら
を同時に半田付けする必要性がある。Problems to be Solved by the Invention However, as a practical problem, a temperature distribution occurs on the P plate due to the difference in heat capacity between the elements on the P plate and the non-uniformity of the arrangement, and in some cases, the temperature of the element may be different. There is a place where soldering cannot be done because it does not rise completely. On the other hand, some elements, such as resin-molded parts, may melt, deform, or cause thermal destruction when the temperature is too high for soldering. In this way, elements that require heating and elements that do not prefer heating are mixed in the same P plate, and it is necessary to solder these elements at the same time.
本発明は上記問題点に鑑み、ヒーターによるP板上の温
度制御性を大幅に向上させるとともに、高効率加熱を図
ることで、半田付け不良の改善と素子品質の安定を保証
する基板加熱装置を提供するものである。In view of the above-mentioned problems, the present invention provides a substrate heating device that significantly improves temperature controllability on a P plate by a heater and achieves high-efficiency heating, thereby improving soldering defects and ensuring stable element quality. It is provided.
問題点を解決するための手段 上記問題点を解決するために本発明の基板加熱装置は、
外部からの制御を受けて動作する可変な加熱機構を有
し、各々が微小すきまを有して配された複数個の発熱体
要素と、前記発熱体要素に近接して、その片面をおおう
様に配置された反射板と、前記発熱体要素の間隙及び、
前記反射板の裏面に近接配置される断熱材と、前記発熱
体要素において、前記反射板との当接面と反対側の面を
おおう様に近接して配置された輻射板と、前記発熱体要
素及び前記輻射板に近接して配置された基板の加熱面の
略方線方向上に配された感熱装置と、前記感熱装置の出
力信号を数値的に処理し、その結果を前記発熱体要素の
制御部へ入力するコントロール手段とを備えた構成を有
している。Means for Solving the Problems In order to solve the above problems, the substrate heating apparatus of the present invention is
A plurality of heating elements each having a variable heating mechanism that operates under the control of the outside, each of which has a minute gap, and a heating element that is adjacent to the heating element and covers one side thereof. And a gap between the reflector and the heating element, and
A heat insulating material arranged in the vicinity of the back surface of the reflection plate; a radiation plate arranged in close proximity so as to cover the surface of the heat generating element opposite to the contact surface with the reflection plate; A heat-sensitive device arranged substantially in the direction of the normal of the heating surface of the substrate arranged close to the element and the radiation plate, and numerically processing the output signal of the heat-sensitive device, and the result thereof being the heating element And a control means for inputting to the control unit.
作 用 本発明は上記した構成によって、P板上の素子の持つ熱
容量の大小に応じて、各発熱体ブロックの加熱強度を、
温度モニタリング結果を数学的に処理した結果に基づい
て刻々とコントロールし、熱源側にフレキシブルな温度
分布を与えて、同時に均一半田付けを行うものである。Operation The present invention has the above-mentioned configuration to change the heating strength of each heating element block according to the magnitude of the heat capacity of the element on the P plate.
The temperature monitoring result is controlled momentarily based on the result of mathematical processing, a flexible temperature distribution is given to the heat source side, and uniform soldering is performed at the same time.
実施例 以下本発明の一実施例について、図面を参照しながら説
明する。第1図は、本発明の実施例における基板加熱装
置を示すものであり、2は加熱される基板、11は断熱
材,12は反射板である。13は、発熱体要素14の集合体か
ら成る発熱部である。また15は輻射板である。発熱体要
素14は、第2図に拡大して示す様に、内部に独立してヒ
ーティングケーブル16が埋め込まれており、互いに近接
する発熱体要素同士は、断熱部材11aにより断熱状態に
保持されている。第1図で、17は、発熱体要素14の温度
出力を各々独立に制御する制御部、18は、基板2上の温
度分布を正確に計測する赤外線温度計(感熱装置)、19
は、赤外線温度計18からのデータを演算処理し、温度補
正量を制御部17へ入力するコントロール手段である。以
上の様に構成された基板加熱方法について以下に説明す
る。第5図にコントロール手段のソフトの概要を示すフ
ロー図を示す。前記ソフトの中には、まず最初に与える
べき温度設定条件が入っており、これに従って制御部17
を介して、発熱体要素14が、各々発熱して基板2を加熱
し始める。適当な時刻の後、赤外線温度計18による基板
2上の温度分布測定結果が、コントロール手段19へ入力
され、それを受けて補正熱量計算なされる。上記の計算
はフーリエの熱伝導式に、エネルギーの保存条件を考慮
して、大気からの熱伝達及び熱輻射を加味してなされ
る。計算の結果、次ステップで発熱体要素14に加えるべ
き温度条件を夫々求めその情報を制御部17へ送る。これ
によって温度条件の再設定がなされ、P板が半田付け温
度にまで加熱されたのを赤外線温度計が確認してヒータ
電源offの信号が出される。本実施例の場合、基板2と
発熱体要素14間の相対位置は基本的に動かないが、制御
のプログラミングの仕方によって、相対移動があっても
良い。また、基板2上の温度モニターは、必ずしも赤外
線温度計を用いる必要は無く、例えば代表点に熱電対を
設置したり、あるいは解析的に求めても良いことは言う
までもない。Embodiment An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a substrate heating apparatus in an embodiment of the present invention, 2 is a substrate to be heated, 11 is a heat insulating material, and 12 is a reflector. Reference numeral 13 is a heat generating portion composed of an assembly of heat generating element 14. 15 is a radiation plate. As shown in the enlarged view of FIG. 2, the heating element 14 has a heating cable 16 independently embedded therein, and the heating elements adjacent to each other are kept in a heat-insulated state by the heat insulating member 11a. ing. In FIG. 1, 17 is a control unit for independently controlling the temperature output of the heating element 14, 18 is an infrared thermometer (heat sensitive device) for accurately measuring the temperature distribution on the substrate 2, 19
Is a control means for arithmetically processing the data from the infrared thermometer 18 and inputting the temperature correction amount to the control unit 17. The substrate heating method configured as above will be described below. FIG. 5 shows a flow chart showing an outline of software of the control means. The software contains the temperature setting conditions to be given first, and the control unit 17
The heating elements 14 each generate heat through the above and start heating the substrate 2. After an appropriate time, the measurement result of the temperature distribution on the substrate 2 by the infrared thermometer 18 is input to the control means 19, and the corrected calorific value is calculated in response to the input. The above calculation is performed by adding heat transfer and heat radiation from the atmosphere to the Fourier's heat conduction equation in consideration of energy storage conditions. As a result of the calculation, temperature conditions to be applied to the heating element 14 are obtained in the next step, and the information is sent to the control unit 17. As a result, the temperature condition is reset, the infrared thermometer confirms that the P plate has been heated to the soldering temperature, and the heater power off signal is output. In the case of the present embodiment, the relative position between the substrate 2 and the heating element 14 basically does not move, but there may be relative movement depending on the control programming method. Further, it is needless to say that the temperature monitor on the substrate 2 does not necessarily need to use an infrared thermometer, and for example, a thermocouple may be installed at a representative point or may be obtained analytically.
なお、これまでは、基板のリフロー半田付けを例に説明
をしたが、この内容は一般の任意の基板加熱に適用でき
ることは言うまでもない。Note that, so far, the description has been given by taking the reflow soldering of the substrate as an example, but it goes without saying that this content can be applied to any general substrate heating.
発明の効果 以上の様に本発明は、熱容量分布を有する基板を、短時
間,高精度にコントロールして加熱することができる。
更に、プログラムの仕方によって異なる機種の基板に対
して連続的に順次加熱量を変化できる。また従来に比較
して炉の構成上省スペース化を図ることができる。EFFECTS OF THE INVENTION As described above, according to the present invention, a substrate having a heat capacity distribution can be controlled and heated in a short time with high accuracy.
Furthermore, the heating amount can be continuously and sequentially changed for different types of substrates depending on the programming method. Further, it is possible to save space in the structure of the furnace as compared with the conventional one.
第1図は本発明の第一の実施例における基板加熱装置の
斜視図、第2図は本発明の第一の実施例の部分拡大図、
第3図は従来例における基板加熱装置の平面図、第4図
は同部分拡大図、第5図は上記実施例におけるコントロ
ールソフトのフロー図である。 11……断熱材、12……反射板、14……発熱体要素、15…
…輻射板、17……制御部、18……感熱装置、19……コン
トロール手段。FIG. 1 is a perspective view of a substrate heating apparatus according to the first embodiment of the present invention, and FIG. 2 is a partially enlarged view of the first embodiment of the present invention.
FIG. 3 is a plan view of a substrate heating apparatus in a conventional example, FIG. 4 is a partially enlarged view of the same, and FIG. 5 is a flow chart of control software in the above embodiment. 11 ... Insulation material, 12 ... Reflector, 14 ... Heating element, 15 ...
… Radiation plate, 17 …… Control unit, 18 …… Heat sensitive device, 19 …… Control means.
Claims (1)
熱機構を有し、各々が微小すきまを有して配された複数
個の発熱体要素と、前記発熱体要素に近接して、その片
面をおおう様に配置された反射板と、前記発熱体要素の
間隙及び、前記反射板の表面に近接配置される断熱材
と、前記発熱体要素において、前記反射板との当接面と
反対側の面をおおう様に近接して配置された輻射板と、
前記発熱体要素及び前記輻射板に近接して配置された基
板の加熱面の略方線方向上に配された感熱装置と、前記
感熱装置の出力信号を数値的に処理し、その結果を前記
発熱体要素の制御部へ入力するコントロール手段とから
成ることを特徴とする基板加熱装置。1. A plurality of heating element elements each having a variable heating mechanism which operates under the control of the outside and each of which has a minute clearance, and in proximity to the heating element element, A reflecting plate arranged so as to cover the one side thereof, a gap between the heating element and a heat insulating material arranged in the vicinity of the surface of the reflecting plate, and a contact surface of the heating element with the reflecting plate. A radiant plate placed close to cover the opposite surface,
A heat-sensitive device arranged on the heating surface of the substrate arranged in the vicinity of the heating element and the radiation plate in a substantially square direction, and an output signal of the heat-sensitive device is processed numerically, and the result is A substrate heating apparatus, comprising: a control unit for inputting to a control unit of a heating element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29181386A JPH0736954B2 (en) | 1986-12-08 | 1986-12-08 | Substrate heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29181386A JPH0736954B2 (en) | 1986-12-08 | 1986-12-08 | Substrate heating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63144866A JPS63144866A (en) | 1988-06-17 |
| JPH0736954B2 true JPH0736954B2 (en) | 1995-04-26 |
Family
ID=17773747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29181386A Expired - Lifetime JPH0736954B2 (en) | 1986-12-08 | 1986-12-08 | Substrate heating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0736954B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6378610B2 (en) * | 2014-10-27 | 2018-08-22 | 東京エレクトロン株式会社 | Heat treatment equipment |
-
1986
- 1986-12-08 JP JP29181386A patent/JPH0736954B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63144866A (en) | 1988-06-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |